公开(公告)号：US20200001453A1

公开(公告)日：2020-01-02

申请号：US16460676

申请日：2019-07-02

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander G. Krupyshev ,  Krysztof A. Majczak ,  Martin Hosek ,  Jay Krishnasamy

IPC: B25J9/10 ,  H01L21/677 ,  B25J9/12

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

公开(公告)号：US20140294551A1

公开(公告)日：2014-10-02

申请号：US14305715

申请日：2014-06-16

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander G. Krupyshev ,  Krysztof A. Majczak ,  Martin Hosek ,  Jay Krishnasamy

IPC: B25J11/00 ,  B25J18/00

CPC classification number: B25J11/0095 ,  B25J9/106 ,  B25J9/126 ,  H01L21/67742 ,  H01L21/68707 ,  Y10S414/141 ,  Y10S901/15 ,  Y10S901/21 ,  Y10S901/23 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

Abstract translation: 一种基板输送装置，包括框架，连接到框架并且包括至少一个可独立控制的马达的驱动部分，连接到框架的至少两个基板输送臂，并且包括布置成用于支撑和输送基板的臂连杆，以及机械运动开关 耦合到所述至少一个可独立控制的电动机和所述至少两个衬底传送臂，用于实现所述至少两个衬底传送臂中的一个的延伸和缩回，同时所述至少两个衬底传送臂中的另一个保持基本上缩回 组态。

公开(公告)号：US10335945B2

公开(公告)日：2019-07-02

申请号：US14305715

申请日：2014-06-16

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander G. Krupyshev ,  Krysztof A. Majczak ,  Martin Hosek ,  Jay Krishnasamy

IPC: B25J9/04 ,  B25J9/10 ,  B25J9/12 ,  H01L21/677 ,  H01L21/687 ,  B25J11/00

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

公开(公告)号：US20130028700A1

公开(公告)日：2013-01-31

申请号：US13646282

申请日：2012-10-05

Applicant: BROOKS AUTOMATION, INC.

Inventor： Ulysses Gilchrist ,  Martin Hosek ,  Jairo Terra Moura ,  Jay Krishnasamy ,  Christopher Hofmeister

IPC: H01L21/677 ,  B25J18/00

CPC classification number: H02K7/09 ,  H02K29/03 ,  Y10S901/15 ,  Y10S901/23 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

Abstract: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.

公开(公告)号：US10120374B2

公开(公告)日：2018-11-06

申请号：US14822310

申请日：2015-08-10

Applicant: Brooks Automation, Inc.

Inventor： Martin Hosek ,  Jay Krishnasamy ,  Jan Prochazka

IPC: G06F11/30 ,  G05B23/02 ,  G06F11/22 ,  G05B19/418 ,  B25J9/16

Abstract: A system for condition monitoring and fault diagnosis includes a data collection function that acquires time histories of selected variables for one or more of the components, a pre-processing function that calculates specified characteristics of the time histories, an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components, and a reasoning function for determining the condition of the one or more components from the one or more hypotheses.

公开(公告)号：US11801598B2

公开(公告)日：2023-10-31

申请号：US16460676

申请日：2019-07-02

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander G. Krupyshev ,  Krysztof A. Majczak ,  Martin Hosek ,  Jay Krishnasamy

IPC: B25J9/10 ,  H01L21/677 ,  B25J11/00 ,  B25J18/00 ,  B25J9/12

CPC classification number: B25J9/106 ,  B25J9/126 ,  B25J11/0095 ,  B25J18/00 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/21 ,  Y10S901/23 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

公开(公告)号：US09024488B2

公开(公告)日：2015-05-05

申请号：US13646282

申请日：2012-10-05

Applicant: Brooks Automation, Inc.

Inventor： Ulysses Gilchrist ,  Martin Hosek ,  Jairo Terra Moura ,  Jay Krishnasamy ,  Christopher Hofmeister

IPC: H02K7/09 ,  H02K41/02 ,  B25J17/00 ,  H02K29/03

CPC classification number: H02K7/09 ,  H02K29/03 ,  Y10S901/15 ,  Y10S901/23 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

Abstract: A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.

Abstract translation: 一种用于基板输送臂的驱动部分，包括框架，至少一个定子，其安装在框架内，该定子包括第一马达部分和至少一个定子轴承部分和同轴主轴，所述至少一个定子轴承部分和基本上不被所述至少一个定子 其中所述同轴心轴的每个驱动轴包括转子，所述转子包括第二电动机部分和至少一个转子轴承部分，所述至少一个转子轴承部分构造成与所述至少一个定子轴承部分相接合，其中所述第一电动机部分被配置为接合 所述第二马达部分绕所述心轴绕预定轴线进行旋转，并且所述至少一个定子支承部分构造成通过与所述至少一个相互作用的至少一个相互作用来实现连接到所述同轴心轴的基底输送臂端部执行器的至少调平 转子轴承部分。