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11.发明授权Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane 有权用外延硅膜制造的电容式微机械超声换能器公开(公告)号：US07545012B2
公开(公告)日：2009-06-09
申请号：US11393317
申请日：2006-03-30
申请人： Lowell Scott Smith , David Martin Mills , Jeffrey Bernard Fortin , Wei-Cheng Tian , John Robert Logan
发明人： Lowell Scott Smith , David Martin Mills , Jeffrey Bernard Fortin , Wei-Cheng Tian , John Robert Logan
CPC分类号： B06B1/0292
摘要： A capacitive micromachined ultrasound transducer (cMUT) cell is presented. The cMUT cell includes a lower electrode. Furthermore, the cMUT cell includes a diaphragm disposed adjacent to the lower electrode such that a gap having a first gap width is formed between the diaphragm and the lower electrode, wherein the diaphragm comprises one of a first epitaxial layer or a first polysilicon layer. In addition, a stress reducing material is disposed in the first epitaxial layer.
摘要翻译： 提出了一种电容式微机械超声换能器（cMUT）。 cMUT电池包括下电极。 此外，cMUT单元包括邻近下电极设置的隔膜，使得在隔膜和下电极之间形成具有第一间隙宽度的间隙，其中隔膜包括第一外延层或第一多晶硅层中的一个。 此外，应力降低材料设置在第一外延层中。
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12.发明授权公开(公告)号：US07037746B1
公开(公告)日：2006-05-02
申请号：US11023252
申请日：2004-12-27
申请人： Lowell Scott Smith , David Martin Mills , Jeffrey Bernard Fortin , Wei-Cheng Tian , John Robert Logan
发明人： Lowell Scott Smith , David Martin Mills , Jeffrey Bernard Fortin , Wei-Cheng Tian , John Robert Logan
IPC分类号： H01L21/00
CPC分类号： B06B1/0292
摘要： A capacitive micromachined ultrasound transducer (cMUT) cell is presented. The cMUT cell includes a lower electrode. Furthermore, the cMUT cell includes a diaphragm disposed adjacent to the lower electrode such that a gap having a first gap width is formed between the diaphragm and the lower electrode, wherein the diaphragm comprises one of a first epitaxial layer or a first polysilicon layer. In addition, a stress reducing material is disposed in the first epitaxial layer.
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公开(公告)号：US20130195333A1
公开(公告)日：2013-08-01
申请号：US13362096
申请日：2012-01-31
申请人： Prabhjot Singh , Lowell Scott Smith
发明人： Prabhjot Singh , Lowell Scott Smith
CPC分类号： G03F7/0035 , B06B1/0629 , H01L41/183
摘要： A method for forming a graded matching layer structure is presented. The method includes (a) depositing a first material slurry on at least a portion of a substrate, (b) spreading the first material slurry to a form a first material layer having a first determined thickness, (c) exposing the first material layer using light processed through a determined light pattern mask to form a first matching layer, and (d) repeating steps (a)-(c) with different material slurries to form the graded matching layer structure.
摘要翻译： 提出了一种形成渐变匹配层结构的方法。 该方法包括（a）在基底的至少一部分上沉积第一材料浆料，（b）将第一材料浆料铺展成具有第一确定厚度的第一材料层，（c）使用 通过确定的光图案掩模处理光以形成第一匹配层，以及（d）用不同的材料浆料重复步骤（a） - （c）以形成渐变匹配层结构。
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公开(公告)号：US08475375B2
公开(公告)日：2013-07-02
申请号：US11639891
申请日：2006-12-15
申请人： Lowell Scott Smith , Robert Stephen Lewandowski , Bruno Hans Haider , Charles Edward Baumgartner , George Charles Sogoian , Christopher Stephen Yetter , Douglas Glenn Wildes , Stephen Royal Kaiser , Svein Bergstoel , Reinhold Bruestle , Tunc Icoz , Steinar Bjaerum , Chester Frank Saj
发明人： Lowell Scott Smith , Robert Stephen Lewandowski , Bruno Hans Haider , Charles Edward Baumgartner , George Charles Sogoian , Christopher Stephen Yetter , Douglas Glenn Wildes , Stephen Royal Kaiser , Svein Bergstoel , Reinhold Bruestle , Tunc Icoz , Steinar Bjaerum , Chester Frank Saj
IPC分类号： A61B8/00
CPC分类号： G01S7/52079 , G01S7/52017 , G10K11/004
摘要： An ultrasound system is provided for imaging an object. The ultrasound system includes an ultrasound probe for acquiring ultrasound data and a cooling subsystem for actively removing heat from the ultrasound probe. The cooling subsystem includes a pump disposed within a reservoir containing a coolant and configured to circulate the coolant through the ultrasound probe via a conduit.
