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公开(公告)号：US06946513B2
公开(公告)日：2005-09-20
申请号：US10275685
申请日：2001-04-27
CPC分类号： C08F214/18 , H01L23/293 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要： There is provided an elastomer composition which is prepared by using a very clean filler reduced in both of an amount of moisture generation and an amount of organic outgas generation and is suitable as a molding material for semiconductor production apparatuses and there is provided a molded article. The composition is a crosslinkable composition comprising a high molecular weight polymer, particularly a crosslinkable fluorine-containing elastomer and a filler which has a weight reduction ratio per unit surface area of not more than 2.5×10−5% by weight/m2 when heating at 200° C. for two hours and a total amount of organic gas generated of not more than 2.5 ppm when heating at 200° C. for 15 minutes. The molded article is produced from the crosslinkable composition.
摘要翻译： 提供一种弹性体组合物，其通过使用在水分产生量和有机废气产生量中减少的非常干净的填料制备，并且适合作为半导体制造装置的成型材料，并且提供了模制品。 该组合物是包含高分子量聚合物，特别是可交联的含氟弹性体和填料的交联组合物，其每单位表面积的重量减少率不超过2.5×10 -5％ 在200℃下加热2小时，并且在200℃下加热15分钟时产生的有机气体总量不超过2.5ppm的总重量/ m 2。 模制品由可交联组合物制备。
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2.发明授权Fluorine-containing olefin, fluorine-containing polymer and thermoplastic resin composition prepared by using said polymer 失效含氟烯烃，含氟聚合物和通过使用所述聚合物制备的热塑性树脂组合物
公开(公告)号：US5986150A
公开(公告)日：1999-11-16
申请号：US856594
申请日：1997-05-15
IPC分类号： C07C33/42 , C07C43/178 , C07C57/52 , C07C69/708 , C07D303/24 , C08F14/18 , C08F214/18 , C08F216/14 , C08F220/22 , C08L27/12 , C08L67/00 , C08L67/02 , C08L69/00 , C08L77/00 , C07C41/00 , C07D303/08
CPC分类号： C08L27/12 , C07C33/423 , C07C43/178 , C07C57/52 , C07C69/708 , C07D303/24 , C08F14/185 , C08F214/184 , C08L67/00 , C08L67/02 , C08L69/00 , C08L2205/02 , C08L77/00
摘要： To provide a fluorine-containing olefin represented, for example, by CH.sub.2 .dbd.CFCF.sub.2 --R.sub.f.sup.6 --(CH.sub.2).sub.k --X.sup.2 [wherein, X.sup.2 is ##STR1## R.sub.f.sup.6 is a fluorine-substituted fluorine-containing alkyl group having 1 to 40 carbon atoms or --OR.sub.f.sup.7 --(Rf.sup.7 is a fluorine-substituted fluorine-containing alkyl group having 1 to 40 carbon atoms or a fluorine-substituted fluorine-containing ether group having 3 to 50 carbon atoms), k is 0 or an integer of 1 to 6]; a fluorine-containing polymer with functional group which is prepared by polymerizing the above-mentioned olefin, has good affinity with various heat-resisting thermoplastic resins and is capable of forming homogeneous dispersion with the thermoplastic resin; and a thermoplastic resin composition comprising the above-mentioned fluorine-containing polymer with functional group and an aromatic polyester or the like as the heat-resisting thermoplastic resin.
