公开(公告)号：US07947951B2

公开(公告)日：2011-05-24

申请号：US12309345

申请日：2007-07-20

申请人： Anjam Khursheed

发明人： Anjam Khursheed

IPC分类号： H01J37/26 ,  H01J37/153

CPC分类号： H01J49/142 ,  H01J37/05 ,  H01J37/15 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/0245 ,  H01J2237/057 ,  H01J2237/0825 ,  H01J2237/2527 ,  H01J2237/31749

摘要： This invention is a multi-beam charged particle instrument that can simultaneously focus electrons and a variety of positive and negative ions, such as Gallium, Oxygen and Cesium ions, onto the same material target. In addition, the instrument has provision to simultaneously capture the spectrum of both secondary electrons and ions. The highly dispersive, high resolution mass spectrometer portion of the instrument is expected to detect and identify secondary ion species across the entire range of the periodic table, and also record a portion of their emitted energy spectrum. The electron energy spectrometer part of the instrument is designed to acquire the entire range of scattered electrons, from the low energy secondary electrons through to the elastic backscattered electrons.

摘要翻译： 本发明是一种多光束带电粒子仪器，可以将电子和各种正离子和负离子（如镓，氧和铯离子）聚焦在同一材料靶上。 此外，仪器还规定同时捕获二次电子和离子的光谱。 仪器的高分散，高分辨率质谱仪部分预计将在周期表的整个范围内检测和识别二次离子物种，并记录其发射的能谱的一部分。 仪器的电子能谱仪部分设计用于从低能二次电子到弹性背散射电子获取散射电子的全部范围。

公开(公告)号：US20090321634A1

公开(公告)日：2009-12-31

申请号：US12309345

申请日：2007-07-20

申请人： Anjam Khursheed

发明人： Anjam Khursheed

IPC分类号： H01J37/26 ,  H01J49/00 ,  G01N23/00

CPC分类号： H01J49/142 ,  H01J37/05 ,  H01J37/15 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/0245 ,  H01J2237/057 ,  H01J2237/0825 ,  H01J2237/2527 ,  H01J2237/31749

摘要： This invention is a multi-beam charged particle instrument that can simultaneously focus electrons and a variety of positive and negative ions, such as Gallium, Oxygen and Cesium ions, onto the same material target. In addition, the instrument has provision to simultaneously capture the spectrum of both secondary electrons and ions. The highly dispersive, high resolution mass spectrometer portion of the instrument is expected to detect and identify secondary ion species across the entire range of the periodic table, and also record a portion of their emitted energy spectrum. The electron energy spectrometer part of the instrument is designed to acquire the entire range of scattered electrons, from the low energy secondary electrons through to the elastic backscattered electrons.

摘要翻译： 本发明是一种多光束带电粒子仪器，可以将电子和各种正离子和负离子（如镓，氧和铯离子）聚焦在同一材料靶上。 此外，仪器还规定同时捕获二次电子和离子的光谱。 仪器的高分散，高分辨率质谱仪部分预计将在周期表的整个范围内检测和识别二次离子物种，并记录其发射的能谱的一部分。 仪器的电子能谱仪部分设计用于从低能二次电子到弹性背散射电子获取散射电子的全部范围。

公开(公告)号：US06906335B2

公开(公告)日：2005-06-14

申请号：US10275203

申请日：2001-05-02

申请人： Anjam Khursheed

发明人： Anjam Khursheed

IPC分类号： G01N23/225 ,  G21K7/00 ,  H01J37/141 ,  H01J37/18

CPC分类号： H01J37/141 ,  G01N23/2251 ,  H01J37/1413 ,  H01J2237/1035 ,  H01J2237/28

摘要： A lens (15) for a scanning electron microscope is adapted to be removably mounted on a specimen stage (1). The lens (15) includes a magnetic circuit (2, 3, 4, 7) having a first magnetic pole piece (7) and a second magnetic pole piece (4), and a specimen holder (5). The specimen holder (5) is located between the first and second magnetic pole pieces (4, 7). The magnetic circuit (2, 3, 4, 7) also includes a lens bore (18) to permit an electron beam (9) to strike a surface of a specimen mounted on the specimen holder (5), in use. The lens bore (18) has a width of greater than 1 mm.

摘要翻译： 用于扫描电子显微镜的透镜（15）适于可拆卸地安装在样品台（1）上。 透镜（15）包括具有第一磁极片（7）和第二磁极片（4）的磁路（2,3,4,7）和样本保持器（5）。 样品架（5）位于第一和第二磁极片（4,7）之间。 在使用中，磁路（2,3,4,7）还包括透镜孔（18），以允许电子束（9）撞击安装在样本架（5）上的试样的表面。 透镜孔（18）具有大于1mm的宽度。

公开(公告)号：US06891159B2

公开(公告)日：2005-05-10

申请号：US10610345

申请日：2003-06-30

申请人： Anjam Khursheed ,  Thiam Leong Thong

发明人： Anjam Khursheed ,  Thiam Leong Thong

IPC分类号： G01N23/00 ,  G01Q30/02 ,  G21K7/00 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J2237/2802

摘要： A device for converting a scanning electron microscope (SEM) to a scanning transmission electron microscope (STEM) is adapted to be mounted on a conventional SEM. The device has a casing mountable on the SEM and provides support for a specimen to be scanned by a beam of primary electrons exiting the objective lens of the SEM. The casing defines a pathway allowing transmission electrons that have passed through the specimen to be detected. The device may have a magnet mountable on the casing for generating a transverse magnetic field to deflect the transmission electrons within the casing. A magnetic lens may be mounted within the casing for focusing the beam of primary electrons onto the specimen. The secondary electron detector of the SEM may be used to detect secondary electrons emitted from a target excited by the transmitted electrons. Alternatively, an electron detector may be mounted within the casing for detecting the transmitted electrons.

摘要翻译： 用于将扫描电子显微镜（SEM）转换成扫描透射电子显微镜（STEM）的装置适于安装在传统的SEM上。 该装置具有可安装在SEM上的壳体，并且通过离开SEM的物镜的一次电子束来扫描样品的支撑。 壳体限定允许透射通过要检测的样品的电子的途径。 该装置可以具有可安装在壳体上的磁体，用于产生横向磁场以使壳体内的透射电子偏转。 磁性透镜可以安装在壳体内，用于将一次电子束聚焦到样品上。 SEM的二次电子检测器可以用于检测从被透射电子激发的靶发射的二次电子。 或者，可以在壳体内安装电子检测器，以检测发射的电子。