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公开(公告)号：US08535035B2
公开(公告)日：2013-09-17
申请号：US12787483
申请日：2010-05-26
IPC分类号： B29C59/00
CPC分类号： B29C59/022 , B29C35/0888 , B29C37/0003 , B29C37/006 , B29C43/021 , B29C43/06 , B29C43/3697 , B29C2035/0827 , B29C2043/025 , B29C2059/023
摘要： A fine-structure transfer apparatus has a base plate, a first post and a second post erected on the upper surface of the base plate, an elongated stamper that is fixed at one end to the upper end face of the first post. The stamper is supported at the other end in a vertically movable manner by means of an ascending/descending unit provided on the second post. A transfer element holding stage is provided on the upper surface of the base plate between the first and second posts in a position that corresponds to the position of the lower surface of the elongated stamper where a fine pattern is formed. A pressure-applying unit is provided to reciprocate on the upper surface of the elongated stamper along a longitudinal direction thereof. The transfer apparatus is characterized by the ease with which the stamper can be detached from the transfer element.
摘要翻译： 精细结构传送装置具有底座，第一柱和第二柱，竖立在基板的上表面上，细长的压模一端固定到第一柱的上端面。 压模在另一端以可垂直移动的方式通过设置在第二柱上的上升/下降单元支撑。 转印元件保持台在第一和第二柱之间的基板的上表面上设置在与形成精细图案的细长压模的下表面的位置相对应的位置。 压力施加单元设置成沿着其长度方向在细长压模的上表面上往复运动。 传送装置的特征在于压模可以容易地与传送元件分离。
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公开(公告)号：US20100303947A1
公开(公告)日：2010-12-02
申请号：US12787483
申请日：2010-05-26
IPC分类号： B29C59/02
CPC分类号： B29C59/022 , B29C35/0888 , B29C37/0003 , B29C37/006 , B29C43/021 , B29C43/06 , B29C43/3697 , B29C2035/0827 , B29C2043/025 , B29C2059/023
摘要： A fine-structure transfer apparatus has a base plate, a first post and a second post erected on the upper surface of the base plate, an elongated stamper that is fixed at one end to the upper end face of the first post. The stamper is supported at the other end in a vertically movable manner by means of an ascending/descending unit provided on the second post. A transfer element holding stage is provided on the upper surface of the base plate between the first and second posts in a position that corresponds to the position of the lower surface of the elongated stamper where a fine pattern is formed. A pressure-applying unit is provided to reciprocate on the upper surface of the elongated stamper along a longitudinal direction thereof. The transfer apparatus is characterized by the ease with which the stamper can be detached from the transfer element.
摘要翻译： 精细结构传送装置具有底座，第一柱和第二柱，竖立在基板的上表面上，细长的压模一端固定到第一柱的上端面。 压模在另一端以可垂直移动的方式通过设置在第二柱上的上升/下降单元支撑。 转印元件保持台在第一和第二柱之间的基板的上表面上设置在与形成精细图案的细长压模的下表面的位置相对应的位置。 压力施加单元设置成沿着其长度方向在细长压模的上表面上往复运动。 传送装置的特征在于压模可以容易地与传送元件分离。
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3.发明申请STAMPER FOR TRANSFER OF MICROSCOPIC STRUCTURE AND TRANSFER APPARATUS OF MICROSCOPIC STRUCTURE 审中-公开显微镜结构转移用保护膜及微结构转移装置公开(公告)号：US20110305787A1
公开(公告)日：2011-12-15
申请号：US13157403
申请日：2011-06-10
申请人： Satoshi ISHII , Masahiko Ogino , Noritake Shizawa , Kyoichi Mori , Akihiro Miyauchi , Naoaki Yamashita , Toshimitsu Shiraishi , Takashi Tarumitsu
发明人： Satoshi ISHII , Masahiko Ogino , Noritake Shizawa , Kyoichi Mori , Akihiro Miyauchi , Naoaki Yamashita , Toshimitsu Shiraishi , Takashi Tarumitsu
IPC分类号： B29C59/02
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B7/263
摘要： A stamper is used for the transfer of microscopic structures, the stamper including a base and a microscopic structure layer on a surface thereof, in which the microscopic structure layer has a surface layer including a polymer derived from a resin composition containing a polymerization initiator and a silsesquioxane derivative having two or more polymerizable functional groups, the microscopic structure layer has a modulus of elasticity of less than 2.0 GPa and has a thickness of 4 times or more the height of a microscopic structure formed on the surface of the microscopic structure layer.
