Semiconductor device
    2.
    发明授权

    公开(公告)号:US12095440B2

    公开(公告)日:2024-09-17

    申请号:US17765046

    申请日:2020-10-05

    Abstract: An amplifier is formed in a wiring layer. A semiconductor device includes a second layer over a first layer with a metal oxide therebetween. The first layer includes a first transistor including a first semiconductor layer containing silicon. The second layer includes an impedance matching circuit, and the impedance matching circuit includes a second transistor including a second semiconductor layer containing gallium. The first transistor forms first coupling capacitance between the first transistor and the metal oxide, and the impedance matching circuit forms second coupling capacitance between the impedance matching circuit and the metal oxide. The impedance matching circuit is electrically connected to the metal oxide through the second coupling capacitance. The metal oxide inhibits the influence of first radiation noise emitted from the impedance matching circuit on the operation of the first transistor.

    CHIP SCALE PACKAGE (CSP) PROCESS
    7.
    发明公开

    公开(公告)号:US20230378008A1

    公开(公告)日:2023-11-23

    申请号:US17951161

    申请日:2022-09-23

    Inventor: Yueyun WANG

    CPC classification number: H01L23/3114 H01L21/561 H01L21/822

    Abstract: A chip scale package process includes: forming a groove on an upper surface of a multi-device wafer; forming a passivation layer on the upper surface and in the groove; forming an opening of the passivation layer; forming a metal bump in the opening; adding a protective layer on the upper surface and in the groove; conducting a treatment after adding the protective layer on the upper surface and in the groove to expose the metal bump; attaching a carrier to the upper surface and grinding a lower surface of the wafer to penetrate a bottom of the groove; and forming a metal layer on the lower surface and separating the carrier from the wafer to form multiple packaged devices. The CSP process avoids the need for a multi-cut process on the surface of the wafer, thereby simplifying the technological process, reducing the production cost, and improving the processing efficiency.

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