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公开(公告)号：US06285490B1
公开(公告)日：2001-09-04
申请号：US09475730
申请日：1999-12-30
Applicant: Robert E. Meier , James D. Huffman , Richard L. Knipe
Inventor： Robert E. Meier , James D. Huffman , Richard L. Knipe
IPC: G02B2600
CPC classification number: G02B26/0841
Abstract: An improved micromechanical device comprising a substrate (104), a deflectable member (102) suspended over the substrate (104), at least one spring-ring (124) supported above the substrate (104); and at least one address electrode (110) spaced apart from substrate (104). The spring-ring (124) resists deflection of the deflectable member (102) when the deflectable member (102) deflects to contact the spring-ring (124). By moving the address electrode (110) off the substrate level, the micromirror is much more immune to particle-caused short circuits, and a planer surface on which to fabricate the mirror (102) is provided without the need to utilize an inverse spacer layer.
Abstract translation: 一种改进的微机械装置，包括衬底（104），悬置在衬底（104）上的可偏转构件（102），支撑在衬底（104）上方的至少一个弹簧环（124）; 以及与衬底（104）间隔开的至少一个地址电极（110）。 当可偏转构件（102）偏转以接触弹簧环（124）时，弹簧环（124）抵抗可偏转构件（102）的偏转。 通过将寻址电极（110）移动离开衬底水平，微镜对于颗粒引起的短路更加免疫，并且提供了在其上制造反射镜（102）的平面，而不需要使用反向间隔层 。
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公开(公告)号：US5943157A
公开(公告)日：1999-08-24
申请号：US73329
申请日：1998-05-06
Applicant: James M. Florence , James D. Huffman , Rodney D. Miller
Inventor： James M. Florence , James D. Huffman , Rodney D. Miller
CPC classification number: G02B26/0841
Abstract: A spatial light modulator (70) comprised of an array of micromirrors (72) each having support post (74). The support post (74) defines support post edges (76) in the upper surface of the mirrors (72). These support post edges (76) are all oriented at 45 degree angles with respect to an incident beam of light from a light source (80) to minimize diffraction of light from the edges (76) into the darkfield optics when the mirrors are oriented in the off-state. The present invention achieves an increased contrast ratio of about 20% over conventional designs.
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公开(公告)号：US08555314B2
公开(公告)日：2013-10-08
申请号：US12828232
申请日：2010-06-30
Applicant: Dean Debois , James D. Huffman , Frank Coppa
Inventor： Dean Debois , James D. Huffman , Frank Coppa
CPC classification number: H04N21/23424 , G06Q30/0241 , G06Q30/0257 , G06Q30/0273 , H04H60/375 , H04N21/23614 , H04N21/2365 , H04N21/2543 , H04N21/2547 , H04N21/25891 , H04N21/26225 , H04N21/2665 , H04N21/4312 , H04N21/44016 , H04N21/441 , H04N21/4722 , H04N21/482 , H04N21/6408 , H04N21/64322 , H04N21/6582 , H04N21/812 , H04W4/06
Abstract: A system that incorporates teachings of the present disclosure may include, for example, a network device having a controller programmed to store a subscriber selectable preference for advertisements and for video channel distribution to send to a set top box (STB) and receive a signal from a broadcast stream indicating the location for insertion of an advertisement based on the subscriber selectable preference. Other embodiments are disclosed.
Abstract translation: 结合本公开的教导的系统可以包括例如具有被编程为存储用户可选择的广告偏好的控制器的网络设备，并且用于视频信道分发以发送到机顶盒（STB）并且从 指示基于用户可选择的偏好来插入广告的位置的广播流。 公开了其他实施例。
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公开(公告)号：US08517516B2
公开(公告)日：2013-08-27
申请号：US13089632
申请日：2011-04-19
Applicant: James A. Katerberg , James D. Huffman
Inventor： James A. Katerberg , James D. Huffman
IPC: B41J2/04
CPC classification number: B41J2/14 , B41J2002/14346 , B41J2002/14403 , B41J2002/14475 , B41J2202/12
Abstract: A method of ejecting a liquid includes providing a liquid dispenser including a substrate. A first portion of the substrate defines a liquid dispensing channel including an outlet opening. A second portion of the substrate defines a liquid supply channel and a liquid return channel. A diverter member is positioned on a wall of the liquid dispensing channel that includes the outlet opening. The diverter member includes a MEMS transducing member anchored to the wall of the liquid dispensing channel. A compliant membrane is positioned in contact with the MEMS transducing member. The diverter member is selectively actuated to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel.
