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1.发明申请STAMPER FOR TRANSFER OF MICROSCOPIC STRUCTURE AND TRANSFER APPARATUS OF MICROSCOPIC STRUCTURE 审中-公开显微镜结构转移用保护膜及微结构转移装置公开(公告)号：US20110305787A1
公开(公告)日：2011-12-15
申请号：US13157403
申请日：2011-06-10
申请人： Satoshi ISHII , Masahiko Ogino , Noritake Shizawa , Kyoichi Mori , Akihiro Miyauchi , Naoaki Yamashita , Toshimitsu Shiraishi , Takashi Tarumitsu
发明人： Satoshi ISHII , Masahiko Ogino , Noritake Shizawa , Kyoichi Mori , Akihiro Miyauchi , Naoaki Yamashita , Toshimitsu Shiraishi , Takashi Tarumitsu
IPC分类号： B29C59/02
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B7/263
摘要： A stamper is used for the transfer of microscopic structures, the stamper including a base and a microscopic structure layer on a surface thereof, in which the microscopic structure layer has a surface layer including a polymer derived from a resin composition containing a polymerization initiator and a silsesquioxane derivative having two or more polymerizable functional groups, the microscopic structure layer has a modulus of elasticity of less than 2.0 GPa and has a thickness of 4 times or more the height of a microscopic structure formed on the surface of the microscopic structure layer.
摘要翻译： 压模用于微观结构的传递，压模在其表面上包括基底和微观结构层，其中微观结构层具有包括由含有聚合引发剂的树脂组合物衍生的聚合物的表面层和 具有两个或更多个可聚合官能团的倍半硅氧烷衍生物，微观结构层的弹性模量小于2.0GPa，并且具有在微观结构层的表面上形成的微观结构的高度的4倍以上的厚度。
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2.发明申请公开(公告)号：US20120319326A1
公开(公告)日：2012-12-20
申请号：US13577337
申请日：2011-03-10
申请人： Toshimitsu Shiraishi , Kyoichi Mori , Noritake Shizawa , Naoaki Yamashita , Masahiko Ogino , Akihiro Miyauchi
发明人： Toshimitsu Shiraishi , Kyoichi Mori , Noritake Shizawa , Naoaki Yamashita , Masahiko Ogino , Akihiro Miyauchi
IPC分类号： B29C59/02
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： The fine structure transfer apparatus is provided with a pattern transfer mechanism having a resin applying mechanism, a substrate handling mechanism, an aligning mechanism, a pressurizing mechanism, and a peeling mechanism, and the pressurizing mechanism is configured of an upper head section and a lower stage section, the molding die having the fine pattern formed thereon is fixed on the lower surface of the upper head section, and after pressurization and transfer, the lower stage section retracts from a position below the substrate in the state wherein the substrate is adhered to the molding die, then, after the peeling mechanism is moved to a position below the substrate, the substrate adhered to the molding die is peeled.
摘要翻译： 精细结构传送装置设置有具有树脂施加机构，基板处理机构，对准机构，加压机构和剥离机构的图案转印机构，并且加压机构由上部头部和下部 具有形成在其上的精细图案的成形模具固定在上部头部的下表面上，并且在加压和转印之后，下基板在基板被粘附的状态下从基板下方的位置缩回 成型模具，然后，在剥离机构移动到基板下方的位置之后，粘附到成型模具的基板被剥离。
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公开(公告)号：US08535035B2
公开(公告)日：2013-09-17
申请号：US12787483
申请日：2010-05-26
IPC分类号： B29C59/00
CPC分类号： B29C59/022 , B29C35/0888 , B29C37/0003 , B29C37/006 , B29C43/021 , B29C43/06 , B29C43/3697 , B29C2035/0827 , B29C2043/025 , B29C2059/023
摘要： A fine-structure transfer apparatus has a base plate, a first post and a second post erected on the upper surface of the base plate, an elongated stamper that is fixed at one end to the upper end face of the first post. The stamper is supported at the other end in a vertically movable manner by means of an ascending/descending unit provided on the second post. A transfer element holding stage is provided on the upper surface of the base plate between the first and second posts in a position that corresponds to the position of the lower surface of the elongated stamper where a fine pattern is formed. A pressure-applying unit is provided to reciprocate on the upper surface of the elongated stamper along a longitudinal direction thereof. The transfer apparatus is characterized by the ease with which the stamper can be detached from the transfer element.