摘要翻译： 压模用于微观结构的传递，压模在其表面上包括基底和微观结构层，其中微观结构层具有包括由含有聚合引发剂的树脂组合物衍生的聚合物的表面层和 具有两个或更多个可聚合官能团的倍半硅氧烷衍生物，微观结构层的弹性模量小于2.0GPa，并且具有在微观结构层的表面上形成的微观结构的高度的4倍以上的厚度。
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4.发明申请公开(公告)号：US20120319326A1
公开(公告)日：2012-12-20
申请号：US13577337
申请日：2011-03-10
申请人： Toshimitsu Shiraishi , Kyoichi Mori , Noritake Shizawa , Naoaki Yamashita , Masahiko Ogino , Akihiro Miyauchi
发明人： Toshimitsu Shiraishi , Kyoichi Mori , Noritake Shizawa , Naoaki Yamashita , Masahiko Ogino , Akihiro Miyauchi
IPC分类号： B29C59/02
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： The fine structure transfer apparatus is provided with a pattern transfer mechanism having a resin applying mechanism, a substrate handling mechanism, an aligning mechanism, a pressurizing mechanism, and a peeling mechanism, and the pressurizing mechanism is configured of an upper head section and a lower stage section, the molding die having the fine pattern formed thereon is fixed on the lower surface of the upper head section, and after pressurization and transfer, the lower stage section retracts from a position below the substrate in the state wherein the substrate is adhered to the molding die, then, after the peeling mechanism is moved to a position below the substrate, the substrate adhered to the molding die is peeled.
摘要翻译： 精细结构传送装置设置有具有树脂施加机构，基板处理机构，对准机构，加压机构和剥离机构的图案转印机构，并且加压机构由上部头部和下部 具有形成在其上的精细图案的成形模具固定在上部头部的下表面上，并且在加压和转印之后，下基板在基板被粘附的状态下从基板下方的位置缩回 成型模具，然后，在剥离机构移动到基板下方的位置之后，粘附到成型模具的基板被剥离。
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公开(公告)号：US20120128811A1
公开(公告)日：2012-05-24
申请号：US13293324
申请日：2011-11-10
IPC分类号： B29C59/02
CPC分类号： G11B5/855
摘要： A double-sided imprinting device includes a top-side stamper device supported by a going up and down mechanism, and a bottom-side stamper device and a transferred body detachment device firmly provided on a moving table placed on a guide rail, in which the moving table can be moved back and forth on the guide rail by a movement driving mechanism, with a position of the top-side stamper device as a center, the bottom-side stamper device and the transferred body detachment device can move alternately to a position opposing the top-side stamper device. A bottom-side stamper provided at the bottom-side stamper device has a rectangular shape and a top-side stamper provided at the top-side stamper device has a rectangular shape so that the rectangular-shaped bottom-side stamper and the rectangular-shaped top-side stamper are provided so as to oppose in a cross shape.
摘要翻译： 双面压印装置包括由上下机构支撑的顶侧压模装置，以及牢固地设置在放置在导轨上的移动台上的底侧压模装置和转印体拆卸装置，其中 移动台可以通过移动驱动机构在导轨上来回移动，以顶侧压模装置的位置为中心，底侧压模装置和转移体拆卸装置可以交替移动到位置 与顶侧压模装置相对。 设置在底侧压模装置的底侧压模具有矩形形状，并且设置在顶侧压模装置处的顶侧压模具有矩形形状，使得矩形底部压模和矩形 顶侧压模被设置为以十字形状相对。
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公开(公告)号：US08333915B2
公开(公告)日：2012-12-18
申请号：US13238735
申请日：2011-09-21
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , Y10S977/887
摘要： A fine-structure transfer method in which a fine-featured pattern formed on one of the two surfaces of a stamper is pressed against a coating of a resist on one of the two surfaces of a transfer element so as to transfer the fine-featured pattern to the resist coating, wherein the atmosphere in the space between the stamper and the transfer element is replaced by the vapor of the resist before the stamper is pressed against the transfer element.
摘要翻译： 精细结构转印方法，其中形成在压模的两个表面中的一个上的精细图案被压在转印元件的两个表面之一上的抗蚀剂涂层上，以便转印精细图案 到抗蚀剂涂层，其中压模和转印元件之间的空间中的气氛被压模抵抗转印元件之前的抗蚀剂的蒸汽所代替。
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公开(公告)号：US08096800B2
公开(公告)日：2012-01-17
申请号：US12711377
申请日：2010-02-24
IPC分类号： A01J21/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , Y10S977/887
摘要： A fine-structure transfer apparatus includes a stamper, a stage on which to place a transfer element having a coating of resist, and a device for heating the resist coating to be vaporized or a device for supplying a vapor of the resist into a space between the stamper and the transfer element.
