Thin film resonator, method for making thin film resonator and filter having thin film resonators
    11.
    发明申请
    Thin film resonator, method for making thin film resonator and filter having thin film resonators 有权
    薄膜谐振器,制造薄膜谐振器的方法和具有薄膜谐振器的滤波器

    公开(公告)号:US20050052261A1

    公开(公告)日:2005-03-10

    申请号:US10936522

    申请日:2004-09-09

    摘要: A thin film resonator having a membrane layer formed on top of a substrate, a lower electrode formed on part of the top surface of the membrane layer, a piezoelectric layer formed on top of the lower electrode, an upper electrode formed on top of the piezoelectric layer, and a mass loading layer interposed between the lower electrode and the membrane layer and having a predetermined mass. This structure enables precise adjustment of the resonant frequency of the thin film resonator, thereby providing a more precise filter.

    摘要翻译: 一种薄膜谐振器,其具有形成在基板顶部的膜层,形成在所述膜层的上表面的一部分上的下电极,形成在所述下电极的顶部上的压电层,形成在所述压电体的顶部的上电极 层和介于下电极和膜层之间并具有预定质量的质量加载层。 这种结构能够精确地调整薄膜谐振器的谐振频率,从而提供更精确的滤波器。

    Thermal inkjet printhead
    12.
    发明授权
    Thermal inkjet printhead 有权
    热喷墨打印头

    公开(公告)号:US07810911B2

    公开(公告)日:2010-10-12

    申请号:US11742816

    申请日:2007-05-01

    IPC分类号: B41J2/05

    CPC分类号: B41J2/14129 B41J2/14072

    摘要: A thermal inkjet printhead includes a plurality of bonding pads to which an external voltage is applied, a plurality of common wires connected to the each of the bonding pads, respectively, a plurality of individual wires connected to each of the common wires, respectively, and heaters connected to each of the individual wires, respectively, to generate ink bubbles by heating ink, wherein each of the common wires includes a first metal layer and a first metal bump which are formed on the first metal layer.

    摘要翻译: 热喷墨打印头包括分别施加有外部电压的多个接合焊盘,分别连接到每个接合焊盘的多个公共电线,分别连接到每个公共电线的多个单独电线,以及 加热器分别连接到各个电线,以通过加热墨水来产生墨水气泡,其中每个公共电线包括形成在第一金属层上的第一金属层和第一金属凸块。

    Two-axis geomagnetic sensor and method for manufacturing the same
    13.
    发明授权
    Two-axis geomagnetic sensor and method for manufacturing the same 有权
    二轴地磁传感器及其制造方法

    公开(公告)号:US07710708B2

    公开(公告)日:2010-05-04

    申请号:US11637767

    申请日:2006-12-13

    IPC分类号: H01G5/012

    摘要: A two-axis geomagnetic sensor is disclosed. The two-axis geomagnetic sensor includes a first geomagnetic sensor part including a first wafer and a first geomagnetic sensor on a surface of the first wafer; and a second geomagnetic sensor part including a second wafer and a second geomagnetic sensor on a surface of the second wafer. The first and second geomagnetic sensor parts are bonded to each other, in which the first and second geomagnetic sensors positioned in an orthogonal relation to each other. Accordingly, an occupancy area of the geomagnetic sensor can be reduced. Further, the geomagnetic sensor on each axe can have the same magnetic material properties, and alignment deviation cannot be generated.

    摘要翻译: 公开了一种双轴地磁传感器。 双轴地磁传感器包括第一地磁传感器部分,其包括在第一晶片的表面上的第一晶片和第一地磁传感器; 以及第二地磁传感器部分,其包括在第二晶片的表面上的第二晶片和第二地磁传感器。 第一和第二地磁传感器部分彼此结合,其中第一和第二地磁传感器以彼此正交的关系定位。 因此,可以减少地磁传感器的占用面积。 此外,每个斧头上的地磁传感器可以具有相同的磁性材料性质,并且不能产生对准偏差。

    Tri-state RF switch
    15.
    发明授权
    Tri-state RF switch 有权
    三态RF开关

    公开(公告)号:US07477884B2

    公开(公告)日:2009-01-13

    申请号:US11345237

    申请日:2006-02-02

    IPC分类号: H04B1/06

    摘要: A tri-state RF MEMS switch includes: a first well formed in a first substrate; a first input signal line and a first output signal line forming a first gap therebetween in the first well; a post bar forming a boundary between the second well and third well in the second substrate; a second input signal line and a second output signal line, and a third input signal line and a third output signal line forming a second gap and a third gap in the second well and the third well, respectively; and a membrane disposed between the first substrate and the second substrate such that the membrane crosses the first, second and third gaps, the membrane including a first conductive pad, a second conductive pad, and a third conductive pad thereon to face the first, second and third gaps, respectively.

