公开(公告)号：US20170025365A1

公开(公告)日：2017-01-26

申请号：US14660726

申请日：2015-03-17

Applicant: Honeywell International Inc. ,  Cornell University

Inventor： Steven Tin ,  Jeffrey James Kriz ,  Steven J. Eickhoff ,  Jeff A. Ridley ,  Amit Lal ,  Christopher Ober ,  Serhan Ardanuc ,  Ved Gund ,  Alex Ruyack ,  Katherine Camera

IPC: H01L23/00 ,  C23C16/26 ,  C23C16/44 ,  H01L25/16 ,  B81C1/00 ,  H01L21/306 ,  H01L21/268 ,  H01L21/02 ,  H01L21/311 ,  H01L21/768 ,  B29C35/02 ,  B81B7/00

CPC classification number: H01L23/564 ,  B29C35/02 ,  B29L2031/34 ,  B81B7/0077 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81C1/00333 ,  B81C2201/013 ,  C23C16/26 ,  C23C16/44 ,  H01L21/02118 ,  H01L21/268 ,  H01L21/30604 ,  H01L21/31133 ,  H01L21/76837 ,  H01L21/76877 ,  H01L21/76898 ,  H01L23/57 ,  H01L23/573 ,  H01L23/576 ,  H01L23/58 ,  H01L25/16 ,  H01L2223/6677 ,  H01L2924/0002 ,  H01L2924/14 ,  H01M8/2475 ,  H01L2924/00

Abstract: Embodiments herein provide for a self-destructing chip including at least a first die and a second die. The first die includes an electronic circuit, and the second die is composed of one or more polymers that disintegrates at a first temperature. The second die defines a plurality of chambers, wherein a first subset of the chambers contain a material that reacts with oxygen in an exothermic manner. A second subset of the chambers contain an etchant to etch materials of the first die. In response to a trigger event, the electronic circuit is configured to expose the material in the first subset of chambers to oxygen in order to heat the second die to at least the first temperature, and is configured to release the etchant from the second subset of the chambers to etch the first die.

Abstract translation: 本文的实施例提供了包括至少第一模具和第二模具的自毁芯片。 第一模具包括电子电路，第二模具由在第一温度下分解的一种或多种聚合物组成。 第二模具限定多个室，其中室的第一子集含有以放热方式与氧反应的材料。 腔室的第二子集含有蚀刻剂以蚀刻第一管芯的材料。 响应于触发事件，电子电路被配置为将室的第一子集中的材料暴露于氧气，以便将第二管芯加热至少第一温度，并且被配置为将蚀刻剂从第二子集 这些腔室蚀刻第一个模具。

公开(公告)号：US20150204899A1

公开(公告)日：2015-07-23

申请号：US14162697

申请日：2014-01-23

Applicant: Honeywell International Inc.

Inventor： Kenneth Salit ,  Mary Salit ,  Robert Compton ,  Jeff A. Ridley ,  Karl Nelson

IPC: G01P15/093 ,  B81B7/02

CPC classification number: G01P15/093 ,  B81B7/02 ,  G01P1/006 ,  G01P15/08 ,  G01P15/12 ,  G01P15/131

Abstract: In some examples, a micro-electro-mechanical system (MEMS) optical accelerometer includes a housing comprising an internal chamber that includes a Fabry-Perot cavity and a proof mass affixed to the housing via one or more elastic elements, a light source configured to emit radiation, a first detector configured to receive radiation transmitted through the Fabry-Perot cavity and configured to generate one or more signals that indicate a position of the proof mass. The MEMS optical accelerometer further comprises an atomic wavelength reference and a second detector configured to detect radiation transmitted through the atomic wavelength reference and configured to generate one or more signals that indicate a wavelength of the radiation emitted by the light source, and a servomechanism electrically coupled to the second photo detector and the light source, configured to adjust the light source to maintain the radiation emitted by the light source at approximately a selected wavelength.