摘要翻译： 精细结构传送装置具有底座，第一柱和第二柱，竖立在基板的上表面上，细长的压模一端固定到第一柱的上端面。 压模在另一端以可垂直移动的方式通过设置在第二柱上的上升/下降单元支撑。 转印元件保持台在第一和第二柱之间的基板的上表面上设置在与形成精细图案的细长压模的下表面的位置相对应的位置。 压力施加单元设置成沿着其长度方向在细长压模的上表面上往复运动。 传送装置的特征在于压模可以容易地与传送元件分离。
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公开(公告)号：US20100303947A1
公开(公告)日：2010-12-02
申请号：US12787483
申请日：2010-05-26
IPC分类号： B29C59/02
CPC分类号： B29C59/022 , B29C35/0888 , B29C37/0003 , B29C37/006 , B29C43/021 , B29C43/06 , B29C43/3697 , B29C2035/0827 , B29C2043/025 , B29C2059/023
摘要： A fine-structure transfer apparatus has a base plate, a first post and a second post erected on the upper surface of the base plate, an elongated stamper that is fixed at one end to the upper end face of the first post. The stamper is supported at the other end in a vertically movable manner by means of an ascending/descending unit provided on the second post. A transfer element holding stage is provided on the upper surface of the base plate between the first and second posts in a position that corresponds to the position of the lower surface of the elongated stamper where a fine pattern is formed. A pressure-applying unit is provided to reciprocate on the upper surface of the elongated stamper along a longitudinal direction thereof. The transfer apparatus is characterized by the ease with which the stamper can be detached from the transfer element.
摘要翻译： 精细结构传送装置具有底座，第一柱和第二柱，竖立在基板的上表面上，细长的压模一端固定到第一柱的上端面。 压模在另一端以可垂直移动的方式通过设置在第二柱上的上升/下降单元支撑。 转印元件保持台在第一和第二柱之间的基板的上表面上设置在与形成精细图案的细长压模的下表面的位置相对应的位置。 压力施加单元设置成沿着其长度方向在细长压模的上表面上往复运动。 传送装置的特征在于压模可以容易地与传送元件分离。
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公开(公告)号：US20120128811A1
公开(公告)日：2012-05-24
申请号：US13293324
申请日：2011-11-10
IPC分类号： B29C59/02
CPC分类号： G11B5/855
摘要： A double-sided imprinting device includes a top-side stamper device supported by a going up and down mechanism, and a bottom-side stamper device and a transferred body detachment device firmly provided on a moving table placed on a guide rail, in which the moving table can be moved back and forth on the guide rail by a movement driving mechanism, with a position of the top-side stamper device as a center, the bottom-side stamper device and the transferred body detachment device can move alternately to a position opposing the top-side stamper device. A bottom-side stamper provided at the bottom-side stamper device has a rectangular shape and a top-side stamper provided at the top-side stamper device has a rectangular shape so that the rectangular-shaped bottom-side stamper and the rectangular-shaped top-side stamper are provided so as to oppose in a cross shape.
摘要翻译： 双面压印装置包括由上下机构支撑的顶侧压模装置，以及牢固地设置在放置在导轨上的移动台上的底侧压模装置和转印体拆卸装置，其中 移动台可以通过移动驱动机构在导轨上来回移动，以顶侧压模装置的位置为中心，底侧压模装置和转移体拆卸装置可以交替移动到位置 与顶侧压模装置相对。 设置在底侧压模装置的底侧压模具有矩形形状，并且设置在顶侧压模装置处的顶侧压模具有矩形形状，使得矩形底部压模和矩形 顶侧压模被设置为以十字形状相对。
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公开(公告)号：US08021141B2
公开(公告)日：2011-09-20
申请号：US12582732
申请日：2009-10-21
CPC分类号： B29C59/022 , B29C2035/0827 , B29C2059/023
摘要： An imprint apparatus has a head unit with a fine structure. The head unit includes a fine imprint pattern layer including fine concavities and convexities, a resin layer on a face of the fine imprint pattern layer opposite to a face where the concavities and convexities are formed, a first pressurizing base member on a face of the resin layer opposite to a face contacting the fine imprint pattern layer, and a second pressurizing base member on a face of the first pressurizing base member opposite to a face contacting the resin layer. The resin layer has a modulus of elasticity smaller than that of the fine imprint pattern layer, and the first pressurizing base member has a modulus of elasticity smaller than that of the resin layer. A light source or a heat source may be further provided. The head unit may be light permeable. A replacement layer may be further provided for replacement.
