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    Patterned photoresist structures having features with high aspect ratios and method of forming such structures
    11.
    发明授权
    Patterned photoresist structures having features with high aspect ratios and method of forming such structures 有权
    具有高纵横比特征的图案化光致抗蚀剂结构和形成这种结构的方法

    公开(公告)号：US06294317B1

    公开(公告)日：2001-09-25

    申请号：US09352956

    申请日：1999-07-14

    申请人： Mildred Calistri-Yeh ,  Cathie J. Burke ,  Diane Atkinson

    发明人： Mildred Calistri-Yeh ,  Cathie J. Burke ,  Diane Atkinson

    IPC分类号： B41J2135

    CPC分类号： B41J2/14129 ,  B41J2202/03

    摘要： Patterned photoresist layers formed on substrates have features with high aspect ratios. The photoresist layers can be formed as single layers with aspect ratios as high as about 4:1. In addition, the features in the photoresist layers can have a wide range of aspect ratios in a given single layer. The photoresist layers can be used in ink jet print heads and other devices to provide controlled fluid flow. The photoresist layers are formed using a contrast enhancement material that enables features having substantially vertical side walls and high aspect ratios to be formed.

    摘要翻译： 形成在基板上的图案化光致抗蚀剂层具有高纵横比的特征。 光致抗蚀剂层可以形成为具有高达约4:1的纵横比的单层。 此外，光刻胶层中的特征可以在给定的单层中具有宽范围的纵横比。 光致抗蚀剂层可用于喷墨打印头和其它装置中以提供受控的流体流动。 使用对比增强材料形成光致抗蚀剂层，其使得能够形成具有基本上垂直的侧壁和高纵横比的特征。

    Polysilicon feed-through fluid drop ejector
    12.
    发明授权
    Polysilicon feed-through fluid drop ejector 失效
    多晶硅直通液滴喷射器

    公开(公告)号：US06905196B2

    公开(公告)日：2005-06-14

    申请号：US10431540

    申请日：2003-05-08

    申请人： Scott N. Seabridge ,  Alan D. Raisanen ,  Scott C. Warner ,  Thomas A. Tellier ,  Cathie J. Burke ,  William G. Hawkins

    发明人： Scott N. Seabridge ,  Alan D. Raisanen ,  Scott C. Warner ,  Thomas A. Tellier ,  Cathie J. Burke ,  William G. Hawkins

    IPC分类号： B41J2/14 ,  B41J2/05

    CPC分类号： B41J2/14129 ,  B41J2/14072 ,  B41J2202/03

    摘要： A fluid ejector includes a fluid channel having a resistive heater and terminating in a nozzle, a common bus formed transverse to the fluid channel and between the resistive heater and the nozzle, a connection line laterally adjacent to the fluid channel, and a connection structure for electrically connecting the common bus with the resistive heater and the connection line, the connection structure including a first set of one or more layers for electrical connection and a second set of one or more layers for covering the common bus and connection line. The first set of one or more layers includes a doped polysilicon layer on or overlaid by an optional tantalum-silicide layer. The second set of one or more layers includes a nitride layer on or overlaid by a tantalum layer.

    摘要翻译： 流体喷射器包括具有电阻加热器并终止于喷嘴的流体通道，与流体通道横向于电阻加热器和喷嘴之间的公共总线，与流体通道横向相邻的连接管线，以及用于 将公共总线与电阻加热器和连接线电连接，连接结构包括用于电连接的一个或多个层的第一组和用于覆盖公共总线和连接线的一个或多个层的第二组。 第一组一层或多层包括在可选的硅化硅层上或由可选的硅化硅层覆盖的掺杂多晶硅层。 第二组一层或多层包括在钽层上或覆盖钽层的氮化物层。

    Monolithic silicon integrated circuit chip for a thermal ink jet printer
    13.
    发明授权
    Monolithic silicon integrated circuit chip for a thermal ink jet printer 失效
    用于热喷墨打印机的单片硅集成电路芯片

    公开(公告)号：US4947192A

    公开(公告)日：1990-08-07

    申请号：US336624

    申请日：1989-04-07

    申请人： William G. Hawkins ,  Cathie J. Burke

    发明人： William G. Hawkins ,  Cathie J. Burke

    IPC分类号： B41J2/16 ,  H01L27/02 ,  H01L27/06

    CPC分类号： B41J2/1604 ,  B41J2/1626 ,  B41J2/1631 ,  H01L27/0211 ,  H01L27/0688 ,  B41J2202/13

    摘要： A thermal jet ink printing system is provided with an inproved printhead. The printhead is formed by monolithic integration of MOS transistors switches onto the same silicon substrate containing the resistive elements. In a preferred embodiment, the transistor switches and resistive elements are formed from a single layer of polysilicon with the resistive element formed on a thermally grown field oxide layer having a thickness ranging from about one to four microns. The integrated circuit chips are formed by MOS technology, are thermally stable and can be operated at higher voltages.

