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公开(公告)号：US20180364022A1
公开(公告)日：2018-12-20
申请号：US16110344
申请日：2018-08-23
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Richard A. Haight , James B. Hannon , Rudolf M. Tromp
CPC classification number: G01B9/02 , G01B11/026 , G01B11/0608 , G01B11/14 , G03F7/70775
Abstract: Methods and systems for measuring a distance include measuring a first interference pattern between a lens and a target surface using a light source at a first wavelength. A second interference pattern is measured between the lens and the target surface using a light source at a second wavelength, different from the first wavelength. An absolute measurement of a distance between the lens and the target surface is determined based on the first interference pattern and the second interference pattern.
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公开(公告)号：US10119801B2
公开(公告)日：2018-11-06
申请号：US15480735
申请日：2017-04-06
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Richard A. Haight , James B. Hannon , Rudolf M. Tromp
Abstract: Methods and systems for measuring a distance include measuring a first interference pattern between a lens and a target surface using a light source at a first wavelength. A second interference pattern is measured between the lens and the target surface using a light source at a second wavelength, different from the first wavelength. An absolute measurement of a distance between the lens and the target surface is determined based on the first interference pattern and the second interference pattern.
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公开(公告)号：US20170167929A1
公开(公告)日：2017-06-15
申请号：US15445019
申请日：2017-02-28
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Arthur W. Ellis , Richard A. Haight , James B. Hannon , Rudolf M. Tromp
CPC classification number: G01L1/24 , G01B11/161
Abstract: A force detector and method for using the same includes a lens. A cantilever is below the movable lens. A laser above the movable lens emits a beam of light through the movable lens, such that light reflects from the lens and the cantilever. A camera is configured to capture images produced by the light reflected from the lens and the light reflected from the cantilever. A processor is configured to determine a force between the movable lens and the cantilever based on a change in phase of the interference rings.
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公开(公告)号：US20170074733A1
公开(公告)日：2017-03-16
申请号：US14850146
申请日：2015-09-10
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Arthur W. Ellis , Richard A. Haight , James B. Hannon , Rudolf M. Tromp
CPC classification number: G01L1/24 , G01B11/161
Abstract: A force detector and method for using the same includes a movable lens having a spherical surface; a cantilever below the movable lens; a laser above the movable lens configured to emit a beam of light through the movable lens, such that light reflects from the spherical surface and the cantilever; a camera configured to capture images of interference rings produced by the light reflected from the spherical surface and the light reflected from the cantilever; and a processor configured to determine a force between the movable lens and the cantilever based on a change in phase of the interference rings.
Abstract translation: 力检测器及其使用方法包括：具有球面的可动透镜; 可移动镜片下方的悬臂; 可动透镜上方的激光被配置为通过可移动透镜发射光束，使得光从球面和悬臂反射; 配置为捕获由从球形表面反射的光和从悬臂反射的光产生的干涉环的图像的照相机; 以及处理器，其被配置为基于所述干扰环的相位变化来确定所述可移动透镜和所述悬臂之间的力。
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15.发明申请SCANNING TRANSMISSION ELECTRON MICROSCOPE HAVING MULTIPLE BEAMS AND POST-DETECTION IMAGE CORRECTION 有权扫描传输具有多个像素的电子显微镜和后检测图像校正公开(公告)号：US20160300689A1
公开(公告)日：2016-10-13
申请号：US14683679
申请日：2015-04-10
Applicant: International Business Machines Corporation
Inventor： Rudolf M. Tromp
IPC: H01J37/26
CPC classification number: H01J37/263 , H01J37/222 , H01J37/244 , H01J37/28 , H01J2237/2446 , H01J2237/2802 , H01J2237/2809 , H01J2237/2826
Abstract: Embodiments are directed to an information processing system for generating a corrected image of a sample. The system includes a detector, a memory communicatively coupled to the detector, and a post-detection image processor communicatively coupled to the memory and the detector. The detector is configured to detect data of a plurality of moving particles, wherein the data of the plurality of moving particles correspond to an uncorrected image of the sample, and wherein the uncorrected image includes defocus, astigmatism and spherical aberration. The post-detection image processor is configured to generate a corrected image of the sample based at least in part on processing the detected data of the plurality of moving particles.
