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    Method for fabricating a read sensor for a read transducer
    1.
    发明授权
    Method for fabricating a read sensor for a read transducer 失效
    读取传感器的读取传感器的制造方法

    公开(公告)号：US08607438B1

    公开(公告)日：2013-12-17

    申请号：US13309357

    申请日：2011-12-01

    申请人： Wei Gao ,  Guanxiong Li ,  Ming Mao ,  Chih-Ching Hu ,  Guanghong Luo ,  Miao Wang ,  Zhihong Zhang ,  Anup G. Roy

    发明人： Wei Gao ,  Guanxiong Li ,  Ming Mao ,  Chih-Ching Hu ,  Guanghong Luo ,  Miao Wang ,  Zhihong Zhang ,  Anup G. Roy

    IPC分类号： G11B5/127 ,  H04R31/00

    CPC分类号： G11B5/3903 ,  G01R33/093 ,  G11B5/3163

    摘要： A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.

    摘要翻译： 制造用于换能器的读取传感器。 传感器具有对应于传感器的场区域和传感器区域。 传感器堆叠被沉积。 提供了包括硬掩模和磁场掩模的混合掩模。 硬掩模包括覆盖传感器区域的传感器部分和覆盖场区域的场部分。 场掩模覆盖硬掩模的场部分。 场掩模将传感器和场区域之间的硬掩模的传感器部分和传感器堆叠的一部分暴露。 传感器从传感器堆叠在轨道宽度方向上定义。 硬偏置层被沉积。 硬偏置层的一部分位于场掩模上。 邻近传感器区域的一部分硬偏压层被密封。 场地面罩被提起。 传感器平坦化。

    Method and system for defining a read sensor using an ion mill planarization
    3.
    发明授权
    Method and system for defining a read sensor using an ion mill planarization 有权
    使用离子磨机平面化定义读取传感器的方法和系统

    公开(公告)号：US08597528B1

    公开(公告)日：2013-12-03

    申请号：US13076103

    申请日：2011-03-30

    申请人： Anup G. Roy ,  Ming Mao

    发明人： Anup G. Roy ,  Ming Mao

    IPC分类号： B44C1/22

    CPC分类号： H01L43/12 ,  G01R33/093 ,  G01R33/098 ,  G11B5/3163 ,  G11B5/3932

    摘要： A method and system for fabricating a magnetic transducer is described. A magnetic junction is defined from the magnetoresistive stack. The magnetic junction has a top and a plurality of sides. The step of defining the magnetic junction redeposits a portion of the magnetoresistive stack and forms fencing adjacent to the top of the magnetic junction. At least one hard bias structure is provided after the magnetic junction is defined. A first portion of the at least one hard bias structure is substantially adjacent to the magnetoresistive junction in a track-width direction. The magnetic junction is ion beam planarized, thereby substantially removing the fencing.

    摘要翻译： 描述了用于制造磁换能器的方法和系统。 从磁阻叠层定义磁结。 磁性接头具有顶部和多个侧面。 限定磁结的步骤重新沉积磁阻堆叠的一部分并且形成与磁结的顶部相邻的围栏。 在确定了磁结后，提供了至少一个硬偏置结构。 至少一个硬偏压结构的第一部分基本上与轨道宽度方向上的磁阻结相邻。 磁结是离子束平坦化的，从而基本上除去围栏。

    Antiferromagnetically-coupled soft bias magnetoresistive read head, and fabrication method therefore
    4.
    发明授权
    Antiferromagnetically-coupled soft bias magnetoresistive read head, and fabrication method therefore 有权
    反铁磁耦合软偏置磁阻读头，因此制造方法