Abstract translation: 喷射液体的方法包括提供包括基底的液体分配器。 衬底的第一部分限定了包括出口开口的液体分配通道。 衬底的第二部分限定了液体供应通道和液体返回通道。 分流器构件定位在包括出口开口的液体分配通道的壁上。 分流器构件包括锚定在液体分配通道的壁上的MEMS换能构件。 柔性膜定位成与MEMS换能件接触。 分流器构件被选择性地致动以使流过液体分配通道的液体的一部分通过液体分配通道的出口打开。
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公开(公告)号：US08434855B2
公开(公告)日：2013-05-07
申请号：US13089528
申请日：2011-04-19
Applicant: James D. Huffman , Weibin Zhang , John A. Lebens
Inventor： James D. Huffman , Weibin Zhang , John A. Lebens
IPC: B41J2/04
CPC classification number: B41J2/14427
Abstract: A fluid ejector includes a substrate, a MEMS transducing member, a compliant membrane, walls, and a nozzle. First portions of the substrate define an outer boundary of a cavity. Second portions of the substrate define a fluidic feed. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. Partitioning walls define a chamber that is fluidically connected to the fluidic feed. At least the second portion of the MEMS transducing member is enclosed within the chamber. The nozzle is disposed proximate to the second portion of the MEMS transducing member and distal to the fluidic feed.
Abstract translation: 流体喷射器包括基板，MEMS转换构件，柔性膜，壁和喷嘴。 基板的第一部分限定空腔的外边界。 衬底的第二部分限定了流体进料。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 顺应性膜的第二部分锚定到基底。 分隔壁限定了流体连接到流体进料的室。 至少MEMS转换构件的第二部分被封闭在腔室内。 喷嘴靠近MEMS转换构件的第二部分并且远离流体进料设置。
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Patent Agency Ranking
公开(公告)号：US08398210B2
公开(公告)日：2013-03-19
申请号：US13089521
申请日：2011-04-19
Applicant: Michael F. Baumer , James D. Huffman , Hrishikesh V. Panchawagh , Jeremy M. Grace , Yonglin Xie , Qing Yang , David P. Trauernicht , John A. Lebens
Inventor： Michael F. Baumer , James D. Huffman , Hrishikesh V. Panchawagh , Jeremy M. Grace , Yonglin Xie , Qing Yang , David P. Trauernicht , John A. Lebens
IPC: B41J2/04
CPC classification number: B41J2/14427 , B41J2002/14435
Abstract: A continuous liquid ejection system includes a substrate defining a liquid chamber. An orifice plate, affixed to the substrate, includes a MEMS transducing member. The MEMS transducing member includes a first portion anchored to the substrate and a second portion extending over and free to move relative to the liquid chamber. A compliant membrane, positioned in contact with the MEMS transducing member, includes an orifice and a first portion covering the MEMS transducing member and a second portion anchored to the substrate. A liquid supply provides a liquid to the liquid chamber under a pressure sufficient to eject a continuous jet of the liquid through the orifice located in the compliant membrane. The MEMS transducing member is selectively actuated to cause a portion of the compliant membrane to be displaced relative to the liquid chamber to cause a drop of liquid to break off from the liquid jet.
Abstract translation: 连续液体喷射系统包括限定液体室的基板。 固定在基板上的孔板包括MEMS转换构件。 MEMS转换构件包括锚定到基底的第一部分和相对于液体腔延伸并自由移动的第二部分。 定位成与MEMS换能构件接触的柔性膜包括孔口和覆盖MEMS换能构件的第一部分和锚定到基底的第二部分。 液体供应在足以通过位于柔顺膜中的孔喷射液体的连续射流的压力下向液体室提供液体。 MEMS转换构件被选择性地致动以使顺应性膜的一部分相对于液体腔移动以引起液体从液体射流中脱落的液滴。
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公开(公告)号：US20120270352A1
公开(公告)日：2012-10-25
申请号：US13089532
申请日：2011-04-19
Applicant: James D. Huffman , Maria J. Lehmann
Inventor： James D. Huffman , Maria J. Lehmann
IPC: H01L21/02
CPC classification number: B81C1/00182 , B81B2201/038 , B81B2203/053 , G01H11/06 , H02N1/002 , H04R1/222 , H04R17/02 , H04R31/00 , H04R2201/003
Abstract: A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity.