    摘要翻译: 三态RF MEMS开关包括:形成在第一衬底中的第一阱; 第一输入信号线和第一输出信号线,其在第一阱中形成第一间隙; 在第二基板中形成第二阱和第三阱之间的边界的柱条; 第二输入信号线和第二输出信号线,以及分别在第二阱和第三阱中形成第二间隙和第三间隙的第三输入信号线和第三输出信号线; 以及膜,其设置在所述第一基板和所述第二基板之间,使得所述膜跨越所述第一,第二和第三间隙,所述膜包括第一导电焊盘,第二导电焊盘和第三导电焊盘, 和第三个差距。

    INKJET PRINTHEAD
    16.
    发明申请
    INKJET PRINTHEAD 审中-公开

    公开(公告)号:US20080297564A1

    公开(公告)日:2008-12-04

    申请号:US11935539

    申请日:2007-11-06

    IPC分类号: B41J2/14 B41J2/04

    摘要: An inkjet printhead includes a substrate in which an ink feed hole is formed, a plurality of ejection devices formed on the substrate at sides of the ink feed hole, a chamber layer stacked on the substrate and in which a plurality of ink chambers, which correspond to the ejection devices and in which ink supplied from the ink feed hole is filled, are formed, and a nozzle layer in which a plurality of nozzles corresponding to the ink chambers are formed, wherein the ink feed hole includes a plurality of through holes formed through the substrate in the thickness direction thereof.

    摘要翻译: 喷墨打印头包括其中形成有供墨孔的基板,在供墨孔的侧面形成在基板上的多个喷射装置,堆叠在基板上的室层,其中对应于多个墨室 形成喷墨装置并且从供墨孔供应的油墨被填充,并且形成有与油墨室相对应的多个喷嘴的喷嘴层,其中所述供墨孔包括形成的多个通孔 通过基板的厚度方向。

    Method of fabricating inkjet print heads
    17.
    发明授权
    Method of fabricating inkjet print heads 有权
    制造喷墨打印头的方法

    公开(公告)号:US07416675B2

    公开(公告)日:2008-08-26

    申请号:US11453012

    申请日:2006-06-15

    IPC分类号: G01D15/00

    摘要: A method of fabricating inkjet print heads usable in an ink jet printer. The method of fabricating ink jet print heads includes preparing a plurality of ink jet print heads on a wafer while forming sub sidewalls around the ink jet print heads when the ink jet print heads are being prepared, attaching protection films onto the sub sidewalls of the wafer and the ink jet print heads, and dicing the ink jet print heads and detaching the individual ink jet print heads from the wafer. In the method, the ink jet print heads are diced in a wafer unit. Particularly, connect pads of the ink jet print heads can be prevented from being contaminated by the protection films.

    摘要翻译: 一种制造可用于喷墨打印机的喷墨打印头的方法。 制造喷墨打印头的方法包括:当准备喷墨打印头时,在晶片上准备多个喷墨打印头,同时在喷墨打印头周围形成副侧壁,将保护膜附着在晶片的子侧壁上 和喷墨打印头,并且对喷墨打印头进行切割并将各个喷墨打印头从晶片上分离出来。 在该方法中,喷墨打印头在晶片单元中切割。 特别地,可以防止喷墨打印头的连接垫被保护膜污染。

    Two-axis geomagnetic sensor and method for manufacturing the same
    18.
    发明申请
    Two-axis geomagnetic sensor and method for manufacturing the same 有权
    二轴地磁传感器及其制造方法

    公开(公告)号:US20070283585A1

    公开(公告)日:2007-12-13

    申请号:US11637767

    申请日:2006-12-13

    IPC分类号: E21B47/00

    摘要: A two-axis geomagnetic sensor is disclosed. The two-axis geomagnetic sensor includes a first geomagnetic sensor part including a first wafer and a first geomagnetic sensor on a surface of the first wafer; and a second geomagnetic sensor part including a second wafer and a second geomagnetic sensor on a surface of the second wafer. The first and second geomagnetic sensor parts are bonded to each other, in which the first and second geomagnetic sensors positioned in an orthogonal relation to each other. Accordingly, an occupancy area of the geomagnetic sensor can be reduced. Further, the geomagnetic sensor on each axe can have the same magnetic material properties, and alignment deviation cannot be generated.

