公开(公告)号：US06897441B2

公开(公告)日：2005-05-24

申请号：US10613700

申请日：2003-07-03

申请人： Anjam Khursheed

发明人： Anjam Khursheed

IPC分类号： G01Q30/02 ,  H01J37/153 ,  H01J37/285

CPC分类号： H01J37/153 ,  H01J37/285

摘要： An imaging device, such as an EEM, includes an electric/magnetic lens used to focus pulsed electrons emitted from an object on to a target plane. Before a pulse of emitted electrons reaches the lens, electrons are spatially separated in dependence on their respective kinetic energies and are then subject to a time varying electric field that keeps the final focal plane constant for a wide variety of different energy electrons. The electric field compensates for variations in the image focal length caused by a spread in kinetic energies, causing the electrons to be focused proximate the target plane, reducing chromatic aberration. The varying electric field may be provided by varying an electric potential at the lens by, for example, varying a voltage supplied to an electrode at the lens. This potential effectively varies the focal strength of the lens in time, in order to compensate for variations in kinetic energies of electrons arriving at the lens, effectively keeping the image plane position constant.

摘要翻译： 诸如EEM的成像装置包括用于将从物体发射的脉冲电子聚焦到目标平面上的电/磁透镜。 在发射的电子脉冲到达透镜之前，电子根据它们各自的动能在空间上分离，然后经受时变电场，使得最终的焦平面保持不同的各种不同能量的电子。 电场补偿由于动能的扩散而导致的图像焦距的变化，导致电子靠近目标平面聚焦，从而减小色差。 可以通过例如改变在透镜处提供给电极的电压来改变透镜上的电位来提供变化的电场。 该电位有效地改变透镜的焦点强度，以补偿到达透镜的电子的动能的变化，有效地保持图像平面位置的恒定。

公开(公告)号：US06320194B1

公开(公告)日：2001-11-20

申请号：US09563117

申请日：2000-05-02

申请人： Anjam Khursheed ,  Jacob Chee Hong Phang ,  John Thiam Leong Thong

发明人： Anjam Khursheed ,  Jacob Chee Hong Phang ,  John Thiam Leong Thong

IPC分类号： H01J3718

CPC分类号： H01J37/28 ,  H01J37/14 ,  H01J2237/16

摘要： A detachable, portable SEM column that is easily disconnected from the electron gun assembly and specimen chamber of the system, allowing different column designs to be used in a given SEM system. As an alternate design, the electron gun and column are configured as a single detachable, portable assembly. The column of the present invention contains a condenser lens and an objective lens, both designed employing permanent magnet elements for primary field generation. Relatively small coils are used for scanning and precise adjustment of focus.

摘要翻译： 可拆卸的便携式SEM柱，易于与系统的电子枪组件和样品室断开，允许在给定SEM系统中使用不同的色谱柱设计。 作为替代设计，电子枪和柱被配置为单个可拆卸的便携式组件。 本发明的列包含聚光透镜和物镜，它们均采用永磁体元件进行设计，用于初级场产生。 相对小的线圈用于扫描和精确调整焦点。

公开(公告)号：US20060060782A1

公开(公告)日：2006-03-23

申请号：US11155014

申请日：2005-06-16

申请人： Anjam Khursheed

发明人： Anjam Khursheed

IPC分类号： G01N23/00

CPC分类号： H01J37/256 ,  G01N23/225 ,  H01J37/28 ,  H01J2237/14 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/2446 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24485

摘要： In a scanning electron microscope, an emitted primary electron beam is diverted by an angle of at least about 45 degrees prior to incidence with a specimen. The beam may be bent by a magnetic separator. The separator may also serve to deflect secondary electron and back scattered electrons. As the angle of emissions and reflections from the specimen is close to the angle of incidence, bending the primary electron beam prior to incidence, allows the electron source to be located so as not to obstruct the travel of emissions and reflections to suitable detectors.

