公开(公告)号：US20050090598A1

公开(公告)日：2005-04-28

申请号：US10995107

申请日：2004-11-24

申请人： Hiroyuki Tanaka ,  Masanori Hasegawa ,  Tsuyoshi Noguchi ,  Katsuhiko Higashino

发明人： Hiroyuki Tanaka ,  Masanori Hasegawa ,  Tsuyoshi Noguchi ,  Katsuhiko Higashino

IPC分类号： C08K3/36 ,  H01L23/29 ,  C08K3/34

CPC分类号： H01L23/293 ,  C08K3/36 ,  H01L2924/0002 ,  C08L27/12 ,  H01L2924/00

摘要： To provide a very clean elastomer molded article excellent in plasma resistance, having excellent property of metal-elution inhibition and is used suitably as a material for molded article for a semiconductor or liquid crystal manufacturing equipment. The molded article is obtained by crosslinking a crosslinkable elastomer composition comprising an elastomer component and a metal oxide filler comprising a silicon oxide filler containing impurity metals other than silicon in an amount of not more than 100 ppm. The molded article has an impurity metal content of not more than 100 ppm, and an increasing rate of particles generated by irradiating oxygen plasma to the article is not more than 1,000% or an amount of impurity metals other than silicon which is extracted with a 50% aqueous solution of HF is not more than 200 ppb.

摘要翻译： 为了提供耐溶剂性优异的非常干净的弹性体成型体，具有优异的金属洗脱性能，适用于半导体或液晶制造装置的成型品的材料。 模制品通过使包含弹性体组分的交联性弹性体组合物和包含不超过100ppm的含硅杂质金属的氧化硅填料的金属氧化物填料交联而获得。 模制品的杂质金属含量不大于100ppm，通过向制品照射氧等离子体而产生的颗粒的增加速率不超过1000％，或者以50被提取的除了硅以外的杂质金属的量 HF的％水溶液不超过200ppb。

公开(公告)号：US06683127B1

公开(公告)日：2004-01-27

申请号：US09743709

申请日：2001-01-16

申请人： Hiroyuki Tanaka ,  Masanori Hasegawa ,  Tsuyoshi Noguchi

发明人： Hiroyuki Tanaka ,  Masanori Hasegawa ,  Tsuyoshi Noguchi

IPC分类号： C08L304

CPC分类号： C08K3/04 ,  C08L21/00

摘要： A carbon black filler for crosslinkable elastomer composition having a content of impurity metals of not more than 300 ppm and a pH value of 5.0 to 11.0. The filler can be obtained by subjecting a starting carbon black filler to extraction treatment with an acid to reduce a content of impurity metals of the filler and then alkali treatment with an alkali to neutralize a remaining acid. The filler does not cause a crosslinking failure even when added to an elastomer composition and can provide an elastomer molded article suitable as a very clean sealing material for semi-conductor production apparatuses.

摘要翻译： 1.一种用于交联性弹性体组合物的炭黑填料，其杂质金属含量不超过300ppm，pH值为5.0〜11.0。 填充剂可以通过使起始炭黑填料用酸进行萃取处理来降低填料的杂质金属含量，然后用碱进行碱处理以中和残留的酸。 填充剂即使添加到弹性体组合物中也不会引起交联失败，并且可以提供适合作为用于半导体生产设备的非常干净的密封材料的弹性体模塑制品。

公开(公告)号：US06515064B1

公开(公告)日：2003-02-04

申请号：US09889009

申请日：2001-07-06

申请人： Hiroyuki Tanaka ,  Masanori Hasegawa ,  Tsuyoshi Noguchi ,  Katsuhiko Higashino

发明人： Hiroyuki Tanaka ,  Masanori Hasegawa ,  Tsuyoshi Noguchi ,  Katsuhiko Higashino

IPC分类号： C08K304

CPC分类号： C08J5/00 ,  C08J2321/00 ,  C08K3/04 ,  C08L21/00

摘要： To provide an elastomer molded article for a semiconductor manufacturing equipment which not only has cleanliness required but also has an excellent plasma resistance and an excellent property of metal-elution inhibition. The elastomer molded article is obtained by crosslinking a crosslinkable elastomer composition comprising a crosslinkable elastomer component and a carbon black filler having an average particle size of not more than 700 &mgr;m and an impurity metal content measured by an ashing analysis method of not more than 300 ppm and has an impurity metal content measured by an ashing analysis method of not more than 100 ppm. An increasing rate of particles generated by irradiating oxygen plasma to the article is not more than 500% or an amount of impurity metals extracted from the article with a 50% aqueous solution of HF is not more than 500 ppb.

