Spectrometry device
    12.
    发明授权

    公开(公告)号:US12158417B1

    公开(公告)日:2024-12-03

    申请号:US18691179

    申请日:2022-09-01

    Inventor: Ichiro Ishimaru

    Abstract: A spectrometry device 1 includes: a collimating optical system 15 configured to collimate object light from a measurement point a on a sample S; a photodetector 21 having a light-receiving face in which a plurality of pixels are arrayed in a predetermined direction; a conjugate plane imaging optical system 11 provided between the sample and the collimating optical system to form a plane optically conjugate with respect to a surface of the sample; an amplitude-type diffraction grating 1 disposed on the conjugate surface and having a light incident face on which the object light is incident or a light emission face from which the object light is emitted, the light incident face or the light emission face being formed by a light-shielding member made of a material having a light shielding rate higher than that of silicon in a wavelength band of the object light and provided with a plurality of openings, an optical path length differentiating optical system 16 configured to divide collimated object light into a first light beam and a second light beam to provide an optical path length difference; and an interference optical system 17 configured to cause the first light beam and the second light beam provided with the optical path length difference to interfere with each other to form an interference image on the light-receiving face along the predetermined direction.

    Light measurement device and optical axis adjustment method

    公开(公告)号:US10545016B2

    公开(公告)日:2020-01-28

    申请号:US16322592

    申请日:2017-08-07

    Abstract: A light measurement device that maintains high measurement precision. The light measurement device includes: light source that irradiates light upon measurement object; branch part that splits transmitted light or reflected light from measurement object; phase-changing unit that changes the phase of one beam of the branched light beams; phase-fixing unit that maintains the phase of the other beam of the branched light beams; adjustment mechanism, which is provided in phase-changing unit or phase-fixing unit, for adjusting the propagation direction of light; multiplexer that causes the light emitted by each of phase-changing unit and phase-fixing unit to interfere with each other; detection unit that detects light that is interfered with by multiplexer; and control unit that controls the adjustment mechanism on the basis of the luminance values of an interference image that is detected by detection unit and adjusts the propagation direction of light in phase-changing unit or phase-fixing unit.

    Spectroscopic measurement device having diffraction grating at conjugate plane of relay lens
    14.
    发明授权
    Spectroscopic measurement device having diffraction grating at conjugate plane of relay lens 有权
    在中继透镜的共轭平面处具有衍射光栅的光谱测量装置

    公开(公告)号:US09488524B2

    公开(公告)日:2016-11-08

    申请号:US14430658

    申请日:2013-10-02

    Inventor: Ichiro Ishimaru

    Abstract: A spectroscopic measurement device includes: a dividing optical system for dividing a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured, into a first measurement beam and a second measurement beam; an imaging optical system; an optical path length difference providing means; a detector including a plurality of pixels; a processor for acquiring an interferogram of a measurement point of the object to be measured; a conjugate plane imaging optical system located between the object to be measured and the dividing optical system; and a periodicity providing means located on the conjugate plane.

    Abstract translation: 光谱测量装置包括:分割光学系统,用于将位于待测物体的测量区域内的多个测量点中的每一个发射的测量光束分成第一测量光束和第二测量光束; 成像光学系统; 光路长度差提供装置; 检测器,包括多个像素; 用于获取待测量对象的测量点的干涉图的处理器; 位于待测物体与分光光学系统之间的共轭平面成像光学系统; 以及位于共轭平面上的周期性提供装置。

    Spectroscopic measurement device having transmissive optical member with a sloped face
    15.
    发明授权
    Spectroscopic measurement device having transmissive optical member with a sloped face 有权
    光谱测量装置具有带倾斜面的透射光学部件

    公开(公告)号:US09482576B2

    公开(公告)日:2016-11-01

    申请号:US14668106

    申请日:2015-03-25

    Inventor: Ichiro Ishimaru

    Abstract: A spectroscopic measurement device includes: a dividing optical system for dividing a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured, into a first measurement beam and a second measurement beam; an imaging optical system; an optical path length difference providing means; a detector including a plurality of pixels; a processor for acquiring an interferogram of a measurement point of the object to be measured; a conjugate plane imaging optical system located between the object to be measured and the dividing optical system; and a periodicity providing means located on the conjugate plane.

    Abstract translation: 光谱测量装置包括:分割光学系统,用于将位于待测物体的测量区域内的多个测量点中的每一个发射的测量光束分成第一测量光束和第二测量光束; 成像光学系统; 光路长度差提供装置; 检测器,包括多个像素; 用于获取待测量对象的测量点的干涉图的处理器; 位于待测物体与分光光学系统之间的共轭平面成像光学系统; 以及位于共轭平面上的周期性提供装置。

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