Abstract translation: 实施例涉及用于产生样本的校正图像的信息处理系统。 该系统包括检测器，通信地耦合到检测器的存储器，以及通信地耦合到存储器和检测器的后检测图像处理器。 检测器被配置为检测多个移动粒子的数据，其中多个移动粒子的数据对应于样本的未校正图像，并且其中未校正的图像包括散焦，散光和球面像差。 后检测图像处理器被配置为至少部分地基于处理多个移动粒子的检测数据来生成样本的校正图像。
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Patent Agency Ranking
公开(公告)号：US10593510B2
公开(公告)日：2020-03-17
申请号：US16294017
申请日：2019-03-06
Applicant: International Business Machines Corporation
Inventor： Rudolf M. Tromp
IPC: H01J37/153 , H01J37/29 , H01J37/145 , H01J37/147
Abstract: An electron microscope system and a method of measuring an aberration of the electron microscope system are disclosed. A method of controlling an aberration of an electron microscope includes obtaining a dispersed energy distribution for electrons at a diffraction plane of the electron microscope and placing an aperture at a selected location of the dispersed energy distribution in the diffraction plane. The method measures displacement of an image of the aperture in an image plane of the electron microscope for the selected location of the aperture. The method determines an aberration coefficient of the electron microscope from the measured displacement and the selected location of the aperture and alters a parameter of an element of the electron microscope to control the aberration of the electron microscope based at least in part on the determined aberration coefficient.
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公开(公告)号：US10564056B2
公开(公告)日：2020-02-18
申请号：US16104580
申请日：2018-08-17
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Arthur W. Ellis , Richard A. Haight , James B. Hannon , Rudolf M. Tromp
Abstract: A force detector and method for using the same includes a lens. A cantilever is disposed below the movable lens. A laser is disposed above the movable lens and is configured to emit a beam of light that reflects from a surface of the lens and the cantilever. A processor is configured to determine a force between the movable lens and the cantilever based on a change in phase in images produced by the light reflected from the spherical surface and the light reflected from the cantilever.
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公开(公告)号：US10330457B2
公开(公告)日：2019-06-25
申请号：US16110344
申请日：2018-08-23
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Richard A. Haight , James B. Hannon , Rudolf M. Tromp
Abstract: Methods and systems for measuring a distance include measuring a first interference pattern between a lens and a target surface using a light source at a first wavelength. A second interference pattern is measured between the lens and the target surface using a light source at a second wavelength, different from the first wavelength. An absolute measurement of a distance between the lens and the target surface is determined based on the first interference pattern and the second interference pattern.
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公开(公告)号：US09625331B2
公开(公告)日：2017-04-18
申请号：US14850146
申请日：2015-09-10
Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
Inventor： Arthur W. Ellis , Richard A. Haight , James B. Hannon , Rudolf M. Tromp
CPC classification number: G01L1/24 , G01B11/161
Abstract: A force detector and method for using the same includes a movable lens having a spherical surface; a cantilever below the movable lens; a laser above the movable lens configured to emit a beam of light through the movable lens, such that light reflects from the spherical surface and the cantilever; a camera configured to capture images of interference rings produced by the light reflected from the spherical surface and the light reflected from the cantilever; and a processor configured to determine a force between the movable lens and the cantilever based on a change in phase of the interference rings.
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20.发明授权公开(公告)号：US09607804B2
公开(公告)日：2017-03-28
申请号：US14745634
申请日：2015-06-22
Applicant: International Business Machines Corporation
Inventor： Rudolf M. Tromp
CPC classification number: H01J37/263 , H01J37/222 , H01J37/244 , H01J37/28 , H01J2237/2446 , H01J2237/2802 , H01J2237/2809 , H01J2237/2826
Abstract: Embodiments are further directed to an information processing system for generating a corrected image of a sample. The system includes a detector, a memory communicatively coupled to the detector, and a post-detection image processor communicatively coupled to the memory and the detector. The system is configured to perform a method that includes detecting, by the detector, data of a plurality of moving particles, wherein the data of the plurality of moving particles correspond to an uncorrected image of the sample, and wherein the uncorrected image includes defocus, astigmatism and spherical aberration. The method further includes generating, by the post-detection image processor, a corrected image of the sample based at least in part on processing the detected data of the plurality of moving particles.
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