    摘要翻译： 热喷墨打印系统设有一个未经授权的打印头。 打印头通过将MOS晶体管开关单元集成到包含电阻元件的同一硅衬底上而形成。 在优选实施例中，晶体管开关和电阻元件由单层多晶硅形成，其中电阻元件形成在厚度范围为约1至4微米的热生长场氧化物层上。 集成电路芯片由MOS技术形成，热稳定，可在较高电压下工作。

    Office environment level electrostatic discharge protection
    14.
    发明授权
    Office environment level electrostatic discharge protection 失效
    办公环境级静电放电保护

    公开(公告)号：US5428498A

    公开(公告)日：1995-06-27

    申请号：US952015

    申请日：1992-09-28

    申请人： William G. Hawkins ,  Cathie J. Burke ,  Thomas E. Watrobski ,  Thomas A. Tellier ,  Sophie Vandebroek

    发明人： William G. Hawkins ,  Cathie J. Burke ,  Thomas E. Watrobski ,  Thomas A. Tellier ,  Sophie Vandebroek

    IPC分类号： H01L27/04 ,  H01L21/822 ,  H01L27/02 ,  H02H3/22

    CPC分类号： H01L27/0251 ,  H01L27/0259

    摘要： An electrostatic discharge protection device for a connector associated with an integrated circuit chip, particularly one associated with a thermal ink-jet printhead. A MOS field effect device extends along at least one edge of the connector on the chip. A bipolar transistor, parasitic to the field effect device, conducts current from the connector to ground in response to a voltage between the connector and ground in excess of a predetermined threshold. A zone of a predetermined electrical resistance is operatively disposed between the bipolar transistor and ground. The zone may substantially encircle the bonding pad of the connector to evenly distribute local incidences of high voltage. The invention enables integrated circuits to pass ESD requirements of office products, which is 15 kV by Human Body Model testing.

    摘要翻译： 一种用于与集成电路芯片相关联的连接器的静电放电保护装置，特别是与热喷墨打印头相关联的静电放电保护装置。 MOS场效应器件沿芯片上连接器的至少一个边缘延伸。 寄生到场效应器件的双极晶体管响应于连接器和地之间的电压超过预定阈值而将电流从连接器传导到地。 预定电阻的区域可操作地设置在双极晶体管和地之间。 该区域可以基本上环绕连接器的焊盘，以均匀分布高电压的局部发生。 本发明使得集成电路能够通过人体模型测试传递15kV的办公产品的ESD要求。

    Directionality of thermal ink jet transducers by front face metalization
    15.
    发明授权
    Directionality of thermal ink jet transducers by front face metalization 失效
    通过前面金属化的热喷墨传感器的方向性

    公开(公告)号：US5208606A

    公开(公告)日：1993-05-04

    申请号：US795596

    申请日：1991-11-21

    申请人： Igal E. Klein ,  Cathie J. Burke ,  William G. Hawkins ,  Roberto E. Proano

    发明人： Igal E. Klein ,  Cathie J. Burke ,  William G. Hawkins ,  Roberto E. Proano

    IPC分类号： B41J2/05 ,  B41J2/135 ,  B41J2/16

    CPC分类号： B41J2/1606

    摘要： A thermal ink jet printhead has an outer, metallic hydrophobic coating on its front face to repel ink. Eliminating the accumulation of ink at the nozzles of the printhead allows an ink droplet to be accurately ejected and ensures the directionality of the ejected ink droplet onto the printing medium. The outer coating is formed of a metal selected from the group of noble metals, including gold, platinum, palladium, silver, rhodium and ruthenium. An adhesion layer is preferably deposited between the front face of the printhead and the outer ink-repellent coating. The metallic coating is preferably applied by electroplating, wet electroless plating, evaporation, sputtering, ion plating, CVD or plasma CVD.

