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公开(公告)号：US20080135385A1
公开(公告)日：2008-06-12
申请号：US11718130
申请日：2005-10-24
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01G5/40 , H01H1/24 , H01H2059/0063
摘要： A MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate.
摘要翻译： MEM器件具有可移动元件（30），一对电极（e 1，e 2），用于移动可移动元件，一个电极具有可独立移动的部分（e 3），弹性地联接到相应电极的其余部分 提供对电极拉动的附加阻力。 这可以实现更高的释放电压Vrel，从而降低静电的风险。 此外，可以减小Vpi与Vrel的比率，因此更大的电压范围可用于可移动元件的移动。 这样可以实现更快的切换。 可独立移动部分的面积小于电极的其余部分，并且弹性联接件的弹簧常数大于柔性支撑件的弹簧常数。 或者，可移动元件可以具有弹性耦合并朝向基板突出的可移动的印模部分，以在其接触基板时提供额外的拉入阻力。
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公开(公告)号：US06538874B2
公开(公告)日：2003-03-25
申请号：US09782664
申请日：2001-02-13
IPC分类号： H01G430
CPC分类号： H03H3/00 , H03H7/0115
摘要： An electronic device having a resonance frequency with a margin of error sufficiently small for high frequency applications. The electronic device includes a first capacitor electrode in a first electrically conducting layer, a dielectric including a layer of dielectric material and a distinct electrically insulating material, and a second capacitor electrode in a second electrically conducting layer.
摘要翻译： 具有对于高频应用具有足够小的误差裕度的共振频率的电子装置。 电子器件包括在第一导电层中的第一电容器电极，包括介电材料层和不同电绝缘材料的电介质，以及在第二导电层中的第二电容器电极。
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13.发明授权公开(公告)号：US08686714B2
公开(公告)日：2014-04-01
申请号：US13058114
申请日：2009-07-28
IPC分类号： G01R29/22
CPC分类号： H03H9/02275 , H03H9/02259 , H03H9/02338 , H03H9/2457 , H03H2009/02511
摘要： The invention relates to an electromechanical transducer (100). The electromechanical transducer (100) comprises a cantilever beam (101) and an excitation unit (102) that is adapted for exciting a motion of the cantilever beam (101). A detection unit (103) is adapted for detecting an electrical signal (iout) in response to the excited motion of the cantilever beam (101).
摘要翻译： 本发明涉及机电换能器（100）。 机电换能器（100）包括悬臂梁（101）和适于激发悬臂梁（101）的运动的激励单元（102）。 检测单元（103）适于响应于悬臂梁（101）的激发的运动来检测电信号（iout）。
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公开(公告)号：US08294534B2
公开(公告)日：2012-10-23
申请号：US12888185
申请日：2010-09-22
申请人： Casper van der Avoort , Jozef Thomas Martinus Van Beek , Johannes van Wingerden , Joep Bontemps , Robert James Pascoe Lander
发明人： Casper van der Avoort , Jozef Thomas Martinus Van Beek , Johannes van Wingerden , Joep Bontemps , Robert James Pascoe Lander
CPC分类号： H03H9/02448 , H03H3/0076 , H03H9/2447 , H03H9/2473 , H03H9/2489
摘要： A resonator comprising a beam formed from a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator, wherein the ratio of the cross sectional area of the first material to the cross sectional area of the second material varies along the length of the beam, the cross sectional areas being measured substantially perpendicularly to the beam.