    摘要翻译: 公开了一种双轴地磁传感器。 双轴地磁传感器包括第一地磁传感器部分,其包括在第一晶片的表面上的第一晶片和第一地磁传感器; 以及第二地磁传感器部分,其包括在第二晶片的表面上的第二晶片和第二地磁传感器。 第一和第二地磁传感器部分彼此结合,其中第一和第二地磁传感器以彼此正交的关系定位。 因此,可以减少地磁传感器的占用面积。 此外,每个斧头上的地磁传感器可以具有相同的磁性材料性质,并且不能产生对准偏差。

    Inkjet printhead and method of manufacturing the same
    19.
    发明申请
    Inkjet printhead and method of manufacturing the same 有权
    喷墨打印头及其制造方法

    公开(公告)号:US20070279458A1

    公开(公告)日:2007-12-06

    申请号:US11653371

    申请日:2007-01-16

    IPC分类号: B41J2/05

    摘要: An inkjet printhead and a method of manufacturing the inkjet printhead. The inkjet printhead includes a substrate including a trench formed to a predetermined depth in an upper portion of the substrate and an ink feed hole formed through a bottom surface of the trench to supply ink, an etch stop layer formed of a metal and formed on an inner surface of the trench, a plurality of heaters, to create bubbles by heating ink, formed on the substrate, a plurality of electrodes, to apply a current to the plurality of heaters, formed on the substrate, a chamber layer stacked on the substrate and including a plurality of ink chambers formed above respective heaters to receive ink from the ink feed hole via the trench, and a nozzle layer stacked on the chamber layer and including a plurality of nozzles to eject ink from the plurality of ink chambers.

    摘要翻译: 喷墨打印头和制造喷墨打印头的方法。 喷墨打印头包括基板,该基板包括在基板的上部形成为预定深度的沟槽,以及通过沟槽的底表面形成供墨的供墨孔,由金属形成的蚀刻停止层, 沟槽的内表面,多个加热器,通过加热形成在基板上的油墨产生气泡,多个电极,以形成在基板上的多个加热器施加电流,堆叠在基板上的室层 并且包括形成在各个加热器上方的多个墨室,以经由所述沟槽从所述供墨孔接收墨;以及喷嘴层,其堆叠在所述腔室层上并且包括多个喷嘴以从所述多个墨室喷射墨。

    OPTICAL BENCH, SLIM OPTICAL PICKUP EMPLOYING THE SAME AND METHOD OF MANUFACTURING THE OPTICAL BENCH
    20.
    发明申请
    OPTICAL BENCH, SLIM OPTICAL PICKUP EMPLOYING THE SAME AND METHOD OF MANUFACTURING THE OPTICAL BENCH 审中-公开
    使用其的光学平台,SLIM OPTICAL PICKUP及其制造方法

    公开(公告)号:US20070264744A1

    公开(公告)日:2007-11-15

    申请号:US11671746

    申请日:2007-02-06

    IPC分类号: H01L21/00

    摘要: An optical bench is provided, as are a thin optical pickup that employs the optical bench, and a method of manufacturing the optical bench. The optical bench includes a light source for generating light for recording and reproducing information to and from an optical disc, a light source stand on which the light source is mounted, a mirror adjacent to the light source stand, and a bottom surface at a lower point than the light source stand and between the light source stand and the mirror surface. Sides of the light source stand besides the side facing the mirror are connected to the surface of the substrate by a flat sloped surface. Along the sloped surface, two electrodes for supplying power to the light source are connected to the light source stand. Since the metal wirings are formed along the sloped surface without trenches or windings between the light source stand and the silicon substrate, no disconnection of metal lines at a corner occurs.

    摘要翻译: 提供了一种光学台,以及使用光学台的薄型光学拾取器以及制造光学台的方法。 光学台包括用于产生用于从光盘记录和再现信息的光的光源,安装有光源的光源支架,与光源支架相邻的反射镜,以及位于下部的底部表面 点比光源支架和光源支架和镜面之间的点。 除了面向镜的一侧之外,光源的侧面通过平坦的倾斜表面连接到基板的表面。 沿着倾斜的表面,用于向光源供电的两个电极连接到光源支架。 由于在光源支架和硅基板之间没有沟槽或绕组的倾斜表面形成金属布线,所以不会发生角落处的金属线断开。