公开(公告)号：US09099118B1

公开(公告)日：2015-08-04

申请号：US12472341

申请日：2009-05-26

申请人： Ronghui Zhou ,  Ming Jiang ,  Guanghong Luo ,  Yun-Fei Li

发明人： Ronghui Zhou ,  Ming Jiang ,  Guanghong Luo ,  Yun-Fei Li

IPC分类号： G11B5/127 ,  H04R31/00 ,  G11B5/31

CPC分类号： G11B5/3169 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163 ,  Y10T29/49046

摘要： Methods of forming a write pole are disclosed. A structure comprising a bottom insulating layer and a top insulating layer is provided. A top damascene trench is formed in the top insulating layer, and a bottom damascene trench is formed in the bottom insulating layer. The bottom damascene trench and a portion of the top damascene trench are filled with a pole material. The top insulating layer and a portion of the pole material located above the bottom damascene trench are removed.

摘要翻译： 公开了形成写极的方法。 提供了包括底部绝缘层和顶部绝缘层的结构。 在顶部绝缘层中形成顶部镶嵌沟槽，并且在底部绝缘层中形成底部镶嵌沟槽。 底部镶嵌沟槽和顶部镶嵌沟槽的一部分填充有极材料。 去除顶部绝缘层和位于底部镶嵌沟槽上方的极材料的一部分。

公开(公告)号：US08262918B1

公开(公告)日：2012-09-11

申请号：US12411270

申请日：2009-03-25

申请人： Yun-Fei Li ,  Ronghui Zhou ,  Guanghong Luo ,  Ming Jiang

发明人： Yun-Fei Li ,  Ronghui Zhou ,  Guanghong Luo ,  Ming Jiang

IPC分类号： B44C1/22

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163

摘要： Methods of producing magnetic recording heads are disclosed. The methods can include providing a wafer comprising a substrate layer in which are disposed a plurality of damascene trenches. The method can further include depositing a pole material across the whole wafer, wherein the plurality of trenches are filled with the pole material. The methods can further include depositing a mask material over the pole material across the whole wafer. The methods can further include performing a first material removal process across the whole wafer to remove the mask material and a first portion of the pole material at a same material removal rate. The methods can further include performing a second material removal process to remove a second portion of the pole material above the substrate layer.

摘要翻译： 公开了制造磁记录头的方法。 所述方法可以包括提供包括其中布置有多个镶嵌沟槽的基底层的晶片。 该方法还可以包括在整个晶片上沉积极材料，其中多个沟槽用极材料填充。 该方法还可以包括在整个晶片上沉积超过极材料的掩模材料。 该方法还可以包括在整个晶片上执行第一材料去除工艺，以相同的材料去除速率移除掩模材料和极材料的第一部分。 所述方法还可以包括执行第二材料去除工艺以去除衬底层上方的极材料的第二部分。

公开(公告)号：US08480911B1

公开(公告)日：2013-07-09

申请号：US13173846

申请日：2011-06-30

申请人： Masahiro Osugi ,  Guanghong Luo ,  Lily Yao ,  Ming Jiang

发明人： Masahiro Osugi ,  Guanghong Luo ,  Lily Yao ,  Ming Jiang

IPC分类号： B44C1/22

CPC分类号： G11B5/398 ,  G01R33/0052 ,  G01R33/093 ,  G11B5/3163 ,  G11B5/3169 ,  G11B5/3932

摘要： A read sensor for a read transducer is fabricated. The read transducer has field and device regions. A read sensor stack is deposited. A mask covering part of the stack corresponding to the read sensor is provided. The read sensor having inboard and outboard junction angles is defined from the stack in a track width direction. A critical junction (CJ) focused ion beam scan (FIBS) polishing that removes part of the read sensor based on the junction angles is performed. A hard bias structure is deposited and the transducer planarized. A remaining portion of the mask is removed. A stripe height mask covering part of the read sensor and hard bias structure in a stripe height direction is provided. The read sensor stripe height is defined. A tunneling magnetoresistance (TMR) FIBS polishing that removes part of the stack in the field region is performed. An insulating layer is provided.