摘要翻译： 一种谐振器，包括由具有第一杨氏模量和第一杨氏模量的第一温度系数的第一材料形成的梁，以及具有第二杨氏模量和第二杨氏模量的第二温度系数的第二材料， 所述第二温度系数至少在所述谐振器的操作条件下与所述第一温度系数的符号相反，其中所述第一材料的横截面积与所述第二材料的横截面面积的比率沿着所述梁的长度变化 横截面面积基本上垂直于梁测量。
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公开(公告)号：US07709285B2
公开(公告)日：2010-05-04
申请号：US10578026
申请日：2004-10-26
IPC分类号： H01L21/00
CPC分类号： H01G5/18 , B81B3/0078 , B81B2201/016 , B81B2201/038 , B81B2203/04 , B81B2203/053 , H01H59/0009 , H01H2057/006 , H01H2239/01
摘要： A method for manufacturing a micro-electromechanical systems (MEMS) device, comprising providing a base layer (10) and a mechanical layer (12) on a substrate (14), providing a sacrificial layer (16) between the base layer (10) and the mechanical layer (12), providing an etch stop layer (18) between the sacrificial layer (16) and the substrate (14), and removing the sacrificial layer (16) by means of dry chemical etching, wherein the dry chemical etching is performed using a fluorine-containing plasma, and the etch stop layer (18) comprises a substantially non-conducting, fluorine chemistry inert material, such as HfO2, ZrO2, Al2O3 or TiO2.
摘要翻译： 一种用于制造微机电系统（MEMS）装置的方法，包括在基底（14）上提供基底层（10）和机械层（12），在基底层（10）之间提供牺牲层（16） 和所述机械层（12），在所述牺牲层（16）和所述衬底（14）之间提供蚀刻停止层（18），以及通过干法化学蚀刻去除所述牺牲层（16），其中所述干化学蚀刻 使用含氟等离子体进行，并且蚀刻停止层（18）包括基本上不导电的氟化学惰性材料，例如HfO 2，ZrO 2，Al 2 O 3或TiO 2。
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公开(公告)号：US08629731B2
公开(公告)日：2014-01-14
申请号：US13128059
申请日：2009-11-10
IPC分类号： H03L1/00
CPC分类号： H03H9/02448 , H03H9/2426
摘要： A MEMS circuit comprises a MEMS device arrangement with temperature dependent output; a resistive heating circuit; and a feedback control system for controlling the resistive heating circuit to provide heating in order to maintain a MEMS device at a constant temperature. The heating is controlled in dependence on the ambient temperature, such that a MEMS device temperature is maintained at one of a plurality of temperatures in dependence on the ambient temperature. This provides power savings because the temperature to which the MEMS device is heated can be kept within a smaller margin of the ambient temperature.
摘要翻译： MEMS电路包括具有温度相关输出的MEMS器件布置; 电阻加热电路; 以及用于控制电阻加热电路以提供加热以便将MEMS器件保持在恒定温度的反馈控制系统。 根据环境温度控制加热，使得MEMS器件温度根据环境温度保持在多个温度中的一个温度。 这提供了功率节省，因为MEMS器件被加热的温度可以保持在环境温度的较小边界内。
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公开(公告)号：US08325143B2
公开(公告)日：2012-12-04
申请号：US10564920
申请日：2004-07-08
申请人： Galileo June Adeva Destura , Hjalmar Edzer Ayco Huitema , Martinus Hermanus Wilhelmus Maria Van Delden , Jozef Thomas Martinus Van Beek , Antonius Lucien Adrianus Maria Kemmeren
发明人： Galileo June Adeva Destura , Hjalmar Edzer Ayco Huitema , Martinus Hermanus Wilhelmus Maria Van Delden , Jozef Thomas Martinus Van Beek , Antonius Lucien Adrianus Maria Kemmeren
IPC分类号： G09G5/00
CPC分类号： G06F3/0412 , G02F1/13338 , G06F3/0414
摘要： A portable device is provided having a touch sensitive display (100) comprising an active matrix display element (101) and a touch sensitive element (103). The touch sensitive element (103) is disposed on the viewer distal side of the active matrix display element (101) thereby not affecting the display properties. The touch sensitive element (103) comprises a first and second conductive layer (113, 115) each having a plurality of conductors. The conductive layers (113, 115) sandwich a pressure sensitive layer (117) which modifies an electrical conductivity between two conductors of the two conductive layers (113, 115) in response to a pressure point resulting from an applied pressure. Thus, accurate position detection is achieved. The conductors may be aligned with the active matrix and the requirement for calibration may be obviated.
