METHOD AND SYSTEM FOR FABRICATING A PIEZOELECTRIC DEVICE

    公开(公告)号:US20210193900A1

    公开(公告)日:2021-06-24

    申请号:US16723363

    申请日:2019-12-20

    Abstract: A method for providing a piezoelectric device is described. The method includes providing a first electrode layer on a substrate and coating at least one layer of piezoelectric material. The coating using at least one of clot-die coating, dip coating, aerosol coating and R2R coating such that a layer of the at least one layer of piezoelectric material has a variation in thickness of not more than ten percent. The layer(s) of piezoelectric materials are also heat treated. Multiple layers of piezoelectric material may be slot-die coated and heat treated to provide a multilayer having the desired thickness. A second electrode layer is provided on the layer(s) of piezoelectric material.

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