公开(公告)号：US11935923B2

公开(公告)日：2024-03-19

申请号：US17525256

申请日：2021-11-12

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Alexander Derrickson ,  Vibhor Jain ,  Judson R. Holt ,  Jagar Singh ,  Mankyu Yang

IPC: H01L29/08 ,  H01L29/06 ,  H01L29/10 ,  H01L29/417 ,  H01L29/735 ,  H01L29/737

CPC classification number: H01L29/0821 ,  H01L29/0649 ,  H01L29/0808 ,  H01L29/0817 ,  H01L29/1008 ,  H01L29/41708 ,  H01L29/735 ,  H01L29/737

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor with gated collector and methods of manufacture. The structure includes: an extrinsic base region vertically over a semiconductor substrate and comprising asymmetrical sidewall spacers on opposing sidewalls of the extrinsic base region; a collector region on the semiconductor substrate and separated from the extrinsic base region by at least a first spacer of the asymmetrical sidewall spacers; and an emitter region on the semiconductor substrate and separated from the extrinsic base region by a second spacer of the asymmetrical sidewall spacers.

公开(公告)号：US20230066437A1

公开(公告)日：2023-03-02

申请号：US17525634

申请日：2021-11-12

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Hong Yu ,  Judson R. Holt ,  Alexander Derrickson

IPC: H01L29/735 ,  H01L29/66 ,  H01L29/08 ,  H01L29/165 ,  H01L29/10

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. The structure includes: an extrinsic base having at least one sidewall with a gradient concentration of semiconductor material; an emitter on a first side of the extrinsic base; and a collector on a second side of the extrinsic base.

公开(公告)号：US11127843B2

公开(公告)日：2021-09-21

申请号：US16733528

申请日：2020-01-03

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Judson Holt ,  Alexander Derrickson ,  Ryan Sporer ,  George R. Mulfinger ,  Alexander Martin ,  Jagar Singh

IPC: H01L29/737 ,  H01L29/06 ,  H01L29/66 ,  H01L21/3065 ,  H01L29/10

Abstract: Structures for a heterojunction bipolar transistor and methods of forming a structure for a heterojunction bipolar transistor. A base layer is positioned in a cavity in a semiconductor layer, a first terminal is coupled to the base layer, and a second terminal is coupled to a portion of the semiconductor layer. The second terminal is laterally spaced from the first terminal, and the portion of the semiconductor layer is laterally positioned between the second terminal and the base layer.

公开(公告)号：US11094805B2

公开(公告)日：2021-08-17

申请号：US16745833

申请日：2020-01-17

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Alexander Derrickson ,  Edmund K. Banghart ,  Alexander Martin ,  Ryan Sporer ,  Jagar Singh ,  Katherina Babich ,  George R. Mulfinger

IPC: H01L29/737 ,  H01L29/08 ,  H01L21/324 ,  H01L29/165 ,  H01L29/66 ,  H01L21/02 ,  H01L29/10

Abstract: Structures for a heterojunction bipolar transistor and methods of forming a structure for a heterojunction bipolar transistor. A first portion of a first semiconductor layer defines an emitter, a first portion of a second semiconductor layer defines a collector, and a base includes respective second portions of the first and second semiconductor layers that are laterally positioned between the first portion of the first semiconductor layer and the first portion of the second semiconductor layer. The first portion of the first semiconductor layer has a first thickness, and the first portion of the second semiconductor layer has a second thickness that is greater than the first thickness. The first portion and the second portion of the first semiconductor layer adjoin at a first junction having the first thickness. The first portion and the second portion of the second semiconductor layer adjoin at a second junction having the second thickness.

公开(公告)号：US20210091212A1

公开(公告)日：2021-03-25

申请号：US16733528

申请日：2020-01-03

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Judson Holt ,  Alexander Derrickson ,  Ryan Sporer ,  George R. Mulfinger ,  Alexander Martin ,  Jagar Singh

IPC: H01L29/737 ,  H01L29/06 ,  H01L29/10 ,  H01L21/3065 ,  H01L29/66

Abstract: Structures for a heterojunction bipolar transistor and methods of forming a structure for a heterojunction bipolar transistor. A base layer is positioned in a cavity in a semiconductor layer, a first terminal is coupled to the base layer, and a second terminal is coupled to a portion of the semiconductor layer. The second terminal is laterally spaced from the first terminal, and the portion of the semiconductor layer is laterally positioned between the second terminal and the base layer.

