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公开(公告)号：US20180216998A1
公开(公告)日：2018-08-02
申请号：US15485097
申请日：2017-04-11
Applicant: KLA-Tencor Corporation
Inventor： Kenneth P. Gross
CPC classification number: G01J3/28 , G01J1/429 , G01J3/021 , G01J3/0218 , G01J3/108 , G01J3/1804 , G01J3/36 , G01N21/211
Abstract: A wideband spectrograph apparatus includes a first spectrograph assembly and one or more subsequent spectrograph assemblies. Each subsequent spectrograph assembly is optically coupled to a previous spectrograph assembly and is configured to receive a cascading beam from one or more dispersion elements of the previous spectrograph assembly. The first spectrograph assembly is configured for detecting illumination in a first wavelength range and the one or more subsequent spectrograph assemblies are configured for detecting illumination in wavelength ranges different from the first or any previous wavelength ranges to provide simultaneous sampling of different spectral portions of an input beam.
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公开(公告)号：US09615439B2
公开(公告)日：2017-04-04
申请号：US14989348
申请日：2016-01-06
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Kenneth P. Gross , Richard Solarz , Lauren Wilson , Rahul Yadav , Joshua Wittenberg , Anant Chimmalgi , Xiumei Liu , Brooke Bruguier
Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element. The gas containment element is configured to contain a volume of a gas mixture. The collector element is configured to focus the pump illumination from the pumping source into the volume of the gas mixture contained within the gas containment element in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas mixture filters one or more selected wavelengths of radiation emitted by the plasma.
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13.发明申请System and Method for Inhibiting Radiative Emission of a Laser-Sustained Plasma Source 有权用于抑制激光持续等离子体源的辐射发射的系统和方法公开(公告)号：US20160205758A1
公开(公告)日：2016-07-14
申请号：US14989348
申请日：2016-01-06
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Kenneth P. Gross , Richard Solarz , Lauren Wilson , Rahul Yadav , Joshua Wittenberg , Anant Chimmalgi , Xiumei Liu , Brooke Bruguier
IPC: H05G2/00
Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element. The gas containment element is configured to contain a volume of a gas mixture. The collector element is configured to focus the pump illumination from the pumping source into the volume of the gas mixture contained within the gas containment element in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas mixture filters one or more selected wavelengths of radiation emitted by the plasma.
Abstract translation: 用于形成激光维持等离子体的系统包括气体容纳元件，被配置为产生泵浦照明的照明源和收集器元件。 气体容纳元件构造成容纳一定体积的气体混合物。 收集器元件被配置为将来自泵送源的泵浦照明聚焦到容纳在气体容纳元件内的气体混合物的体积中，以便在发射宽带辐射的气体混合物的体积内产生等离子体。 气体混合物过滤由等离子体发射的一个或多个选定波长的辐射。
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Patent Agency Ranking
公开(公告)号：US20190033204A1
公开(公告)日：2019-01-31
申请号：US16043764
申请日：2018-07-24
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Kenneth P. Gross , John Szilagyi
Abstract: A broadband radiation source is disclosed. The system may include a plasma containment vessel configured to receive laser radiation from a pump source to sustain a plasma within gas flowed through the plasma containment vessel. The plasma containment vessel may be further configured to transmit at least a portion of broadband radiation emitted by the plasma. The system may also include a recirculation gas loop fluidically coupled to the plasma containment vessel. The recirculation gas loop may be configured to transport heated gas from an outlet of the plasma containment vessel, and further configured to transport cooled gas to an inlet of the plasma containment vessel.
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公开(公告)号：US20170164457A1
公开(公告)日：2017-06-08
申请号：US15360397
申请日：2016-11-23
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Kenneth P. Gross , Matthew Panzer , Anant Chimmalgi , Lauren Wilson , Joshua Wittenberg
CPC classification number: H01J61/025 , H01J61/302 , H01J61/52 , H01J65/04
Abstract: A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.
