Plated-layer structure for improving interface stress between aluminium nitride substrate and copper-plated layer

    公开(公告)号:US10060036B2

    公开(公告)日:2018-08-28

    申请号:US14959285

    申请日:2015-12-04

    CPC classification number: C23C28/023 C23C28/021

    Abstract: A yellow light photolithographic process and an electroplating process are performed multiple times to produce copper plated layers on the aluminum nitride (AlN) substrate. The copper plated layers are plated in sequence into a stack structure with each layer having reduced length. The parameters of the yellow light photolithographic process can be adjusted, such that each copper plated layer is formed horizontally for a predetermined length into a stack structure of step layers tapering off upward, while a predetermined angle is formed by the tangent line passing through edges of the respective step layers, and the surface of the AlN substrate. An adhesion layer, a copper seed layer, a first copper plated layer, a second copper plated layer, a third copper plated layer, and a nickel plated layer are formed in sequence on the AlN substrate, to form a metalized circuit of multi-layer stack.

    COOLING DEVICE FOR ELECTRONIC COMPONENTS
    13.
    发明申请
    COOLING DEVICE FOR ELECTRONIC COMPONENTS 审中-公开
    电子元件冷却装置

    公开(公告)号:US20160148917A1

    公开(公告)日:2016-05-26

    申请号:US15011515

    申请日:2016-01-30

    Abstract: A cooling device for electronic components is a combination of substrate (aluminum nitride substrate—thermoelectric elements—aluminum nitride substrate) and utilizing the temperature difference generated by two top and bottom ends of the cooling device to effectively remove the heat generated by the electronic components. This cooling device not only can effectively reduce temperature of the electronic components, but also store the power generated through its thermoelectric effect.

    Abstract translation: 电子部件的冷却装置是基板(氮化铝基板 - 热电元件 - 氮化铝基板)的组合,并且利用由冷却装置的两个顶端和底端产生的温差来有效地去除由电子部件产生的热量。 该冷却装置不仅能够有效地降低电子部件的温度,还可以存储通过其热电效应产生的电力。

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