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23 条记录 (耗时 0.031 秒)

    Liquid feed vaporization system and gas injection device
    11.
    发明授权
    Liquid feed vaporization system and gas injection device 失效
    液体进料蒸发系统和气体注入装置

    公开(公告)号：US06195504B1

    公开(公告)日：2001-02-27

    申请号：US08974512

    申请日：1997-11-19

    申请人： Kuniaki Horie ,  Hidenao Suzuki ,  Tsutomu Nakada ,  Fumio Kuriyama ,  Takeshi Murakami ,  Masahito Abe ,  Yuji Araki ,  Hiroyuki Ueyama

    发明人： Kuniaki Horie ,  Hidenao Suzuki ,  Tsutomu Nakada ,  Fumio Kuriyama ,  Takeshi Murakami ,  Masahito Abe ,  Yuji Araki ,  Hiroyuki Ueyama

    IPC分类号： A61H3306

    CPC分类号： C23C16/45565 ,  C23C16/448 ,  C23C16/45561 ,  C23C16/4557

    摘要： A compact vaporizer system is presented to produce a high quality vapor feed from a liquid feed to be delivered to a chemical vapor deposition processing chamber to produce thin film devices based on highly dielectric or ferroelectric materials such as BaTiO3, SrTiO3 and others such materials. The vaporization apparatus comprises a feed tank for storing the liquid feed; feed delivery means for transporting the liquid feed by way of a feed delivery path; a vaporizer section disposed in the delivery path comprising a high temperature heat exchanger having a capillary tube for transporting the liquid feed and a heat source for externally heating the capillary tube; and a vaporization prevention section disposed upstream of the vaporizer section for preventing heating effects of the vaporizer section to the liquid feed within the vaporization prevention section.

    摘要翻译： 提供了一种紧凑的蒸发器系统，用于从液体进料产生高质量的蒸汽进料，以将其输送到化学气相沉积处理室，以产生基于高电介质或铁电材料如BaTiO 3，SrTiO 3等材料的薄膜器件。 蒸发装置包括用于储存液体进料的进料罐; 用于通过进料输送路径输送液体进料的进料输送装置; 设置在输送路径中的蒸发器部分包括具有用于输送液体进料的毛细管和用于外部加热毛细管的热源的高温热交换器; 以及蒸发防止部，其设置在所述蒸发部的上游侧，用于防止所述蒸发部对所述蒸发防止部内的所述液体进料的加热效果。

    Plate material carrying apparatus
    16.
    发明授权
    Plate material carrying apparatus 失效
    板材输送装置

    公开(公告)号：US06609875B1

    公开(公告)日：2003-08-26

    申请号：US09691161

    申请日：2000-10-19

    申请人： Yuji Araki

    发明人： Yuji Araki

    IPC分类号： B65G5902

    CPC分类号： B23Q7/103 ,  B23Q7/1442 ,  Y10S414/108

    摘要： A material table 39 supporting materials W is provided so as to be able to move between a plate material taking-in/out area 11 and material wait area 13, and when the material table 39 is positioned in the plate material taking-in/out area 11, the material table 39 is positioned in a lower position adjacent to an upper end portion of a slat conveyor 33.

    摘要翻译： 提供支撑材料W的材料台39，以便能够在板材导入/退出区域11和材料等待区域13之间移动，并且当材料台39位于板材接收/退出 区域11，材料台39位于与板条输送机33的上端部相邻的下部位置。

    Plate material carrying apparatus
    17.
    发明授权
    Plate material carrying apparatus 失效
    板材输送装置

    公开(公告)号：US6152682A

    公开(公告)日：2000-11-28

    申请号：US194760

    申请日：1998-12-03

    申请人： Yuji Araki

    发明人： Yuji Araki

    IPC分类号： B23Q7/10 ,  B23Q7/14 ,  B65G59/02

    CPC分类号： B23Q7/103 ,  B23Q7/1442 ,  Y10S414/108

    摘要： A material table 39 supporting materials W is provided so as to be able to move between a plate material taking-in/out area 11 and material wait area 13, and when the material table 39 is positioned in the plate material taking-in/out area 11, the material table 39 is positioned in a lower position adjacent to an upper end portion of a slat conveyor 33.

    摘要翻译： PCT No.PCT / JP98 / 01272 Sec。 371日期1998年12月3日第 102（e）1998年12月3日日期PCT提交1998年3月24日PCT公布。 出版物WO98 / 42478 日期1998年10月1日提供了支撑材料W的材料台39，以便能够在板材导入/退出区域11和材料等待区域13之间移动，并且当材料台39位于板材料 入口/出口区域11，材料台39位于与板条输送机33的上端部分相邻的下部位置。

    Substrate holder and plating apparatus
    18.
    发明授权
    Substrate holder and plating apparatus 有权
    基板支架和电镀装置

    公开(公告)号：US08864965B2

    公开(公告)日：2014-10-21

    申请号：US13211498

    申请日：2011-08-17

    申请人： Jumpei Fujikata ,  Yuji Araki ,  Masaaki Kimura

    发明人： Jumpei Fujikata ,  Yuji Araki ,  Masaaki Kimura

    IPC分类号： B23H7/26 ,  B25B1/22 ,  B25B1/00 ,  B23Q3/02 ,  B23Q3/00 ,  C25D17/06 ,  C25D17/00

    CPC分类号： C25D17/001 ,  C25D17/06

    摘要： A substrate holder includes a fixed holding member and a movable holding member for detachably holding a substrate by gripping a peripheral portion of the substrate therebetween, and an inner seal member and an outer seal member which are fixed to the movable holding member. When the substrate is held by the movable holding member and the fixed holding member, the inner and outer seal members seal the connection between the movable holding member and a peripheral portion of the substrate and the connection between the movable holding member and the fixed holding member, respectively. The movable holding member includes a seal holder, and the inner seal member and the outer seal member are fixed between the seal holder and a fixing ring secured to the seal holder.

    摘要翻译： 衬底保持器包括固定保持构件和可动保持构件，用于通过夹持基板的周边部分而可拆卸地保持基板，以及固定到可动保持构件的内密封构件和外密封构件。 当基板被可动保持构件和固定保持构件保持时，内密封构件和外密封构件密封可动保持构件与基板的周边部分之间的连接以及可动保持构件与固定保持构件之间的连接 ， 分别。 可动保持构件包括密封保持器，并且内密封构件和外密封构件固定在密封保持器和固定到密封件保持器的固定环之间。