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公开(公告)号：US20150128749A1
公开(公告)日：2015-05-14
申请号：US14469260
申请日：2014-08-26
发明人： Ulysses Gilchrist
IPC分类号： H01L21/677 , B25J18/04 , B25J9/04
CPC分类号： H01L21/67742 , B25J9/042 , B25J18/04 , G05B2219/40301 , Y10T74/20323
摘要： A substrate processing apparatus comprising a transport arm having serially connected arm links, at least one of the arm links having a predetermined arm link height, at least a first pulley and a second pulley, where the second pulley is fixed to an arm link of the serially connected arm links, and at least one torque transmission band extending longitudinally between and coupled to each of the first pulley and the second pulley, the at least one torque transmission band having a corresponding band height for the predetermined arm link height and a variable lateral thickness such that the at least one torque transmission band includes a segment of laterally increased cross section for the corresponding band height.
摘要翻译： 一种基板处理装置，包括具有串联连接的臂连杆的传送臂，至少一个臂连杆具有预定的臂连杆高度，至少第一滑轮和第二滑轮，其中第二滑轮固定到臂连杆 至少一个扭矩传递带，其在所述第一滑轮和所述第二滑轮之间纵向延伸并且联接到所述第一滑轮和所述第二滑轮中的每一个，所述至少一个扭矩传递带具有用于所述预定臂连杆高度的相应的带高度，以及可变横向 使得所述至少一个扭矩传递带包括用于相应的带高度的横向增加的横截面的段。
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公开(公告)号：US20140126987A1
公开(公告)日：2014-05-08
申请号：US14071314
申请日：2013-11-04
IPC分类号： H01L21/677
CPC分类号： B25J9/042 , B25J9/0087 , B25J9/08 , B25J9/10 , B25J9/104 , B25J18/04 , H01L21/67742 , Y10S901/15 , Y10S901/23 , Y10S901/28 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.
摘要翻译： 具有框架，驱动部和铰接臂的基板输送装置。 驱动部分具有至少一个电动机模块，其可选择用于从多个不同的可互换电动机模块放置在驱动部分中。 每个具有不同的预定特性。 铰接臂具有铰接接头。 臂连接到驱动部分用于铰接。 臂具有可从多个具有预定配置特性的不同臂配置中选择的可选配置。 通过选择用于放置在驱动部分中的至少一个电机模块来实现臂配置的选择。
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公开(公告)号：US20130028700A1
公开(公告)日：2013-01-31
申请号：US13646282
申请日：2012-10-05
发明人： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
IPC分类号： H01L21/677 , B25J18/00
CPC分类号： H02K7/09 , H02K29/03 , Y10S901/15 , Y10S901/23 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.
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公开(公告)号：US20210043494A1
公开(公告)日：2021-02-11
申请号：US17081811
申请日：2020-10-27
IPC分类号： H01L21/687 , H01L21/677
摘要： A substrate transport apparatus including a frame, an upper arm rotatably mounted to the frame about a shoulder axis, a forearm rotatably mounted to the upper arm about an elbow axis where the forearm includes stacked forearm sections dependent from the upper arm through a common joint, and independent stacked end effectors rotatably mounted to the forearm, the forearm being common to the independent stacked end effectors, wherein at least one end effector is mounted to the stacked forearm sections at a wrist axis, where the forearm is configured such that spacing between the independent stacked end effectors mounted to the stacked forearm sections is decoupled from a height build up between end effectors accommodating pass through instrumentation.
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公开(公告)号：US10818537B2
公开(公告)日：2020-10-27
申请号：US16272974
申请日：2019-02-11
IPC分类号： H01L21/687 , H01L21/677
摘要： A substrate transport apparatus including a frame, an upper arm rotatably mounted to the frame about a shoulder axis, a forearm rotatably mounted to the upper arm about an elbow axis where the forearm includes stacked forearm sections dependent from the upper arm through a common joint, and independent stacked end effectors rotatably mounted to the forearm, the forearm being common to the independent stacked end effectors, wherein at least one end effector is mounted to the stacked forearm sections at a wrist axis, where the forearm is configured such that spacing between the independent stacked end effectors mounted to the stacked forearm sections is decoupled from a height build up between end effectors accommodating pass through instrumentation.
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公开(公告)号：US10742092B2
公开(公告)日：2020-08-11
申请号：US14540058
申请日：2014-11-13
IPC分类号： H02K11/215 , H01L21/687 , H02K1/14 , H01L21/677 , H02K5/128 , H02K1/24 , H01L21/67
摘要： A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive, where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, at least one seal partition configured to isolate the isolated environment, and at least one sensor including a magnetic sensor member connected to the housing, at least one sensor track connected to the at least one rotor where the at least one seal partition is disposed between and separates the magnetic sensor member and the at least one sensor track so that the at least one sensor track is disposed in the isolated environment and the magnetic sensor member is disposed outside the isolated environment.
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公开(公告)号：US10679882B2
公开(公告)日：2020-06-09
申请号：US14976952
申请日：2015-12-21
发明人： Michael L. Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert C. May
IPC分类号： H01L21/677
摘要： In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.
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公开(公告)号：US10468936B2
公开(公告)日：2019-11-05
申请号：US15952595
申请日：2018-04-13
摘要： A transport apparatus including a housing, a drive mounted to the housing, and at least one transport arm connected to the drive where the drive includes at least one rotor having at least one salient pole of magnetic permeable material and disposed in an isolated environment, at least one stator having at least one salient pole with corresponding coil units and disposed outside the isolated environment, where the at least one salient pole of the at least one stator and the at least one salient pole of the rotor form a closed magnetic flux circuit between the at least one rotor and the at least one stator, and at least one seal configured to isolate the isolated environment where the at least one seal is integral to the at least one stator.
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公开(公告)号：US10204817B2
公开(公告)日：2019-02-12
申请号：US15702436
申请日：2017-09-12
IPC分类号： H01L21/677 , H01L21/687
摘要： A substrate transport apparatus including a frame, an upper arm rotatably mounted to the frame about a shoulder axis, a forearm rotatably mounted to the upper arm about an elbow axis where the forearm includes stacked forearm sections dependent from the upper arm through a common joint, and independent stacked end effectors rotatably mounted to the forearm, the forearm being common to the independent stacked end effectors, wherein at least one end effector is mounted to the stacked forearm sections at a wrist axis, where the forearm is configured such that spacing between the independent stacked end effectors mounted to the stacked forearm sections is decoupled from a height build up between end effectors accommodating pass through instrumentation.
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公开(公告)号：US09670010B2
公开(公告)日：2017-06-06
申请号：US13908909
申请日：2013-06-03
IPC分类号： H01L21/677 , B65G49/00
CPC分类号： B65G49/00 , H01L21/67772 , Y10S414/135 , Y10S414/14
摘要： A substrate processing apparatus having a station for loading and unloading substrates from the apparatus is provided. The station has a loading and unloading aperture, a magazine door drive for opening a substrate magazine by removing a door of a substrate magazine through the loading and unloading aperture, and a substrate magazine transport having a magazine support, the substrate magazine transport being configured to move the substrate magazine horizontally between a first position and a second position. When in the first position the substrate magazine is seated on the magazine support and communicates with the aperture and when moved to the second position the substrate magazine is offset from the first position, where the substrate magazine remains seated on the magazine support during horizontal transfer between the first and second positions and another substrate magazine is capable of being located at the first position in communication with the aperture.
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