VACUUM PUMP AND INSULATION MEMBER FOR USE IN VACUUM PUMP

    公开(公告)号:US20240337266A1

    公开(公告)日:2024-10-10

    申请号:US18700064

    申请日:2022-11-09

    发明人: Takashi Kabasawa

    IPC分类号: F04D19/04 F04D29/58

    摘要: A vacuum pump and a heat insulating member for the vacuum pump are provided that improve the rigidity and heat insulating effect of a heat insulating portion and facilitate the control of intended temperatures of components within the pump. A turbomolecular pump having at least a cooling function includes a heat insulator that is disposed on a threaded spacer and has a hollow structure including cavities extending in the axial direction.

    VACUUM PUMP
    3.
    发明公开
    VACUUM PUMP 审中-公开

    公开(公告)号:US20240026889A1

    公开(公告)日:2024-01-25

    申请号:US18254581

    申请日:2021-12-03

    IPC分类号: F04D19/04 F04D29/58

    摘要: There is obtained a vacuum pump which suppresses an influence on external piping caused by a contact failure of a rotor during rotation of the rotor. A temperature rise ring 301 is provided in the vacuum pump, an outlet port 133 to which the external piping is connected is connected to the temperature rise ring 301, and a rotational force is directly or indirectly applied to the temperature rise ring 301 due to the contact failure of the rotor during the rotation of the rotor. In addition, a rotation suppression means (a hole 301a and a bolt 305) for suppressing rotation of the temperature rise ring 301 by the above-described rotational force is provided separately from a connection portion between the temperature rise ring 301 and a casing (outer tube 127a).

    VACUUM PUMP
    6.
    发明申请
    VACUUM PUMP 审中-公开

    公开(公告)号:US20180335052A1

    公开(公告)日:2018-11-22

    申请号:US15774861

    申请日:2016-10-31

    IPC分类号: F04D29/58 F04D19/04 F04D27/00

    摘要: Provided is a vacuum pump that prevents the solidification of gas while being operated properly. The vacuum pump includes a rotor that is supported rotatably on a base, a stator that has a thread groove portion, and a heating structure that heats the stator. The heating structure has a spacer that insulates the stator from stator components other than the stator, and a cartridge heater that heats the stator. The distance between a rotor cylindrical portion and the stator at the inlet port side is set to be equal to or greater than the distance between the rotor cylindrical portion and the stator at the outlet port side.

    VACUUM PUMP
    7.
    发明申请
    VACUUM PUMP 审中-公开

    公开(公告)号:US20180283400A1

    公开(公告)日:2018-10-04

    申请号:US15920650

    申请日:2018-03-14

    发明人: Tetsuya TSUBOKAWA

    IPC分类号: F04D29/58 F04D25/06 F04D19/04

    摘要: A vacuum pump comprises: a pump housing; a motor configured to rotate in the pump housing; a rotor configured to be rotatably driven by the motor; a stator provided between the rotor and the pump housing; and a heat insulating member provided between the stator and the pump housing. The heat insulating member has a cylindrical main body and a processing gripping target portion provided on at least one of inner and outer peripheral surfaces of the main body.