Dielectric isolation using shallow oxide and polycrystalline silicon
    13.
    发明授权
    Dielectric isolation using shallow oxide and polycrystalline silicon 失效
    使用浅氧化物和多晶硅的介质隔离

    公开(公告)号:US4184172A

    公开(公告)日:1980-01-15

    申请号:US773637

    申请日:1977-02-28

    IPC分类号: H01L21/76 H01L27/04

    CPC分类号: H01L21/76

    摘要: A process is described which combines polycrystalline isolation of collectors and shallow oxide isolation of bases. This approach is capable of providing deep dielectric isolation, surface planarity and the high density of walled emitter geometries, a combination heretofore unobtainable by any other means.This isolation scheme has been used to fabricate ECL gate chains. The transistors were located in 2.5 micron thick n-epi islands surrounded by 5.times.10.sup.5 ohm-cm polysilicon selectively oxidized with silicon nitride masking to a thickness of one micron. The oxide "bump" at the nitride mask was typically 3000 A and the epi-poly step height was as small as 2600 A. The circuits have polysilicon resistors and were fabricated using both thermal diffusion and ion implantation. The power-delay product of these circuits was approximately one-half that of junction isolated circuits.

    摘要翻译: 描述了结合收集器的多晶分离和碱的浅氧化物隔离的方法。 这种方法能够提供深的介电隔离,表面平面性和高密度的壁发射器几何形状,这是迄今为止通过任何其他方式无法获得的组合。 该隔离方案已被用于制造ECL门链。 晶体管位于由氮化硅选择性氧化的5×10 5欧姆 - 厘米多晶硅所围绕的2.5微米厚的n外延岛中,其掩盖厚度为1微米。 氮化物掩模上的氧化物“凸块”通常为3000A,外延多层台阶高度为2600A。电路具有多晶硅电阻器,并使用热扩散和离子注入制造。 这些电路的功率延迟产物大约是结隔离电路的一半。

    Reading capacitor memories with a variable voltage ramp
    14.
    发明授权
    Reading capacitor memories with a variable voltage ramp 失效
    用可变电压斜坡读取电容器存储器

    公开(公告)号:US4127900A

    公开(公告)日:1978-11-28

    申请号:US808068

    申请日:1977-06-20

    摘要: An improved method for reading metal dual insulator semiconductor capacitor memories is disclosed. The memory contains a plurality of capacitor cells, each cell comprising a semiconductor substrate layer and a high conductivity layer sandwiching two insulator layers. The substrate is doped to provide avalanche breakdown in a surface depletion layer at a voltage comparable to the write voltage in the accumulation direction. According to the invention, a small variable voltage is applied across a selected cell or cells. The range of voltage includes a "flat-band" portion of the hysteresis loop describing the voltage-capacitance relationship for the capacitor memory. The unselected cells are maintained in a depletion state in which their capacitance is a minimum. A change or the absence of a change in the current through the capacitor indicates the state of the capacitor cell.

    摘要翻译: 公开了一种用于读取金属双绝缘体半导体电容器存储器的改进方法。 存储器包含多个电容器单元,每个单元包括半导体衬底层和夹着两个绝缘体层的高电导率层。 掺杂衬底以在表面耗尽层中以与积累方向上的写入电压相当的电压提供雪崩击穿。 根据本发明,在所选择的单元或单元上施加小的可变电压。 电压范围包括描述电容器存储器的电压 - 电容关系的磁滞回线的“平带”部分。 未选择的电池保持在其电容最小的耗尽状态。 通过电容器的电流的改变或不存在改变电容器电池的状态。