Abstract translation: 在一些示例中，微电子机械系统（MEMS）光学加速度计包括壳体，该壳体包括内部腔室，该内部腔室包括法布里 - 珀罗空腔和经由一个或多个弹性元件固定到壳体的校验物质， 发射辐射，第一检测器被配置为接收透射通过法布里 - 珀罗腔的辐射并被配置为产生指示证明质量位置的一个或多个信号。 MEMS光学加速度计还包括原子波长参考和第二检测器，其被配置为检测透射原子波长参考的辐射并被配置为产生指示由光源发射的辐射的波长的一个或多个信号，以及电耦合的伺服机构 所述第二光检测器和所述光源被配置为调节所述光源以将由所述光源发射的辐射保持在大致选定的波长。

公开(公告)号：US08941442B2

公开(公告)日：2015-01-27

申请号：US13662850

申请日：2012-10-29

Applicant: Honeywell International Inc.

Inventor： Daniel W. Youngner ,  Jeff A. Ridley ,  Son T. Lu

IPC: H01L21/31 ,  H01S1/06 ,  G04F5/14

CPC classification number: G04F5/14 ,  Y10T428/24149

Abstract: A method of fabricating one or more vapor cells comprises forming one or more vapor cell dies in a first wafer having a first diameter, and anodically bonding a second wafer to a first side of the first wafer over the vapor cell dies, the second wafer having a second diameter. A third wafer is positioned over the vapor cell dies on a second side of the first wafer opposite from the second wafer, with the third wafer having a third diameter. A sacrificial wafer is placed over the third wafer, with the sacrificial wafer having a diameter that is larger than the first, second and third diameters. A metallized bond plate is located over the sacrificial wafer. The third wafer is anodically bonded to the second side of the first wafer when a voltage is applied to the metallized bond plate while the sacrificial wafer is in place.

Abstract translation: 一种制造一个或多个蒸汽池的方法包括在具有第一直径的第一晶片中形成一个或多个蒸汽池模具，并且将第二晶片阳极结合到第一晶片的第一侧上，在第二晶圆上方， 第二直径。 第三晶片位于第一晶片与第二晶片相对的第二侧上的蒸汽单元上，第三晶片具有第三直径。 牺牲晶片放置在第三晶片上，牺牲晶片的直径大于第一，第二和第三直径。 金属化接合板位于牺牲晶片上方。 当牺牲晶片就位时，将第三晶片阳极接合到第一晶片的第二侧，当电压施加到金属化接合板时。

公开(公告)号：US08829423B2

公开(公告)日：2014-09-09

申请号：US13663057

申请日：2012-10-29

Applicant: Honeywell International Inc.

Inventor： Robert Compton ,  Robert D. Horning ,  Jeff A. Ridley

IPC: H05H3/02 ,  H05H3/00

CPC classification number: G21K1/006 ,  G01C19/58 ,  G01P15/08 ,  G04F5/14 ,  Y10T29/49826

Abstract: System and methods for a vacuum cell apparatus for an atomic sensor are provided. In at least one embodiment, the apparatus comprises a cell wall encircling an enclosed volume, the cell wall having a first open end and a second open end opposite from the first open end and a first panel over the first open end of the cell wall and having a first surface, the first surface facing the enclosed volume and having a first set of diffractive optics therein. Further, the apparatus comprises a second panel over the second open end of the cell wall and having a second surface, the second surface facing the enclosed volume and having a second set of diffractive optics therein; wherein the first set of diffractive optics and the second of diffractive optics are configured to reflect at least one optical beam within the enclosed volume along a predetermined optical path.

Abstract translation: 提供了一种用于原子传感器的真空电池装置的系统和方法。 在至少一个实施例中，该装置包括围绕封闭容积的细胞壁，细胞壁具有第一开放端和与第一开放端相对的第二开口端和在细胞壁的第一开口端上的第一面板， 具有第一表面，所述第一表面面向所述封闭容积并且在其中具有第一组衍射光学元件。 此外，该装置包括在细胞壁的第二开口端上的第二面板，并具有第二表面，第二表面面向封闭容积并且在其中具有第二组衍射光学元件; 其中所述第一组衍射光学器件和所述第二衍射光学器件被配置为沿着预定光学路径反射所述封闭容积内的至少一个光束。