摘要翻译： 制造用于读取换能器的读取传感器。 读取传感器具有现场和设备区域。 读取传感器堆栈。 提供覆盖对应于读取传感器的堆叠部分的掩模。 具有内侧和外侧接合角的读取传感器从堆叠沿轨道宽度方向限定。 执行基于结合角去除部分读取传感器的临界结（CJ）聚焦离子束扫描（FIBS）抛光。 沉积硬偏压结构，并将传感器平坦化。 去除掩模的剩余部分。 提供覆盖读取传感器的一部分并且条带高度方向上的硬偏置结构的条纹高度掩模。 读取传感器条纹高度被定义。 执行去除场区域中的一部分堆叠的隧道磁阻（TMR）FIBS抛光。 提供绝缘层。

公开(公告)号：US08191237B1

公开(公告)日：2012-06-05

申请号：US12470385

申请日：2009-05-21

申请人： Guanghong Luo ,  Ge Yi ,  Dujiang Wan ,  Lei Wang ,  Xiaohai Xiang ,  Ming Jiang

发明人： Guanghong Luo ,  Ge Yi ,  Dujiang Wan ,  Lei Wang ,  Xiaohai Xiang ,  Ming Jiang

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for providing a structure in a magnetic transducer is described. The method includes performing a first planarization that exposes a top surface of the magnetic transducer. This first planarization also terminates before a portion of a first planarization buffer layer is removed. The method also includes providing a second planarization buffer layer after the first planarization is performed. The second planarization buffer layer is above the first planarization buffer layer. The method also includes performing a second planarization. This second planarization does not completely remove the second planarization buffer layer. The method also includes performing a third planarization terminating after the first planarization buffer layer is exposed and before the first planarization buffer layer is completely removed.

摘要翻译： 描述了一种用于在磁换能器中提供结构的方法。 该方法包括执行暴露磁换能器的顶表面的第一平面化。 该第一平面化还在第一平坦化缓冲层的一部分被去除之前终止。 该方法还包括在执行第一平面化之后提供第二平坦化缓冲层。 第二平坦化缓冲层在第一平坦化缓冲层之上。 该方法还包括执行第二平面化。 该第二平面化不能完全去除第二平坦化缓冲层。 该方法还包括在第一平坦化缓冲层暴露之后并且在第一平坦化缓冲层被完全去除之前执行终止的第三平坦化。

公开(公告)号：US08607438B1

公开(公告)日：2013-12-17

申请号：US13309357

申请日：2011-12-01

申请人： Wei Gao ,  Guanxiong Li ,  Ming Mao ,  Chih-Ching Hu ,  Guanghong Luo ,  Miao Wang ,  Zhihong Zhang ,  Anup G. Roy

发明人： Wei Gao ,  Guanxiong Li ,  Ming Mao ,  Chih-Ching Hu ,  Guanghong Luo ,  Miao Wang ,  Zhihong Zhang ,  Anup G. Roy

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3903 ,  G01R33/093 ,  G11B5/3163

摘要： A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.

摘要翻译： 制造用于换能器的读取传感器。 传感器具有对应于传感器的场区域和传感器区域。 传感器堆叠被沉积。 提供了包括硬掩模和磁场掩模的混合掩模。 硬掩模包括覆盖传感器区域的传感器部分和覆盖场区域的场部分。 场掩模覆盖硬掩模的场部分。 场掩模将传感器和场区域之间的硬掩模的传感器部分和传感器堆叠的一部分暴露。 传感器从传感器堆叠在轨道宽度方向上定义。 硬偏置层被沉积。 硬偏置层的一部分位于场掩模上。 邻近传感器区域的一部分硬偏压层被密封。 场地面罩被提起。 传感器平坦化。

公开(公告)号：US08563146B1

公开(公告)日：2013-10-22

申请号：US13169710

申请日：2011-06-27

申请人： Jinqiu Zhang ,  Ying Hong ,  Hai Sun ,  Hongping Yuan ,  Guanghong Luo ,  Xiaoyu Yang ,  Hongmei Han ,  Lingyun Miao

发明人： Jinqiu Zhang ,  Ying Hong ,  Hai Sun ,  Hongping Yuan ,  Guanghong Luo ,  Xiaoyu Yang ,  Hongmei Han ,  Lingyun Miao