    公开(公告)号：US08611054B1

    公开(公告)日：2013-12-17

    申请号：US13444723

    申请日：2012-04-11

    申请人： Changhe Shang ,  Daniele Mauri ,  Kuok San Ho ,  Anup G. Roy ,  Ming Mao

    发明人： Changhe Shang ,  Daniele Mauri ,  Kuok San Ho ,  Anup G. Roy ,  Ming Mao

    IPC分类号： G11B5/39

    CPC分类号： G11B5/3932 ,  G01R33/093 ,  G11B5/3909 ,  G11B2005/3996 ,  H01F10/3218 ,  H01F10/3254

    摘要： A magnetic read transducer is described with a magnetoresistive sensor that has a free layer, and an antiferromagnetically-coupled (AFC) soft bias layer for magnetically biasing the free layer. The free layer has a first edge in a track width direction along an air-bearing surface (ABS). At least a portion of the AFC soft bias layer is conformal to at least a portion of a second edge of the free layer, and situated to form a magnetic moment at an angle with respect to a center line of the free layer. The center line of the free layer extends in the same direction as the free layer first edge that is in the track width direction along the ABS.

    摘要翻译： 用具有自由层的磁阻传感器和用于磁偏置自由层的反铁磁耦合（AFC）软偏置层来描述磁读取传感器。 自由层具有沿空气轴承表面（ABS）的轨道宽度方向上的第一边缘。 AFC柔性偏置层的至少一部分与自由层的第二边缘的至少一部分共形，并且位于相对于自由层的中心线形成一个角度的磁矩。 自由层的中心线沿与ABS沿轨道宽度方向的自由层第一边缘相同的方向延伸。

    Method and system for providing a read transducer having soft and hard magnetic bias structures
    5.
    发明授权
    Method and system for providing a read transducer having soft and hard magnetic bias structures 有权
    用于提供具有软和硬磁偏置结构的读取换能器的方法和系统

    公开(公告)号：US08760823B1

    公开(公告)日：2014-06-24

    申请号：US13332313

    申请日：2011-12-20

    申请人： Laurence L. Chen ,  Anup G. Roy ,  Yunfei Ding ,  Ming Mao ,  Amritpal S. Rana ,  Daniele Mauri

    发明人： Laurence L. Chen ,  Anup G. Roy ,  Yunfei Ding ,  Ming Mao ,  Amritpal S. Rana ,  Daniele Mauri

    IPC分类号： G11B5/39

    CPC分类号： G11B5/3903 ,  G11B5/3912 ,  G11B5/3932 ,  G11B5/398

    摘要： A method and system provide a magnetic transducer having an air-bearing surface (ABS). The magnetic transducer includes a first shield, a read sensor, at least one soft magnetic bias structure and at least one hard bias structure. The read sensor includes a sensor layer that has at least one edge in the track width direction along the ABS. The soft magnetic bias structure(s) are adjacent to the edge(s) of the sensor layer. The soft magnetic bias structure has a first permeability. The soft bias structure(s) are between the read sensor and the hard bias structure(s). The hard bias structure(s) are adjacent to a portion of the soft bias structure(s) and have a second permeability. The first permeability is at least ten multiplied by the second permeability.

    摘要翻译： 一种方法和系统提供具有空气轴承表面（ABS）的磁换能器。 磁换能器包括第一屏蔽，读取传感器，至少一个软磁偏置结构和至少一个硬偏压结构。 读取传感器包括沿ABS沿轨道宽度方向具有至少一个边缘的传感器层。 软磁偏置结构与传感器层的边缘相邻。 软磁偏置结构具有第一磁导率。 柔性偏置结构位于读取传感器和硬偏置结构之间。 硬偏压结构与软偏压结构的一部分相邻并且具有第二磁导率。 第一渗透率至少为乘以第二渗透率的十倍。

    Method of sputter depositing an alloy on a substrate
    6.
    发明申请
    Method of sputter depositing an alloy on a substrate 审中-公开
    将合金溅射沉积在基底上的方法