摘要翻译： 提供例如通过CH 2 = CFCF 2 -R f 6 - （CH 2）k -X 2表示的含氟烯烃[其中，X 2是Rf 6是具有1〜40个碳原子的氟取代的含氟烷基或-OR f7 - （Rf7为碳原子数为1〜40的氟取代的含氟烷基或碳原子数为3〜50的氟取代的含氟醚基），k为0或1〜6的整数]。 通过聚合上述烯烃制备的具有官能团的含氟聚合物与各种耐热性热塑性树脂具有良好的亲和性，并且能够与热塑性树脂形成均匀的分散体; 以及包含上述具有官能团的含氟聚合物和芳族聚酯等作为耐热性热塑性树脂的热塑性树脂组合物。
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公开(公告)号：US5869574A
公开(公告)日：1999-02-09
申请号：US838063
申请日：1997-04-17
申请人： Tetsuo Shimizu , Yoshihisa Yamamoto , Seitaro Yamaguchi , Nobuhiko Tsuda , Noriyasu Yamane , Takafumi Yamato , Masahiro Kumegawa , Takayuki Araki
发明人： Tetsuo Shimizu , Yoshihisa Yamamoto , Seitaro Yamaguchi , Nobuhiko Tsuda , Noriyasu Yamane , Takafumi Yamato , Masahiro Kumegawa , Takayuki Araki
IPC分类号： C08G59/30 , C08G59/32 , C08G61/12 , C08L27/12 , C08L27/16 , C08L67/00 , C08L67/02 , C08L67/03 , C08L69/00 , C08L71/10 , C08L77/00 , C08L77/02 , C08L77/06 , C08L81/04 , C08L101/00
CPC分类号： C08L77/06 , C08G59/30 , C08G59/3254 , C08G61/12 , C08L101/00 , C08L27/12 , C08L27/16 , C08L67/00 , C08L67/02 , C08L67/03 , C08L69/00 , C08L77/00 , C08L77/02 , C08L81/04 , C08L2201/00
摘要： A thermoplastic resin composition comprising a blend obtainable by blending 0.1 to 99% by weight of (a) a fluorine-containing polymer having a number-average molecular weight of 2000 to 1000000 and having hydroxy group or epoxy group at least at one of end portions of a main chain and side chain of the polymer, and 1 to 99.9% by weight of (b) a heat resisting thermoplastic resin having a crystalline melting point or glass transition temperature of not less than 150.degree. C. The present invention can provide a composition comprising various heat resisting thermoplastic resins and a fluorine-containing polymer having a functional group which is capable of developing an affinity with said resins and forming a uniform dispersion.
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公开(公告)号：US5767198A
公开(公告)日：1998-06-16
申请号：US564243
申请日：1995-12-20
摘要： To provide a thermoplastic resin composition which comprises a fluorine-containing polymer having a molecular weight of 5.times.10.sup.2 to 5.times.10.sup.5 and 2.times.10.sup.2 to 1.times.10.sup.5 methylol groups per 1.times.10.sup.6 carbon atoms at its molecular chain ends and a liquid crystal polyester or in addition a perfluoro type resin having less than 2.times.10.sup.2 methylol groups mentioned above, and has improved shrinkage from mold dimensions and dimensional stability represented by a coefficient of linear expansion with maintaining excellent characteristics of the fluorine-containing resin, such as thermal resistance, chemical resistance, weather resistance, surface properties (non-stickiness, excellent friction property), antisoil property and dielectric property.
摘要翻译： PCT No.PCT / JP95 / 00833 Sec。 371 1995年12月20日第 102（e）1995年12月20日日期PCT提交1995年4月26日PCT公布。 WO95 / 29956 PCT公开号 日期：1995年11月9日提供一种热塑性树脂组合物，其包含分子链末端分子量为5×10 2〜5×10 5的含氟聚合物和1×10 6个碳原子的2×102〜1×10 5个羟甲基，以及液晶聚酯， 具有上述小于2×102羟甲基的全氟型树脂，并且通过保持含氟树脂的优异特性，例如耐热性，耐化学性，耐候性，由模具尺寸和线性膨胀系数表示的尺寸稳定性提高了收缩率 ，表面性（不粘性，优异的摩擦性），防垢性和介电性。
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公开(公告)号：US20110086229A1
公开(公告)日：2011-04-14
申请号：US12969463
申请日：2010-12-15
申请人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
发明人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
CPC分类号： C08L27/18 , C08K5/18 , C08L2205/02 , Y10T428/3154 , C08L2666/04
摘要： The present invention includes crosslinked perfluoroelastomeric compositions and molded articles formed from a cross-linkable perfluoroelastomeric composition having a first curable perfluoropolymer having a cure site monomer and a second perfluoropolymer having a cure site monomer. The molar ratio of the tetrafluoroethylene monomer to perfluoroalkylvinyl ether in one perfluoropolymer is about 0 to 100 to about 65 to 35 in the perfluoropolymer. The molar ratio of the tetrafluoroethylene monomer to the perfluoroalkylvinyl ether monomer in the second polymer is about 65:35 to about 95:5 in the second perfluoropolymer. The composition further includes a curative. One fluorine-containing elastomer composition herein, having a short crosslinking time, has perfluoroelastomers (A) having a tetrafluoroethylene unit, a perfluoralkylvinyl ether unit (a) and a monomer unit (b) having at least one kind selected from the group consisting of a nitrile group, a carboxyl group and an alkoxycarbonyl group, wherein the composition has two or more kinds of perfluoroelastomers (A) having differing contents of perfluoroalkylvinyl ether unit (a).