Abstract translation: 制造MEMS复合换能器的方法包括提供具有第一表面和与第一表面相对的第二表面的基底。 在衬底的第一表面上沉积换能材料。 通过将传感材料保持在第一区域中并且在第二区域中去除换能材料来对转导材料进行图案化。 聚合物层沉积在第一区域和第二区域上。 通过在第三区域中保持聚合物并在第四区域中除去聚合物来对聚合物层进行图案化。 第三区域的第一部分与第一区域的一部分重合，第三区域的第二部分与第二区域的一部分重合。 空腔从第二表面蚀刻到衬底的第一表面。 在基板的第一表面处的空腔的外边界与保持换能材料的第一区域相交，使得转换材料的第一部分锚定到基板的第一表面，并且换能材料的第二部分延伸 在空腔的至少一部分上方。
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公开(公告)号：US20120268528A1
公开(公告)日：2012-10-25
申请号：US13089582
申请日：2011-04-19
Applicant: Carolyn R. Ellinger , James A. Katerberg , James D. Huffman
Inventor： Carolyn R. Ellinger , James A. Katerberg , James D. Huffman
IPC: B41J2/04
CPC classification number: B41J2/14 , B41J2002/14346 , B41J2002/14403 , B41J2002/14475 , B41J2202/12
Abstract: A method of ejecting liquid includes providing a liquid dispenser including a substrate and a diverter member. A first portion of the substrate defines a liquid dispensing channel including an outlet opening and a second portion of the substrate defines an outer boundary of a cavity. Other portions of the substrate define a liquid supply channel and a liquid return channel. The diverter member includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate such that the compliant membrane forms a portion of a wall of the liquid dispensing channel. The wall is positioned opposite the outlet opening. A continuous flow of liquid is provided from a liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. The diverter member is selectively actuated to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel when drop ejection is desired.
Abstract translation: 喷射液体的方法包括提供包括基底和转向构件的液体分配器。 衬底的第一部分限定包括出口开口的液体分配通道，并且衬底的第二部分限定空腔的外边界。 衬底的其他部分限定了液体供应通道和液体返回通道。 分流器构件包括MEMS换能构件。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 柔性膜的第二部分锚固到基底上，使得柔顺膜形成液体分配通道的壁的一部分。 墙壁位于出口开口对面。 从液体供应通道通过液体分配通道通过液体返回通道提供连续的液体流并返回到液体供应。 当需要液滴喷射时，分流器构件被选择性地致动以使流过液体分配通道的液体的一部分通过液体分配通道的出口打开。
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公开(公告)号：US20120268526A1
公开(公告)日：2012-10-25
申请号：US13089528
申请日：2011-04-19
Applicant: James D. Huffman , Weibin Zhang , John A. Lebens
Inventor： James D. Huffman , Weibin Zhang , John A. Lebens
IPC: B41J2/04
CPC classification number: B41J2/14427
Abstract: A fluid ejector includes a substrate, a MEMS transducing member, a compliant membrane, walls, and a nozzle. First portions of the substrate define an outer boundary of a cavity. Second portions of the substrate define a fluidic feed. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. Partitioning walls define a chamber that is fluidically connected to the fluidic feed. At least the second portion of the MEMS transducing member is enclosed within the chamber. The nozzle is disposed proximate to the second portion of the MEMS transducing member and distal to the fluidic feed.
Abstract translation: 流体喷射器包括基板，MEMS转换构件，柔性膜，壁和喷嘴。 基板的第一部分限定空腔的外边界。 衬底的第二部分限定了流体进料。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 顺应性膜的第二部分锚定到基底。 分隔壁限定了流体连接到流体进料的室。 至少MEMS转换构件的第二部分被封闭在腔室内。 喷嘴靠近MEMS转换构件的第二部分并且远离流体进料设置。
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公开(公告)号：US20120267900A1
公开(公告)日：2012-10-25
申请号：US13089507
申请日：2011-04-19
Applicant: James D. Huffman , Gary A. Kneezel
Inventor： James D. Huffman , Gary A. Kneezel
IPC: H02K57/00
CPC classification number: H02N2/186 , H01L41/1138
Abstract: An energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The compliant member is configured to be set into oscillation by excitations produced externally relative to the energy harvesting device.
Abstract translation: 能量收集装置包括MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 MEMS转换构件包括具有第一端和第二端的梁。 第一端锚固到基底上，第二端悬臂在空腔上。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 顺应性膜的第二部分锚定到基底。 柔性构件被配置成通过相对于能量收集装置在外部产生的激励而被设置成振荡。
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