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公开(公告)号：US20100104682A1
公开(公告)日：2010-04-29
申请号：US12359402
申请日：2009-01-26
申请人： Takashi ANDO , Noritake Shizawa , Kyoichi Mori , Susumu Komoriya
发明人： Takashi ANDO , Noritake Shizawa , Kyoichi Mori , Susumu Komoriya
IPC分类号： B29C35/08
CPC分类号： G11B5/855
摘要： An optical imprinting device capable of simultaneously imprinting fine patterns to both surfaces of an opaque substrate is provided. The imprinting device includes a stamper having a fine pattern on its surface to imprint the fine pattern onto a surface of an object to be imprinted by pressing the stamper against the object composed of a substrate and a photo-curing resin layer formed on the substrate. The imprinting device further includes a light source for applying light to the photo-curing resin layer of the object when imprinting the fine pattern of the stamper onto the photo-curing resin layer of the object. The light source applies light to the stamper at a predetermined incident angle to the surface of the stamper.
摘要翻译： 提供了能够同时将精细图案压印到不透明基板的两个表面的光学压印装置。 压印装置包括在其表面上具有精细图案的压模，通过将压模压在由基板构成的物体和形成在基板上的光固化树脂层的物体上，将精细图案印刷到待印刷对象的表面上。 压印装置还包括将压模的精细图案压印到物体的光固化树脂层上时将光施加到物体的光固化树脂层的光源。 光源以与预压件表面成预定入射角的方式将光施加于压模。
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公开(公告)号：US20100098799A1
公开(公告)日：2010-04-22
申请号：US12582732
申请日：2009-10-21
CPC分类号： B29C59/022 , B29C2035/0827 , B29C2059/023
摘要： An imprint apparatus has a head unit with a fine structure. The head unit includes a fine imprint pattern layer including fine concavities and convexities, a resin layer on a face of the fine imprint pattern layer opposite to a face where the concavities and convexities are formed, a first pressurizing base member on a face of the resin layer opposite to a face contacting the fine imprint pattern layer, and a second pressurizing base member on a face of the first pressurizing base member opposite to a face contacting the resin layer. The resin layer has a modulus of elasticity smaller than that of the fine imprint pattern layer, and the first pressurizing base member has a modulus of elasticity smaller than that of the resin layer. A light source or a heat source may be further provided. The head unit may be light permeable. A replacement layer may be further provided for replacement.
摘要翻译： 压印装置具有精细结构的头单元。 头单元包括精细的凹凸图案，在与形成凹凸面的面相反的微细图案层的表面上的树脂层，树脂的表面上的第一加压基材 在与第一加压基体的与接触树脂层的面相反的表面上的第二加压基底部件与接触精细压印图案层的面相反。 树脂层的弹性模量小于精细印刷图案层的弹性模量，第一加压基材的弹性模量小于树脂层的弹性模量。 可以进一步提供光源或热源。 头单元可以是透光的。 还可以提供更换层以进行更换。
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公开(公告)号：US08668487B2
公开(公告)日：2014-03-11
申请号：US13581169
申请日：2011-02-16
IPC分类号： B29C59/16
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0046 , G03F7/038 , G03F7/0757
摘要： A micro-pattern transferring stamper includes a supporting base material and a microstructure layer formed on the supporting base material, the microstructure layer is a polymer of a resin composition that mainly contains a silsesquioxane derivative containing a plurality of polymerizable functional groups, and one or plural kinds of monomer elements containing a plurality of polymerizable functional groups.
摘要翻译： 微图案转印模具包括支撑基材和形成在支撑基材上的微结构层，微结构层是主要包含含有多个可聚合官能团的倍半硅氧烷衍生物的树脂组合物的聚合物，以及一个或多个 含有多个聚合性官能团的单体元素种类。
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公开(公告)号：US08562896B2
公开(公告)日：2013-10-22
申请号：US12765145
申请日：2010-04-22
IPC分类号： B82Y40/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： An object of the present invention is to provide a micropattern transfer method and a micropattern transfer device in which the small amount of resin is applied to a substrate, and the nonuniformity in thickness is prevented to arise on the obtained pattern forming layer. In order to achieve the above object, the present invention provides a micropattern transfer method in which a micropattern is transferred to a resin by pressing a stamper having the micropattern onto the resin applied to a substrate, including the steps of: applying the resin to a surface of the substrate discretely in order to obtain a plurality of resin islands so that a center portion of each of the resin islands forms a planar thin-film, and a peripheral portion of the resin island rises higher than the center portion.