IPC分类号： G11B5/33

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163

摘要： A method for fabricating a magnetic transducer having an air-bearing surface (ABS). An underlayer having a first and second regions and a bevel connecting these regions is provided. The first region is thicker and closer to the ABS than the second region. An intermediate layer conformal with the underlayer is provided. A hard mask layer having a top surface perpendicular to the ABS is formed on the intermediate layer. Part of the hard mask and intermediate layers are removed to provide a trench. The trench has a bottom surface and sidewalls having a first angle between the bottom surface and the intermediate layer and a second angle corresponding to the hard mask layer. A pole is provided in the trench. The pole has a pole tip, a yoke distal, and a bottom bevel. At least the yoke includes sidewalls having sidewall angles corresponding to the first and second angles.

摘要翻译： 一种制造具有空气轴承表面（ABS）的磁换能器的方法。 提供具有第一和第二区域的底层以及连接这些区域的斜面。 第一区域比第二区域更厚且更接近ABS。 提供与底层共形的中间层。 在中间层上形成具有垂直于ABS的顶表面的硬掩模层。 除去硬掩模和中间层的一部分以提供沟槽。 沟槽具有底表面和在底表面和中间层之间具有第一角度的侧壁和对应于硬掩模层的第二角度。 在沟槽中设置一个极点。 杆具有极尖，轭远端和底斜面。 至少轭包括具有对应于第一和第二角度的侧壁角的侧壁。

公开(公告)号：US08413317B1

公开(公告)日：2013-04-09

申请号：US12945681

申请日：2010-11-12

申请人： Dujiang Wan ,  Hai Sun ,  Ge Yi ,  Wei Gao ,  Hong Zhang ,  Guanghong Luo ,  Yunjun Tang ,  Tiffany Yun Wen Jiang ,  Zhigang Zhou ,  Wencheng Su

发明人： Dujiang Wan ,  Hai Sun ,  Ge Yi ,  Wei Gao ,  Hong Zhang ,  Guanghong Luo ,  Yunjun Tang ,  Tiffany Yun Wen Jiang ,  Zhigang Zhou ,  Wencheng Su

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B2005/0021 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for fabricating a microelectric device are described. A write pole of an energy assisted magnetic recording head or a capacitor might be fabricated. The method includes depositing a resist film and curing the resist film at a temperature of at least 180 degrees centigrade. A cured resist film capable of supporting a line having an aspect ratio of at least ten is thus provided. A portion of the cured resist film is removed. A remaining portion of the resist film forms the line. An insulating or nonmagnetic layer is deposited after formation of the line. The line is removed to provide a trench in the insulating or nonmagnetic layer. The trench has a height and a width. The height divided by the width corresponds to the aspect ratio. At least part of the structure is provided in the trench.

摘要翻译： 描述了一种用于制造微电子器件的方法和系统。 可以制造能量辅助磁记录头或电容器的写极。 该方法包括在至少180摄氏度的温度下沉积抗蚀剂膜并固化抗蚀剂膜。 因此提供了能够支撑纵横比至少为10的线的固化的抗蚀剂膜。 去除一部分固化的抗蚀剂膜。 抗蚀剂膜的剩余部分形成线。 在形成线之后沉积绝缘或非磁性层。 去除线以在绝缘或非磁性层中提供沟槽。 沟槽具有高度和宽度。 高度除以宽度对应于纵横比。 该结构的至少一部分设置在沟槽中。

公开(公告)号：US08146236B1

公开(公告)日：2012-04-03

申请号：US12057692

申请日：2008-03-28

申请人： Guanghong Luo ,  Liubo Hong ,  Honglin Zhu ,  Yun-Fei Li ,  Yingjian Chen

发明人： Guanghong Luo ,  Liubo Hong ,  Honglin Zhu ,  Yun-Fei Li ,  Yingjian Chen

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for providing a perpendicular magnetic recording (PMR) transducer from pole layer(s) are disclosed. First and second planarization stop layers are provided on the pole layer(s). A mask is provided on the second planarization stop layer. A first portion of the mask resides on a portion of the pole layer(s) used to form the PMR pole. The PMR pole is defined after the mask is provided. An intermediate layer surrounding at least the PMR pole is provided. A first planarization is performed on at least the intermediate layer. A portion of the second planarization stop layer is removed during the first planarization. A remaining portion of the second planarization stop layer is removed. A second planarization is performed. A portion of the first planarization stop layer remains after the second planarization. A write gap and shield are provided on the PMR pole and write gap, respectively.

