摘要:
Methods of forming a contact structure in a semiconductor device include providing a semiconductor substrate including active regions and word lines crossing the active regions. A first interlayer dielectric layer is formed on the semiconductor substrate. Direct contact plugs are formed extending through the first interlayer dielectric layer to contact selected ones of the active regions. Bit line structures are formed on the first interlayer dielectric layer and crossing the word lines that are coupled to the selected ones of the active regions by the direct contact plugs. A second interlayer dielectric layer is formed on the semiconductor substrate including the bit line structures. Barrier patterns are formed extending in parallel with bit line structures and into the second interlayer dielectric layer. Mask patterns are formed overlying an entirety of top surfaces of the direct contact plugs on the second interlayer dielectric layer and the bit line structures. The second and first interlayer dielectric layers are is etched using the mask patterns, the barrier patterns and the bit line structures as an etching mask to form buried contact holes and buried contact plugs are formed in the buried contact holes.
摘要:
Disclosed is the dehumidifying apparatus for a dryer comprising: a case; a drum disposed inside the case and for receiving objects to be dried therein; and a hot air supplying unit for supplying hot air into the drum and drying the objects to be dried, the dehumidifying apparatus, comprising: a heat exchanger for heat exchange with air flowing from the drum; and an injection nozzle portion disposed between the hot air supplying unit and the heat exchanger so as to inject a certain jet. According to the dehumidifying apparatus for a dryer, when gas introduced into the dehumidifying apparatus from the drum through a jet passes through the jet, foreign substances such as lint, etc. contained in the gas may be separated, thereby preventing accumulation of the foreign substances on the dehumidifying apparatus.
摘要:
Disclosed is the dehumidifying apparatus for a dryer comprising: a case; a drum disposed inside the case and for receiving objects to be dried therein; and a hot air supplying unit for supplying hot air into the drum and drying the objects to be dried, the dehumidifying apparatus, comprising: a dehumidifying unit having a heat exchanger for cooling hot air flowing from the drum; and a water tank for containing a fluid supplied to the heat exchanger, wherein the fluid circulates between the heat exchanger and the water tank. The dehumidifying apparatus for a dryer may reduce an amount of water used for operating the dryer, prevent the waste of water, and stably supply recycled cool water to the heat exchanger from the water tank.
摘要:
The present invention relates to a manufacturing method of a three dimensional structure having a hydrophobic inner surface. The manufacturing method includes anodizing a three dimensional metal member and forming fine holes on an external surface of the metal member, forming a replica by coating a non-wetting polymer material on the outer surface of the metal member and forming the non-wetting polymer material to be a replication structure corresponding to the fine holes of the metal member, forming an exterior by surrounding the replication structure with an exterior forming material, and etching the metal member and eliminating the metal member from the replication structure and the exterior forming material.
摘要:
Non-volatile memory devices include a tunnel insulating layer on a channel region of a substrate, a charge-trapping layer pattern on the tunnel insulating layer and a first blocking layer pattern on the charge-trapping layer pattern. Second blocking layer patterns are on the tunnel insulating layer proximate sidewalls of the charge-trapping layer pattern. The second blocking layer patterns are configured to limit lateral diffusion of electrons trapped in the charge-trapping layer pattern. A gate electrode is on the first blocking layer pattern. The second blocking layer patterns may prevent lateral diffusion of the electrons trapped in the charge-trapping layer pattern.
摘要:
A polynomial predistortion apparatus and method for compensating for a nonlinear distortion characteristic of a power amplifier is provided. The apparatus and method comprise an adaptation controller for determining polynomial coefficients by calculating an inverse nonlinear distortion characteristic of the power amplifier, and calculating complex predistortion gains for all possible amplitudes of an input signal using the determined polynomial coefficients; and a predistorter for receiving an input signal which is a combination of complex-modulated previous baseband input signal samples and current input signal samples, predistorting the input signal using the complex predistortion gains output from the adaptation controller, and outputting the predistorted input signal to the power amplifier.
摘要:
Methods of fabricating a semiconductor device having a self-aligned contact plug are provided. Methods include forming a lower insulating layer on a semiconductor substrate, forming a plurality of interconnection patterns parallel to each other on the lower insulating layer; forming an upper insulating layer that is configured to fill between the interconnection patterns, and forming a plurality of first mask patterns crossing the plurality of interconnection patterns, ones of the plurality of first mask patterns parallel to each other on the semiconductor substrate having the upper insulating layer. Methods may include forming a second mask pattern that is self-aligned to the plurality of first mask patterns and that is between ones of the plurality of first mask patterns, etching the upper insulating layer and the lower insulating layer using the first and second mask patterns and the plurality of interconnection patterns as etch masks to form a plurality of contact holes exposing the semiconductor substrate, and forming a plurality of contact plugs in respective ones of the plurality of contact holes. Semiconductor devices are also provided.
摘要:
Disclosed herein is a method of preparing a perfluoroalkadiene. A dihaloperfluorocarbon used as a starting material is added dropwise to a nonpolar organic solvent, a metal powder and an organic metal compound. The dihaloperfluorocarbon is slowly added dropwise in a temperature range from 30° C. to 150° C. for a certain period of time. Moreover, the nonpolar organic solvent used may be benzene, toluene, xylene, etc., and the organic metal compound is used by being dissolved in ethyl ether or tetrahydrofuran at a concentration of 1 to 3M. The metal powder used may be Mg, Zn, Cd, etc.
摘要:
A recess gate-type semiconductor device includes a gate electrode having a recessed portion at least partially covering a recess trench in an active region, and source/drain regions disposed in the active region that are separated by the gate electrode. The recess trench is separated from sidewalls of a device isolation region in a first direction and contacts sidewalls of the device isolation region in a second direction. The width of the recess trench of the active region in the second direction may be greater than the width of the source/drain regions in the second direction, and the recessed portion of the gate electrode may have tabs protruding in the first direction at its corners. Therefore, the semiconductor device has excellent junction leakage current and excellent refresh characteristics.
摘要:
A nonvolatile memory device includes a semiconductor substrate, a device isolation film, a tunnel insulation film, a plurality of floating gates, an inter-gate dielectric film, and a control gate pattern. Trenches are formed in the substrate that define active regions therebetween. The device isolation film is in the trenches in the substrate. The tunnel insulation film is on the active regions of the substrate. The plurality of floating gates are each on the tunnel insulation film over the active regions of the substrate. The inter-gate dielectric film extends across the floating gates and the device isolation film. The control gate pattern is on the inter-gate dielectric film and extends across the floating gates. A central region of the device isolation film in the trenches has an upper major surface that is recessed below an upper major surface of a surrounding region of the device isolation film in the trenches. An edge of the recessed central region of the device isolation film is aligned with a sidewall of an adjacent one of the floating gates.