公开(公告)号：US20150300913A1

公开(公告)日：2015-10-22

申请号：US14560932

申请日：2014-12-04

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Boris Golberg ,  Amir Moshe Sagiv ,  Haim Feldman ,  Uriel Malul ,  Adam Baer

IPC: G01M11/02

CPC classification number: G01M11/00 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/95676 ,  G02B21/125

Abstract: An on-tool measurement system and a method for measuring optical system's wavefront (WF) aberrations are disclosed. The on-tool measurement system includes an optical setup comprising a moveable deflection element further comprising a highly transparent region. The deflection element includes a first surface configured to project a first image of at least one object onto a sensor and the highly transparent region includes a second surface configured to project a second image of the at least one object onto the sensor. The on-tool measurement system includes a sensor configured to capture the first and second images and a controller configured to measure differential displacements between the first and second images at each deflection element position and to calculate the optical setup local WF gradients that depend on the measured differential displacements.

Abstract translation: 公开了一种工具测量系统和用于测量光学系统的波前（WF）像差的方法。 工具测量系统包括光学装置，其包括还包括高度透明区域的可移动偏转元件。 偏转元件包括被配置为将至少一个物体的第一图像突出到传感器上的第一表面，并且高透明区域包括配置成将至少一个物体的第二图像投影到传感器上的第二表面。 工具测量系统包括被配置为捕获第一和第二图像的传感器和被配置为测量在每个偏转元件位置处的第一和第二图像之间的差分位移的控制器，并且计算取决于被测量的光学设置局部WF梯度 差分位移。

公开(公告)号：US20240133807A1

公开(公告)日：2024-04-25

申请号：US17972339

申请日：2022-10-23

Applicant: Applied Materials Israel Ltd.

Inventor： Benny Kirshner ,  Boris Golberg

IPC: G01N21/47 ,  G01N21/95

CPC classification number: G01N21/47 ,  G01N21/9501 ,  G01N2201/0636

Abstract: A method for phase retrieval, the method may include (a) obtaining multiple out-of-focus intensity images of one or more point spread function targets; wherein the out-of-focus intensity images are generated by based on residual collected light signals obtained by a residual collection channel of an optical unit having a numerical aperture that exceeds 0.8; and (b) calculating phase information, based on the multiple out-of-focus intensity images and on a vectorial model of the point spread function.

公开(公告)号：US11448601B2

公开(公告)日：2022-09-20

申请号：US16885785

申请日：2020-05-28

Applicant: Applied Materials Israel Ltd.

Inventor： Boris Golberg ,  Roman Naidis

IPC: G01N21/88 ,  G02B21/08 ,  G02B5/20 ,  G01N21/95

Abstract: A method and a system for obtaining information from a sample. The system may include (i) a spatial filter that includes a blocking element and an aperture; (ii) an illumination unit; and (iii) an optical unit that includes an optical objective assembly. The illumination unit may be configured to illuminate the optical objective assembly with oblique radiation. The optical objective assembly may be configured to (a) focus the oblique radiation onto the sample, (b) collect radiation from the sample to provide collected radiation, and (c) reflect the oblique radiation to provide back reflected radiation. The optical unit may be configured to (a) focus the collected radiation to provide focused collected radiation, (b) direct the focused collection radiation towards the aperture, (c) focus the back reflected radiation to provide focused back reflected radiation, and (d) direct the focused back reflected radiation towards the blocking element.

公开(公告)号：US10481101B2

公开(公告)日：2019-11-19

申请号：US15412879

申请日：2017-01-23

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Haim Feldman ,  Boris Golberg ,  Ido Dolev

IPC: G01N21/88 ,  G01N21/95 ,  G02B21/00 ,  G02B21/06 ,  G02B27/09 ,  G02B26/08

Abstract: An illumination module that includes a pair of anamorphic prisms that comprises a first anamorphic prism and a second anamorphic prism; wherein the pair of anamorphic prisms is configured to (a) receive a first radiation beam that propagates along a first optical axis, and (b) asymmetrically magnify the first radiation beam to provide a second radiation beam that propagates along a second optical axis that is parallel to the first optical axis; and a rectangular prism that is configured to receive the second radiation beam and perform a lateral shift of the second radiation beam to provide a third radiation beam; and a rotating mechanism that is configured to change an asymmetrical magnification of the pair of anamorphic prisms by rotating at least one of the first anamorphic prism and the second anamorphic prism.

公开(公告)号：US20180081166A1

公开(公告)日：2018-03-22

申请号：US15270311

申请日：2016-09-20

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Ron Naftail ,  Boris Golberg ,  Rami Elichai

IPC: G02B26/10 ,  G02B27/09 ,  G01N21/95 ,  G01N21/88

CPC classification number: G02B26/10 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2201/105 ,  G02B21/002 ,  G02B27/0966

Abstract: A scanning system that includes an illumination module that is configured to scan, at a first direction, an elongated radiation spot over an object; and a collection module that is configured to (a) collect a collected radiation beam from the object, and (b) optically manipulate the collected radiation beam to provide a counter-scan beam is directed towards a set of detection units and has a focal point that is positioned at a same location regardless of the propagation of the elongated radiation spot along the first direction.

公开(公告)号：US20160260642A1

公开(公告)日：2016-09-08

申请号：US14639003

申请日：2015-03-04

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Juergen Frosien ,  Jacob Levin ,  Igor Krivts (Krayvitz) ,  Yoram Uziel ,  Boris Golberg

IPC: H01L21/66 ,  H01J37/18 ,  H01J37/22 ,  H01J37/20 ,  H01J37/29

CPC classification number: H01L22/12 ,  H01J37/226 ,  H01J37/228 ,  H01J37/265 ,  H01J37/28 ,  H01J37/292 ,  H01J2237/2817

Abstract: A system for inspecting and reviewing a sample, the system may include a chamber that is arranged to receive the sample and to maintain vacuum within the chamber during at least a scan period; an inspection unit; a review unit; and a mechanical stage for moving the sample, according to a scan pattern and during the scan period, in relation to the inspection unit and the review unit while a spatial relationship between the inspection unit and the review unit remains unchanged; wherein the inspection unit is arranged to detect, during the scan period, multiple suspected defects of the sample; and wherein the review unit is arranged to (a) receive, during the scan period, information about the multiple suspected defects; and (b) locate, during the scan period and in response to the information about the multiple suspected defects, at least one actual defect.

Abstract translation: 一种用于检查和检查样品的系统，所述系统可以包括被布置成接收样品并且在至少扫描周期期间在腔室内维持真空的室; 检查单位; 一个审查单位; 以及用于在检查单元和检查单元之间相对于检查单元和检查单元根据扫描图案和扫描周期期间移动样品的机械台，而检查单元和检查单元之间的空间关系保持不变; 其中所述检查单元被布置成在所述扫描周期期间检测所述样品的多个可疑缺陷; 并且其中所述审查单元被布置为（a）在扫描周期期间接收关于所述多个可疑缺陷的信息; 并且（b）在扫描期间以及针对关于多个疑似缺陷的信息，至少存在一个实际缺陷。