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公开(公告)号：US10578158B2
公开(公告)日：2020-03-03
申请号：US15521793
申请日：2015-11-05
Applicant: Edwards Japan Limited
Inventor： Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada , Manabu Nonaka
Abstract: Provided are a vacuum pump and a method for the vacuum pump in which, when contact between a rotating body and a stator is sensed, the cause of the contact can be analyzed. Contact determination is made using a threshold for rotating body contact determination for a displacement signal and a threshold for rotating body contact determination for an acceleration signal. The amount of unbalance of a rotating body is determined using a threshold for amount-of-unbalance increase determination for the displacement signal and a threshold for amount-of-unbalance increase determination for the acceleration signal. When, in one of the displacement signal and the acceleration signal, the threshold for amount-of-unbalance increase determination or the threshold for amount-of-unbalance increase determination is exceeded within a predetermined time before determination of an estimated time point of contact, the contact is determined not to be caused by an increase in accumulation of products.
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公开(公告)号：US20180038375A1
公开(公告)日：2018-02-08
申请号：US15552137
申请日：2016-01-19
Applicant: Edwards Japan Limited
Inventor： Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
CPC classification number: F04D19/042 , F04C18/126 , F04D17/168 , F04D29/083 , F04D29/522 , F04D29/64 , F04D29/644 , F05D2230/52
Abstract: Provided are a vacuum pump and an adapter used in the vacuum pump that are capable of responding to various changes in specifications at low cost. A turbo-molecular pump includes a base, a stator blade that is provided above the base in an axial direction of a rotor, a rotor blade that is integrally attached to the rotor, a housing that is formed in a cylindrical shape, and accommodates the stator blade and is integrally attached to the base, and an adapter that is replaceable depending on a type of the stator blade, the rotor blade, or the housing, and that is detachably mounted on the base and is configured to support the stator blade in the axial direction.
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公开(公告)号：US20160025096A1
公开(公告)日：2016-01-28
申请号：US14763345
申请日：2013-12-25
Applicant: EDWARDS JAPAN LIMITED
Inventor： Yongwei Shi , Manabu Nonaka , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
CPC classification number: F04D19/002 , F04D19/044 , F04D25/06 , F04D27/0292 , F04D29/053 , F04D29/325 , F04D29/40 , F04D29/522 , F04D29/584 , F05D2260/607
Abstract: An object is to reduce an adhesion amount of a product in a vacuum pump as a whole and effectively prevent occurrence of a trouble in a vacuum pump electric system due to a magnetic flux leak. A vacuum pump includes a rotor enclosed in a pump case, a rotating shaft fixed to the rotor, a supporting means that rotatably supports the rotating shaft, a driving means that rotates the rotating shaft, and thread-groove-exhaust-portion stators that form thread grove exhaust passages between the thread-groove-exhaust-portion stator and an outer circumferential side of or an inner circumferential side of the rotor. A heating portion is provided below the thread-groove-exhaust-portion stators. The heating portion includes a yoke, a coil, and a heating plate. The heating portion heats the yoke and the heating plate with electromagnetic induction heating by feeding an alternating current to the coil.
Abstract translation: 本发明的目的是减少真空泵中的产品的附着量，并且有效地防止由于磁通量泄漏而在真空泵电气系统中发生故障。 真空泵包括：封闭在泵壳体中的转子，固定在转子上的旋转轴，可旋转地支撑旋转轴的支撑装置，使旋转轴旋转的驱动装置，以及形成螺旋槽排气部分的定子 螺纹槽排出部定子与转子的外周侧或内周侧之间的螺旋槽排气通路。 加热部设置在螺纹槽排气部定子的下方。 加热部包括轭，线圈和加热板。 加热部通过向线圈供给交流电而通过电磁感应加热来加热轭和加热板。
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公开(公告)号：US20150240822A1
公开(公告)日：2015-08-27
申请号：US14422173
申请日：2013-08-26
Applicant: Edwards Japan Limited
Inventor： Yoshiyuki Sakaguchi , Akihiro Ito , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
Abstract: The invention provides a stator-side member which is arranged in a vacuum pump and which, without the provision of a heat insulation material, prevents the deposition of products at the lower side of a threaded groove pump unit, with this lower side being an area of high pressure where the deposition of products (deposits) occurs easily, and also provides a vacuum pump equipped with this stator-side member. A threaded groove spacer configured to have a coefficient of thermal conductivity lower than a predetermined value is arranged in a vacuum pump equipped with a threaded groove pump unit. (1) The threaded groove spacer is manufactured from a material having a coefficient of thermal conductivity lower than that of a member which opposes or comes into contact with the threaded groove spacer. Specifically, this material has a coefficient of thermal conductivity lower than that of aluminum or aluminum alloy, and is preferably any one of stainless steel, fiber-reinforced plastic, polyetherimide, and polyetheretherketone. (2) The threaded groove spacer is constituted by at least two or more parts.