摘要翻译： 在扫描电子显微镜中，发射的一次电子束在与样品入射之前被转向至少约45度的角度。 梁可以通过磁选机弯曲。 分离器还可以用于偏转二次电子和背散射电子。 当来自样品的发射角和反射角接近于入射角时，在入射之前弯曲一次电子束，允许电子源被定位成不妨碍发射和反射到合适的检测器的行进。

公开(公告)号：US07326928B2

公开(公告)日：2008-02-05

申请号：US11288929

申请日：2005-11-29

申请人： Anjam Khursheed

发明人： Anjam Khursheed

IPC分类号： H01J37/26 ,  H01J37/153

CPC分类号： H01J37/153 ,  H01J37/21 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0432 ,  H01J2237/1202 ,  H01J2237/1534 ,  H01J2237/21 ,  H01J2237/2485 ,  H01J2237/2538 ,  H01J2237/2809

摘要： An electron microscope and a method of imaging objects. The method including the steps of: generating at least one electron pulse, each electron pulse including a plurality of electrons with the electrons having a kinetic energy spread; demagnifying each electron pulse using one or more lenses, each lens having a focal strength; dynamically varying said focal strength of at least one of said one or more lenses to compensate for said kinetic energy spread; and forming an image of said object based on interactions at said object resulting from each demagnified pulse. The electron microscope comprising: an electron source adapted to produce a plurality of electron pulses, each electron pulse including a plurality of electrons with the electrons having a kinetic energy spread; one or more lenses adapted to demagnify each of said electron pulses at said object, each lens having a focal strength; compensation means for dynamically varying said focal strength of at least one of said one or more lenses to compensate for said kinetic energy spread; and a detector for forming an image of said object based on interactions at said object resulting from each of said demagnified pulses

摘要翻译： 电子显微镜和成像对象的方法。 该方法包括以下步骤：产生至少一个电子脉冲，每个电子脉冲包括具有动能扩散的电子的多个电子; 使用一个或多个透镜对每个电子脉冲进行缩小，每个透镜具有焦点强度; 动态地改变所述一个或多个透镜中的至少一个的所述焦距强度以补偿所述动能扩展; 以及基于由每个缩小的脉冲产生的所述对象的相互作用形成所述对象的图像。 该电子显微镜包括：适于产生多个电子脉冲的电子源，每个电子脉冲包括具有动能扩散的电子的多个电子; 一个或多个透镜，适于在所述物体处对每个所述电子脉冲进行去磁，每个透镜具有焦点强度; 用于动态地改变所述一个或多个透镜中的至少一个透镜的所述焦距强度以补偿所述动能扩展的补偿装置; 以及检测器，用于基于由每个所述缩小脉冲产生的在所述物体处的相互作用形成所述物体的图像

公开(公告)号：US07294834B2

公开(公告)日：2007-11-13

申请号：US11155014

申请日：2005-06-16

申请人： Anjam Khursheed

发明人： Anjam Khursheed

IPC分类号： G01N23/00

CPC分类号： H01J37/256 ,  G01N23/225 ,  H01J37/28 ,  H01J2237/14 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/2446 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24485

摘要： In a scanning electron microscope, an emitted primary electron beam is diverted by an angle of at least about 45 degrees prior to incidence with a specimen. The beam may be bent by a magnetic separator. The separator may also serve to deflect secondary electron and back scattered electrons. As the angle of emissions and reflections from the specimen is close to the angle of incidence, bending the primary electron beam prior to incidence, allows the electron source to be located so as not to obstruct the travel of emissions and reflections to suitable detectors.

