摘要:
A wafer with a reversed domain is prepared for two piezoelectric single crystal plates and of about the same thickness by using direct bonding without any adhesive. Driving electrodes are formed on two principal planes of the wafer with a reversed domain to provide a piezoelectric resonator. A piezoelectric resonator having the structure with a reversed polarization and using odd-order vibration modes vibrating with a fundamental wave has a wavelength of a thickness thereof and suppresses scattering of the thickness of the domains with a reversed polarization. In the direct bonding, the axes of the spontaneous polarization of the two piezoelectric single crystal plates are reverse to each other and crystalline axes other than the axes of polarization are shifted intentionally by an angle other than zero. Thus, spurious modes are suppressed in a simple way.
摘要:
A wafer with a reversed domain is prepared for two piezoelectric single crystal plates 11 and 12 having about the same thickness as each other by using direct bonding without any adhesive. Then, driving electrodes 13 are formed on two principal planes of the wafer with a reversed domain to provide a piezoelectric resonator. A piezoelectric resonator having the structure with a reverses polarization and using odd-order vibration modes vibrating with a fundamental wave has a wavelength of a thickness thereof suppresses scattering of the thickness of the domains with a reversed polarization. In the direct bonding, the axes of the spontaneous polarization of the two piezoelectric single crystal plates are reverse to each other and crystalline axes other than the axes of polarization are shifted intentionally by an angle other than zero. Thus, spurious modes are suppressed in a simple way.
摘要:
A method of driving an ultrasonic motor having a rotation body (6) which is rotated by travelling waves generated in a vibrator body (3), whereby the drive frequency of the motor is controlled in accordance with the value of an operating parameter such as phase difference between drive current and voltage, such as to maintain the drive frequency at a value which is lower than the antiresonance frequency of the vibrator body (3) and higher than a highest resonance frequency of the vibrator body (3) in a hysteresis loop exhibited by a resonance frequency characteristic of the vibrator body (3). Continuous stable operation is attained, irrespective of the effects of temperature and load changes upon the motor operating characteristics.
摘要:
In an ultrasonic motor wherein an elastic travelling wave is excited in a vibrating stator comprising a piezoelectric element and an elastic element thereby to drive and a rotor which is disposed to touch the vibrating stator with pressure by friction forces, an ultrasonic motor having high efficiency is obtained. In the present invention, the above-mentioned vibrating stator is substantially disk-type, electrodes being provided to the piezoelectric element are disposed in a form of two sets of concentric circles having different phases with respect to each other in a circumferential direction in which the vibration is travelling, and have a constitution which excites the vibrating stator by flexural vibration modes of second order or higher in a radial direction and of third order or higher in the circumferential direction, and also, are designed so that at least mechanical impedances seen from each electrode become equal. By superimposing standing waves of the flexural vibration which are excited by those two sets of electrodes, the flexural vibration is made to travel in the circumferential direction, thereby to obtain a driving force.
摘要:
An acceleration sensor has a piezoelectric element which includes a piezoelectric member layer in which a plurality of piezoelectric members are stacked and electrodes which are disposed in major opposed surfaces of the piezoelectric member layer; and a support member for supporting the piezoelectric element, wherein some piezoelectric members of the piezoelectric member layer are polarized. The electrodes are disposed in both surfaces of the polarized piezoelectric members. Capacitors which are formed by the polarized piezoelectric members and the electrodes in both surfaces of the polarized piezoelectric members are connected parallel to each other.
摘要:
An acceleration sensor has a piezoelectric element which includes a piezoelectric member layer in which a plurality of piezoelectric members are stacked and electrodes which are disposed in major opposed surfaces of the piezoelectric member layer; and a support member for supporting the piezoelectric element, wherein some piezoelectric members of the piezoelectric member layer are polarized, the electrodes are disposed in the both surfaces of the polarized piezoelectric members, capacitors which are formed by the polarized piezoelectric members and the electrodes in the both surfaces of the polarized piezoelectric members are connected parallel to each other.
摘要:
In a directional loudspeaker, an audible sound signal that is modulated with a carrier wave in the ultrasonic wave band is input to a piezoelectric element, and thereby a diaphragm having the piezoelectric element is vibrated and a sound wave is generated. In such a directional loudspeaker, the diaphragm is fixed to a fixed part via a plurality of beams disposed along the outer circumference of the diaphragm.
摘要:
An electronic component includes a substrate; a piezoelectric material layer supported directly or indirectly by the substrate; a first electrode arranged on a surface of the piezoelectric material layer on an opposite side of the substrate; and a second electrode arranged on a surface of the piezoelectric material layer on the substrate side. The piezoelectric material layer is sandwiched between the first electrode and the second electrode. The first electrode has a smaller surface area than the piezoelectric material layer. A portion where the piezoelectric material layer is exposed from the first electrode includes a portion that is thinner than a thickness of the piezoelectric material layer between the first electrode and the second electrode. Thus, it is possible to configure a resonator with a higher frequency than its ordinary resonance, and it is easy to achieve an adjustment of the resonance frequency of the resonator, as well as improving the yield of the component and enabling the configuration of an electronic component that includes a plurality of resonators of different frequencies.
摘要:
There is provided a method for driving a piezoelectric transformer in which a driving efficiency and the reliability in terms of withstand power and distortion can be enhanced by suppressing a higher order vibration mode exited by a harmonic component other than a driving frequency included in a driving signal of the piezoelectric transformer without using an inductive element. The driving signal applied to a primary side electrode of the piezoelectric transformer is a signal in a rectangular waveform having a time period δT in which a level is a maximum potential (2V) or a minimum potential (0), obtained by multiplying a period T of the driving signal by a predetermined time ratio δ. The time ratio δ is set to be smaller than 0.5 and so as to minimize a sum of ratios of amplitudes of respective higher order vibration modes with respect to an amplitude of a vibration mode exciting the piezoelectric transformer.
摘要:
In a directional loudspeaker, an audible sound signal that is modulated with a carrier wave in the ultrasonic wave band is input to a piezoelectric element, and thereby a diaphragm having the piezoelectric element is vibrated and a sound wave is generated. In such a directional loudspeaker, the diaphragm is fixed to a fixed part via a plurality of beams disposed along the outer circumference of the diaphragm.