摘要翻译： 本发明包括交联的全氟弹性体组合物和由可交联的全氟弹性体组合物形成的模塑制品，其具有具有固化部位单体的第一可固化全氟聚合物和具有固化部位单体的第二全氟聚合物。 全氟聚合物中四氟乙烯单体与全氟烷基乙烯基醚的摩尔比在全氟聚合物中为约0至约100至约65至35。 第二聚合物中四氟乙烯单体与全氟烷基乙烯基醚单体的摩尔比在第二全氟聚合物中为约65:35至约95:5。 组合物还包括治疗剂。 具有交联时间短的一种含氟弹性体组合物具有全氟弹性体（A），其具有四氟乙烯单元，全氟烷基乙烯基醚单元（a）和单体单元（b），所述单体单元具有选自以下的至少一种： 腈基，羧基和烷氧基羰基，其中所述组合物具有两种或更多种具有不同全氟烷基乙烯基醚单元（a）含量的全氟弹性体（A）。
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6.发明授权公开(公告)号：US07495046B2
公开(公告)日：2009-02-24
申请号：US10498939
申请日：2002-12-13
申请人： Hirofumi Nishibayashi , Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Hirofumi Nishibayashi , Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： C08L1/00
CPC分类号： C08L27/18 , C08G73/101 , C08L79/08 , C08L101/00 , C08L2666/14 , C08L2666/02
摘要： The present invention provides a crosslinkable elastomer composition, in which generation of HF under high temperature conditions is reduced, the decrease in weight to both NF3 plasma treatment and O3 treatment in the semiconductor manufacturing process is small and generation of foreign substances (particles) in these treatments is suppressed significantly. Specifically, the present invention relates to a crosslinkable elastomer composition comprising a crosslinkable elastomer and a filler having a specific surface area of at least 0.5 m2/g and containing a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain, a crosslinkable elastomer composition comprising a crosslinkable elastomer and nonoxide ceramics and a crosslinkable elastomer composition wherein the decrease in weight by NF3 plasma irradiation is at most 0.20%.
摘要翻译： 本发明提供了一种可交联弹性体组合物，其中在高温条件下产生HF，在半导体制造过程中，NF3等离子体处理和O 3处理两者的重量减少很小，并且在这些中产生异物（颗粒） 治疗显着抑制。 具体地说，本发明涉及可交联弹性体组合物，其包含可交联弹性体和比表面积至少为0.5m 2 / g的填料，并且含有在主链中具有热和化学稳定的芳环的合成聚合物，可交联的 包含可交联弹性体和非氧化物陶瓷的弹性体组合物和可交联弹性体组合物，其中NF 3等离子体照射的重量减少至多0.20％。
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公开(公告)号：US06878778B1
公开(公告)日：2005-04-12
申请号：US10129375
申请日：2000-10-31
申请人： Kazuyoshi Kawasaki , Tsuyoshi Itagaki , Katsuhiko Iseki , Takafumi Yamato , Tsuyoshi Noguchi , Mitsuru Kishine
发明人： Kazuyoshi Kawasaki , Tsuyoshi Itagaki , Katsuhiko Iseki , Takafumi Yamato , Tsuyoshi Noguchi , Mitsuru Kishine
IPC分类号： C08K5/18 , C08K5/41 , C08F259/08
摘要： An elastomer composition for crosslinking which comprises (A) a compound having at least two crosslinkable reactive groups represented by the formula (I): wherein R1 are the same or different and each is fluorine atom or a monovalent organic group, and (B) an elastomer having a curing site capable of reacting with the crosslinkable reactive group (I). The composition provides a crosslinked article which possesses improved mechanical strength and heat resistance and has excellent chemical resistance.
