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公开(公告)号:US20220059691A1
公开(公告)日:2022-02-24
申请号:US16996010
申请日:2020-08-18
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yanping Shen , Haiting Wang , Zhiqing Li
Abstract: Disclosed is a lateral double-diffused metal oxide semiconductor field effect transistor (LDMOSFET) with a replacement metal gate (RMG) structure that includes a first section, which traverses a semiconductor body at a channel region in a first-type well, and a second section, which is adjacent to the first section and which traverses the semiconductor body at a drain drift region in a second-type well. The RMG structure includes, in both sections, a first-type work function layer and a second-type work function layer on the first-type work function layer. However, the thickness of the first-type work function layer in the first section is greater than the thickness in the second section such that the RMG structure is asymmetric. Thus, threshold voltage (Vt) at the first section is greater than Vt at the second section and the LDMOSFET has a relatively high breakdown voltage (BV). Also disclosed are methods for forming the LDMOSFET.
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公开(公告)号:US20210305495A1
公开(公告)日:2021-09-30
申请号:US16836434
申请日:2020-03-31
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yanping Shen , Haiting Wang , Sipeng Gu
Abstract: One illustrative memory cell disclosed herein includes at least one layer of insulating material having a first opening and an internal sidewall spacer positioned within the first opening, wherein the internal sidewall spacer includes a spacer opening. The memory cell also includes a bottom electrode positioned within the spacer opening, a memory state material positioned above an upper surface of the bottom electrode and above an upper surface of the internal sidewall spacer, and a top electrode positioned above the memory state material.
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公开(公告)号:US11908857B2
公开(公告)日:2024-02-20
申请号:US16901417
申请日:2020-06-15
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yanping Shen , Haiting Wang , Sipeng Gu
IPC: H01L27/088 , H01L21/8234 , H01L21/8238
CPC classification number: H01L27/0886 , H01L21/823437 , H01L21/823468 , H01L21/823481 , H01L21/823878
Abstract: Structures for a semiconductor device that include dielectric isolation and methods of forming a structure for a semiconductor device that includes dielectric isolation. A semiconductor body includes a cavity, first and second gate structures extending over the semiconductor body, and a semiconductor layer including first and second sections on the semiconductor body. The first section of the semiconductor layer is laterally positioned between the cavity and the first gate structure, and the second section on the semiconductor layer is laterally positioned between the cavity and the second gate structure. An isolation structure is laterally positioned between the first and second sections of the semiconductor layer. The isolation structure includes a dielectric layer and a sidewall spacer having first and second sections. The dielectric layer includes a first portion in the cavity and a second portion between the first and second sections of the sidewall spacer.
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公开(公告)号:US11264504B2
公开(公告)日:2022-03-01
申请号:US16751779
申请日:2020-01-24
Applicant: GLOBALFOUNDRIES U.S. INC.
Inventor: Yanping Shen , Haiting Wang , Hong Yu
IPC: H01L29/78 , H01L29/16 , H01L29/423
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a scheme of active and dummy fin structures and methods of manufacture. The structure includes: an active fin structure; at least one dummy fin structure running along at least one side of the active fin structure along its length; a fin cut separating the at least one dummy fin structure along its longitudinal axes; and a gate structure extending over the active fin structure and the fin cut.
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公开(公告)号:US11239336B2
公开(公告)日:2022-02-01
申请号:US16788922
申请日:2020-02-12
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Wei Hong , Yanping Shen , Domingo A. Ferrer , Hong Yu
IPC: H01L29/45 , H01L29/417 , H01L29/66 , H01L29/08 , H01L27/088 , H01L29/165 , H01L29/78 , H01L21/285
Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure with a niobium-based silicide layer. An IC structure according to the disclosure includes a transistor on a substrate, the transistor including a gate structure above the substrate and a source/drain (S/D) region on the substrate adjacent the gate structure. A niobium-based silicide layer is on at least an upper surface the S/D region of the transistor, and extends across substantially an entire width of the S/D region. An S/D contact to the S/D region is in contact with the niobium-based silicide layer.