公开(公告)号：US20250076574A1

公开(公告)日：2025-03-06

申请号：US18242364

申请日：2023-09-05

Applicant: GlobalFoundries U.S. Inc.

Inventor： Md Nabil Shehtab Dhrubo ,  Andreas D. Stricker ,  Alexander Derrickson ,  Subramanian Krishnamurthy ,  Yusheng Bian ,  Judson R. Holt

IPC: G02B6/122 ,  G02B6/13

Abstract: Photonics chip structures including a reflector and methods of forming such structures. The photonics chip structure comprises a first waveguide core, a second waveguide core adjacent to the first waveguide core, and a reflector including a plurality of metal contacts over a portion of the first waveguide core. The second waveguide core is configured to couple light to the first waveguide core, and the metal contacts are configured to reflect the light.

公开(公告)号：US12159926B2

公开(公告)日：2024-12-03

申请号：US18373598

申请日：2023-09-27

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Haiting Wang ,  Alexander Derrickson ,  Jagar Singh ,  Vibhor Jain ,  Andreas Knorr ,  Alexander Martin ,  Judson R. Holt ,  Zhenyu Hu

IPC: H01L29/735 ,  H01L29/08 ,  H01L29/417 ,  H01L29/66 ,  H01L29/737

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. A structure includes: an intrinsic base comprising semiconductor material in a channel region of a semiconductor substrate; an extrinsic base vertically above the intrinsic base; a raised collector region on the semiconductor substrate and laterally connected to the intrinsic base; and a raised emitter region on the semiconductor substate and laterally connected to the intrinsic base.

公开(公告)号：US12040388B2

公开(公告)日：2024-07-16

申请号：US17525634

申请日：2021-11-12

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Hong Yu ,  Judson R. Holt ,  Alexander Derrickson

IPC: H01L29/735 ,  H01L29/08 ,  H01L29/10 ,  H01L29/165 ,  H01L29/66

CPC classification number: H01L29/735 ,  H01L29/0808 ,  H01L29/0821 ,  H01L29/1008 ,  H01L29/165 ,  H01L29/6625

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. The structure includes: an extrinsic base having at least one sidewall with a gradient concentration of semiconductor material; an emitter on a first side of the extrinsic base; and a collector on a second side of the extrinsic base.

公开(公告)号：US20240172455A1

公开(公告)日：2024-05-23

申请号：US17990800

申请日：2022-11-21

Applicant: GlobalFoundries U.S. Inc.

Inventor： John J. Pekarik ,  Hong Yu ,  Vibhor Jain ,  Alexander Derrickson ,  Venkatesh Gopinath

IPC: H01L47/00 ,  H01L29/66 ,  H01L29/737

CPC classification number: H01L27/2445 ,  H01L29/66242 ,  H01L29/7371 ,  H01L45/1233 ,  H01L45/16

Abstract: Structures that include bipolar junction transistors and methods of forming such structures. The structure comprises a substrate having a top surface, a trench isolation region in the substrate, and a base layer on the top surface of the substrate. The base layer extending across the trench isolation region. A first bipolar junction transistor includes a first collector in the substrate and a first emitter on a first portion of the first base layer. The first portion of the first base layer is positioned between the first collector and the first emitter. A second bipolar junction transistor includes a second collector in the substrate and a second emitter on a second portion of the first base layer. The second portion of the first base layer is positioned between the second collector and the second emitter.

公开(公告)号：US11810969B2

公开(公告)日：2023-11-07

申请号：US17509384

申请日：2021-10-25

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Haiting Wang ,  Alexander Derrickson ,  Jagar Singh ,  Vibhor Jain ,  Andreas Knorr ,  Alexander Martin ,  Judson R. Holt ,  Zhenyu Hu

IPC: H01L29/735 ,  H01L29/66 ,  H01L29/737 ,  H01L29/08 ,  H01L29/417

CPC classification number: H01L29/735 ,  H01L29/0808 ,  H01L29/0821 ,  H01L29/41708 ,  H01L29/6625 ,  H01L29/737

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. A structure includes: an intrinsic base comprising semiconductor material in a channel region of a semiconductor substrate; an extrinsic base vertically above the intrinsic base; a raised collector region on the semiconductor substrate and laterally connected to the intrinsic base; and a raised emitter region on the semiconductor substate and laterally connected to the intrinsic base.