摘要翻译： 为了提供一种用于半导体制造设备的弹性体模塑制品，其不仅需要清洁度，而且具有优异的等离子体电阻和优异的金属洗脱抑制性能。 弹性体成型体是将包含交联性弹性体成分和平均粒径为700μm以下的炭黑填料的交联性弹性体组合物和通过灰化分析法测定的杂质金属含量为300ppm以下， 并且通过灰化分析方法测定的不大于100ppm的杂质金属含量。 通过向制品照射氧等离子体而产生的颗粒的增加率不大于500％，或者用50％的HF水溶液从制品中提取的杂质金属的量不超过500ppb。

公开(公告)号：US06503986B1

公开(公告)日：2003-01-07

申请号：US09743708

申请日：2001-01-16

申请人： Hiroyuki Tanaka ,  Sadashige Irie ,  Tsuyoshi Noguchi ,  Mitsuru Kishine

发明人： Hiroyuki Tanaka ,  Sadashige Irie ,  Tsuyoshi Noguchi ,  Mitsuru Kishine

IPC分类号： C08L2712

CPC分类号： C09K3/1009 ,  C08F293/005 ,  C08L27/12 ,  C08L27/16 ,  C08L27/18 ,  C08L53/00 ,  C08L2666/24 ,  C08L2666/02 ,  C08L2666/04

摘要： To provide a fluorine-containing rubber composition comprising (a-1) a non-perfluoro fluorine-containing rubber and (b-1) a fluorine-containing multi-segment polymer comprising an elastomeric fluorine-containing polymer chain segment and non-elastomeric fluorine-containing polymer chain segment, in which structural units of each of the elastomeric fluorine-containing polymer chain segment and the non-elastomeric fluorine-containing polymer chain segment comprise not less than 90% by mole of a perhalo olefin unit. The fluorine-containing rubber composition is capable of providing a clean sealing material for semi-conductor production apparatuses without using a filler.

摘要翻译： 为了提供含有（a-1）非全氟含氟橡胶的氟橡胶组合物和（b-1）含有弹性体含氟聚合物链段和非弹性体氟的含氟多段聚合物 聚合物链段，其中弹性体含氟聚合物链段和非弹性含氟聚合物链段的结构单元包括不少于90摩尔％的全卤代烯烃单元。 含氟橡胶组合物能够在不使用填料的情况下为半导体制造装置提供清洁的密封材料。

公开(公告)号：US08309660B2

公开(公告)日：2012-11-13

申请号：US12903474

申请日：2010-10-13

申请人： Hiroyuki Tanaka ,  Tsuyoshi Noguchi

发明人： Hiroyuki Tanaka ,  Tsuyoshi Noguchi

IPC分类号： C08L27/12

CPC分类号： C09K3/1009 ,  F16J15/102 ,  Y10T428/24355

摘要： The present invention provides a perfluoroelastomer seal material in which adhesive strength, contamination, corrosion and color change of a contacted surface with a seal material are improved, and an amount of an uncrosslinked polymer component is at most 1% by weight, measured under specific conditions, and a process for preparing the same. The present invention relates to a perfluoroelastomer seal material, wherein a rate of weight decrease is at most 1% by weight when the seal material is immersed into perfluoro(tri-n-butyl) amine at 60° C. for 70 hours and is dried at 90° C. for 5 hours, 125° C. for 5 hours and 200° C. for 10 hours after taken out of the emersion. And, the present invention also relates to a process for preparing a perfluoroelastomer seal material comprising a step of treating with a solvent having at least 50% of a swelling rate based on said molded article, when said molded article is immersed at 60° C. for 70 hours.

摘要翻译： 本发明提供了一种全氟弹性体密封材料，其中改善了与密封材料的接触表面的粘合强度，污染物，腐蚀和颜色变化，并且在特定条件下测量的未交联聚合物组分的量为至多1重量％ ，及其制备方法。 全氟弹性体密封材料技术领域本发明涉及一种全氟弹性体密封材料，其中当密封材料在60℃下浸入全氟（三正丁基）胺中70小时时，其重量减少率至多为1重量％，并干燥 在90℃，5小时，125℃，5小时和200℃，10分钟后脱出。 另外，本发明还涉及一种全氟弹性体密封材料的制造方法，其特征在于，在将所述成形体浸渍于60℃时，使用具有基于所述成型体的至少50％的溶胀率的溶剂进行处理的工序。 70个小时。