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公开(公告)号:US20210399126A1
公开(公告)日:2021-12-23
申请号:US16906490
申请日:2020-06-19
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Sipeng Gu , Judson R. Holt , Haiting Wang , Yanping Shen
Abstract: An illustrative transistor device disclosed herein includes a gate structure positioned around a portion of a fin defined in a semiconductor substrate and epitaxial semiconductor material positioned on the fin in a source/drain region of the transistor device, wherein the epitaxial semiconductor material has a plurality of lower angled surfaces. In this example, the device further includes a first sidewall spacer positioned adjacent the gate structure, wherein a first portion of the first sidewall spacer is also positioned on and in physical contact with at least a portion of the lower angled surfaces of the epitaxial semiconductor material.
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公开(公告)号:US20210336126A1
公开(公告)日:2021-10-28
申请号:US16855745
申请日:2020-04-22
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yanping Shen , Haiting Wang , Sipeng Gu
IPC: H01L43/02 , H01L27/24 , H01L27/22 , H01L27/1159 , H01L43/08 , H01L43/10 , H01L43/12 , H01L45/00
Abstract: An illustrative device disclosed herein includes at least one layer of insulating material, a conductive contact structure having a conductive line portion and a conductive via portion and a memory cell positioned in a first opening in the at least one layer of insulating material. In this illustrative example, the memory cell includes a bottom electrode, a memory state material positioned above the bottom electrode and an internal sidewall spacer positioned within the first opening and above at least a portion of the memory state material, wherein the internal sidewall spacer defines a spacer opening and wherein the conductive via portion is positioned within the spacer opening and above a portion of the memory state material.
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公开(公告)号:US11785860B2
公开(公告)日:2023-10-10
申请号:US16846497
申请日:2020-04-13
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Sipeng Gu , Haiting Wang , Yanping Shen
IPC: H10N50/80 , H10B51/30 , H10B53/30 , H10B61/00 , H10B63/00 , H10N50/01 , H10N50/10 , H10N70/00 , H10N70/20
CPC classification number: H10N50/80 , H10B51/30 , H10B53/30 , H10B61/00 , H10B63/00 , H10N50/01 , H10N50/10 , H10N70/011 , H10N70/231 , H10N70/841
Abstract: One illustrative device disclosed herein includes a memory cell positioned in a first opening in at least one layer of insulating material. The memory cell comprises a bottom electrode, a memory state material positioned above the bottom electrode and an internal sidewall spacer positioned within the first opening, wherein the internal sidewall spacer defines a spacer opening. The device also comprises a top electrode positioned within the spacer opening.
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公开(公告)号:US11569437B2
公开(公告)日:2023-01-31
申请号:US16855745
申请日:2020-04-22
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yanping Shen , Halting Wang , Sipeng Gu
IPC: H01L43/02 , H01L27/24 , H01L27/22 , H01L27/1159 , H01L43/08 , H01L45/00 , H01L43/12 , H01L43/10
Abstract: An illustrative device disclosed herein includes at least one layer of insulating material, a conductive contact structure having a conductive line portion and a conductive via portion and a memory cell positioned in a first opening in the at least one layer of insulating material. In this illustrative example, the memory cell includes a bottom electrode, a memory state material positioned above the bottom electrode and an internal sidewall spacer positioned within the first opening and above at least a portion of the memory state material, wherein the internal sidewall spacer defines a spacer opening and wherein the conductive via portion is positioned within the spacer opening and above a portion of the memory state material.
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公开(公告)号:US20210391323A1
公开(公告)日:2021-12-16
申请号:US16901417
申请日:2020-06-15
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yanping Shen , Haiting Wang , Sipeng Gu
IPC: H01L27/088 , H01L21/8234
Abstract: Structures for a semiconductor device that include dielectric isolation and methods of forming a structure for a semiconductor device that includes dielectric isolation. A semiconductor body includes a cavity, first and second gate structures extending over the semiconductor body, and a semiconductor layer including first and second sections on the semiconductor body. The first section of the semiconductor layer is laterally positioned between the cavity and the first gate structure, and the second section on the semiconductor layer is laterally positioned between the cavity and the second gate structure. An isolation structure is laterally positioned between the first and second sections of the semiconductor layer. The isolation structure includes a dielectric layer and a sidewall spacer having first and second sections. The dielectric layer includes a first portion in the cavity and a second portion between the first and second sections of the sidewall spacer.
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