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公开(公告)号:US08266962B2
公开(公告)日:2012-09-18
申请号:US12361212
申请日:2009-01-28
申请人: Thoralf Kautzsch , Bernhard Winkler , Dirk Meinhold , Ben Rosam , Bernd Foeste , Andreas Thamm , Boris Binder
发明人: Thoralf Kautzsch , Bernhard Winkler , Dirk Meinhold , Ben Rosam , Bernd Foeste , Andreas Thamm , Boris Binder
IPC分类号: G01P15/125 , H01L29/84 , H01L21/02
CPC分类号: G01P15/125 , B81B2201/0235 , B81C1/00182 , G01P15/0802
摘要: A semiconductor device includes a semiconductor substrate and a semiconductor mass element configured to move in response to an applied acceleration. The mass element is defined by trenches etched into the semiconductor substrate and a cavity below the mass element. The semiconductor device includes a sensing element configured to sense movement of the mass element and a complementary metal-oxide-semiconductor (CMOS) circuit formed on the substrate.
摘要翻译: 半导体器件包括半导体衬底和配置为响应于所施加的加速度而移动的半导体质量元件。 质量元件由蚀刻到半导体衬底中的沟槽和质量元件下方的空腔限定。 半导体器件包括感测元件,其被配置为感测质量元件的移动和形成在衬底上的互补金属氧化物半导体(CMOS)电路。
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公开(公告)号:US20120164774A1
公开(公告)日:2012-06-28
申请号:US13406069
申请日:2012-02-27
IPC分类号: H01L21/02
CPC分类号: B81C1/00182 , B81B2201/0271 , H01L41/0933 , Y10S977/732
摘要: Micro-electromechanical system (MEMS) devices and methods of manufacture thereof are disclosed. In one embodiment, a MEMS device includes a first semiconductive material and at least one trench disposed in the first semiconductive material, the at least one trench having a sidewall. An insulating material layer is disposed over an upper portion of the sidewall of the at least one trench in the first semiconductive material and over a portion of a top surface of the first semiconductive material proximate the sidewall. A second semiconductive material or a conductive material is disposed within the at least one trench and at least over the insulating material layer disposed over the portion of the top surface of the first semiconductive material proximate the sidewall.
摘要翻译: 公开了微机电系统(MEMS)装置及其制造方法。 在一个实施例中,MEMS器件包括第一半导体材料和设置在第一半导体材料中的至少一个沟槽,所述至少一个沟槽具有侧壁。 绝缘材料层设置在第一半导体材料中的至少一个沟槽的侧壁的上部上方,以及靠近侧壁的第一半导体材料的顶表面的一部分之上。 第二半导体材料或导电材料设置在至少一个沟槽内,并且至少在绝缘材料层的上方设置在靠近侧壁的第一半导体材料的顶表面的部分之上。
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公开(公告)号:US20120061734A1
公开(公告)日:2012-03-15
申请号:US13300138
申请日:2011-11-18
CPC分类号: B81C1/00246 , B81B2201/0271 , B81C2203/0742
摘要: Micro-electromechanical system (MEMS) devices and methods of manufacture thereof are disclosed. In one embodiment, a MEMS device includes a semiconductive layer disposed over a substrate. A trench is disposed in the semiconductive layer, the trench with a first sidewall and an opposite second sidewall. A first insulating material layer is disposed over an upper portion of the first sidewall, and a conductive material disposed within the trench. An air gap is disposed between the conductive material and the semiconductive layer.
摘要翻译: 公开了微机电系统(MEMS)装置及其制造方法。 在一个实施例中,MEMS器件包括设置在衬底上的半导体层。 沟槽设置在半导体层中,沟槽具有第一侧壁和相对的第二侧壁。 第一绝缘材料层设置在第一侧壁的上部之上,并且设置在沟槽内的导电材料。 在导电材料和半导体层之间设置气隙。
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公开(公告)号:US08125046B2
公开(公告)日:2012-02-28
申请号:US12133104
申请日:2008-06-04
IPC分类号: H01L21/70
CPC分类号: B81C1/00246 , B81B2201/0271 , B81C2203/0742
摘要: Micro-electromechanical system (MEMS) devices and methods of manufacture thereof are disclosed. In one embodiment, a MEMS device includes a semiconductive layer disposed over a substrate. A trench is disposed in the semiconductive layer, the trench with a first sidewall and an opposite second sidewall. A first insulating material layer is disposed over an upper portion of the first sidewall, and a conductive material disposed within the trench. An air gap is disposed between the conductive material and the semiconductive layer.