摘要翻译： 精细结构转印装置包括压模，放置具有抗蚀剂涂层的转印元件的台和用于加热待蒸发的抗蚀剂涂层的装置或用于将抗蚀剂的蒸气供应到第一和第 压模和转印元件。
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公开(公告)号：US20110155008A1
公开(公告)日：2011-06-30
申请号：US12975411
申请日：2010-12-22
IPC分类号： B41F1/18
CPC分类号： G11B5/855
摘要： The present invention relates to a double-sided imprint apparatus capable of simultaneously imprinting both surfaces of a transfer printing target such as a doughnut-shaped, circular disc substrate. The double-sided imprint apparatus includes: an upper surface stamper device that is supported by an elevation mechanism; a lower surface stamper device that is fastened to a transport table mounted on a guide rail; and a transfer printing target separator, in which the transport table moves back and forth along the guide rail with the aid of a transport drive mechanism, thereby allowing the lower surface stamper device and the transfer printing target separator to alternately move to a position facing the upper surface stamper device, which is positioned at the center of the upper surface stamper device.
摘要翻译： 本发明涉及一种双面压印装置，其能够同时压印诸如环形圆盘基板的转印打印对象的两个表面。 双面压印装置包括：由升降机构支撑的上表面压模装置; 紧固在安装在导轨上的运送台上的下表面压模装置; 以及转印打印对象分离器，其中传送台借助传送驱动机构沿导轨移动，从而允许下表面压模装置和转印打印目标分离器交替地移动到面向 上表面压模装置位于上表面压模装置的中心。
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公开(公告)号：US08016585B2
公开(公告)日：2011-09-13
申请号：US12270376
申请日：2008-11-13
申请人： Susumu Komoriya , Kyoichi Mori , Noritake Shizawa , Takanori Yamasaki , Tetsuhiro Hatogai , Koji Tsushima
发明人： Susumu Komoriya , Kyoichi Mori , Noritake Shizawa , Takanori Yamasaki , Tetsuhiro Hatogai , Koji Tsushima
CPC分类号： B29C35/0888 , B29C33/424 , B29C37/0053 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： A resin stamper is provided that is intended for use in an optical transfer-based nanostructure transfer apparatus and which is capable of automatic transport and alignment. The resin stamper includes a support member made of a light transmitting material and having mechanical strength, an intermediate layer also made of a light transmitting material, and a patterned resin layer which is also made of a light transmitting material. The support member is larger in size than the intermediate layer and the patterned resin layer. The intermediate layer is more flexible than the patterned resin layer. Also, the patterned resin layer has a pattern of high and low areas formed in a surface thereof that is the obverse of the pattern of high and low areas in a mold.
摘要翻译： 提供了一种用于基于光学转印的纳米结构转印装置并且能够自动输送和对准的树脂压模。 树脂压模包括由透光材料制成并具有机械强度的支撑构件，也由透光材料制成的中间层以及也由透光材料制成的图案化树脂层。 支撑构件的尺寸大于中间层和图案化树脂层。 中间层比图案化树脂层更柔软。 此外，图案化树脂层具有形成在模具中的高低区域图案的表面的高低区域的图案。
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公开(公告)号：US20090123590A1
公开(公告)日：2009-05-14
申请号：US12270376
申请日：2008-11-13
申请人： Susumu Komoriya , Kyoichi Mori , Noritake Shizawa , Takanori Yamasaki , Tetsuhiro Hatogai , Koji Tsushima
发明人： Susumu Komoriya , Kyoichi Mori , Noritake Shizawa , Takanori Yamasaki , Tetsuhiro Hatogai , Koji Tsushima
IPC分类号： B29C35/08
CPC分类号： B29C35/0888 , B29C33/424 , B29C37/0053 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： A resin stamper is provided that is intended for use in an optical transfer-based nanostructure transfer apparatus and which is capable of automatic transport and alignment. The resin stamper comprises a support member made of a light transmitting material and having mechanical strength, an intermediate layer also made of a light transmitting material, and a patterned resin layer which is also made of a light transmitting material, the support member being larger in size than the intermediate layer and the patterned resin layer, the intermediate layer being more flexible than the patterned resin layer, and the patterned resin layer having a pattern of high and low areas formed in a surface thereof that is the obverse of the pattern of high and low areas in a mold.
摘要翻译： 提供了一种用于基于光学转印的纳米结构转印装置并且能够自动输送和对准的树脂压模。 树脂压模包括由透光材料制成并具有机械强度的支撑构件，也由透光材料制成的中间层，以及也由透光材料制成的图案化树脂层，支撑构件 尺寸比中间层和图案化树脂层，中间层比图案化树脂层更具柔性，并且图案化树脂层具有形成在其表面上的高和低区域的图案，其是高图案的图案 和模具中的低面积。
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