Abstract translation: 本发明提供了一种定子侧构件，其被布置在真空泵中，并且在没有隔热材料的情况下，防止产品沉积在螺纹槽泵单元的下侧，该下侧是面积 产生（沉积物）沉积容易发生的高压，并且还提供配备有该定子侧构件的真空泵。 配置为具有低于预定值的导热系数的螺纹槽间隔件布置在配备有螺纹槽泵单元的真空泵中。 （1）螺纹槽间隔件由导热系数低于与螺纹槽隔离件相对或接触的构件的导热系数的材料制成。 具体地说，该材料的导热系数低于铝或铝合金，并且优选为不锈钢，纤维增强塑料，聚醚酰亚胺和聚醚醚酮中的任一种。 （2）螺纹槽间隔件由至少两个以上的部分构成。
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公开(公告)号：US20240167484A1
公开(公告)日：2024-05-23
申请号：US18279349
申请日：2022-03-11
Applicant: Edwards Japan Limited
Inventor： Masayuki Hashimoto , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
CPC classification number: F04D27/00 , F04D19/042 , G08C17/00
Abstract: A vacuum pump, a vacuum pump controller, and a remote controller are provided that can reduce the workload of users and field service engineers. A vacuum pump 10 includes a turbomolecular pump 100 that exhausts gas inside a semiconductor manufacturing apparatus X, and a controller 200 that performs control on the turbomolecular pump 100. The controller 200 includes a remote signal receiving means that receives a command signal from a remote controller 300, which remotely controls the turbomolecular pump 100, and changes a setting relating to an operating specification of the turbomolecular pump 100 on the basis of the command signal received by the remote signal receiving means.
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Patent Agency Ranking
公开(公告)号：US20220397122A1
公开(公告)日：2022-12-15
申请号：US17779116
申请日：2020-11-27
Applicant: Edwards Japan Limited
Inventor： Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
Abstract: A vacuum exhaust apparatus capable of accurately and rapidly adjusting the pressure in an exhaust chamber and a vacuum pump used therein are provided. A vacuum pump includes a rotor that rotates to exhaust an exhaust chamber and a casing having an inlet port. A valve is located between the inlet port of the vacuum pump and an outlet port of the exhaust chamber. A controller performs control such that the pressure in the exhaust chamber matches a target value. The controller adjusts the opening degree of the valve when the absolute value of the difference between the pressure in the exhaust chamber and the target value is greater than a predetermined value, and adjusts the rotational speed of the rotor of the vacuum pump when the absolute value of the difference between the pressure in the exhaust chamber and the target value is less than the predetermined value.
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公开(公告)号：US11466692B2
公开(公告)日：2022-10-11
申请号：US15552137
申请日：2016-01-19
Applicant: Edwards Japan Limited
Inventor： Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
Abstract: Provided are a vacuum pump and an adapter used in the vacuum pump that are capable of responding to various changes in specifications at low cost. A turbo-molecular pump includes a base, a stator blade that is provided above the base in an axial direction of a rotor, a rotor blade that is integrally attached to the rotor, a housing that is formed in a cylindrical shape, and accommodates the stator blade and is integrally attached to the base, and an adapter that is replaceable depending on a type of the stator blade, the rotor blade, or the housing, and that is detachably mounted on the base and is configured to support the stator blade in the axial direction.
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公开(公告)号：US20210293244A1
公开(公告)日：2021-09-23
申请号：US17265373
申请日：2019-08-02
Applicant: Edwards Japan Limited
Inventor： Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
Abstract: Provided is a vacuum pump including a turbomolecular mechanism having rotor blades and stator blades alternately arranged in multiple stages in an axial direction inside a casing having an inlet port that sucks gas from an outside and an outlet port that exhausts the sucked gas to the outside, the vacuum pump including: a plurality of annular spacers that are stacked on each other and position the stator blades in the axial direction; the casing that has a cylindrical portion arranged to surround outer peripheries of the plurality of stacked spacers and a base portion attached to a lower portion of the cylindrical portion; and an upper radial positioning portion and a lower radial positioning portion provided at two vertical positions inside the cylindrical portion and coaxially hold at least a spacer of an uppermost stage and a spacer of a lowermost stage among the plurality of stacked spacers.
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公开(公告)号：US10704555B2
公开(公告)日：2020-07-07
申请号：US14422173
申请日：2013-08-26
Applicant: Edwards Japan Limited
Inventor： Yoshiyuki Sakaguchi , Akihiro Ito , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
Abstract: The invention provides a stator-side member which is arranged in a vacuum pump and which, without the provision of a heat insulation material, prevents the deposition of products at the lower side of a threaded groove pump unit, with this lower side being an area of high pressure where the deposition of products (deposits) occurs easily, and also provides a vacuum pump equipped with this stator-side member. A threaded groove spacer configured to have a coefficient of thermal conductivity lower than a predetermined value is arranged in a vacuum pump equipped with a threaded groove pump unit. (1) The threaded groove spacer is manufactured from a material having a coefficient of thermal conductivity lower than that of a member which opposes or comes into contact with the threaded groove spacer. Specifically, this material has a coefficient of thermal conductivity lower than that of aluminum or aluminum alloy, and is preferably any one of stainless steel, fiber-reinforced plastic, polyetherimide, and polyetheretherketone. (2) The threaded groove spacer is constituted by at least two or more parts.
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公开(公告)号：US10364814B2
公开(公告)日：2019-07-30
申请号：US14763345
申请日：2013-12-25
Applicant: Edwards Japan Limited
Inventor： Yongwei Shi , Manabu Nonaka , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
IPC: F04D29/58 , F04D19/00 , F04D27/02 , F04D29/52 , F04D25/06 , F04D29/053 , F04D29/32 , F04D29/40 , F04D19/04
Abstract: An object is to reduce an adhesion amount of a product in a vacuum pump as a whole and effectively prevent occurrence of a trouble in a vacuum pump electric system due to a magnetic flux leak. A vacuum pump includes a rotor enclosed in a pump case, a rotating shaft fixed to the rotor, a supporting means that rotatably supports the rotating shaft, a driving means that rotates the rotating shaft, and thread-groove-exhaust-portion stators that form thread grove exhaust passages between the thread-groove-exhaust-portion stator and an outer circumferential side of or an inner circumferential side of the rotor. A heating portion is provided below the thread-groove-exhaust-portion stators. The heating portion includes a yoke, a coil, and a heating plate. The heating portion heats the yoke and the heating plate with electromagnetic induction heating by feeding an alternating current to the coil.
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