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112 条记录 (耗时 0.026 秒)

    Semiconductor device and manufacturing method
    12.
    发明授权
    Semiconductor device and manufacturing method 有权
    半导体器件及制造方法

    公开(公告)号：US06894341B2

    公开(公告)日：2005-05-17

    申请号：US10326179

    申请日：2002-12-23

    申请人： Kikuko Sugimae ,  Hiroyuki Kutsukake ,  Masayuki Ichige ,  Michiharu Matsui ,  Yuji Takeuchi ,  Riichiro Shirota

    发明人： Kikuko Sugimae ,  Hiroyuki Kutsukake ,  Masayuki Ichige ,  Michiharu Matsui ,  Yuji Takeuchi ,  Riichiro Shirota

    IPC分类号： H01L21/8247 ,  H01L27/105 ,  H01L27/115 ,  H01L29/788 ,  H01L31/0328

    CPC分类号： H01L27/11526 ,  H01L27/105 ,  H01L27/115 ,  H01L27/11521 ,  H01L27/11524 ,  H01L27/11529

    摘要： A semiconductor device comprises a memory cell array portion and peripheral circuit portion, wherein a first insulation film including elements as main components other than nitrogen fills between the memory cell gate electrodes of the memory cell array portion, the first insulation film is formed as a liner on a sidewall of a peripheral gate electrode of the peripheral circuit portion simultaneously with the memory cell portion, and a second insulation film including nitrogen as the main component is formed on the sidewall of the peripheral gate electrode via the first insulation film, thus enabling not only the formation of the memory cell portion having high reliability, but also the formation of a peripheral circuit with good efficiency, simultaneously, and avoiding gate offset of a peripheral gate.

    摘要翻译： 半导体器件包括存储单元阵列部分和外围电路部分，其中包括作为除氮之外的主要成分的元素的第一绝缘膜填充在存储单元阵列部分的存储单元栅电极之间，第一绝缘膜形成为衬垫 在周边电路部分的外围栅电极的侧壁上与存储单元部分同时，并且通过第一绝缘膜在外围栅电极的侧壁上形成包括氮作为主要成分的第二绝缘膜，从而不能 仅形成具有高可靠性的存储单元部分，而且形成具有良好效率的周边电路，同时避免了外围栅极的栅极偏移。

    NONVOLATILE SEMICONDUCTOR MEMORY, FABRICATION METHOD FOR THE SAME, SEMICONDUCTOR INTEGRATED CIRCUITS AND SYSTEMS
    13.
    发明申请
    NONVOLATILE SEMICONDUCTOR MEMORY, FABRICATION METHOD FOR THE SAME, SEMICONDUCTOR INTEGRATED CIRCUITS AND SYSTEMS 失效
    非线性半导体存储器，其制造方法，半导体集成电路和系统

    公开(公告)号：US20070070708A1

    公开(公告)日：2007-03-29

    申请号：US11559785

    申请日：2006-11-14

    申请人： Masayuki ICHIGE ,  Koji Hashimoto ,  Tatsuaki Kuji ,  Seiichi Mori ,  Riichiro Shirota ,  Yuji Takeuchi ,  Koji Sakui

    发明人： Masayuki ICHIGE ,  Koji Hashimoto ,  Tatsuaki Kuji ,  Seiichi Mori ,  Riichiro Shirota ,  Yuji Takeuchi ,  Koji Sakui

    IPC分类号： G11C16/04

    CPC分类号： H01L27/11521 ,  G11C16/0483 ,  H01L27/0207 ,  H01L27/115 ,  H01L27/11519 ,  H01L27/11524

    摘要： A nonvolatile semiconductor memory which is configured to include a plurality of word lines disposed in a row direction; a plurality of bit lines disposed in a column direction perpendicular to the word lines; memory cell transistors having a charge storage layer, provided in the column direction and an electronic storage condition of the memory cell transistor configured to be controlled by one of the plurality of the word lines connected to the memory cell; a plurality of first select transistors, each including a gate electrode, selecting the memory cell transistors provided in the column direction, arranged in the column direction and adjacent to the memory cell transistors at a first end of the memory cell transistors; and a first select gate line connected to each of the gate electrodes of the first select transistors.

