Measuring probe
    11.
    发明授权

    公开(公告)号:US09618312B2

    公开(公告)日:2017-04-11

    申请号:US14789283

    申请日:2015-07-01

    CPC classification number: G01B3/008 G01B5/0016 G01B5/012 G01B5/20 G01B11/007

    Abstract: A measuring probe includes a stylus having a contact part to be in contact with an object to be measured, an axial motion mechanism having a moving member that allows the contact part to move in an axial direction, and a rotary motion mechanism having a rotating member that allows the contact part to move along a plane perpendicular to the axial direction by means of rotary motion. The measuring probe includes a probe main body that incorporates the axial motion mechanism, and a probe module that is supported by the probe main body, incorporates the rotary motion mechanism, and supports the stylus. The probe main body and the probe module are detachably coupled to each other with a pair of rollers and a ball capable of positioning to each other. This allows adequate detection sensitivity and a restoring force suitable for the stylus to be obtained at a low cost.

    FORM MEASURING INSTRUMENT
    12.
    发明申请
    FORM MEASURING INSTRUMENT 有权
    形式测量仪器

    公开(公告)号:US20140237834A1

    公开(公告)日:2014-08-28

    申请号:US14190452

    申请日:2014-02-26

    CPC classification number: G01B5/20 G01B3/008 G01B5/28 G01B7/28 G01B7/34

    Abstract: A form measuring instrument includes: a body; a movable member including: a stylus holder being rotatably supported by the body; a stylus being held by the stylus holder; and a tip being provided at an end of the stylus and being contactable with a workpiece surface; a measurement-force-applying unit being adapted to generate a rotation force acting on the stylus holder to bring the tip of the stylus into contact with the workpiece surface; a displacement detector being provided to a portion of the stylus holder to detect a displacement of the stylus holder resulting from a rotation thereof; and a vibration generator being adapted to apply vibration to the stylus holder.

    Abstract translation: 一种形式测量仪器包括:身体; 可动构件,包括:由所述主体可旋转地支撑的触针座; 由触针座保持的触针; 并且尖端设置在触针的端部并且可与工件表面接触; 测量力施加单元,其适于产生作用在所述触针座上的旋转力,以使所述触针的尖端与所述工件表面接触; 位移检测器被提供到触针保持器的一部分以检测由其旋转引起的触针座的位移; 以及振动发生器,其适于对所述触针支架施加振动。

    Lens substrate stacking position calculating apparatus and program

    公开(公告)号:US11435560B2

    公开(公告)日:2022-09-06

    申请号:US16789970

    申请日:2020-02-13

    Abstract: The present invention provides a lens substrate stacking position calculating apparatus capable of calculating a stacking position at which the number of lens sets whose optical axis deviation falls within an allowable range is maximized, when a plurality of wafer lens arrays are bonded together even if the position of each lens formed on a wafer substrate is deviated between wafer lens arrays to be stacked. The lens substrate stacking position calculating apparatus calculates the positional relationship of two or more transparent substrates to be stacked when the two or more transparent substrates on which a plurality of lenses are two-dimensionally arranged are stacked to form a plurality of lens sets each including two or more lenses. A position of each lens is specified in advance in a common coordinate system.

    Form measuring apparatus
    14.
    发明授权

    公开(公告)号:US10900765B2

    公开(公告)日:2021-01-26

    申请号:US16207706

    申请日:2018-12-03

    Abstract: A form measuring apparatus includes a base; an arm capable of swinging relative to the base; a coupler coupling the base and the arm, and having a deformation region that is capable of elastic deformation between the base and the arm; and a distortion detector installed in the deformation region. In the form measuring apparatus, a stylus is mounted to the arm and can slide along a surface of a work piece.

    Measuring probe and measuring probe system

    公开(公告)号:US10001358B2

    公开(公告)日:2018-06-19

    申请号:US15281326

    申请日:2016-09-30

    CPC classification number: G01B5/012 G01B5/204

    Abstract: A measuring probe for measuring a screw groove of a relatively rotatable ball screw includes a stylus having a tip end portion configured to contact the screw groove, a radial-direction displacement mechanism configured to support the stylus so as for the stylus to be displaceable in an X direction toward an axial center of the ball screw, an axial-direction displacement mechanism configured to support the stylus so as for the stylus to be displaceable in an axial direction (Z direction) of the axial center, and sensors configured to detect displacement of the stylus produced by the radial-direction displacement mechanism and the axial-direction displacement mechanism. This enables high-accuracy measurement of a predetermined position of a side surface of a relatively rotatable work.

    Form measuring machine
    16.
    发明授权
    Form measuring machine 有权
    成型测量机

    公开(公告)号:US09518811B2

    公开(公告)日:2016-12-13

    申请号:US14669667

    申请日:2015-03-26

    CPC classification number: G01B3/008 G01B5/20

    Abstract: A measuring force includes a stem, an arm, a detector, a rotation fulcrum, and a measuring force adjuster. A probe which makes contact with a workpiece is provided on the stem. An end portion of the arm is joined to the stem. The rotation fulcrum acts as a fulcrum for a rotating motion of the stem and the arm. The detector detects a displacement amount of the rotating motion of the arm. A crossed spring of the rotation fulcrum imparts on the stem and the arm a torque around an axis of the rotating motion in accordance with the displacement amount of the rotating motion. The measuring force adjuster imparts on the arm and the stem a torque, in a reverse direction of the torque generated by the crossed spring, by an attraction force generated by a magnetic force between at least two magnetic members mutually arranged at opposite ends.