    公开(公告)号：US20070045102A1

    公开(公告)日：2007-03-01

    申请号：US11209907

    申请日：2005-08-23

    申请人： Chih-Ling Lee ,  Adrian Devasahayam ,  Ming Mao ,  Chih-Ching Hu ,  Vincent Ip ,  Piero Sferlazzo

    发明人： Chih-Ling Lee ,  Adrian Devasahayam ,  Ming Mao ,  Chih-Ching Hu ,  Vincent Ip ,  Piero Sferlazzo

    IPC分类号： C23C14/00

    CPC分类号： C23C14/352 ,  C23C14/165

    摘要： An improved planetary sputter deposition method for sputter depositing an alloy on a substrate wherein the sputter deposited amount, or thickness, of a specific material of the alloy can be controlled so that different substrates can be provided with an alloy having a different composition, i.e. having different percentages of the same materials, thus, reducing the costs of stockpiling multiple alloy targets. The method generally includes providing a substrate and a plurality of targets with each of the plurality of targets being composed of one or more magnetic materials. The targets are sputtered, in sequence, to deposit each of the materials of the plurality of targets on the substrate to provide at least one laminate defining an alloy.

    摘要翻译： 一种用于在基板上溅射沉积合金的改进的行星溅射沉积方法，其中可以控制合金的特定材料的溅射沉积量或厚度，使得可以提供具有不同组成的合金，即具有 不同百分比的相同材料，从而降低储存多种合金靶材的成本。 该方法通常包括提供基底和多个靶，其中多个靶中的每一个由一个或多个磁性材料构成。 按顺序溅射靶，以将多个靶材的每种材料沉积在基底上，以提供限定合金的至少一个层压板。

    Method of forming thin oxidation layer by cluster ion beam
    8.
    发明授权
    Method of forming thin oxidation layer by cluster ion beam 失效

    公开(公告)号：US06800565B2

    公开(公告)日：2004-10-05

    申请号：US10341282

    申请日：2003-01-13

    申请人： Chih-Ching Hu ,  Adrian J. Devasahayam ,  Patricia L. Cox ,  Chih-Ling Lee ,  Ming Mao ,  Jacques C. S. Kools

    发明人： Chih-Ching Hu ,  Adrian J. Devasahayam ,  Patricia L. Cox ,  Chih-Ling Lee ,  Ming Mao ,  Jacques C. S. Kools

    IPC分类号： H01L2131

    CPC分类号： C23C14/5833 ,  C23C8/02 ,  C23C26/00 ,  C23C28/00 ,  G11B5/84

    摘要： A method of forming a thin-film magnetic element, such as a TMR element or a spin valve element, on a substrate wherein at least a surface portion of a nonmagnetic metal layer is oxidized by cluster ion beam (CIB) oxidation. Specifically, the method comprises depositing a first magnetic layer on a substrate, then depositing a nonmagnetic metal layer on the first magnetic layer. At least a top surface of the nonmagnetic layer is oxidized by CIB oxidation. In one embodiment, only a top surface portion is oxidized such that a nano-oxide layer (NOL) is formed on a nonmagnetic conductive layer. In another embodiment, the nonmagnetic metal layer is oxidized throughout it's thickness such that the layer is converted to a nonmagnetic insulating film. After oxidation, a second magnetic layer is deposited on the oxidized layer. Oxidizing by cluster ion beam oxidation advantageously comprises mixing a pressurized inert carrier gas with oxygen gas to form a gas mixture and passing the gas mixture into a low pressure vacuum to produce a supersonic gas jet, whereby expansion occurs in the jet to cause formation of clusters of inert gas and oxygen atoms and molecules. The clusters are then ionized and focused into a cluster ion beam and accelerated toward the top surface of the nonmagnetic metal layer to bombard the top surface and react the ionized oxygen atoms and molecules with at least the top surface of the nonmagnetic metal layer.