公开(公告)号：US08173727B2

公开(公告)日：2012-05-08

申请号：US12264089

申请日：2008-11-03

申请人： Hirofumi Nishibayashi ,  Takafumi Yamato ,  Katsuhiko Higashino ,  Hiroyuki Tanaka ,  Tsuyoshi Noguchi

发明人： Hirofumi Nishibayashi ,  Takafumi Yamato ,  Katsuhiko Higashino ,  Hiroyuki Tanaka ,  Tsuyoshi Noguchi

IPC分类号： C08L1/00

CPC分类号： C08L27/18 ,  C08G73/101 ,  C08L79/08 ,  C08L101/00 ,  C08L2666/14 ,  C08L2666/02

摘要： The present invention provides a crosslinkable elastomer composition, in which generation of HF under high temperature conditions is reduced, the decrease in weight to both NF3 plasma treatment and O3 treatment in the semiconductor manufacturing process is small and generation of foreign substances (particles) in these treatments is suppressed significantly. Specifically, the present invention relates to a crosslinkable elastomer composition comprising a crosslinkable elastomer and a filler having a specific surface area of at least 0.5 m2/g and containing a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain, a crosslinkable elastomer composition comprising a crosslinkable elastomer and nonoxide ceramics and a crosslinkable elastomer composition wherein the decrease in weight by NF3 plasma irradiation is at most 0.20%.

摘要翻译： 本发明提供了一种可交联弹性体组合物，其中在高温条件下产生HF，在半导体制造过程中，NF3等离子体处理和O 3处理两者的重量减少很小，并且在这些中产生异物（颗粒） 治疗显着抑制。 具体地说，本发明涉及可交联弹性体组合物，其包含可交联弹性体和比表面积至少为0.5m 2 / g的填料，并且含有在主链中具有热和化学稳定的芳环的合成聚合物，可交联的 包含可交联弹性体和非氧化物陶瓷的弹性体组合物和可交联弹性体组合物，其中NF 3等离子体照射的重量减少至多0.20％。

公开(公告)号：US06756445B1

公开(公告)日：2004-06-29

申请号：US10089523

申请日：2002-03-29

申请人： Sadashige Irie ,  Kazuyoshi Mimura ,  Hirofumi Nishibayashi ,  Hiroyuki Tanaka ,  Tsuyoshi Noguchi ,  Mitsuru Kishine

发明人： Sadashige Irie ,  Kazuyoshi Mimura ,  Hirofumi Nishibayashi ,  Hiroyuki Tanaka ,  Tsuyoshi Noguchi ,  Mitsuru Kishine

IPC分类号： C08L2100

CPC分类号： C08L21/00 ,  C08L27/12 ,  C08L27/18 ,  C08L2205/02 ,  C08L2666/04

摘要： A transparent elastomer composition is obtained by co-coagulation of an emulsion of fluorine-containing resin fine particles having an average particle size of from 20 to 150 nm and an emulsion of elastomer particles, in which the fluorine-containing resin fine particles are finely dispersed uniformly in the elastomer. The transparent elastomer composition provides an elastomeric molded article having excellent mechanical strength, abrasion resistance and transparency.

公开(公告)号：US20110028655A1

公开(公告)日：2011-02-03

申请号：US12903474

申请日：2010-10-13

申请人： Hiroyuki Tanaka ,  Tsuyoshi Noguchi

发明人： Hiroyuki Tanaka ,  Tsuyoshi Noguchi

IPC分类号： C08F214/18

CPC分类号： C09K3/1009 ,  F16J15/102 ,  Y10T428/24355

摘要： The present invention provides a perfluoroelastomer seal material in which adhesive strength, contamination, corrosion and color change of a contacted surface with a seal material are improved, and an amount of an uncrosslinked polymer component is at most 1% by weight, measured under specific conditions, and a process for preparing the same. The present invention relates to a perfluoroelastomer seal material, wherein a rate of weight decrease is at most 1% by weight when the seal material is immersed into perfluoro(tri-n-butyl) amine at 60° C. for 70 hours and is dried at 90° C. for 5 hours, 125° C. for 5 hours and 200° C. for 10 hours after taken out of the emersion. And, the present invention also relates to a process for preparing a perfluoroelastomer seal material comprising a step of treating with a solvent having at least 50% of a swelling rate based on said molded article, when said molded article is immersed at 60° C. for 70 hours.