摘要翻译： 公开了一种用于从极层提供垂直磁记录（PMR）换能器的方法和系统。 第一和第二平坦化停止层设置在极层上。 在第二平坦化停止层上设置掩模。 掩模的第一部分位于用于形成PMR极的极层的一部分上。 在提供面罩之后定义PMR极。 提供至少围绕PMR极的中间层。 至少在中间层上执行第一平面化。 在第一平坦化期间，去除第二平坦化停止层的一部分。 去除第二平坦化停止层的剩余部分。 执行第二平面化。 在第二平面化之后，第一平坦化停止层的一部分保留。 分别在PMR极和写间隙上提供写间隙和屏蔽。

公开(公告)号：US08797680B1

公开(公告)日：2014-08-05

申请号：US13417930

申请日：2012-03-12

申请人： Guanghong Luo ,  Liubo Hong ,  Honglin Zhu ,  Yun-Fei Li ,  Yingjian Chen

发明人： Guanghong Luo ,  Liubo Hong ,  Honglin Zhu ,  Yun-Fei Li ,  Yingjian Chen

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A perpendicular magnetic recording (PMR) transducer is provided. The PRM transducer includes a PMR pole having a top, a bottom, and at least one sidewall, the bottom having a bottom width, the top having a top width bigger than the bottom width. The PRM transducer further includes an intermediate layer adjacent to the at least one sidewall, a write gap on the PMR pole, the write gap including a first layer on the PMR pole, the first layer including a planarization stop layer, and a shield on the write gap.

摘要翻译： 提供垂直磁记录（PMR）传感器。 PRM传感器包括具有顶部，底部和至少一个侧壁的PMR极，底部具有底部宽度，顶部具有大于底部宽度的顶部宽度。 PRM换能器还包括与至少一个侧壁相邻的中间层，PMR极上的写入间隙，写入间隙包括PMR极上的第一层，第一层包括平坦化停止层，以及屏蔽 写差距。

公开(公告)号：US08404128B1

公开(公告)日：2013-03-26

申请号：US12391095

申请日：2009-02-23

申请人： Hong Zhang ,  Ge Yi ,  Lei Wang ,  Dujiang Wan ,  Guanghong Luo ,  Xiaohai Xiang

发明人： Hong Zhang ,  Ge Yi ,  Lei Wang ,  Dujiang Wan ,  Guanghong Luo ,  Xiaohai Xiang

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/4902 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for providing a magnetic recording transducer having a pole are disclosed. The pole has side(s), a bottom, and a top wider than the bottom. The method and system include providing at least one side gap layer that covers the side(s) and the top of the pole. At least one sacrificial layer is provided on the side gap layer(s). The sacrificial layer(s) are wet etchable and cover the side gap layer(s). The magnetic recording transducer is planarized after the sacrificial layer(s) are provided. Thus, a portion of the side gap and sacrificial layer(s) is removed. A remaining portion of the sacrificial layer(s) is thus left. The method and system also include wet etching the sacrificial layer(s) to remove the remaining portion of the sacrificial layer(s). A wrap around shield is provided after the remaining portion of the sacrificial layer(s) is removed.

摘要翻译： 公开了一种用于提供具有极点的磁记录换能器的方法和系统。 电极具有侧面，底部和顶部比底部更宽。 该方法和系统包括提供覆盖极的侧面和顶部的至少一个侧面间隙层。 在侧间隙层上提供至少一个牺牲层。 牺牲层是可湿蚀刻的并且覆盖侧间隙层。 在提供牺牲层之后，磁记录传感器被平坦化。 因此，侧面间隙和牺牲层的一部分被去除。 因此留下牺牲层的剩余部分。 该方法和系统还包括湿蚀刻牺牲层以去除牺牲层的剩余部分。 在除去牺牲层的剩余部分之后提供环绕护罩。