    Method and system for providing a side shielded read transducer
    9.
    发明授权
    Method and system for providing a side shielded read transducer 有权
    提供侧屏蔽读取传感器的方法和系统

    公开(公告)号：US08630068B1

    公开(公告)日：2014-01-14

    申请号：US13296970

    申请日：2011-11-15

    申请人： Daniele Mauri ,  Chih-Ching Hu ,  Ming Mao ,  Kuok San Ho ,  Savas Gider

    发明人： Daniele Mauri ,  Chih-Ching Hu ,  Ming Mao ,  Kuok San Ho ,  Savas Gider

    IPC分类号： G11B5/39

    CPC分类号： G11B5/3909 ,  B82Y10/00 ,  G11B5/3912 ,  G11B2005/3996

    摘要： A method and system for providing a magnetic transducer having an air-bearing surface (ABS) is described. The magnetic read transducer includes a first shield, a magnetoresistive sensor, at least one soft magnetic side shield, and a second shield. The magnetoresistive sensor includes a sensor layer having at least one edge in the track width direction along the ABS. The at least one soft magnetic side shield is adjacent to the at least one edge of the sensor layer. The at least one soft magnetic side shield has a full film permeability of at least ten. The magnetoresistive sensor is between the first shield and the second shield and free of an in-stack hard bias layer.

    摘要翻译： 描述了一种用于提供具有空气轴承表面（ABS）的磁换能器的方法和系统。 磁读取传感器包括第一屏蔽，磁阻传感器，至少一个软磁侧屏蔽和第二屏蔽。 磁阻传感器包括具有沿ABS的轨道宽度方向上的至少一个边缘的传感器层。 所述至少一个软磁侧屏蔽件邻近所述传感器层的所述至少一个边缘。 所述至少一个软磁侧屏具有至少十个全透膜度。 磁阻传感器位于第一屏蔽和第二屏蔽之间，并且没有堆叠内的硬偏置层。

    Method and system for providing an improved hard bias structure
    10.
    发明授权
    Method and system for providing an improved hard bias structure 有权
    提供改进的硬偏置结构的方法和系统

    公开(公告)号：US08343319B1

    公开(公告)日：2013-01-01

    申请号：US12238156

    申请日：2008-09-25

    申请人： Guanxiong Li ,  Xiaohai Xiang ,  Ming Mao ,  Mahendra Pakala

    发明人： Guanxiong Li ,  Xiaohai Xiang ,  Ming Mao ,  Mahendra Pakala

    IPC分类号： C23C14/34

    CPC分类号： G11B5/3932 ,  G11B5/3163

    摘要： A method and system for providing a magnetic transducer is described. The method and system define a magnetoresistive sensor in a track width direction, provide hard bias material(s) adjacent to the sensor in the track width direction, and provide sacrificial capping layer(s) on a portion of the hard bias material(s). The sacrificial capping layer(s) have a first height in a stripe height direction. The method and system also provide a mask for defining a stripe height of the sensor. The mask covers at least part of the sensor and has a second height in the stripe height direction. The second height is less than the first height. The method and system define the stripe height of the sensor while the mask covers the sensor. The sacrificial capping layer(s) are configured to prevent removal of the portion of the hard bias material(s) while the stripe height is defined.

    摘要翻译： 描述了一种用于提供磁换能器的方法和系统。 该方法和系统在磁道宽度方向上限定磁阻传感器，在磁道宽度方向上提供与传感器相邻的硬偏置材料，并在硬偏置材料的一部分上提供牺牲性覆盖层， 。 牺牲覆盖层具有条纹高度方向上的第一高度。 该方法和系统还提供用于定义传感器的条纹高度的掩模。 掩模覆盖传感器的至少一部分，并且在条纹高度方向上具有第二高度。 第二个高度小于第一个高度。 该方法和系统定义传感器的条纹高度，同时掩模覆盖传感器。 牺牲覆盖层被构造成在限定条纹高度的同时防止去除硬偏移材料的一部分。