Hard intermetallic bonding of wafers for MEMS applications
    12.
    发明申请
    Hard intermetallic bonding of wafers for MEMS applications 审中-公开
    用于MEMS应用的晶片的硬金属间键合

    公开(公告)号:US20070099410A1

    公开(公告)日:2007-05-03

    申请号:US11262863

    申请日:2005-10-31

    CPC classification number: B81C1/00269 B81C3/001 B81C2203/019 B81C2203/036

    Abstract: A method of bonding two substrates in MEMS applications includes depositing a first metal in a bonding area on a first substrate, depositing a second metal, which is different from the first metal, in a bonding area on a second substrate, place the first substrate and the second substrate together such that the deposited first metal on the first substrate is aligned and in contact with the deposited second metal on the second substrate, and annealing the first metal and second metal to form an intermetallic bond between the first substrate and the second substrate.

    Abstract translation: 在MEMS应用中结合两个基板的方法包括在第一基板上的接合区域中沉积第一金属,在第二基板上的接合区域中沉积与第一金属不同的第二金属,将第一基板和 所述第二衬底一起使得所述第一衬底上沉积的第一金属对准并且与所述第二衬底上沉积的第二金属接触,并且对所述第一金属和第二金属退火以在所述第一衬底和所述第二衬底之间形成金属间键 。

    Method and system for determining club head speed
    14.
    发明申请
    Method and system for determining club head speed 失效
    确定球杆头速度的方法和系统

    公开(公告)号:US20060189398A1

    公开(公告)日:2006-08-24

    申请号:US11357215

    申请日:2006-02-21

    Abstract: A one dimensional (1D) line imaging system that operates at a scanning (clock) rate of between 10-40 MHz is used to monitor the characteristics of a golf swing. A line image is analyzed in real time by an associate computer imaging system removing the need for a trigger to operate. Optics of the imaging system are designed to relate ball image size to distance so that the number of 1 D pixels imaging the ball, in particular sensing a white object, have a relation to distance to the ball. Ball image size is related to distance by monitoring the rate of increase (rate of change) of the pixels imaging the ball with time so that the speed of the club head can be determined. The speed of a golf ball that has been struck is determined by monitoring the rate of decrease (rate of change) of the pixels imaging the ball.

    Abstract translation: 使用以10-40MHz的扫描(时钟)速率操作的一维(1D)线成像系统来监视高尔夫挥杆的特征。 通过相关的计算机成像系统实时分析线图像,消除了对触发器操作的需要。 成像系统的光学设计用于将球图像尺寸与距离相关联,使得对球体(特别是感测白色物体)成像的1D像素的数量与到球的距离有关。 球图像尺寸通过监视随时间成像球的像素的增加率(变化率)而使得球杆头的速度可以被确定来与距离相关。 通过监测对球成像的像素的降低率(变化率)来确定已经被击打的高尔夫球的速度。

    MEMS vibration isolation system and method
    17.
    发明授权
    MEMS vibration isolation system and method 有权
    MEMS振动隔离系统及方法

    公开(公告)号:US08896074B2

    公开(公告)日:2014-11-25

    申请号:US13358744

    申请日:2012-01-26

    CPC classification number: B81B7/0016

    Abstract: A microelectromechanical vibration isolation system includes a microelectromechanical structure having a plurality of fin apertures etched therethrough, and a plurality of fins each disposed within a respective one of the plurality of fin apertures and spaced apart from the microelectromechanical structure so as to define a fluid gap therebetween. The fluid gap is configured to provide squeeze film damping of vibrations imparted upon the microelectromechanical structure in at least two dimensions. The system further includes a frame surrounding the microelectromechanical structure, and a plurality of springs each coupled to the microelectromechanical structure and to the frame. The plurality of springs is configured to support the micromechanical structure in relation to the frame.

    Abstract translation: 微机电振动隔离系统包括具有蚀刻穿过其中的多个翅片孔的微机电结构,以及多个翅片,每个翅片均设置在多个翅片孔中的相应一个翅片孔内并与微机电结构间隔开,以便限定其间的流体间隙 。 流体间隙构造成在至少两个维度上提供施加在微机电结构上的振动的挤压膜阻尼。 该系统还包括围绕微电子机械结构的框架,以及多个弹簧,每个弹簧联接到微机电结构和框架。 多个弹簧构造成相对于框架支撑微机械结构。

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