摘要翻译： 本发明的目的是提供一种微图案转印方法和一种微图案转印装置，其中少量的树脂施加于基底，并且在所获得的图案形成层上防止出现不均匀的厚度。 为了实现上述目的，本发明提供一种微图案转印方法，其中通过将具有微图案的压模压入到施加到基板上的树脂上而将微图案转印到树脂上，包括以下步骤：将树脂施加到 为了获得多个树脂岛，使得每个树脂岛的中心部分形成平面薄膜，并且树脂岛的周边部分比中心部分上升得更高。
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公开(公告)号：US08535035B2
公开(公告)日：2013-09-17
申请号：US12787483
申请日：2010-05-26
IPC分类号： B29C59/00
CPC分类号： B29C59/022 , B29C35/0888 , B29C37/0003 , B29C37/006 , B29C43/021 , B29C43/06 , B29C43/3697 , B29C2035/0827 , B29C2043/025 , B29C2059/023
摘要： A fine-structure transfer apparatus has a base plate, a first post and a second post erected on the upper surface of the base plate, an elongated stamper that is fixed at one end to the upper end face of the first post. The stamper is supported at the other end in a vertically movable manner by means of an ascending/descending unit provided on the second post. A transfer element holding stage is provided on the upper surface of the base plate between the first and second posts in a position that corresponds to the position of the lower surface of the elongated stamper where a fine pattern is formed. A pressure-applying unit is provided to reciprocate on the upper surface of the elongated stamper along a longitudinal direction thereof. The transfer apparatus is characterized by the ease with which the stamper can be detached from the transfer element.
摘要翻译： 精细结构传送装置具有底座，第一柱和第二柱，竖立在基板的上表面上，细长的压模一端固定到第一柱的上端面。 压模在另一端以可垂直移动的方式通过设置在第二柱上的上升/下降单元支撑。 转印元件保持台在第一和第二柱之间的基板的上表面上设置在与形成精细图案的细长压模的下表面的位置相对应的位置。 压力施加单元设置成沿着其长度方向在细长压模的上表面上往复运动。 传送装置的特征在于压模可以容易地与传送元件分离。
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公开(公告)号：US08186992B2
公开(公告)日：2012-05-29
申请号：US12692135
申请日：2010-01-22
IPC分类号： B29C59/00
CPC分类号： G11B5/82 , B29C43/021 , B29C2043/025 , B29C2043/3411 , B29C2043/3488 , B29C2043/3602 , B29C2043/3634 , B29C2043/5038 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/743 , G11B7/263
摘要： In a micropattern transfer device, a stamper on which a fine indented pattern is formed is brought into contact with a material to be transferred, and the fine indented pattern on the stamper is transferred onto a surface of the material to be transferred. The micropattern transfer device includes a holding mechanism which holds an entire outer circumferential portion of the material to be transferred. The holding mechanism holds the material to be transferred such that a distance between the material to be transferred and the stamper is substantially equal to or shorter than a distance between the holding mechanism and the stamper.
摘要翻译： 在微图案转印装置中，形成有精细凹凸图案的压模与要转印的材料接触，压模上的精细凹入图案被转印到待转印材料的表面上。 微图案转印装置包括保持待转印材料的外周部分的保持机构。 保持机构保持要被转印的材料，使得被转印材料和压模之间的距离基本上等于或短于保持机构和压模之间的距离。
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17.发明申请公开(公告)号：US20120029110A1
公开(公告)日：2012-02-02
申请号：US13193658
申请日：2011-07-29
IPC分类号： C08F220/10
CPC分类号： G11B5/855 , C08F2/50 , C08F290/064 , C08F290/067 , C08F220/10 , C08F222/10
摘要： A photopolymerizable resin composition for transferring a microstructure, which allows a thinner and uniform thin film to be formed, a transfer accuracy of extremely smaller microfine pattern to be excellent, and a curing time of the thin film to be shortened, is provided. The photopolymerizable resin composition for transferring a microstructure comprises the following component (A), component (B), component (C), component (D) and component (E) at the rate described below: (A) a 6 to 15-functional acrylate; in 0.5 to 10 mass % (B) an acrylate with a weight-average molecular weight (Mw) of 1000 to 10000; in 0.5 to 10 mass % (C) an acrylate having a benzene ring; in 0.5 to 10 mass % (D) a reactive diluent; in 80 to 98 mass % (E) a photopolymerization initiator; in 0.1 to 5 mass %.
