公开(公告)号：US07012491B1

公开(公告)日：2006-03-14

申请号：US10238319

申请日：2002-09-10

Applicant: Aaron Geisberger ,  Matthew D. Ellis

Inventor： Aaron Geisberger ,  Matthew D. Ellis

IPC: H01H51/22

CPC classification number: B25J15/12 ,  B25J7/00 ,  B81B3/0018 ,  B81B2201/13 ,  B81C99/002

Abstract: A system and method for storing potential energy in a microcomponent is disclosed comprising a multi-stable element having two or more equilibrium states and a stopper to restrict the multi-stable element from entering at least one of the two or more equilibrium states. The pre-charged microcomponent may then preferably be transported to another location and use the stored potential energy to perform some action.

Abstract translation: 公开了一种用于在微元件中存储势能的系统和方法，其包括具有两个或多个平衡状态的多稳态元件和用于限制所述多稳态元件进入所述两个或多个平衡状态中的至少一个的止动器。 然后可以优选将预充电的微元件运送到另一位置，并使用存储的势能来执行一些动作。

公开(公告)号：US06679055B1

公开(公告)日：2004-01-20

申请号：US10061775

申请日：2002-01-31

Applicant: Matthew D. Ellis

Inventor： Matthew D. Ellis

IPC: F01B2910

CPC classification number: B81B3/0035 ,  F03G7/06 ,  H01H1/0036 ,  H01H61/04 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H2061/008

Abstract: In a microactuator having substantially parallel beams, the free ends of the beams are detached from the substrate and rigidly interconnected with one another. Differential thermal expansion of the beams causes deflection of the free ends as a unit laterally away from the thermally expanded beam. Depending on the choice of thermally expanded beam, the deflection can be either in or out of the plane parallel to the substrate. Selective heating is achieved for example by passing electric current through a pair of beams in series. Each beam has an independent electrical contact pad at the base end, and all beams are connected together electrically at the free end. A voltage is applied across the selected beam pads, whereas the non-selected beam pads are disconnected. Multiple microactuators can be combined cooperatively, e.g., to move a stage in a plurality of directions.

Abstract translation: 在具有基本上平行的梁的微型致动器中，梁的自由端与衬底分离并且彼此刚性地互连。 梁的差分热膨胀导致自由端作为横向远离热膨胀梁的单元的偏转。 根据热扩张束的选择，偏转可以在平行于基底的平面内或外。 例如通过使电流串联通过一对光束来实现选择性加热。 每个光束在基端具有独立的电接触焊盘，并且所有光束在自由端电连接在一起。 电压施加在所选择的光束焊盘上，而未选择的光束焊盘被断开。 可以协同地组合多个微致动器，例如，以在多个方向上移动台。

公开(公告)号：US07227140B2

公开(公告)日：2007-06-05

申请号：US10948385

申请日：2004-09-23

Applicant: George Skidmore ,  Matthew D. Ellis ,  Aaron Geisberger ,  Kenneth Bray ,  Kimberly Tuck ,  Robert Folaron

Inventor： George Skidmore ,  Matthew D. Ellis ,  Aaron Geisberger ,  Kenneth Bray ,  Kimberly Tuck ,  Robert Folaron

IPC: G21G5/00

CPC classification number: H01J37/185 ,  G01N1/28 ,  G01N1/286 ,  G01N1/32 ,  G01N2001/2886 ,  G02B21/32 ,  H01J37/20 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method including, in one embodiment, severing a sample at least partially from a substrate by cutting the substrate with a focused ion beam (FIB), capturing the substrate sample by activating a grasping element, and separating the captured sample from the substrate. The captured sample may be separated from the substrate and transported to an electron microscope for examination.

Abstract translation: 一种方法包括在一个实施方案中，通过用聚焦离子束（FIB）切割衬底，至少部分地从衬底切割样品，通过激活抓握元件捕获衬底样品，以及将捕获的样品与衬底分离。 捕获的样品可以与基底分离并输送到电子显微镜进行检查。