摘要翻译: 公开了微机电系统(MEMS)装置及其制造方法。 在一个实施例中,MEMS器件包括设置在衬底上的半导体层。 沟槽设置在半导体层中,沟槽具有第一侧壁和相对的第二侧壁。 第一绝缘材料层设置在第一侧壁的上部之上,并且设置在沟槽内的导电材料。 在导电材料和半导体层之间设置气隙。
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公开(公告)号:US07612627B2
公开(公告)日:2009-11-03
申请号:US11863534
申请日:2007-09-28
申请人: Florian Schön , Wolfgang Raberg , Bernhard Winkler
发明人: Florian Schön , Wolfgang Raberg , Bernhard Winkler
IPC分类号: H04L27/20
CPC分类号: H03C3/42 , H03J2200/19
摘要: A modulator includes a micro-electromechanical resonator device configured to receive an input signal and generate two output signals in response thereto, wherein the two signals having a predetermined phase relationship therebetween. The modulator further includes a switching system configured to selectively pass one of the two signals to an output of the modulator in an alternating fashion in response to phase modulation data.
摘要翻译: 调制器包括被配置为接收输入信号并响应于此产生两个输出信号的微机电谐振器装置,其中两个信号之间具有预定的相位关系。 该调制器还包括一个交换系统,配置成响应于相位调制数据以交替的方式选择性地将两个信号之一传送到调制器的输出端。
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公开(公告)号:US20050062248A1
公开(公告)日:2005-03-24
申请号:US10740202
申请日:2003-12-18
申请人: Bernhard Winkler , Raymond Tilly , Awad Ramouni , John Santori
发明人: Bernhard Winkler , Raymond Tilly , Awad Ramouni , John Santori
CPC分类号: B60G3/20 , B60G7/008 , B60G2200/144 , B60G2200/462 , B60G2204/143 , B60G2204/148 , B60G2204/422 , B62D17/00 , Y10T403/125
摘要: A toe link assembly of a suspension system includes a cam sleeve having a first and second end, a first cam plate fixedly attached to the cam sleeve at the first end, and a second cam plate fixedly attached to the cam sleeve at the second end. In addition, the toe link assembly includes a first cam washer rotatably received by the first cam plate, a second cam washer rotatably received by the second cam plate, and a bolt having a head fixedly attached to the first cam washer, a body extending between the first and second ends of the cam sleeve, and a shank fixed for rotation with the second cam washer. Rotation of the bolt causes the first and second cam washers to react against the first and second cam plates to position the bolt relative to the cam sleeve along a first longitudinal axis.
摘要翻译: 悬架系统的脚趾连接组件包括具有第一和第二端的凸轮套筒,在第一端处固定地连接到凸轮套筒的第一凸轮板和在第二端处固定地连接到凸轮套筒的第二凸轮板。 此外,脚趾连接组件包括由第一凸轮板可旋转地接收的第一凸轮垫圈,由第二凸轮板可旋转地接收的第二凸轮垫圈和具有固定地连接到第一凸轮垫圈的头部的螺栓, 凸轮套筒的第一端和第二端,以及固定用于与第二凸轮垫圈一起旋转的柄。 螺栓的旋转使得第一和第二凸轮垫圈相对于第一和第二凸轮板反作用以沿着第一纵向轴线相对于凸轮套筒定位螺栓。
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公开(公告)号:US4930283A
公开(公告)日:1990-06-05
申请号:US354541
申请日:1989-05-19
申请人: Bernhard Winkler
发明人: Bernhard Winkler
CPC分类号: E04C1/395 , E02D29/025 , Y10S52/02
摘要: A brick or construction element comprised of cement or synthetic sand and/or gravel of the kind for erecting high embankments or earthworks has a shield-type support with a flat front wall to which are connected lateral wing sections angled toward the rear. A tie bar extends rearwardly from the center of the shield-type support and bottom walls are located between the shield-type support and the tie bar. Boreholes are provided through the wing sections and through the free end of the tie bar, into which reinforcing bars are inserted to enable the bricks to be held together when stacking them in courses to form a retaining wall.