摘要翻译： 一种用于交联的弹性体组合物，其包含（A）具有至少两个由式（I）表示的可交联反应性基团的化合物：其中R 1相同或不同，各自为氟原子或一价有机基团，和（ B）具有能够与可交联反应性基团（I）反应的固化部位的弹性体。 该组合物提供具有改善的机械强度和耐热性并且具有优异的耐化学性的交联制品。
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公开(公告)号：US06552127B1
公开(公告)日：2003-04-22
申请号：US09540759
申请日：2000-03-31
申请人： Tetsuo Shimizu , Yoshihisa Yamamoto , Seitaro Yamaguchi , Nobuhiko Tsuda , Noriyasu Yamane , Takafumi Yamato , Masahiro Kumegawa , Takayuki Araki
发明人： Tetsuo Shimizu , Yoshihisa Yamamoto , Seitaro Yamaguchi , Nobuhiko Tsuda , Noriyasu Yamane , Takafumi Yamato , Masahiro Kumegawa , Takayuki Araki
IPC分类号： C08L6702
CPC分类号： C08L77/06 , C08G59/30 , C08G59/3254 , C08G61/12 , C08L27/12 , C08L27/16 , C08L67/00 , C08L67/02 , C08L67/03 , C08L69/00 , C08L77/00 , C08L77/02 , C08L81/04 , C08L101/00 , C08L2201/00 , C08L2666/02 , C08L2666/04 , C08L27/00 , C08L2666/14
摘要： A thermoplastic resin composition comprising a blend obtainable by blending 0.1 to 99% by weight of (a) a fluorine-containing polymer having a number-average molecular weight of 2000 to 1000000 and having hydroxy group or epoxy group at least at one of end portions of a main chain and side chain of the polymer, and 1 to 99.9% by weight of (b) a heat resisting thermoplastic resin having a crystalline melting point or glass transition temperature of not less than 150° C. The present invention can provide a composition comprising various heat resisting thermoplastic resins and a fluorine-containing polymer having a functional group which is capable of developing an affinity with said resins and forming a uniform dispersion
摘要翻译： 一种热塑性树脂组合物，其包含通过将（a）数均分子量为2000〜1000000的含氟聚合物与至少一个末端部分具有羟基或环氧基的0.1〜99重量％ 的聚合物的主链和侧链，和1〜99.9重量％的（b）具有不低于150℃的结晶熔点或玻璃化转变温度的耐热性热塑性树脂。本发明可以提供一种 包含各种耐热性热塑性树脂的组合物和具有能够与所述树脂形成亲和性并形成均匀分散体的官能团的含氟聚合物
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公开(公告)号：US6054537A
公开(公告)日：2000-04-25
申请号：US186427
申请日：1998-11-05
申请人： Tetsuo Shimizu , Yoshihisa Yamamoto , Seitaro Yamaguchi , Nobuhiko Tsuda , Noriyasu Yamane , Takafumi Yamato , Masahiro Kumegawa , Takayuki Araki
发明人： Tetsuo Shimizu , Yoshihisa Yamamoto , Seitaro Yamaguchi , Nobuhiko Tsuda , Noriyasu Yamane , Takafumi Yamato , Masahiro Kumegawa , Takayuki Araki
IPC分类号： C08G59/30 , C08G59/32 , C08G61/12 , C08L27/12 , C08L27/16 , C08L67/00 , C08L67/02 , C08L67/03 , C08L69/00 , C08L71/10 , C08L77/00 , C08L77/02 , C08L77/06 , C08L81/04 , C08L101/00
CPC分类号： C08L77/06 , C08G59/30 , C08G59/3254 , C08G61/12 , C08L101/00 , C08L27/12 , C08L27/16 , C08L67/00 , C08L67/02 , C08L67/03 , C08L69/00 , C08L77/00 , C08L77/02 , C08L81/04 , C08L2201/00
摘要： A thermoplastic resin composition comprising a blend obtainable by blending 0.1 to 99% by weight of (a) a fluorine-containing polymer having a number-average molecular weight of 2000 to 1000000 and having hydroxy group or epoxy group at least at one of end portions of a main chain and side chain of the polymer, and 1 to 99.9% by weight of (b) a heat resisting thermoplastic resin having a crystalline melting point or glass transition temperature of not less than 150.degree. C. The present invention can provide a composition comprising various heat resisting thermoplastic resins and a fluorine-containing polymer having a functional group which is capable of developing an affinity with said resins and forming a uniform dispersion.
