Abstract:
In a microparticle measurement device, a sample is passed through each channel in a multi-flow channel, and a predetermined linear area is illuminated with light. Measurement light originating from a microparticle in the sample, such as scattered or fluorescent light, is shaped into a parallel beam by an objective lens and passes through a first and second transmission portions. The beams transmitted through these two portions are converged as first and second measurement beams onto the same straight line by a cylindrical lens. The intensity of the interference light formed by these beams is detected with a detector. Meanwhile, the light emitted from the light source and passing through the multi-flow channel without hitting the microparticle falls through the objective lens onto a non-reflection portion and does not travel toward the cylindrical lens. Accordingly, only the interference light formed by the measurement beams is allowed to fall onto the detector.
Abstract:
A spectrometry device 1 includes: a collimating optical system 15 configured to collimate object light from a measurement point a on a sample S; a photodetector 21 having a light-receiving face in which a plurality of pixels are arrayed in a predetermined direction; a conjugate plane imaging optical system 11 provided between the sample and the collimating optical system to form a plane optically conjugate with respect to a surface of the sample; an amplitude-type diffraction grating 1 disposed on the conjugate surface and having a light incident face on which the object light is incident or a light emission face from which the object light is emitted, the light incident face or the light emission face being formed by a light-shielding member made of a material having a light shielding rate higher than that of silicon in a wavelength band of the object light and provided with a plurality of openings, an optical path length differentiating optical system 16 configured to divide collimated object light into a first light beam and a second light beam to provide an optical path length difference; and an interference optical system 17 configured to cause the first light beam and the second light beam provided with the optical path length difference to interfere with each other to form an interference image on the light-receiving face along the predetermined direction.
Abstract:
A light measurement device that maintains high measurement precision. The light measurement device includes: light source that irradiates light upon measurement object; branch part that splits transmitted light or reflected light from measurement object; phase-changing unit that changes the phase of one beam of the branched light beams; phase-fixing unit that maintains the phase of the other beam of the branched light beams; adjustment mechanism, which is provided in phase-changing unit or phase-fixing unit, for adjusting the propagation direction of light; multiplexer that causes the light emitted by each of phase-changing unit and phase-fixing unit to interfere with each other; detection unit that detects light that is interfered with by multiplexer; and control unit that controls the adjustment mechanism on the basis of the luminance values of an interference image that is detected by detection unit and adjusts the propagation direction of light in phase-changing unit or phase-fixing unit.
Abstract:
A spectroscopic measurement device includes: a dividing optical system for dividing a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured, into a first measurement beam and a second measurement beam; an imaging optical system; an optical path length difference providing means; a detector including a plurality of pixels; a processor for acquiring an interferogram of a measurement point of the object to be measured; a conjugate plane imaging optical system located between the object to be measured and the dividing optical system; and a periodicity providing means located on the conjugate plane.
Abstract:
A spectroscopic measurement device includes: a dividing optical system for dividing a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured, into a first measurement beam and a second measurement beam; an imaging optical system; an optical path length difference providing means; a detector including a plurality of pixels; a processor for acquiring an interferogram of a measurement point of the object to be measured; a conjugate plane imaging optical system located between the object to be measured and the dividing optical system; and a periodicity providing means located on the conjugate plane.