Abstract:
A pressure sensor comprising two parts connected with one another via an active braze joint manufactured by active hard soldering, or brazing, with an active hard solder, or braze, especially a pressure contactable, pressure-dependently elastically deformable, measuring membrane, especially a ceramic measuring membrane, and a platform, especially a ceramic platform, which are connected by an active braze joint connecting an outer edge of the measuring membrane (which covers a pressure chamber with an outer edge of an end of the platform facing the measuring membrane, whose measuring characteristics are improved in that the active braze joint has a coefficient of thermal expansion dependent on the dimensions of the active braze joint and on the materials of the parts and matched to a coefficient of thermal expansion of at least one of the parts, especially the measuring membrane.
Abstract:
A pressure measurement cell, comprising: a ceramic measurement membrane and a ceramic counterpart. The measurement membrane is joined to the counterpart in a pressure-tight manner forming a pressure chamber between the measurement membrane and the counterpart by means of an active brazing solder. The pressure measurement cell furthermore has a solder stop layer on a surface of the measurement membrane and/or the counterpart, wherein the solder stop layer has a metal oxide or a reduced form of the metal oxide. The metal oxide has at least one oxidation stage, which, assuming an activity coefficient of Rakt=1 at an inverse temperature of 8·10−4/K, has an oxygen coexistence decomposition pressure of not less than 1−23 MPa (10−23· bar) and not more than 1−12 MPa (10−12· bar) and which, assuming an activity coefficient of Rakt=1, at an inverse temperature of 9·10−4/K has an oxygen coexistence decomposition pressure of not less than 1−27 MPa (10−27 bar) and not more than 1−15 MPa (10−15 bar). Suitable metal oxides are, for example, oxides of chromium, tungsten or titanium.
Abstract:
A method for connecting a component to a support via soldering between a first contact surface of the component and a second contact surface of the support. The method is distinguished by features including that at least one spacer is embodied in such a manner and arranged between the first contact surface and the second contact surface that the first contact surface and the second contact surface are spaced from one another, and that the soldering is executed in such a manner that the component and the support are connected with one another via the first contact surface and the second contact surface. Also claimed is a component connectable with a support via soldering is intended.
Abstract:
An assembly, comprising: a first ceramic body and a second ceramic body connected by means of a joint of an active hard solder, or braze, wherein the active hard solder, or braze, averaged over a continuous main volume, which includes at least 50% of the volume of the joint, has an average composition CM with a liquidus temperature Tl(CM). An edge region of the joint, which contacts at least one of the ceramic bodies, has an average composition CE with a liquidus temperature Tl(CE), which lies not less than 20 K, preferably not less than 50 K, and especially preferably not less than 100 K above the liquidus temperature Tl(CM) of the average composition CM of the main volume.
Abstract:
A pressure measurement cell, comprising: a ceramic measurement membrane and a ceramic counterpart. The measurement membrane is joined to the counterpart in a pressure-tight manner forming a pressure chamber between the measurement membrane and the counterpart by means of an active brazing solder. The pressure measurement cell furthermore has a solder stop layer on a surface of the measurement membrane and/or the counterpart, wherein the solder stop layer has a metal oxide or a reduced form of the metal oxide. The metal oxide has at least one oxidation stage, which, assuming an activity coefficient of Rakt=1 at an inverse temperature of 8·10−4/K, has an oxygen coexistence decomposition pressure of not less than 1−23 MPa (10−23· bar) and not more than 1−12 MPa (10−12· bar) and which, assuming an activity coefficient of Rakt=1, at an inverse temperature of 9.10−4/K has an oxygen coexistence decomposition pressure of not less than 1−27 MPa (10−27 bar) and not more than 1−15 MPa (10−15 bar). Suitable metal oxides are, for example, oxides of chromium, tungsten or titanium.
Abstract:
A method for connecting a component to a support via soldering between a first contact surface of the component and a second contact surface of the support. The method is distinguished by features including that at least one spacer is embodied in such a manner and arranged between the first contact surface and the second contact surface that the first contact surface and the second contact surface are spaced from one another, and that the soldering is executed in such a manner that the component and the support are connected with one another via the first contact surface and the second contact surface. Also claimed is a component connectable with a support via soldering is intended.
Abstract:
An assembly, comprising two ceramic bodies, which are connected by means of a joint, which contains an active hard solder, or braze, wherein the active hard solder, or braze, has a continuous core volume, which is spaced from the ceramic bodies, in each case, by at least 1 μm, especially at least 2 μm, and wherein the joint has bounding layers, which border on the ceramic body. The the core volume, which includes at least 50% of the volume of the joint, is free of crystalline phases of size greater than 6 μm, especially greater than 4 μm, preferably greater than 2 μm.
Abstract:
A versatilely usable pressure sensor is described, which has a ceramic pressure measuring cell (5) clamped in the pressure sensor with interpositioning of a seal (1) outwardly sealing an interior of the pressure sensor and loadable via an opening (3) of the pressure sensor with a pressure (p) to be measured, and whose seal (1) comprises a film (21) of a thermoplastic material, especially polytetrafluoroethylene (PTFE), clamped (in an axial direction and extending perpendicularly to planes of the sealing surfaces (25, 27)) between a form-retaining, planar sealing surface (25) of the pressure measuring cell (5) and a form-retaining sealing surface (27, 27′) of a counterbody (19, 19′) outwardly surrounding the opening (3), characterized in that the film (21) includes a first film segment (23), which is clamped between the sealing surface (25) of the pressure measuring cell (5) and the sealing surface (27, 27′) of the counterbody (19), and the film (21) includes a second film segment (29), which extends over a lateral surface (31) of the counterbody (19, 19′) different from the sealing surface (27, 27′), and which is connected with the counterbody (19, 19′) on the lateral surface (31) via a connecting layer (33) of a material serving as bonding agent for the material of the film (21), especially perfluoroalkoxy-polymer (PFA), arranged on the lateral surface (31).
Abstract:
A pressure sensor comprises an operating circuit and a pressure-measuring cell comprising a counter body, a measurement membrane, which is arranged on the counter body and can be deformed by a pressure to be measured, and a capacitive transducer, which has at least one membrane electrode arranged on the measurement membrane and at least one counter-body electrode arranged on the counter body. The capacitance between the membrane electrode and the counter-body electrode depends on a pressure-dependent deformation of the measurement membrane, wherein at least the membrane electrode has a temperature-dependent impedance. The operating circuit is designed to sense at least one capacitance between the at least one counter-body electrode and the at least one membrane electrode and to provide a pressure measurement value on the basis of at least one capacitance and to determine the impedance of the membrane electrode—particularly, the ohmic portion of the impedance of the membrane electrode.
Abstract:
A sintered body comprises a first region which comprises a first material having a first effective coefficient of thermal expansion α1, a second region which comprises a second material having a second effective coefficient of thermal expansion α2, a transition region between the first region and the second region in which the effective coefficient of thermal expansion changes from the first effective coefficient of thermal expansion to the second effective coefficient of thermal expansion. The transition region has a sequence of layers with a mixture of at least the first material and the second material, with the mixing ratio of the layers varying in order to achieve a stepwise, in particular monotonic, change in the coefficient of thermal expansion.