摘要翻译: 由用于竖立高堤或土方工程的水泥或合成砂和/或砾石构成的砖或建筑构件具有屏蔽型支撑件,其具有平坦的前壁,连接的侧翼部分朝向后方成角度。 连接杆从屏蔽型支架的中心向后延伸,底壁位于屏蔽型支架和连接杆之间。 钻孔通过机翼部分并穿过连接杆的自由端,其中插入有钢筋,以使砖可以将其堆叠在一起以形成挡土墙。
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公开(公告)号:US09464524B2
公开(公告)日:2016-10-11
申请号:US14345903
申请日:2012-07-10
申请人: Josef Glogger , Bernhard Winkler
发明人: Josef Glogger , Bernhard Winkler
CPC分类号: E21D20/02 , E21D20/021 , E21D20/025 , F16B13/141
摘要: An anchor rod is disclosed. The anchor rod includes an attachment region and an anchoring region which is insertable into a borehole and which has a profiled section. The profiled section interacts with a curable organic and/or inorganic mortar compound filled into the borehole. The profiled section includes a plurality of expansion sections disposed axially in a row which are conically shaped. For each of the plurality of expansion sections, a diameter of the expansion section increases in a direction toward a free front end of the anchor rod, a ratio of a distance of the expansion section to a mean borehole diameter is 0.40 to 0.60, a ratio of an outer diameter to a core diameter of the expansion section is 1.35 to 1.55, and a cone angle of the expansion section is 22.5° to 27.5°.
摘要翻译: 公开了一种锚杆。 锚杆包括附接区域和可插入钻孔中并具有成型部分的锚定区域。 型材部分与填充到钻孔中的可固化的有机和/或无机砂浆化合物相互作用。 成形部分包括多个沿圆锥形状排列成一列的膨胀部分。 对于多个膨胀部中的每一个,膨胀部的直径朝向锚杆的自由前端的方向增大,膨胀部的距离与平均井眼直径的比率为0.40〜0.60, 的外径与膨胀部的芯直径的比为1.35〜1.55,膨胀部的锥角为22.5°〜27.5°。
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公开(公告)号:US08627720B2
公开(公告)日:2014-01-14
申请号:US13612042
申请日:2012-09-12
申请人: Thoralf Kautzsch , Bernhard Winkler , Dirk Meinhold , Ben Rosam , Bernd Foeste , Andreas Thamm , Boris Binder
发明人: Thoralf Kautzsch , Bernhard Winkler , Dirk Meinhold , Ben Rosam , Bernd Foeste , Andreas Thamm , Boris Binder
IPC分类号: G01P15/125 , H01L29/84 , H01L21/02
CPC分类号: G01P15/125 , B81B2201/0235 , B81C1/00182 , G01P15/0802
摘要: A semiconductor device includes a semiconductor substrate and a semiconductor mass element configured to move in response to an applied acceleration. The mass element is defined by trenches etched into the semiconductor substrate and a cavity below the mass element. The semiconductor device includes a sensing element configured to sense movement of the mass element.
摘要翻译: 半导体器件包括半导体衬底和配置为响应于所施加的加速度而移动的半导体质量元件。 质量元件由蚀刻到半导体衬底中的沟槽和质量元件下方的空腔限定。 半导体器件包括感测元件,其被配置为感测质量元件的移动。
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公开(公告)号:US08476990B2
公开(公告)日:2013-07-02
申请号:US13241638
申请日:2011-09-23
申请人: Bernhard Winkler , Mohsin Nawaz , Florian Schoen
发明人: Bernhard Winkler , Mohsin Nawaz , Florian Schoen
CPC分类号: H03H9/02244 , G04C3/12 , G04F5/063 , H03B5/30 , H03H3/0072 , H03H9/02433 , H03H9/02448 , H03H9/2431
摘要: Embodiments are related to micro-electromechanical system (MEMS) devices, systems and methods. In one embodiment, a MEMS resonating device comprises a resonator element configured to provide timing; and at least one passive temperature compensation structure arranged on the resonator element.
摘要翻译: 实施例涉及微机电系统(MEMS)装置,系统和方法。 在一个实施例中,MEMS谐振装置包括被配置为提供定时的谐振元件; 以及布置在谐振器元件上的至少一个被动温度补偿结构。
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