摘要翻译： 压印装置具有精细结构的头单元。 头单元包括精细的凹凸图案，在与形成凹凸面的面相反的微细图案层的表面上的树脂层，树脂的表面上的第一加压基材 在与第一加压基体的与接触树脂层的面相反的表面上的第二加压基底部件与接触精细压印图案层的面相反。 树脂层的弹性模量小于精细印刷图案层的弹性模量，第一加压基材的弹性模量小于树脂层的弹性模量。 可以进一步提供光源或热源。 头单元可以是透光的。 还可以提供更换层以进行更换。
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公开(公告)号：US20100189836A1
公开(公告)日：2010-07-29
申请号：US12692135
申请日：2010-01-22
IPC分类号： B29C59/02
CPC分类号： G11B5/82 , B29C43/021 , B29C2043/025 , B29C2043/3411 , B29C2043/3488 , B29C2043/3602 , B29C2043/3634 , B29C2043/5038 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/743 , G11B7/263
摘要： In a micropattern transfer device, a stamper on which a fine indented pattern is formed is brought into contact with a material to be transferred, and the fine indented pattern on the stamper is transferred onto a surface of the material to be transferred. The micropattern transfer device includes a holding mechanism which holds an entire outer circumferential portion of the material to be transferred. The holding mechanism holds the material to be transferred such that a distance between the material to be transferred and the stamper is substantially equal to or shorter than a distance between the holding mechanism and the stamper.
摘要翻译： 在微图案转印装置中，形成有精细凹凸图案的压模与要转印的材料接触，压模上的精细凹入图案被转印到待转印材料的表面上。 微图案转印装置包括保持待转印材料的外周部分的保持机构。 保持机构保持要被转印的材料，使得被转印材料和压模之间的距离基本上等于或短于保持机构和压模之间的距离。
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公开(公告)号：US20120321738A1
公开(公告)日：2012-12-20
申请号：US13581169
申请日：2011-02-16
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0046 , G03F7/038 , G03F7/0757
摘要： A micro-pattern transferring stamper includes a supporting base material and a microstructure layer formed on the supporting base material, the microstructure layer is a polymer of a resin composition that mainly contains a silsesquioxane derivative containing a plurality of polymerizable functional groups, and one or plural kinds of monomer elements containing a plurality of polymerizable functional groups.
摘要翻译： 微图案转印模具包括支撑基材和形成在支撑基材上的微结构层，微结构层是主要包含含有多个可聚合官能团的倍半硅氧烷衍生物的树脂组合物的聚合物，以及一个或多个 含有多个聚合性官能团的单体元素种类。
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公开(公告)号：US20120205838A1
公开(公告)日：2012-08-16
申请号：US13370413
申请日：2012-02-10
IPC分类号： B29C59/16
CPC分类号： G03F7/0002 , B29C33/3878 , B82Y10/00 , B82Y40/00
摘要： A microstructure transferring device is characterized in that the device comprises a stamper made from a first photo-curable resin composition cured with light with a first wavelength, and a light source emitting light with a second wavelength longer than the first wavelength. The microstructure is transferred to an impression receptor supplied with a second photo-curable resin composition, which is curable with light with the second wavelength emitted by the light source.
摘要翻译： 微结构转印装置的特征在于，该装置包括由用第一波长的光固化的第一光固化树脂组合物制成的压模和发射长于第一波长的第二波长的光的光源。 将微结构转移到提供有第二光固化树脂组合物的印模受体中，该第二光固化树脂组合物可用由光源发出的第二波长的光固化。
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10.发明申请公开(公告)号：US20100155989A1
公开(公告)日：2010-06-24
申请号：US12635730
申请日：2009-12-11
CPC分类号： B29C59/022 , B29C35/02 , B29C35/0888 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： An object of the present invention is to provide a stamper for transferring fine pattern and a method for manufacturing the stamper, the stamper has a fine structure layer to improve a continuous transferring property of the resinous stamper, and to allow accurate and continuous transferring. In order to achieve the above object, the present invention provides a stamper for transferring fine pattern, including: a fine structure layer on a supporting substrate, in which the fine structure layer is a polymer of a resinous compound whose principal component is silsesquioxane derivative having a plurality of polymerizable functional groups.
摘要翻译： 本发明的目的是提供一种用于转印精细图案的压模和用于制造压模的方法，压模具有精细的结构层，以提高树脂压模的连续转印性能，并允许精确和连续的转印。 为了实现上述目的，本发明提供一种用于转印精细图案的压模，包括：支撑基板上的精细结构层，其中精细结构层是主成分为倍半硅氧烷衍生物的树脂化合物的聚合物， 多个聚合性官能团。
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