摘要翻译： 提供用于对物体成像的超声系统。 超声波系统包括用于获取超声数据的超声波探头和用于主动地从超声波探头去除热量的冷却子系统。 冷却子系统包括设置在容纳冷却剂的储存器内的泵，并且构造成通过导管使冷却剂循环通过超声波探头。
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公开(公告)号：US5655276A
公开(公告)日：1997-08-12
申请号：US386718
申请日：1995-02-06
CPC分类号： B06B1/0629 , Y10T29/42
摘要： In fabricating a two-dimensional array transducer wherein individual preformed piezoelectric elements are manufactured separately in a high temperature ceramic firing process, a ceramic substrate is provided, having a surface with a plurality of electrodes thereon. A layer of dielectric material is formed on the substrate surface. Holes are formed in the dielectric material layer over the electrodes, defining cavities with metal pads at the bottoms. The individual preformed piezoelectric elements are then inserted into the holes; with one end of each element in contact with a corresponding one of the substrate electrodes. The holes are sized such that the piezoelectric elements are isolated from the dielectric layer. A ground plane conductor is then formed over the dielectric material layer and over the ends of the piezoelectric elements opposite the ends in contact with the piezoelectric elements, and is photolithographically patterned and may be etched to provide a "mesh" structure. The layer of dielectric material may then be removed to provide better isolation between the piezoelectric elements.
摘要翻译： 在制造二维阵列换能器中，其中单独的预成型压电元件在高温陶瓷烧制工艺中单独制造，提供了具有其上具有多个电极的表面的陶瓷基片。 在基板表面上形成介电材料层。 在电极上的电介质材料层中形成孔，在底部形成具有金属垫的空腔。 然后将各个预制的压电元件插入孔中; 每个元件的一端与相应的一个衬底电极接触。 孔的尺寸使得压电元件与电介质层隔离。 接地平面导体然后形成在电介质材料层之上并且在与压电元件接触的端部相对的压电元件的端部之上，并且被光刻图案化并且可被蚀刻以提供“网格”结构。 然后可以去除电介质材料层，以在压电元件之间提供更好的隔离。
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公开(公告)号：US06936009B2
公开(公告)日：2005-08-30
申请号：US09681220
申请日：2001-02-27
IPC分类号： G10K11/02 , A61B8/0029
摘要： A matching layer for ultrasound transducers has a gradient in impedance value from one surface to the other surface of the matching layer. The matching layer is composed of a plurality of sublayers made of composite materials and securely attached together and is disposed on the surface of the transducer element. The first sublayer adjacent to the transducer element has an impedance value less than or equal to that of the transducer element. The last sublayer adjacent to the target has an impedance value greater than or equal to that of the target. The impedance values of the sublayers decrease monotonically from the first to the last sublayer.
摘要翻译： 用于超声换能器的匹配层具有从匹配层的一个表面到另一个表面的阻抗值的梯度。 匹配层由复合材料制成的多个子层组成，并且牢固地附着在一起并设置在换能器元件的表面上。 与换能器元件相邻的第一子层具有小于或等于换能器元件的阻抗值的阻抗值。 与目标相邻的最后一个子层具有大于或等于目标的阻抗值。 子层的阻抗值从第一个子层到最后一个子层单调减小。
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公开(公告)号：US5660877A
公开(公告)日：1997-08-26
申请号：US538151
申请日：1995-10-02
CPC分类号： C04B41/009 , C04B41/4515 , C04B41/81 , H01L41/183 , H01L41/37 , C04B2111/00844
摘要： A process for fabricating a fully dense ceramic preform for a piezoelectric or electrostrictive composite exhibiting anisotropic 3--3 connectivity. The process involves preparing a homogeneous slurry of a piezoelectric ceramic powder, a binder, dispersant, and a liquid medium. The slurry is freeze dried to form a ceramic preform having ceramic interconnected lamelli having greater connectivity in the Z direction than in the X and Y direction, and having interconnected interlamellar regions. The composite is fabricated by infiltrating the fully dense ceramic preform with an infiltrate phase in the interconnected interlamellar regions. The composite may be poled to produce a piezoelectric composite for electromechanical devices exhibiting anisotropic 3-3 connectivity.
