公开(公告)号：US08693008B2

公开(公告)日：2014-04-08

申请号：US13565147

申请日：2012-08-02

申请人： Holger Doemer ,  Ruediger Rosenkranz

发明人： Holger Doemer ,  Ruediger Rosenkranz

IPC分类号： G01B11/14

CPC分类号： B23K26/042 ,  B23K26/082 ,  B23K26/1224 ,  B23K26/705 ,  H01J2237/30433

摘要： A method includes using a scanner to scan a laser beam along a scan path, and detecting light intensities caused by laser light of the laser beam incident on a detection cross-section. The method also includes determining a position of the detection cross-section relative to the laser scanner based on the detected light intensities. The scan path includes, in a plane which includes the detection cross-section, a first partial path and a second partial path which extend adjacent to each other and at a distance from each other which is: a) smaller than a diameter of the detection cross-section plus a diameter of the laser beam in the plane which includes the detection cross-section; and b) greater than 0.3 times the diameter of the laser beam in the plane which includes the detection cross-section or greater than 0.3 times the diameter of the detection cross-section.

摘要翻译： 一种方法包括使用扫描仪沿着扫描路径扫描激光束，以及检测由入射到检测横截面上的激光束的激光引起的光强度。 该方法还包括基于检测到的光强度来确定检测横截面相对于激光扫描仪的位置。 扫描路径在包括检测横截面的平面中包括第一部分路径和第二部分路径，该第一部分路径和第二部分路径彼此相邻延伸并且彼此间隔一定距离，该距离是：a）小于检测的直径 横截面加上包括检测横截面的平面中的激光束的直径; 和b）大于包括检测横截面的平面中的激光束的直径的0.3倍或大于检测横截面直径的0.3倍。

公开(公告)号：US20110198326A1

公开(公告)日：2011-08-18

申请号：US13029453

申请日：2011-02-17

申请人： Holger Doemer

发明人： Holger Doemer

IPC分类号： B23K26/00 ,  G01N21/00 ,  G21K5/10

CPC分类号： H01J37/226 ,  B23K26/032 ,  B23K26/082 ,  B23K26/1224 ,  B23K26/36 ,  B23K26/705 ,  H01J37/3045 ,  H01J2237/2482 ,  H01J2237/31732 ,  H01J2237/3174

摘要： A processing system includes a common base, an object mount configured to hold an object for inspection or processing, and at least one aperture plate provided on the object mount. The aperture plate has at least one aperture The processing system also includes a laser device mounted on the common base and configured to scan a laser beam across a scan region, and a transport device configured to displace the object mount relative to the common base from a first position to a second position. When the object mount is in the first position, the object and the at least one aperture are positioned within the scan region of the laser device. The processing system also includes at least one light guide provided on the object mount. The light guide has an input port provided by the at least one aperture, and an output port. The processing system also includes at least one light detector mounted at a fixed position relative to the common base and configured to detect light emerging from the output port of the light guide.

摘要翻译： 处理系统包括公共基座，被配置为保持用于检查或处理的物体的物体安装件，以及设置在物体安装件上的至少一个孔板。 孔板具有至少一个孔。 所述处理系统还包括安装在所述公共基座上并且被配置为扫描穿过扫描区域的激光束的激光装置，以及被配置为使所述物体安装件相对于所述公共基座从第一位置移动到第二位置的传送装置。 当物体安装件处于第一位置时，物体和至少一个孔定位在激光装置的扫描区域内。 处理系统还包括设置在物体安装件上的至少一个光导。 光导具有由至少一个孔提供的输入端口和输出端口。 处理系统还包括安装在相对于公共基座的固定位置处的至少一个光检测器，并被配置为检测从光导的输出端口出射的光。

公开(公告)号：US20110079711A1

公开(公告)日：2011-04-07

申请号：US12804139

申请日：2010-07-13

申请人： Wolfram Buehler ,  Holger Doemer ,  Matthias Lang ,  Joerg Stodolka ,  Peter Roediger ,  Emmerich Bertagnolli ,  Heinz Wanzenboeck

发明人： Wolfram Buehler ,  Holger Doemer ,  Matthias Lang ,  Joerg Stodolka ,  Peter Roediger ,  Emmerich Bertagnolli ,  Heinz Wanzenboeck

IPC分类号： G01N23/00

CPC分类号： H01J37/30 ,  H01J37/28 ,  H01J37/3178 ,  H01J2237/0044 ,  H01J2237/006 ,  H01J2237/022 ,  H01J2237/3174

摘要： A particle beam system 1 for cleaning itself comprises an irradiation system to direct electromagnetic radiation onto the surfaces to be cleaned and a supply system 61 to supply a precursor gas to the interior of the vacuum chamber 11 of the particle beam system 1. The precursor gas is activated in a vicinity of the surfaces to be cleaned and is converted into a reaction gas which reacts with the contaminants present on the irradiated surfaces such that said contaminants may be pumped out then.

摘要翻译： 用于清洁的粒子束系统1本身包括将电磁辐射引导到要清洁的表面上的照射系统和用于将前体气体供应到粒子束系统1的真空室11的内部的供应系统61.前体气体 在待清洁表面附近被活化，并被转化成与存在于照射表面上的污染物反应的反应气体，从而可以将所述污染物抽出。