摘要翻译： 在扫描电子显微镜中，发射的一次电子束在与样品入射之前被转向至少约45度的角度。 梁可以通过磁选机弯曲。 分离器还可以用于偏转二次电子和背散射电子。 当来自样品的发射角和反射角接近于入射角时，在入射之前弯曲一次电子束，允许电子源被定位成不妨碍发射和反射到合适的检测器的行进。

公开(公告)号：US08981292B2

公开(公告)日：2015-03-17

申请号：US14114170

申请日：2012-04-24

申请人： Anjam Khursheed ,  Hung Quang Hoang

发明人： Anjam Khursheed ,  Hung Quang Hoang

IPC分类号： H01J49/48 ,  H01J37/244 ,  H01J37/28 ,  H01J37/26 ,  H01J37/05 ,  H01J37/22

CPC分类号： H01J37/261 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J49/48 ,  H01J49/482 ,  H01J49/484 ,  H01J49/486 ,  H01J49/488 ,  H01J2237/2446 ,  H01J2237/24485

摘要： A parallel radial mirror analyzer (PRMA) (700) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen is disclosed. The PRMA comprises a zero-volt equipotential grid (728), and a plurality of electrodes (702, 704, 706, 708, 710, 712, 714, 716, 718, 720, 722) electrically configured to generate corresponding electrostatic fields for deflecting the charged particles in accordance with respective energy levels of the charged particles to exit through the grid (728) to form corresponding second-order focal points on a detector (206). The detector (206) is disposed external to the corresponding electrostatic fields. A related method is also disclosed.

摘要翻译： 公开了一种用于促进由入射在试样上的带电束引起的带电粒子的旋转对称检测的并行径向镜分析仪（PRMA）（700）。 PRMA包括零伏等势网格（728）和多个电极（702,704,706,708,710,712,714,716,718,720,722），电气地配置为产生相应的静电场用于偏转 所述带电粒子根据所述带电粒子的相应能级移动通过所述格栅（728）以在检测器（206）上形成对应的二阶焦点。 检测器（206）设置在相应静电场的外部。 还公开了相关方法。

公开(公告)号：US20140042317A1

公开(公告)日：2014-02-13

申请号：US14114170

申请日：2012-04-24

申请人： Anjam Khursheed ,  Hung Quang Hoang

发明人： Anjam Khursheed ,  Hung Quang Hoang

IPC分类号： H01J37/26

CPC分类号： H01J37/261 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J49/48 ,  H01J49/482 ,  H01J49/484 ,  H01J49/486 ,  H01J49/488 ,  H01J2237/2446 ,  H01J2237/24485

摘要： A parallel radial mirror analyser (PRMA) (700) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen is disclosed. The PRMA comprises a zero-volt equipotential grid (728), and a plurality of electrodes (702, 704, 706, 708, 710, 712, 714, 716, 718, 720, 722) electrically configured to generate corresponding electrostatic fields for deflecting the charged particles in accordance with respective energy levels of the charged particles to exit through the grid (728) to form corresponding second-order focal points on a detector (206). The detector (206) is disposed external to the corresponding electrostatic fields. A related method is also disclosed.

摘要翻译： 公开了一种用于促进由入射在试样上的带电束引起的带电粒子的旋转对称检测的并行径向镜分析仪（PRMA）（700）。 PRMA包括零伏等势网格（728）和多个电极（702,704,706,708,710,712,714,716,718,720,722），电气地配置为产生相应的静电场用于偏转 所述带电粒子根据所述带电粒子的相应能级移动通过所述格栅（728）以在检测器（206）上形成对应的二阶焦点。 检测器（206）设置在相应静电场的外部。 还公开了相关方法。

公开(公告)号：US20060151696A1

公开(公告)日：2006-07-13

申请号：US11288929

申请日：2005-11-29

申请人： Anjam Khursheed

发明人： Anjam Khursheed

IPC分类号： G21K7/00

CPC分类号： H01J37/153 ,  H01J37/21 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0432 ,  H01J2237/1202 ,  H01J2237/1534 ,  H01J2237/21 ,  H01J2237/2485 ,  H01J2237/2538 ,  H01J2237/2809