摘要翻译： 一种热塑性树脂组合物，其包含通过将（a）数均分子量为2000〜1000000的含氟聚合物与至少一个末端部分具有羟基或环氧基的0.1〜99重量％ 的聚合物的主链和侧链，以及1〜99.9重量％的（b）结晶熔点或玻璃化转变温度为150℃以上的耐热性热塑性树脂。本发明可以提供一种 包含各种耐热性热塑性树脂的组合物和具有能够与所述树脂形成亲和性并形成均匀分散体的官能团的含氟聚合物。
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公开(公告)号：US09068069B2
公开(公告)日：2015-06-30
申请号：US12969463
申请日：2010-12-15
申请人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
发明人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
CPC分类号： C08L27/18 , C08K5/18 , C08L2205/02 , Y10T428/3154 , C08L2666/04
摘要： The present invention includes crosslinked perfluoroelastomeric compositions and molded articles formed from a cross-linkable perfluoroelastomeric composition having a first curable perfluoropolymer having a cure site monomer and a second perfluoropolymer having a cure site monomer. The molar ratio of the tetrafluoroethylene monomer to perfluoroalkylvinyl ether in one perfluoropolymer is about 0 to 100 to about 65 to 35 in the perfluoropolymer. The molar ratio of the tetrafluoroethylene monomer to the perfluoroalkylvinyl ether monomer in the second polymer is about 65:35 to about 95:5 in the second perfluoropolymer. The composition further includes a curative. One fluorine-containing elastomer composition herein, having a short crosslinking time, has perfluoroelastomers (A) having a tetrafluoroethylene unit, a perfluoralkylvinyl ether unit (a) and a monomer unit (b) having at least one kind selected from the group consisting of a nitrile group, a carboxyl group and an alkoxycarbonyl group, wherein the composition has two or more kinds of perfluoroelastomers (A) having differing contents of perfluoroalkylvinyl ether unit (a).
摘要翻译： 本发明包括交联的全氟弹性体组合物和由可交联的全氟弹性体组合物形成的模塑制品，其具有具有固化部位单体的第一可固化全氟聚合物和具有固化部位单体的第二全氟聚合物。 全氟聚合物中四氟乙烯单体与全氟烷基乙烯基醚的摩尔比在全氟聚合物中为约0至约100至约65至35。 第二聚合物中四氟乙烯单体与全氟烷基乙烯基醚单体的摩尔比在第二全氟聚合物中为约65:35至约95:5。 组合物还包括治疗剂。 具有交联时间短的一种含氟弹性体组合物具有全氟弹性体（A），其具有四氟乙烯单元，全氟烷基乙烯基醚单元（a）和单体单元（b），所述单体单元具有选自以下的至少一种： 腈基，羧基和烷氧基羰基，其中所述组合物具有两种或更多种具有不同全氟烷基乙烯基醚单元（a）含量的全氟弹性体（A）。
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