-
公开(公告)号：US20240141907A1
公开(公告)日：2024-05-02
申请号：US18546510
申请日：2022-02-25
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
CPC classification number: F04D19/042 , F04D29/5853 , F04D29/701 , F04D19/048
Abstract: A vacuum pump capable of improving cleaning performance is provided. A heater, purge gas introduction ports, a purge gas valve, and an exhaust valve are provided. As an operation mode, a cleaning operation mode capable of sublimating deposits in a turbomolecular pump is provided. In the cleaning operation mode, at least one of the heater, the purge gas valve, and the exhaust valve is controlled, and a pressure in at least a part of an interior of the turbomolecular pump is increased to a pressure region with which a temperature is greater than or equal to a sublimation temperature of the deposits in the turbomolecular pump and that causes an intermediate flow or a viscous flow.
-
公开(公告)号：US11846298B2
公开(公告)日：2023-12-19
申请号：US17796785
申请日：2021-01-29
Applicant: Edwards Japan Limited
Inventor： Haruki Suzuki , Takashi Kabasawa
CPC classification number: F04D29/324 , F04D17/168 , F04D19/042 , F04D29/544
Abstract: Provided is a vacuum pump regarding which compression can be improved at low costs.
Included is a plurality of Siegbahn exhaust mechanisms in which a helical groove is provided to a stator disc. The Siegbahn exhaust mechanisms are provided on both faces of an upstream side and a downstream side of the stator disc. An end portion of the helical groove provided on the upstream side and a start portion of the helical groove provided on the downstream side are situated at least partially overlapping in a circumferential direction. A width of a channel of a switchback portion of the upstream side and the downstream side is equivalent or less than a depth of a channel of the Siegbahn exhaust mechanisms.-
13.发明授权公开(公告)号：US11448223B2
公开(公告)日：2022-09-20
申请号：US16336006
申请日：2017-09-29
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
Abstract: In a vacuum pump, an outer diameter of a spiral plate disposed on a downstream side is set smaller than an outer diameter of a spiral plate disposed on an upstream side. Specifically, a stepped portion is provided by setting a blade length of the spiral plate disposed on the downstream side shorter than a blade length of the spiral plate disposed on the upstream side. In addition, in a spacer provided in the stepped portion, a relief formation portion is provided to allow a contact surface in contact with an upstream spacer (i.e., spacer opposed to the spiral plate having the unreduced outer diameter) and a contact surface in contact with a downstream spacer (i.e., spacer opposed to the spiral plate having the reduced outer diameter) in the stepped portion to have an equal inner diameter.
-
公开(公告)号：US20220082103A1
公开(公告)日：2022-03-17
申请号：US17419523
申请日：2019-12-24
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
Abstract: Decane (C10H22) is sprayed as a mist from spray nozzles toward a rotor blade via a supply pipe and communication passages. Since decane has a boiling point of 174° C. at atmospheric pressure, the decane is a liquid at normal temperature and normal pressure. On the other hand, the pressure inside a turbomolecular pump is in a substantially vacuum state of about 100 Pa, and the boiling point of decane at this pressure is 14° C. Thus, although the pressure is high and the decane is in a liquid state until the decane is sprayed, when the decane adheres to surfaces of the rotor blades and the temperature of the decane rises, the decane vaporizes. At this moment, since the amount of heat of the rotor blades is consumed as heat of vaporization, the rotor blades can be cooled.
-
公开(公告)号：US20220074407A1
公开(公告)日：2022-03-10
申请号：US17419087
申请日：2019-12-25
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
Abstract: A pressure difference of liquid is generated between an upper end and a lower end of a thread groove by the action of a thread groove pump formed between the thread groove and a lower end wall portion of a rotating rotor shaft. As a result, liquid of a bottom space is sucked up and passes through a hollow hole and is discharged to the outside of the rotor shaft through communication holes. The discharged liquid passes through the inside of a hub of a rotating body and reaches an extension member where it is sprayed radially in the form of droplets from a protrusion. The droplets are received by a partition wall. Due to the presence of a protrusion in an upper portion of the partition wall, the droplets cannot cross over the partition wall. The accumulated liquid drops through a communication hole to the bottom space.