摘要翻译： 本发明提供了一种全氟弹性体密封材料，其中改善了与密封材料的接触表面的粘合强度，污染物，腐蚀和颜色变化，并且在特定条件下测量的未交联聚合物组分的量为至多1重量％ ，及其制备方法。 全氟弹性体密封材料技术领域本发明涉及一种全氟弹性体密封材料，其中当密封材料在60℃下浸入全氟（三正丁基）胺中70小时时，其重量减少率至多为1重量％，并干燥 在90℃，5小时，125℃，5小时和200℃，10分钟后脱出。 另外，本发明还涉及一种全氟弹性体密封材料的制造方法，其特征在于，在将所述成形体浸渍于60℃时，使用具有基于所述成型体的至少50％的溶胀率的溶剂进行处理的工序。 70个小时。

公开(公告)号：US20050004298A1

公开(公告)日：2005-01-06

申请号：US10901955

申请日：2004-07-30

申请人： Hiroyuki Tanaka ,  Masanori Hasegawa ,  Tsuyoshi Noguchi ,  Katsuhiko Higashino ,  Yosuke Nishimura

发明人： Hiroyuki Tanaka ,  Masanori Hasegawa ,  Tsuyoshi Noguchi ,  Katsuhiko Higashino ,  Yosuke Nishimura

IPC分类号： C08K9/02 ,  C08K9/06 ,  H01L23/29 ,  C08K3/34

CPC分类号： C08K9/06 ,  C08K9/02 ,  H01L23/293 ,  H01L2924/0002 ,  H01L2924/00

摘要： To provide a crosslinkable elastomer composition which is excellent in mechanical properties, ensures a small amount of outgas such as DOP and is suitable as a very clean material for molded article for semiconductor production apparatuses. The composition comprises a crosslinkable elastomer component and ultra fine powders of silicon oxide, in which the ultra fine powders of silicon oxide have 100×1019 or less hydroxyl groups per gram on surfaces thereof, dioctylphthalate adsorption of not more than 8 μg per 1 g of silicon oxide and an average particle size of not more than 0.5 μm.

摘要翻译： 为了提供机械特性优异的交联性弹性体组合物，可以确保少量的DOP等排气，适合作为半导体制造装置的成型品的非常干净的材料。 该组合物包含可交联弹性体组分和氧化硅超细粉末，其中氧化硅的超细粉末在其表面上具有每克表面100×10 19或更少的羟基，邻苯二甲酸二辛酯吸附量不超过8gug / g 的氧化硅，平均粒径为0.5μm以下。

公开(公告)号：US07495046B2

公开(公告)日：2009-02-24

申请号：US10498939

申请日：2002-12-13

申请人： Hirofumi Nishibayashi ,  Takafumi Yamato ,  Katsuhiko Higashino ,  Hiroyuki Tanaka ,  Tsuyoshi Noguchi

发明人： Hirofumi Nishibayashi ,  Takafumi Yamato ,  Katsuhiko Higashino ,  Hiroyuki Tanaka ,  Tsuyoshi Noguchi

IPC分类号： C08L1/00

CPC分类号： C08L27/18 ,  C08G73/101 ,  C08L79/08 ,  C08L101/00 ,  C08L2666/14 ,  C08L2666/02

摘要： The present invention provides a crosslinkable elastomer composition, in which generation of HF under high temperature conditions is reduced, the decrease in weight to both NF3 plasma treatment and O3 treatment in the semiconductor manufacturing process is small and generation of foreign substances (particles) in these treatments is suppressed significantly. Specifically, the present invention relates to a crosslinkable elastomer composition comprising a crosslinkable elastomer and a filler having a specific surface area of at least 0.5 m2/g and containing a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain, a crosslinkable elastomer composition comprising a crosslinkable elastomer and nonoxide ceramics and a crosslinkable elastomer composition wherein the decrease in weight by NF3 plasma irradiation is at most 0.20%.

摘要翻译： 本发明提供了一种可交联弹性体组合物，其中在高温条件下产生HF，在半导体制造过程中，NF3等离子体处理和O 3处理两者的重量减少很小，并且在这些中产生异物（颗粒） 治疗显着抑制。 具体地说，本发明涉及可交联弹性体组合物，其包含可交联弹性体和比表面积至少为0.5m 2 / g的填料，并且含有在主链中具有热和化学稳定的芳环的合成聚合物，可交联的 包含可交联弹性体和非氧化物陶瓷的弹性体组合物和可交联弹性体组合物，其中NF 3等离子体照射的重量减少至多0.20％。