    Abstract translation: 测量力包括杆,臂,检测器,旋转支点和测量力调节器。 在杆上设置与工件接触的探针。 臂的端部连接到杆。 旋转支点用作杆和臂的旋转运动的支点。 检测器检测臂的旋转运动的位移量。 旋转支点的交叉弹簧根据旋转运动的位移量,在杆和臂上施加围绕旋转运动的轴线的转矩。 测量力调节器通过由在相对端相互布置的至少两个磁性构件之间的磁力产生的吸引力,在与交叉弹簧产生的扭矩相反的方向上向臂和杆施加扭矩。

    Wavelength detector and contact probe using it
    17.
    发明授权
    Wavelength detector and contact probe using it 有权
    使用波长检测器和接触探头

    公开(公告)号:US08665435B2

    公开(公告)日:2014-03-04

    申请号:US13733356

    申请日:2013-01-03

    Inventor: Kazuhiko Hidaka

    CPC classification number: G01J3/28 G01B5/012 G01B11/007 G01B11/14 G01B2210/50

    Abstract: A contact probe includes a stylus and an optical detector configured to detect a posture of the stylus optically. An illumination subject portion is formed on the stylus and has three or more reflection surfaces. The optical detector includes three or more fibers, a light source, a condenser lens group, and a wavelength detector. The wavelength detector calculates posture information of the stylus on the basis of wavelength variations of reflection light beams that are caused by variations of intervals between the condenser lens group and the three or more reflection surfaces, respectively. The contact probe acquires coordinates of a position of the contact to the object to be measured on the basis of posture information obtained by the optical detector.

    Abstract translation: 接触探针包括触针和被配置为以光学方式检测触针的姿势的光学检测器。 照明对象部分形成在触笔上并且具有三个或更多个反射表面。 光学检测器包括三个或更多个光纤,光源,聚光透镜组和波长检测器。 波长检测器基于聚光透镜组和三个或更多个反射面之间的间隔的变化引起的反射光束的波长变化,分别计算触针的姿势信息。 接触探针基于由光学检测器获得的姿势信息,获取触点的位置的坐标。

    WAVELENGTH DETECTOR AND CONTACT PROBE USING IT
    18.
    发明申请
    WAVELENGTH DETECTOR AND CONTACT PROBE USING IT 有权
    波长检测器和联系人探测器

    公开(公告)号:US20130176561A1

    公开(公告)日:2013-07-11

    申请号:US13733356

    申请日:2013-01-03

    Inventor: Kazuhiko Hidaka

    CPC classification number: G01J3/28 G01B5/012 G01B11/007 G01B11/14 G01B2210/50

    Abstract: A contact probe includes a stylus and an optical detector configured to detect a posture of the stylus optically. An illumination subject portion is formed on the stylus and has three or more reflection surfaces. The optical detector includes three or more fibers, a light source, a condenser lens group, and a wavelength detector. The wavelength detector calculates posture information of the stylus on the basis of wavelength variations of reflection light beams that are caused by variations of intervals between the condenser lens group and the three or more reflection surfaces, respectively. The contact probe acquires coordinates of a position of the contact to the object to be measured on the basis of posture information obtained by the optical detector.

    Abstract translation: 接触探针包括触针和被配置为以光学方式检测触针的姿势的光学检测器。 照明对象部分形成在触笔上并且具有三个或更多个反射表面。 光学检测器包括三个或更多个光纤,光源,聚光透镜组和波长检测器。 波长检测器基于聚光透镜组和三个或更多个反射面之间的间隔的变化引起的反射光束的波长变化,分别计算触针的姿势信息。 接触探针基于由光学检测器获得的姿势信息,获取触点的位置的坐标。

    Measurement apparatus, control apparatus, and control method

    公开(公告)号:US12078478B2

    公开(公告)日:2024-09-03

    申请号:US17517903

    申请日:2021-11-03

    CPC classification number: G01B21/16 G06T7/579 G06T2200/08

    Abstract: A measurement apparatus includes a sensor that measures a workpiece, a multi-axis robot that moves the sensor in a three-dimensional space, a position determination part that determines i) a plurality of measurement positions that are positions along a normal direction at each of a plurality of positions to be measured on the workpiece and ii) a direction of the sensor at each of the plurality of measurement positions on the basis of at least either design data or captured image data indicating the geometry of the workpiece, a moving control part that sequentially moves the sensor to the plurality of measurement positions by controlling the robot, and a measurement control part that outputs measured data indicating a result that the sensor measured at each of the plurality of measurement positions in association with the plurality of positions to be measured.

    Measurement probe and measuring device

    公开(公告)号:US10415947B2

    公开(公告)日:2019-09-17

    申请号:US15647446

    申请日:2017-07-12

    Abstract: A probe includes a movable plate to which a stylus capable of contacting a measurable object is mounted, the movable plate displaceable in an X direction; a static plate arranged to overlap with the movable plate; a counter plate facing the movable plate and the static plate; an elastic movable side connection plate, the movable side connection plate connecting the counter plate at at least three places with each of a first end connector positioned toward a first end of the movable plate in the X direction and second end connectors positioned toward a second end in the X direction; and a static side connection plate which connects the static plate and the counter plate. An entire length of the first end connector in a Y direction orthogonal to the X direction is the same size as the entire length of the second end connectors in the Y direction.

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