Pressure sensor and manufacturing method therefor
    14.
    发明授权
    Pressure sensor and manufacturing method therefor 有权
    压力传感器及其制造方法

    公开(公告)号:US07343810B2

    公开(公告)日:2008-03-18

    申请号:US11342535

    申请日:2006-01-31

    IPC分类号: G01L7/00

    CPC分类号: G01L19/0645 G01L19/146

    摘要: A pressure sensor is composed of a pressure housing having a pressure chamber inside and a pressure sensitive element arranged in the pressure chamber, and a joint housing having a fluid passage for leading fluid into the pressure housing, wherein the pressure housing and the joint housing are jointed by brazing with an insulating member interposed at a joint section therebetween. A stress relieving member is interposed at least either between the metal housing and the insulating member or between the joint housing and the insulating member, so that the insulating member can be relieved of a stress which is caused by the braze jointing to act on the insulating member.

    摘要翻译: 压力传感器由在内部具有压力室的压力壳体和布置在压力室中的压力敏感元件组成,以及具有用于将流体引入压力壳体的流体通道的接头壳体,其中压力壳体和接头壳体 通过钎焊与插入其间的接合部分处的绝缘构件接合。 应力消除部件至少插入在金属壳体和绝缘构件之间或者在接头壳体和绝缘构件之间,使得绝缘构件能够消除由钎焊接合作用于绝缘体上的应力 会员。

    Amino acid N-carboxyanhydrides with acyl substituents on nitrogen atoms thereof
    16.
    发明授权
    Amino acid N-carboxyanhydrides with acyl substituents on nitrogen atoms thereof 失效
    在其氮原子上具有酰基取代基的氨基酸N-羧酸酐

    公开(公告)号:US06670447B2

    公开(公告)日:2003-12-30

    申请号:US10070156

    申请日:2002-03-04

    IPC分类号: C07K1600

    摘要: This invention provides amino acid N-carboxyanhydrides, each of which has an N-acyl substituent on its nitrogen atom, is represented by the following formula (1): readily reacts with nucleophilic reagents such as free amino acids, alcohols, anions or the like, and are intermediates useful for the high-yield production of amino acid derivatives, optically active compounds, peptides, polypeptides and the like useful in many fields lead by the fields of pharmaceuticals and agrochemicals, and also provides a process for the production of the amino acid N-carboxyanhydrides. Further, the present invention also provides a process for the production of diamides, which uses the compounds of the formula (1) and amine derivatives represented by the following formula (7): These diamides can also be suitably used for the production of amino acid derivatives, optically active compounds, peptides, polypeptides and the like.

    摘要翻译: 本发明提供氨基酸N-羧酸酐,其各自在其氮原子上具有N-酰基取代基,由下式(1)表示:容易与亲核试剂如游离氨基酸,醇,阴离子等反应 并且是用于高产量生产氨基酸衍生物,光学活性化合物,肽,多肽等的中间体,其在许多领域中可用于药物和农用化学品的领域,并且还提供了制备氨基酸的方法 酸性N-羧酸酐。 此外,本发明还提供了使用式(1)的化合物和由下式(7)表示的胺衍生物的二酰胺的制备方法:这些二酰胺也可以适合用于制备氨基酸 衍生物,光学活性化合物,肽,多肽等。

    Phase shift mask blank, method of manufacturing the same, and phase shift mask
    20.
    发明授权
    Phase shift mask blank, method of manufacturing the same, and phase shift mask 有权
    相移掩模空白,其制造方法和相移掩模

    公开(公告)号:US08999609B2

    公开(公告)日:2015-04-07

    申请号:US13639686

    申请日:2011-04-08

    摘要: Provided are a phase shift mask blank that is improved in the irradiation durability of a light-semitransmissive film (phase shift film), made of a material containing mainly a transition metal, silicon, and nitrogen, to exposure light having a wavelength of 200 nm or less and thus can improve the mask lifetime, a method of manufacturing such a phase shift mask blank, and a phase shift mask. The phase shift mask blank is used for manufacturing a phase shift mask adapted to be applied with ArF excimer laser exposure light. The phase shift mask blank has a light-semitransmissive film on a transparent substrate. The light-semitransmissive film is an incomplete nitride film containing mainly a transition metal, silicon, and nitrogen. The content ratio of the transition metal to the transition metal and the silicon in the light-semitransmissive film is less than 9%.

    摘要翻译: 提供一种相位移掩模坯料,其将由主要包含过渡金属,硅和氮的材料制成的光半透射膜(相移膜)的照射耐久性提高到具有200nm波长的曝光光 或更小,从而可以改善掩模寿命,制造这种相移掩模坯料的方法和相移掩模。 相移掩模空白用于制造适于施加ArF准分子激光曝光光的相移掩模。 相移掩模空白在透明基板上具有轻半透射膜。 轻半透射膜是主要包含过渡金属,硅和氮的不完全氮化物膜。 过渡金属与过渡金属和轻半透射膜中的硅的含量比小于9%。