    摘要翻译： 热喷墨打印头在其前面具有外部金属疏水涂层以排斥油墨。 在打印头的喷嘴处消除墨水的积聚允许墨滴被精确地喷射并确保喷射的墨滴在打印介质上的方向性。 外涂层由选自贵金属，包括金，铂，钯，银，铑和钌的金属形成。 粘合层优选沉积在打印头的前表面和外部防墨涂层之间。 金属涂层优选通过电镀，湿化学镀，蒸发，溅射，离子镀，CVD或等离子体CVD来进行。

    Temperature control transducer and MOS driver for thermal ink jet printing chips
    16.
    发明授权
    Temperature control transducer and MOS driver for thermal ink jet printing chips 失效
    用于热喷墨打印芯片的温度控制传感器和MOS驱动器

    公开(公告)号：US5081473A

    公开(公告)日：1992-01-14

    申请号：US558092

    申请日：1990-07-26

    申请人： William G. Hawkins ,  Cathie J. Burke

    发明人： William G. Hawkins ,  Cathie J. Burke

    IPC分类号： B41J2/05 ,  B41J2/16 ,  H01L27/06

    CPC分类号： B41J2/1626 ,  B41J2/1601 ,  B41J2/1642 ,  B41J2/1646 ,  H01L27/0688 ,  B41J2202/13

    摘要： A transducer for a thermal ink jet printhead has a primary heating region having a tantalum layer, a silicon nitride layer and a polysilicon resistor layer. An n.sup.- drift layer resistor serves as a secondary heating region and a field layer of silicon dioxide acts as an insulator. The field layer is sandwiched between the primary heating region and the secondary heating region. The secondary heating region by heating the field layer causes the heat generated in the primary heating region to be directed toward ink which lies above the primary heating region. An electrical contact connects the polysilicon resistor layer of the primary heating region to a driving transistor located on the same silicon wafer as the transducer. The driving transistor has a field oxide layer sandwiched between an n.sup.- drift layer and a field plate layer, the field plate layer causing secondary pinch off of the n.sup.- drift layer thus enabling higher operating voltages.

    摘要翻译： 用于热喷墨打印头的换能器具有具有钽层，氮化硅层和多晶硅电阻层的初级加热区域。 n漂移层电阻器用作二次加热区域，二氧化硅的场层用作绝缘体。 场层被夹在主加热区和次加热区之间。 通过加热场层的二次加热区域，使得在一次加热区域中产生的热量朝向位于主加热区域上方的墨水。 电接触将主加热区域的多晶硅电阻层连接到位于与换能器相同的硅晶片上的驱动晶体管。 驱动晶体管具有夹在n漂移层和场板层之间的场氧化物层，所述场板层引起n漂移层的次级夹断，从而实现更高的工作电压。

    Methods of patterning resists and structures including the patterned resists
    18.
    发明授权
    Methods of patterning resists and structures including the patterned resists 失效
    图案化抗蚀剂和包括图案化抗蚀剂的结构的方法

    公开(公告)号：US06790598B2

    公开(公告)日：2004-09-14

    申请号：US10046245

    申请日：2002-01-16

    申请人： Cathie J. Burke ,  Diane Atkinson ,  Mildred Calistri-Yeh

    发明人： Cathie J. Burke ,  Diane Atkinson ,  Mildred Calistri-Yeh

    IPC分类号： G03F722

    CPC分类号： B41J2/1631 ,  B41J2/1604 ,  G03F1/50

    摘要： Methods of patterning resists and structures including the patterned resists are disclosed. A patterned, multi-transmissive mask is used during patterning of resists to control exposure at areas of the resist at which features having different detail are desired. Exposure is varied in more finely patterned and more grossly patterned areas of the resist. The patterned resists have a high degree of topographical uniformity.

    摘要翻译： 公开了图案化抗蚀剂和包括图案化抗蚀剂的结构的方法。 在图案化抗蚀剂期间使用图案化的多透射掩模，以控制在需要具有不同细节的特征的抗蚀剂的区域处的曝光。 曝光在抗蚀剂的更精细图案和更严格图案的区域中变化。 图案化的抗蚀剂具有高度的形貌均匀性。