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公开(公告)号：US10967511B2
公开(公告)日：2021-04-06
申请号：US16115505
申请日：2018-08-28
IPC分类号： B25J9/16 , H01L21/67 , H01L21/677 , G05B19/416
摘要： A time-optimal trajectory generation method, for a robotic manipulator having a transport path with at least one path segment, comprising generating a forward time-optimal trajectory of the manipulator along the at least one path segment from a start point of the at least one path segment towards an end point of the at least one path segment, generating a reverse time-optimal trajectory of the manipulator along the at least one path segment from the end point towards the start point of the at least one path segment, and combining the time-optimal forward and reverse trajectories to obtain a complete time-optimal trajectory, where the forward and reverse trajectories of the at least one path segment are blended together with a smoothing bridge joining the time-optimal forward and reverse trajectories in a position-velocity reference frame with substantially no discontinuity between the time-optimal forward and reverse trajectories.
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公开(公告)号：US20200166913A1
公开(公告)日：2020-05-28
申请号：US16696822
申请日：2019-11-26
发明人： Martin Hosek , Stuart Beale , Roumen Botev , Matthew Coady , Christopher Hofmeister , Mark Ives , Jairo Moura , Robert Caveney
IPC分类号： G05B19/418 , G05B19/414
摘要： A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.
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3.发明授权公开(公告)号：US10120374B2
公开(公告)日：2018-11-06
申请号：US14822310
申请日：2015-08-10
发明人： Martin Hosek , Jay Krishnasamy , Jan Prochazka
IPC分类号： G06F11/30 , G05B23/02 , G06F11/22 , G05B19/418 , B25J9/16
摘要： A system for condition monitoring and fault diagnosis includes a data collection function that acquires time histories of selected variables for one or more of the components, a pre-processing function that calculates specified characteristics of the time histories, an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components, and a reasoning function for determining the condition of the one or more components from the one or more hypotheses.
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4.发明申请公开(公告)号：US20200001453A1
公开(公告)日：2020-01-02
申请号：US16460676
申请日：2019-07-02
发明人： Christopher Hofmeister , Alexander G. Krupyshev , Krysztof A. Majczak , Martin Hosek , Jay Krishnasamy
IPC分类号： B25J9/10 , H01L21/677 , B25J9/12
摘要： A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
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5.发明申请SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM 审中-公开使用机械开关机构的多个可移动臂的基板运输装置公开(公告)号：US20140294551A1
公开(公告)日：2014-10-02
申请号：US14305715
申请日：2014-06-16
发明人： Christopher Hofmeister , Alexander G. Krupyshev , Krysztof A. Majczak , Martin Hosek , Jay Krishnasamy
CPC分类号： B25J11/0095 , B25J9/106 , B25J9/126 , H01L21/67742 , H01L21/68707 , Y10S414/141 , Y10S901/15 , Y10S901/21 , Y10S901/23 , Y10S901/27 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
摘要翻译： 一种基板输送装置，包括框架，连接到框架并且包括至少一个可独立控制的马达的驱动部分，连接到框架的至少两个基板输送臂，并且包括布置成用于支撑和输送基板的臂连杆，以及机械运动开关 耦合到所述至少一个可独立控制的电动机和所述至少两个衬底传送臂，用于实现所述至少两个衬底传送臂中的一个的延伸和缩回，同时所述至少两个衬底传送臂中的另一个保持基本上缩回 组态。
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6.发明授权公开(公告)号：US10335945B2
公开(公告)日：2019-07-02
申请号：US14305715
申请日：2014-06-16
发明人： Christopher Hofmeister , Alexander G. Krupyshev , Krysztof A. Majczak , Martin Hosek , Jay Krishnasamy
IPC分类号： B25J9/04 , B25J9/10 , B25J9/12 , H01L21/677 , H01L21/687 , B25J11/00
摘要： A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
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公开(公告)号：US10058998B2
公开(公告)日：2018-08-28
申请号：US15376119
申请日：2016-12-12
IPC分类号： H01L21/67 , B25J9/16 , H01L21/677 , G05B19/416
CPC分类号： B25J9/1664 , G05B19/416 , G05B2219/40449 , G05B2219/40466 , H01L21/67259 , H01L21/67742 , H01L21/67766 , Y02P90/083
摘要： A time-optimal trajectory generation method, for a robotic manipulator haying a transport path with at least one path segment, comprising generating a forward time-optimal trajectory of the manipulator along the at least one path segment from a start point of the at least one path segment towards an end point of the at least one path segment, generating a reverse time-optimal trajectory of the manipulator along the at least one path segment from the end point towards the start point of the at least one path segment, and combining the time-optimal forward and reverse trajectories to obtain a complete time optimal trajectory, where the forward and reverse trajectories of the at least one path segment are blended together with a smoothing bridge joining the time-optimal forward and reverse trajectories in a position-velocity reference frame with substantially no discontinuity between the time-optimal forward and reverse trajectories.
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8.发明授权Intelligent condition monitoring and fault diagnostic system for preventative maintenance 有权智能状态监测和故障诊断系统进行预防性维护公开(公告)号：US09104650B2
公开(公告)日：2015-08-11
申请号：US13739831
申请日：2013-01-11
CPC分类号： G05B23/0283 , B25J9/1674 , G05B19/41875 , G05B23/0221 , G06F11/2257
摘要： A system for condition monitoring and fault diagnosis includes a data collection function that acquires time histories of selected variables for one or more of the components, a pre-processing function that calculates specified characteristics of the time histories, an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components, and a reasoning function for determining the condition of the one or more components from the one or more hypotheses.
摘要翻译： 用于状态监视和故障诊断的系统包括数据收集功能，其获取一个或多个组件的选定变量的时间历史，计算时间历史的指定特征的预处理功能，用于评估特征的分析功能 产生一个或多个组件的条件的一个或多个假设，以及用于从一个或多个假设确定一个或多个组件的状况的推理功能。
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公开(公告)号：US20130028700A1
公开(公告)日：2013-01-31
申请号：US13646282
申请日：2012-10-05
发明人： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
IPC分类号： H01L21/677 , B25J18/00
CPC分类号： H02K7/09 , H02K29/03 , Y10S901/15 , Y10S901/23 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.
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10.发明授权公开(公告)号：US11801598B2
公开(公告)日：2023-10-31
申请号：US16460676
申请日：2019-07-02
发明人： Christopher Hofmeister , Alexander G. Krupyshev , Krysztof A. Majczak , Martin Hosek , Jay Krishnasamy
IPC分类号： B25J9/10 , H01L21/677 , B25J11/00 , B25J18/00 , B25J9/12
CPC分类号： B25J9/106 , B25J9/126 , B25J11/0095 , B25J18/00 , H01L21/67742 , Y10S901/15 , Y10S901/21 , Y10S901/23 , Y10S901/27 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
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