公开(公告)号：US09969651B2

公开(公告)日：2018-05-15

申请号：US15695769

申请日：2017-09-05

申请人： Atsushi Takeuchi ,  Osamu Machida ,  Akira Shimofuku

发明人： Atsushi Takeuchi ,  Osamu Machida ,  Akira Shimofuku

IPC分类号： H01L41/187 ,  C04B35/472 ,  F04B43/04 ,  F04B19/00 ,  G02B26/08 ,  C23C18/12 ,  B41J2/16 ,  B41J2/14 ,  H01L41/331 ,  H01L41/318 ,  F16K99/00

CPC分类号： C04B35/472 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/164 ,  C23C18/1216 ,  C23C18/1254 ,  C23C18/1283 ,  F04B19/006 ,  F04B43/046 ,  F16K99/0015 ,  F16K99/0048 ,  F16K2099/0092 ,  G02B26/0858 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/331

摘要： A functional ink that includes a precursor sol-gel solution and a solvent is provided. The precursor sol-gel solution is used for forming an oxide dielectric film having a perovskite structure represented by a general formula ABO3, and has been subjected to a partial hydrolysis process in which a viscosity change resulting from the partial hydrolysis process is controlled to be less than or equal to 50%, and water contained in the precursor sol-gel solution is controlled to be greater than or equal to 0.50 times and less than or equal to 10 times by molar ratio with respect to a B site atom contained in the precursor sol-gel solution. The functional ink has a metal oxide concentration and a viscosity that renders the functional ink suitable for being discharged from a nozzle of a liquid droplet discharge apparatus included in a thin film fabrication apparatus.

公开(公告)号：US08770725B2

公开(公告)日：2014-07-08

申请号：US13612717

申请日：2012-09-12

申请人： Yasuhiro Watanabe ,  Osamu Machida ,  Akira Shimofuku ,  Ryo Tashiro

发明人： Yasuhiro Watanabe ,  Osamu Machida ,  Akira Shimofuku ,  Ryo Tashiro

IPC分类号： B41J2/045 ,  H01L41/22 ,  H04R17/00

CPC分类号： H01L41/0973 ,  B41J2/161 ,  H01L41/318 ,  H01L41/331

摘要： Disclosed is a method of manufacturing an electromechanical transducer element including a first process of hydrophobizing a first area of an electrode by forming a self-assembled monolayer film; a second process of applying a sol-gel solution onto a predetermined second area of the electrode so as to produce a complex oxide; a third process of producing the complex oxide by calcining the electrode; a fourth process of acid-washing the electrode on which the complex oxide has been produced; a fifth process of hydrophobizing the first area of the acid-washed electrode by forming the self-assembled monolayer film; a sixth process of applying the sol-gel solution onto the predetermined second area; and a seventh process of producing the complex oxide by calcining the electrode.

摘要翻译： 公开了一种制造机电换能器元件的方法，其包括通过形成自组装单层膜来疏水化电极的第一区域的第一工艺; 将溶胶 - 凝胶溶液施加到电极的预定的第二区域上以产生复合氧化物的第二种方法; 通过煅烧电极制造复合氧化物的第三种方法; 对生成了复合氧化物的电极进行酸洗的第四工序; 通过形成自组装单层膜来疏水酸洗电极的第一区域的第五种方法; 将溶胶 - 凝胶溶液施加到预定的第二区域上的第六种方法; 以及通过煅烧电极制造复合氧化物的第七种方法。

公开(公告)号：US20130176364A1

公开(公告)日：2013-07-11

申请号：US13737128

申请日：2013-01-09

申请人： Osamu Machida ,  Yoshikazu Akiyama ,  Ryo Tashiro ,  Akira Shimofuku ,  Eiichi Ohta ,  Kenichi Ogata

发明人： Osamu Machida ,  Yoshikazu Akiyama ,  Ryo Tashiro ,  Akira Shimofuku ,  Eiichi Ohta ,  Kenichi Ogata

IPC分类号： B41J2/045 ,  H01L41/08

CPC分类号： B41J2/045 ,  B41J2/14233 ,  H01L41/0805 ,  H01L41/318 ,  H01L41/331

摘要： Disclosed is an electromechanical transducer element including a first electrode disposed on a substrate; an electromechanical transducer film disposed on a first portion of the first electrode; and a second electrode disposed on a second portion of the electromechanical transducer film, wherein an actuator portion formed by laminating the substrate, the first electrode, the electromechanical transducer film, and the second electrode has a stiffness such that, in a cross section of the actuator portion, the stiffness gradually increases from an end portion of the actuator portion to a center portion of the actuator portion.

