EPROM CELL WITH MODIFIED FLOATING GATE
    11.
    发明申请
    EPROM CELL WITH MODIFIED FLOATING GATE 有权
    具有改性浮选门的EPROM单元

    公开(公告)号:US20170069639A1

    公开(公告)日:2017-03-09

    申请号:US15119989

    申请日:2014-03-14

    Abstract: An electronically programmable read-only memory (EPROM) cell includes a semiconductor substrate having source and drain regions; a floating gate, adjacent to the source and drain regions and separated from the semiconductor substrate by a first dielectric layer, the floating gate including: a polysilicon layer formed over the first dielectric layer; a first metal layer electrically connected to the polysilicon layer, where the surface area of the first metal layer is less than 1000 μm2; and a control gate comprising a second metal layer, capacitively coupled to the first metal layer through a second dielectric material disposed therebetween.

    Abstract translation: 电子可编程只读存储器(EPROM)单元包括具有源区和漏区的半导体衬底; 浮置栅极,与源极和漏极区相邻并且通过第一介电层与半导体衬底分离,所述浮置栅极包括:形成在第一介电层上的多晶硅层; 电连接到多晶硅层的第一金属层,其中第一金属层的表面积小于1000μm2; 以及包括第二金属层的控制栅极,所述第二金属层通过设置在其间的第二介电材料电容耦合到所述第一金属层。

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