摘要翻译： 一种用于制造具有各向异性3-3连接性的压电或电致伸缩复合材料的完全致密陶瓷预制件的方法。 该方法包括制备压电陶瓷粉末，粘合剂，分散剂和液体介质的均匀浆料。 将浆料冷冻干燥以形成陶瓷预制件，该陶瓷预制件具有在Z方向上比在X和Y方向上具有更大连接性的陶瓷互连薄片，并且具有互连的层间区域。 通过在互连的层间区域中渗透具有渗透相的完全致密陶瓷预制件来制造复合材料。 复合材料可以被极化以产生具有各向异性3-3连接性的机电装置的压电复合材料。
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公开(公告)号：US08038620B2
公开(公告)日：2011-10-18
申请号：US11313449
申请日：2005-12-20
CPC分类号： A61B8/00
摘要： A method for Fresnel zone imaging is provided. The method comprises identifying a plurality of constructive regions and a plurality of destructive regions in an energy transmitting device and converting the destructive regions to the constructive regions by using an apodization profile. The apodization profile comprises apodization values for each constructive region and destructive region and the apodization values comprise real numbers.
摘要翻译： 提供了一种菲涅耳带成像方法。 该方法包括在能量传输装置中识别多个构造区域和多个破坏性区域，并且通过使用变迹轮廓将破坏性区域转换为构造区域。 变迹曲线包括每个构建区域和破坏性区域的变迹值，并且变迹值包括实数。
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公开(公告)号：US20100249598A1
公开(公告)日：2010-09-30
申请号：US12410525
申请日：2009-03-25
申请人： Lowell Scott Smith , Charles Edward Baumgartner , Charles Gerard Woychik , Warren Lee , Reinhold Bruestle , Ferdinand Puttinger
发明人： Lowell Scott Smith , Charles Edward Baumgartner , Charles Gerard Woychik , Warren Lee , Reinhold Bruestle , Ferdinand Puttinger
CPC分类号： B06B1/0622 , A61B8/00 , A61B8/0883 , A61B8/12 , A61B8/4411 , A61B8/4427 , A61B8/445 , A61B8/4455 , A61B8/483 , G01S7/52079 , G01S7/5208 , G01S7/52082 , Y10T29/49005
摘要： An ultrasound probe includes a transducer comprising an array of transducer elements removably disposed in a head portion. At least one or more stages of electronic circuit units is removably coupled to the transducer and configured to excite the transducer. A handle portion is detachably coupled to the head portion. The head portion and the handle portion are disposed enclosing the at least one or more stages of electronic circuit units. The ultrasound probe is used for one dimensional applications, two dimensional applications, and volumetric applications.
摘要翻译： 超声波探头包括换能器，其包括可拆卸地设置在头部中的换能器元件阵列。 电子电路单元的至少一个或多个级可移除地耦合到换能器并且被配置为激励换能器。 手柄部分可拆卸地联接到头部。 头部和把手部分被设置成包围至少一个或多个电子电路单元的阶段。 超声波探头用于一维应用，二维应用和体积应用。
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20.发明授权Curved micromachined ultrasonic transducer arrays and related methods of manufacture 有权弯曲微加工超声波换能器阵列及相关制造方法公开(公告)号：US07285897B2
公开(公告)日：2007-10-23
申请号：US10749645
申请日：2003-12-31
IPC分类号： H01L41/08
CPC分类号： G01N29/2406 , B06B1/0292
摘要： A curved sensor device, such as an ultrasonic transducer array, is fabricated from a flat micromachined sensor (such as cMUT or pMUT) array constructed using micromachined electro-mechanical systems (MEMS) techniques. The device comprises: a support structure comprising a spine having a profile that is generally curved and a multiplicity of teeth extending from one side of the curved spine; and a multiplicity of sensors built on the support structure. The spine can be bent forward or backward and attached to a curved front face of a support member, thereby causing the sensors to adopt a curved array.
摘要翻译： 诸如超声换能器阵列的弯曲传感器装置由使用微加工机电系统（MEMS）技术构造的平面微机械传感器（例如cMUT或pMUT）阵列制造。 该装置包括：支撑结构，其包括具有大致弯曲的轮廓的脊柱和从弯曲脊的一侧延伸的多个齿; 以及建立在支撑结构上的多个传感器。 脊柱可以向前或向后弯曲并且附接到支撑构件的弯曲前表面，从而使传感器采用弯曲阵列。
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