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16.发明授权System and method for imaging a sample with a laser sustained plasma illumination output 有权用激光持续等离子体照明输出成像样品的系统和方法公开(公告)号：US09558858B2
公开(公告)日：2017-01-31
申请号：US14459155
申请日：2014-08-13
Applicant: KLA-Tencor Corporation
Inventor： David W. Shortt , Steven R. Lange , Matthew Derstine , Kenneth P. Gross , Wei Zhao , Ilya Bezel , Anatoly Shchemelinin
CPC classification number: G21K5/00
Abstract: The inspection of a sample with VUV light from a laser sustained plasma includes generating pumping illumination including a first selected wavelength, or range of wavelength, containing a volume of gas suitable for plasma generation, generating broadband radiation including a second selected wavelength, or range of wavelengths, by forming a plasma within the volume of gas by focusing the pumping illumination into the volume of gas, illuminating a surface of a sample with the broadband radiation emitted from the plasma via an illumination pathway, collecting illumination from a surface of the sample, focusing the collected illumination onto a detector via a collection pathway to form an image of at least a portion of the surface of the sample and purging the illumination pathway and/or the collection pathway with a selected purge gas.
Abstract translation: 使用来自激光持续等离子体的VUV光检测样品包括产生包括第一选定波长或波长范围的泵浦照明，其包含适于等离子体产生的气体体积，产生包括第二选定波长的宽度辐射或范围 通过将泵浦照明聚焦到气体体积中，通过将等离子体聚焦在气体体积中，利用从等离子体经由照明路径发射的宽带辐射来照射样品的表面，从样品的表面收集照明， 通过收集路径将收集的照明聚焦到检测器上，以形成样品表面的至少一部分的图像，并用所选择的吹扫气体吹扫照明路径和/或收集路径。
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17.发明授权Method and system for controlling convective flow in a light-sustained plasma 有权用于控制光持久等离子体中对流的方法和系统公开(公告)号：US09390902B2
公开(公告)日：2016-07-12
申请号：US14224945
申请日：2014-03-25
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Kenneth P. Gross , David W. Shortt , Wei Zhao , Anant Chimmalgi , Jincheng Wang
IPC: H01J65/00
CPC classification number: H01J65/042 , H01J61/28 , H01J61/523 , H01J65/00 , H05H1/24
Abstract: A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.
Abstract translation: 用于控制光持久等离子体中的对流的系统包括被配置为产生照明的照明源，包括用于容纳一定体积的气体的灯泡的等离子体单元，被布置成将来自照明源的照明聚焦到气体体积中的集电器元件 以便在容纳在灯泡内的气体的体积内产生等离子体。 此外，等离子体单元设置在集电器元件的凹入区域内，其中集电器元件包括用于将等离子体的一部分羽流传播到收集元件的凹部区域外部的区域的开口。
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18.发明申请System and Method for Imaging a Sample with a Laser Sustained Plasma Illumination Output 有权用激光持续等离子体照明输出成像样品的系统和方法公开(公告)号：US20150048741A1
公开(公告)日：2015-02-19
申请号：US14459155
申请日：2014-08-13
Applicant: KLA-Tencor Corporation
Inventor： David W. Shortt , Steven R. Lange , Matthew Derstine , Kenneth P. Gross , Wei Zhao , Ilya Bezel , Anatoly Shchemelinin
IPC: H05H1/46
CPC classification number: G21K5/00
Abstract: The inspection of a sample with VUV light from a laser sustained plasma includes generating pumping illumination including a first selected wavelength, or range of wavelength, containing a volume of gas suitable for plasma generation, generating broadband radiation including a second selected wavelength, or range of wavelengths, by forming a plasma within the volume of gas by focusing the pumping illumination into the volume of gas, illuminating a surface of a sample with the broadband radiation emitted from the plasma via an illumination pathway, collecting illumination from a surface of the sample, focusing the collected illumination onto a detector via a collection pathway to form an image of at least a portion of the surface of the sample and purging the illumination pathway and/or the collection pathway with a selected purge gas.
Abstract translation: 使用来自激光持续等离子体的VUV光检测样品包括产生包括第一选定波长或波长范围的泵浦照明，其包含适于等离子体产生的气体体积，产生包括第二选定波长的宽度辐射或范围 通过将泵浦照明聚焦到气体体积中，通过将等离子体聚焦在气体体积中，利用从等离子体经由照明路径发射的宽带辐射来照射样品的表面，从样品的表面收集照明， 通过收集路径将收集的照明聚焦到检测器上，以形成样品表面的至少一部分的图像，并用所选择的吹扫气体吹扫照明路径和/或收集路径。
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