摘要翻译： 提供了用于转印微结构的可光聚合树脂组合物，其允许形成更薄且均匀的薄膜，极小的微细图案的转印精度优异，并且缩短薄膜的固化时间。 用于转移微结构的光聚合性树脂组合物以下述速度包含以下组分（A），组分（B），组分（C），组分（D）和组分（E）：（A）6至15官能 丙烯酸酯; 0.5〜10质量％（B）重均分子量（Mw）为1000〜10000的丙烯酸酯; 为0.5〜10质量％（C）具有苯环的丙烯酸酯; 为0.5〜10质量％（D）反应性稀释剂; 80〜98质量％（E）光聚合引发剂; 为0.1〜5质量％。
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公开(公告)号：US20090246309A1
公开(公告)日：2009-10-01
申请号：US12388653
申请日：2009-02-19
申请人： Ryuta WASHIYA , Takashi Ando , Masahiko Ogino , Noritake Shizawa , Kyoichi Mori , Akihiro Miyauchi
发明人： Ryuta WASHIYA , Takashi Ando , Masahiko Ogino , Noritake Shizawa , Kyoichi Mori , Akihiro Miyauchi
IPC分类号： B29C59/02
CPC分类号： B29C35/0888 , B29C37/0053 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： A fine structure imprinting machine is provided which can surely and easily eliminate static electricity in removing a stamper from an imprinting object. The fine structure imprinting machine is adapted to bring the stamper with a fine concavo-convex pattern formed thereon into contact with the imprinting object, thereby to imprint the fine concavo-convex pattern of the stamper onto a surface of the imprinting object. The stamper has a conductive film on at least a pattern formation surface thereof. The stamper is fixed by a conductive holding member, the conductive film is connected to the holding member via the conductor, and the holding member is connected to a ground within the machine.
摘要翻译： 提供了一种精细的结构压印机，其可以确实地和容易地消除从压印对象去除压模的静电。 精细结构压印机适于使压模与形成在其上的精细凹凸图案与压印对象接触，从而将压模的细微凹凸图案压印到压印对象的表面上。 压模至少在其图案形成表面上具有导电膜。 压模由导电保持构件固定，导电膜通过导体连接到保持构件，并且保持构件连接到机器内的地面上。
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19.发明申请公开(公告)号：US20120319326A1
公开(公告)日：2012-12-20
申请号：US13577337
申请日：2011-03-10
申请人： Toshimitsu Shiraishi , Kyoichi Mori , Noritake Shizawa , Naoaki Yamashita , Masahiko Ogino , Akihiro Miyauchi
发明人： Toshimitsu Shiraishi , Kyoichi Mori , Noritake Shizawa , Naoaki Yamashita , Masahiko Ogino , Akihiro Miyauchi
IPC分类号： B29C59/02
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： The fine structure transfer apparatus is provided with a pattern transfer mechanism having a resin applying mechanism, a substrate handling mechanism, an aligning mechanism, a pressurizing mechanism, and a peeling mechanism, and the pressurizing mechanism is configured of an upper head section and a lower stage section, the molding die having the fine pattern formed thereon is fixed on the lower surface of the upper head section, and after pressurization and transfer, the lower stage section retracts from a position below the substrate in the state wherein the substrate is adhered to the molding die, then, after the peeling mechanism is moved to a position below the substrate, the substrate adhered to the molding die is peeled.
摘要翻译： 精细结构传送装置设置有具有树脂施加机构，基板处理机构，对准机构，加压机构和剥离机构的图案转印机构，并且加压机构由上部头部和下部 具有形成在其上的精细图案的成形模具固定在上部头部的下表面上，并且在加压和转印之后，下基板在基板被粘附的状态下从基板下方的位置缩回 成型模具，然后，在剥离机构移动到基板下方的位置之后，粘附到成型模具的基板被剥离。
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公开(公告)号：US08333915B2
公开(公告)日：2012-12-18
申请号：US13238735
申请日：2011-09-21
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , Y10S977/887
摘要： A fine-structure transfer method in which a fine-featured pattern formed on one of the two surfaces of a stamper is pressed against a coating of a resist on one of the two surfaces of a transfer element so as to transfer the fine-featured pattern to the resist coating, wherein the atmosphere in the space between the stamper and the transfer element is replaced by the vapor of the resist before the stamper is pressed against the transfer element.
摘要翻译： 精细结构转印方法，其中形成在压模的两个表面中的一个上的精细图案被压在转印元件的两个表面之一上的抗蚀剂涂层上，以便转印精细图案 到抗蚀剂涂层，其中压模和转印元件之间的空间中的气氛被压模抵抗转印元件之前的抗蚀剂的蒸汽所代替。
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