    摘要翻译： 一种非易失性半导体存储器，被配置为包括沿行方向布置的多个字线; 沿垂直于字线的列方向布置的多个位线; 具有沿列方向设置的电荷存储层的存储单元晶体管和存储单元晶体管的电子存储状态，其被配置为由连接到存储单元的多条字线之一控制; 多个第一选择晶体管，每个包括栅极，选择沿列方向设置的存储单元晶体管，其布置在存储单元晶体管的第一端处并与存储单元晶体管相邻; 以及连接到第一选择晶体管的每个栅电极的第一选择栅极线。

    Fabrication method of a nonvolatile semiconductor memory
    15.
    发明授权
    Fabrication method of a nonvolatile semiconductor memory 有权
    非易失性半导体存储器的制造方法

    公开(公告)号：US07141474B2

    公开(公告)日：2006-11-28

    申请号：US11008531

    申请日：2004-12-10

    申请人： Masayuki Ichige ,  Koji Hashimoto ,  Tatsuaki Kuji ,  Seiichi Mori ,  Riichiro Shirota ,  Yuji Takeuchi ,  Koji Sakui

    发明人： Masayuki Ichige ,  Koji Hashimoto ,  Tatsuaki Kuji ,  Seiichi Mori ,  Riichiro Shirota ,  Yuji Takeuchi ,  Koji Sakui

    IPC分类号： H01L21/336

    CPC分类号： H01L27/11521 ,  G11C16/0483 ,  H01L27/0207 ,  H01L27/115 ,  H01L27/11519 ,  H01L27/11524

    摘要： A method of fabricating a nonvolatile semiconductor memory including the steps of: sequentially forming a gate insulating layer and a first conductive layer of a floating gate on a semiconductor substrate; depositing an inter-gate insulating layer; forming an opening in a part of the inter-gate insulating layer; depositing a control gate electrode on the inter-gate insulating layer and an exposed portion of the first conductive layer by the opening; and forming the gate electrodes of the memory cell transistors and the gate electrodes of the select transistors by utilizing the etching processes of the control gate electrode, the inter-gate insulating layer and the first conductive layer, wherein the select transistors include at least a part of the exposed portion of the first conductive layer.

    摘要翻译： 一种制造非易失性半导体存储器的方法，包括以下步骤：在半导体衬底上依次形成栅极绝缘层和浮置栅极的第一导电层; 沉积栅极间绝缘层; 在所述栅极绝缘层的一部分中形成开口; 通过所述开口在所述栅极间绝缘层上沉积控制栅极电极和所述第一导电层的暴露部分; 以及通过利用所述控制栅电极，所述栅极间绝缘层和所述第一导电层的蚀刻工艺，形成所述存储单元晶体管的栅电极和所述选择晶体管的栅电极，其中所述选择晶体管至少包括一部分 的第一导电层的暴露部分。

    Nonvolatile semiconductor memory
    16.
    发明授权
    Nonvolatile semiconductor memory 失效
    非易失性半导体存储器

    公开(公告)号：US07498630B2

    公开(公告)日：2009-03-03

    申请号：US11559785

    申请日：2006-11-14

    申请人： Masayuki Ichige ,  Koji Hashimoto ,  Tatsuaki Kuji ,  Seiichi Mori ,  Riichiro Shirota ,  Yuji Takeuchi ,  Koji Sakui

    发明人： Masayuki Ichige ,  Koji Hashimoto ,  Tatsuaki Kuji ,  Seiichi Mori ,  Riichiro Shirota ,  Yuji Takeuchi ,  Koji Sakui

    IPC分类号： H01L29/76

    CPC分类号： H01L27/11521 ,  G11C16/0483 ,  H01L27/0207 ,  H01L27/115 ,  H01L27/11519 ,  H01L27/11524

    摘要： A nonvolatile semiconductor memory which is configured to include a plurality of word lines disposed in a row direction; a plurality of bit lines disposed in a column direction perpendicular to the word lines; memory cell transistors having a charge storage layer, provided in the column direction and an electronic storage condition of the memory cell transistor configured to be controlled by one of the plurality of the word lines connected to the memory cell; a plurality of first select transistors, each including a gate electrode, selecting the memory cell transistors provided in the column direction, arranged in the column direction and adjacent to the memory cell transistors at a first end of the memory cell transistors; and a first select gate line connected to each of the gate electrodes of the first select transistors.

    摘要翻译： 一种非易失性半导体存储器，被配置为包括沿行方向布置的多个字线; 沿垂直于字线的列方向布置的多个位线; 具有沿列方向设置的电荷存储层的存储单元晶体管和存储单元晶体管的电子存储状态，其被配置为由连接到存储单元的多条字线之一控制; 多个第一选择晶体管，每个包括栅极，选择沿列方向设置的存储单元晶体管，其布置在存储单元晶体管的第一端处并与存储单元晶体管相邻; 以及连接到第一选择晶体管的每个栅电极的第一选择栅极线。