-
Patent Agency Ranking
公开(公告)号：US20210018003A1
公开(公告)日：2021-01-21
申请号：US16491909
申请日：2018-03-02
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
Abstract: A vacuum pump exhaust system and an exhausting method of the vacuum pump supply a purge gas to the vacuum pump such that an amount of the purge gas satisfies one of following conditions: an amount of the purge gas flowing at a higher velocity than a backflow velocity of gas exhausted by the vacuum pump on at least a part of a downstream side of the temperature sensor unit, and an amount of the purge gas having a pressure of one of an intermediate flow and a viscous flow around the temperature sensor unit. The exhaust system further includes a purge gas supply unit capable of controlling a flow rate of purge gas introduced into the vacuum pump. This configuration can prevent process gas from flowing backward so as to change the composition around the temperature sensor unit, thereby accurately measuring the temperature of the rotating portion.
-
公开(公告)号：US20170002832A1
公开(公告)日：2017-01-05
申请号：US15115094
申请日：2015-01-08
Applicant: Edwards Japan Limited
Inventor： Manabu Nonaka , Takashi Kabasawa
CPC classification number: F04D29/545 , F04D19/044 , F04D19/046 , F04D29/522 , F04D29/584 , F04D29/5853 , F05B2240/12 , F05B2240/14 , F05B2240/51 , F05B2260/231 , F05B2280/1021 , F05B2280/6015 , F05D2260/607
Abstract: To provide a vacuum pump capable of heating only a flow channel extending from the vicinity of an exit of a thread groove exhaust flow channel toward an outlet port and prevents the accumulation of a product that is caused by a decrease in the temperature of process gas near the exit of the thread groove exhaust flow channel and the flow channel. A vacuum pump has a thread groove exhaust portion that has thread groove exhaust flow channels at least in respective parts of portions on inner and outer circumferential sides of a rotor (rotating body), a casing enclosing the thread groove exhaust portion, an outlet port for exhausting gas compressed by the thread groove exhaust portion to the outside of the casing, and a partition wall that covers a flow channel extending from the exits of the thread groove exhaust flow channels toward the outlet port.
Abstract translation: 提供一种能够仅加热从螺纹槽排气流路的出口附近朝向出口延伸的流路的真空泵，并且防止由于工艺气体的温度降低引起的产品的积聚 螺纹槽排气流道和流动通道的出口。 真空泵具有螺纹槽排气部，至少在转子（旋转体）的内周侧和外周侧的部分的各部分中具有螺纹槽排气流路，包围螺纹槽排气部的壳体， 将由所述螺纹槽排气部压缩的气体排出到所述壳体的外部，以及分隔壁，所述分隔壁覆盖从所述螺纹槽排气流路的出口向所述出口延伸的流路。
-
18.发明授权公开(公告)号：US12276283B2
公开(公告)日：2025-04-15
申请号：US15743185
申请日：2016-07-01
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa , Manabu Nonaka
Abstract: An exhausting system capable of preventing gas condensation and early overheat in a vacuum pump without causing an increase in the costs of the entire exhausting system and suitable for relaxing the operable conditions of the entire exhausting system including a flow rate at which gas is successively exhausted. An exhausting system is predicated on a constitution including: at least a first vacuum pump and a second vacuum pump connected in series; and a connecting portion disposed therebetween, the exhausting system exhausting gas containing a condensable gas via the vacuum pumps and the connecting portion. In the exhausting system, an environment inside the connecting portion is set to an environment having a vapor phase region below a vapor pressure curve of the condensable gas flowing through an inside of the connecting portion by providing the second vacuum pump near the first vacuum pump.
-
公开(公告)号：US12234828B2
公开(公告)日：2025-02-25
申请号：US18004989
申请日：2021-07-30
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa , Kengo Saegusa
Abstract: A vacuum pump and a vacuum pump rotor blade that can effectively limit deposition of reaction products are provided. The vacuum pump includes a rotating shaft held rotationally, a drive mechanism for the rotating shaft, a first rotor blade made of a first material, a second rotor blade made of a second material having higher heat resistance than the first material, and disposed further toward a downstream side than the first rotor blade, and a casing enclosing the rotating shaft, the first rotor blade, and the second rotor blade. The second rotor blade is disposed, via a heat insulating portion, on the first rotor blade.
-
公开(公告)号：US12196225B2
公开(公告)日：2025-01-14
申请号：US18000750
申请日：2021-06-04
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
Abstract: A vacuum pump is provided that can remove deposits without overhauling and also detect completion of removal of deposits. A cleaning function portion for a cleaning function that performs cleaning of a deposit in a vacuum pump and a deposition sensor for a deposition detection function that detects the deposit are provided. A reading circuit portion and a cleaning completion determination circuit portion for a cleaning completion determination function that determines completion of cleaning are provided. The cleaning completion determination circuit portion outputs a cleaning completion signal indicating completion of the cleaning, based on a detection result of the deposition sensor.
-
-
-
-
-
-
-
-
-
Search Results
53
records
(took 0.018 seconds)
