摘要:
The present invention relates to a diffusion barrier layer for a semiconductor device and fabrication method thereof. The diffusion barrier layer according to the present invention is fabricated by forming a diffusion barrier layer containing a refractory metal material and an insulating material on an insulating layer and in a contact hole, wherein the insulating layer being partially etched to form the contact hole, is formed on a semiconductor substrate; and annealing the diffusion barrier layer. Therefore, an object of the present invention is to provide a diffusion barrier layer for a semiconductor device, which is of an amorphous or microcrystalline state and thermodynamically stable even at a high temperature since an insulating material is bonded to a refractory metal material in the diffusion barrier layer.
摘要:
The present invention provides a flame retardant resin composition, or more particularly, a flame retardant polypropylene resin composition which comprises polypropylene having improved flow melt characteristics, flame retardants, a flame retardant aid, and a tetrafluoroethylene polymer. The composition of the present invention has high melt tension, without deterioration of the mechanical properties of flame retardant polypropylene, and drastically enhanced characteristics of shape maintenance and a flaming drip during burning.
摘要:
The present invention relates to a high barrier multilayer film for functional medical solution product comprising in order, an outer layer comprising polyethyleneterephthalate deposited inorganic oxide thereon; a first adhesive layer comprising ester type polyurethane; a first intermediate layer comprising ethylene vinyl alcohol copolymer; a second adhesive layer comprising ester type polyurethane; a second intermediate layer comprising polyamide; a third adhesive layer comprising ester type polyurethane; and an inner layer comprising propylene-based polymer. The multilayer film has the merits of improved transparency, heat resistance, sealing property, durability, competitive price, oxygen barrier property and less pinhole, so that may be applied to a outer bag of pouch type container of medical solution.
摘要:
The present invention relates to a method for improving charge/discharge cycle characteristics of a lithium secondary battery using a Si based anode active material, the method comprising surface-treating a surface of an anode current collector to have specific morphology, and preferably vapor-depositing a silicon film, as the anode active material by sputtering under application of bias voltage to the surface-treated anode current collector, and/or disposing an adhesive layer between the surface-treated anode current collector and silicon film, so as to reinforce bondability between the anode current collector and active material, ultimately leading to improvement of charge/discharge characteristics of the battery.
摘要:
A wafer pattern inspecting apparatus and method are disclosed. The apparatus comprises an image sensor to acquire image data from a reference die and a sample die, an external memory to store the image data, an encoder to compress the data, a decoder to decompress the data, an internal memory device to store the compressed image data of the reference die, an arithmetic module to process the image data for the reference dies to extract a reference image data, a reference storage memory to store compressed reference image data, and a comparison module to compare the sample die image data with the reference image data to an extract defect data for the sample die.
摘要:
A wafer pattern inspecting apparatus and method are disclosed. The apparatus comprises an image sensor to acquire image data from a reference die and a sample die, an external memory to store the image data, an encoder to compress the data, a decoder to decompress the data, an internal memory device to store the compressed image data of the reference die, an arithmetic module to process the image data for the reference dies to extract a reference image data, a reference storage memory to store compressed reference image data, and a comparison module to compare the sample die image data with the reference image data to an extract defect data for the sample die.
摘要:
Provided are an anode active material for a lithium secondary battery having high reversible capacity and excellent charge/discharge efficiency, comprising a complex composed of ultra-fine Si phase particles and an oxide surrounding the ultra-fine Si phase particles, and a carbon material; and a method for preparing the same. The present invention also provides a method for preparing an anode active material for a lithium secondary battery comprising producing a complex composed of ultra-fine Si particles and an oxide surrounding the ultra-fine Si particles by mixing a silicon oxide and a material having an absolute value of oxide formation enthalpy (ΔHfor) greater than that of the silicon oxide and negative oxide formation enthalpy by a mechanochemical process or subjecting them to a thermochemical reaction to reduce the silicon oxide; and mixing the Si phase-containing oxide complex and carbon material.
摘要:
The present invention provides a polypropylene resin composition including a polypropylene resin having a melt flow rate of 4-18 g/10 minutes, a flame retardant additive having a low melting point, an antimony oxide, a UV stabilizer, a silane coupling agent, and titanium dioxide as a light-blocking agent. The resin composition of the invention produces products exhibiting excellent flame retarding properties, stability against weather, and maintainability of physical/mechanical properties as shown by maintaining the original flame retarding properties after long periods of outdoor exposure and hydrothermal dipping treatments.
摘要:
A method of aligning a substrate can comprise primarily aligning the substrate having a pattern, obtaining pattern information corresponding to a configuration of the pattern, comparing the pattern information with predetermined reference pattern information to corroborate the acceptability of the pattern information, selectively exchanging the predetermined reference pattern information with the pattern information based on the acceptability of the pattern information, and secondarily aligning the substrate to correlate the position of the pattern with the pattern information.
摘要:
A method and apparatus of classifying repetitive defects on a substrate is provided. Defects of dies on the substrate are sequentially compared with a predetermined reference die. Sets of coordinates are marked on the reference die which are corresponding to the position of the defects on the dies on the substrate. Then, repetitive defects are classified which are repeatedly marked in a specified region on the reference die.