摘要翻译： 提供了具有触敏显示器（100）的便携式设备，该触敏显示器（100）包括有源矩阵显示元件（101）和触敏元件（103）。 触敏元件（103）设置在有源矩阵显示元件（101）的观看者远侧，从而不影响显示属性。 触敏元件（103）包括每个具有多个导体的第一和第二导电层（113,115）。 导电层（113,115）夹着压力敏感层（117），该压力敏感层（117）响应于由所施加的压力导致的压力点而改变两个导电层（113,115）的两个导体之间的导电性。 因此，实现了精确的位置检测。 导体可以与有源矩阵对准，并且可以避免校准的要求。
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公开(公告)号：US20090211885A1
公开(公告)日：2009-08-27
申请号：US11718137
申请日：2005-10-24
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/40 , H01H1/06 , H01H57/00 , H01H2057/006 , H01H2059/0072
摘要： The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate (14). The MEMS element comprises a first electrode (101) and a second electrode (11), that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode (11) is separated from the first electrode (101) by an air gap (110) in its first position. The movable element comprises a mechanical layer (12) and an intermediate layer, in which the second electrode (11) is defined. The second electrode (11) is constituted by a plurality of sections (131, 132, 133) in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect (121, 122, 123) to the mechanical layer (12).
摘要翻译： 该电子设备包括在基板（14）的第一侧的微机电系统（MEMS）元件。 MEMS元件包括第一电极（101）和第二电极（11），其是可移动元件的一部分并且可在第一和第二位置之间朝向和离开第一电极移动。 第二电极（11）在其第一位置通过气隙（110）与第一电极（101）分离。 可移动元件包括机械层（12）和中间层，其中限定了第二电极（11）。 第二电极（11）由中间层中的多个部分（131,132,133）构成，每个部分通过分开的垂直互连（121,122,123）与机械层（12）机械连接， 。
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公开(公告)号：US20090057792A1
公开(公告)日：2009-03-05
申请号：US11722634
申请日：2005-12-21
IPC分类号： B81B7/02
CPC分类号： H03H9/02409 , H03H9/02433 , H03H9/2405 , H03H9/2463 , H03H2009/02496
摘要： A resonator has a vibrating element (10) and at least a first (20) and a second (30) electrode, at least one of the electrodes storing an electric charge to make the device charge biased. A charge adjuster (C) can add to or reduce the stored charge. The charge adjuster can be a capacitor to reduce leakage, and or a power supply coupled by switch. It can reduce problems of stiction, and reduce power consumption, and reduce non linearity's, it enables the charge level to be adjusted before operation. A second switch can be used to ground the vibrating element.
摘要翻译： 谐振器具有振动元件（10）和至少第一（20）和第二（30）电极，至少一个电极存储电荷以使器件充电偏置。 电荷调节器（C）可以增加或减少存储的电荷。 电荷调节器可以是电容器来减少泄漏，或者电源由开关耦合。 它可以减少静噪问题，降低功耗，减少非线性度，使操作前调整充电水平。 可以使用第二开关来将振动元件接地。
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公开(公告)号：US20080231385A1
公开(公告)日：2008-09-25
申请号：US12088722
申请日：2006-09-21
IPC分类号： H03B1/00
CPC分类号： H03B5/30
摘要： An oscillator circuit has a first and a second piezoresistive resonator (1,2), each having a resonant frequency, each piezoresistive resonator having an input for driving the resonator, and each piezoresistive resonator having its input coupled directly to an output of the other of the resonators, to provide feedback according to a resistance of the respective resonator without amplification and without a phase shifter. This enables feedback without the need for another component to provide the phase shift. This means a simpler circuit can be used, which can facilitate greater integration and hence lower costs. By using piezoresistive resonators the need for an external crystal can be avoided, enabling greater integration and lower costs.
摘要翻译： 振荡器电路具有第一和第二压阻谐振器（1,2），每个具有谐振频率，每个压阻谐振器具有用于驱动谐振器的输入端，并且每个压阻谐振器的输入直接耦合到另一个的输出端 谐振器，以根据各个谐振器的电阻而无需放大而不使用移相器来提供反馈。 这使得反馈不需要另一个组件来提供相移。 这意味着可以使用更简单的电路，这可以促进更大的集成度，从而降低成本。 通过使用压阻谐振器，可以避免对外部晶体的需求，从而实现更高的集成度和更低的成本。
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