摘要翻译： 公开了一种机电换能器元件，包括设置在基板上的第一电极; 设置在所述第一电极的第一部分上的机电换能器膜; 以及设置在所述机电换能器膜的第二部分上的第二电极，其中通过层叠所述基板，所述第一电极，所述机电换能器膜和所述第二电极而形成的致动器部分具有刚度，使得在所述 致动器部分的刚度从致动器部分的端部逐渐增加到致动器部分的中心部分。

公开(公告)号：US20110205307A1

公开(公告)日：2011-08-25

申请号：US12968630

申请日：2010-12-15

申请人： Keiji UEDA ,  Yoshikazu Akiyama ,  Osamu Machida ,  Akira Shimofuku ,  Takakazu Kihira

发明人： Keiji UEDA ,  Yoshikazu Akiyama ,  Osamu Machida ,  Akira Shimofuku ,  Takakazu Kihira

IPC分类号： B41J2/045 ,  H01L41/18 ,  H01L41/187

CPC分类号： H01L41/0805 ,  B41J2/14233 ,  B41J2202/03 ,  C23C18/06 ,  C23C18/1216 ,  C23C18/1254 ,  H01L41/1876 ,  H01L41/318

摘要： A sol-gel liquid for use in forming an individualized electromechanical conversion film of an electromechanical conversion element by inkjet methods, including a lead zirconate titanate (PZT) or the PZT and other metal complex oxides; and an organic solvent having properties surrounded by A, B, C, D, E and F in triangular composition diagram of FIG. 3, and having a viscosity of from 3 to 13 mPa·s, a surface tension of 30±5 mN/m and a dehydration rate of from 70 to 80% relative to pure water.

摘要翻译： 一种用于通过喷墨法形成机电转换元件的单独机电转换膜的溶胶凝胶液体，包括锆钛酸铅（PZT）或PZT等金属络合物氧化物; 和在图3的三角形组成图中具有被A，B，C，D，E和F包围的性质的有机溶剂。 3，粘度为3〜13mPa·s，表面张力为30±5mN / m，脱水率为70〜80％。

公开(公告)号：US08727509B2

公开(公告)日：2014-05-20

申请号：US13486075

申请日：2012-06-01

申请人： Akira Shimofuku ,  Osamu Machida ,  Ryoh Tashiro ,  Yasuhiro Watanabe

发明人： Akira Shimofuku ,  Osamu Machida ,  Ryoh Tashiro ,  Yasuhiro Watanabe

IPC分类号： B41J2/045

CPC分类号： B41J2/14201 ,  B41J2/161 ,  B41J2/164 ,  H01L41/047 ,  H01L41/318 ,  H01L41/331

摘要： Disclosed is an electromechanical transducer film forming method including a surface modification process; an application process; and processes of drying, thermally decomposing, and crystallizing sol-gel solution applied to a portion of a surface of a first electrode. An electromechanical transducer film is formed on a desired pattern area on the surface of the first electrode by repeating the above processes. In the application process, each of dots of the sol-gel solution applied by the inkjet method drops onto both a first area inside the desired pattern area and a second area outside the desired pattern area. The first area is a hydrophilic area on the surface of the first electrode, and the second area is a hydrophobic area on the surface of the first electrode. The hydrophilic area and the hydrophobic area have been modified by the surface modification process.