摘要： An electron microscope and a method of imaging objects. The method including the steps of: generating at least one electron pulse, each electron pulse including a plurality of electrons with the electrons having a kinetic energy spread; demagnifying each electron pulse using one or more lenses, each lens having a focal strength; dynamically varying said focal strength of at least one of said one or more lenses to compensate for said kinetic energy spread; and forming an image of said object based on interactions at said object resulting from each demagnified pulse. The electron microscope comprising: an electron source adapted to produce a plurality of electron pulses, each electron pulse including a plurality of electrons with the electrons having a kinetic energy spread; one or more lenses adapted to demagnify each of said electron pulses at said object, each lens having a focal strength; compensation means for dynamically varying said focal strength of at least one of said one or more lenses to compensate for said kinetic energy spread; and a detector for forming an image of said object based on interactions at said object resulting from each of said demagnified pulses

摘要翻译： 电子显微镜和成像对象的方法。 该方法包括以下步骤：产生至少一个电子脉冲，每个电子脉冲包括具有动能扩散的电子的多个电子; 使用一个或多个透镜对每个电子脉冲进行缩小，每个透镜具有焦点强度; 动态地改变所述一个或多个透镜中的至少一个的所述焦距强度以补偿所述动能扩展; 以及基于由每个缩小的脉冲产生的所述对象的相互作用形成所述对象的图像。 该电子显微镜包括：适于产生多个电子脉冲的电子源，每个电子脉冲包括具有动能扩散的电子的多个电子; 一个或多个透镜，适于在所述物体处对每个所述电子脉冲进行去磁，每个透镜具有焦点强度; 用于动态地改变所述一个或多个透镜中的至少一个透镜的所述焦距强度以补偿所述动能扩展的补偿装置; 以及检测器，用于基于由每个所述缩小脉冲产生的在所述物体处的相互作用形成所述物体的图像

公开(公告)号：US08013298B2

公开(公告)日：2011-09-06

申请号：US12502707

申请日：2009-07-14

申请人： Anjam Khursheed

发明人： Anjam Khursheed

IPC分类号： H01J47/00 ,  G01N23/00

CPC分类号： H01J49/48

摘要： An apparatus for spectrometry that includes a spectrometer configured for second order focusing and capable of 2π azimuthal collection.

摘要翻译： 一种用于光谱测定的装置，其包括配置用于二阶聚焦并且能够2和pgr的光谱仪; 方位收集。

公开(公告)号：US07947951B2

公开(公告)日：2011-05-24

申请号：US12309345

申请日：2007-07-20

申请人： Anjam Khursheed

发明人： Anjam Khursheed

IPC分类号： H01J37/26 ,  H01J37/153

CPC分类号： H01J49/142 ,  H01J37/05 ,  H01J37/15 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/0245 ,  H01J2237/057 ,  H01J2237/0825 ,  H01J2237/2527 ,  H01J2237/31749

摘要： This invention is a multi-beam charged particle instrument that can simultaneously focus electrons and a variety of positive and negative ions, such as Gallium, Oxygen and Cesium ions, onto the same material target. In addition, the instrument has provision to simultaneously capture the spectrum of both secondary electrons and ions. The highly dispersive, high resolution mass spectrometer portion of the instrument is expected to detect and identify secondary ion species across the entire range of the periodic table, and also record a portion of their emitted energy spectrum. The electron energy spectrometer part of the instrument is designed to acquire the entire range of scattered electrons, from the low energy secondary electrons through to the elastic backscattered electrons.

摘要翻译： 本发明是一种多光束带电粒子仪器，可以将电子和各种正离子和负离子（如镓，氧和铯离子）聚焦在同一材料靶上。 此外，仪器还规定同时捕获二次电子和离子的光谱。 仪器的高分散，高分辨率质谱仪部分预计将在周期表的整个范围内检测和识别二次离子物种，并记录其发射的能谱的一部分。 仪器的电子能谱仪部分设计用于从低能二次电子到弹性背散射电子获取散射电子的全部范围。