摘要翻译： 公开了一种包括表面改性工艺的机电换能器成膜方法; 申请流程; 以及施加到第一电极表面的一部分上的溶胶 - 凝胶溶液的干燥，热分解和结晶过程。 通过重复上述过程，在第一电极的表面上的期望图案区域上形成机电换能器膜。 在涂布过程中，通过喷墨法施加的溶胶 - 凝胶溶液的每个点落在期望图案区域内的第一区域和期望图案区域外的第二区域上。 第一区域是第一电极表面上的亲水区域，第二区域是第一电极表面上的疏水区域。 亲水区域和疏水区域已经通过表面改性过程进行了修饰。

公开(公告)号：US08690297B2

公开(公告)日：2014-04-08

申请号：US12968630

申请日：2010-12-15

申请人： Keiji Ueda ,  Yoshikazu Akiyama ,  Osamu Machida ,  Akira Shimofuku ,  Takakazu Kihira

发明人： Keiji Ueda ,  Yoshikazu Akiyama ,  Osamu Machida ,  Akira Shimofuku ,  Takakazu Kihira

IPC分类号： B41J2/045 ,  H01L41/18 ,  H01L41/187

CPC分类号： H01L41/0805 ,  B41J2/14233 ,  B41J2202/03 ,  C23C18/06 ,  C23C18/1216 ,  C23C18/1254 ,  H01L41/1876 ,  H01L41/318

摘要： A sol-gel liquid for use in forming an individualized electromechanical conversion film of an electromechanical conversion element by inkjet methods, including a lead zirconate titanate (PZT) or the PZT and other metal complex oxides; and an organic solvent having properties surrounded by A, B, C, D, E and F in triangular composition diagram of FIG. 3, and having a viscosity of from 3 to 13 mPa·s, a surface tension of 30±5 mN/m and a dehydration rate of from 70 to 80% relative to pure water.

摘要翻译： 一种用于通过喷墨法形成机电转换元件的单独机电转换膜的溶胶凝胶液体，包括锆钛酸铅（PZT）或PZT等金属络合物氧化物; 和在图3的三角形组成图中具有被A，B，C，D，E和F包围的性质的有机溶剂。 3，粘度为3〜13mPa·s，表面张力为30±5mN / m，脱水率为70〜80％。

公开(公告)号：US09085145B2

公开(公告)日：2015-07-21

申请号：US14243177

申请日：2014-04-02

申请人： Akira Shimofuku ,  Osamu Machida ,  Ryoh Tashiro ,  Yasuhiro Watanabe

发明人： Akira Shimofuku ,  Osamu Machida ,  Ryoh Tashiro ,  Yasuhiro Watanabe

IPC分类号： B41J2/045 ,  H01L41/22 ,  H04R17/00 ,  B41J2/14 ,  B41J2/16 ,  H01L41/047

CPC分类号： B41J2/14201 ,  B41J2/161 ,  B41J2/164 ,  H01L41/047 ,  H01L41/318 ,  H01L41/331

摘要： Disclosed is an electromechanical transducer film forming method including a surface modification process; an application process; and processes of drying, thermally decomposing, and crystallizing sol-gel solution applied to a portion of a surface of a first electrode. An electromechanical transducer film is formed on a desired pattern area on the surface of the first electrode by repeating the above processes. In the application process, each of dots of the sol-gel solution applied by the inkjet method drops onto both a first area inside the desired pattern area and a second area outside the desired pattern area. The first area is a hydrophilic area on the surface of the first electrode, and the second area is a hydrophobic area on the surface of the first electrode. The hydrophilic area and the hydrophobic area have been modified by the surface modification process.

摘要翻译： 公开了一种包括表面改性工艺的机电换能器成膜方法; 申请流程; 以及施加到第一电极表面的一部分上的溶胶 - 凝胶溶液的干燥，热分解和结晶过程。 通过重复上述过程，在第一电极的表面上的期望图案区域上形成机电换能器膜。 在涂布过程中，通过喷墨法施加的溶胶 - 凝胶溶液的每个点落在期望图案区域内的第一区域和期望图案区域外的第二区域上。 第一区域是第一电极表面上的亲水区域，第二区域是第一电极表面上的疏水区域。 亲水区域和疏水区域已经通过表面改性过程进行了修饰。

公开(公告)号：US08960866B2

公开(公告)日：2015-02-24

申请号：US13737128

申请日：2013-01-09

申请人： Osamu Machida ,  Yoshikazu Akiyama ,  Ryo Tashiro ,  Akira Shimofuku ,  Eiichi Ohta ,  Kenichi Ogata

发明人： Osamu Machida ,  Yoshikazu Akiyama ,  Ryo Tashiro ,  Akira Shimofuku ,  Eiichi Ohta ,  Kenichi Ogata

IPC分类号： B41J2/045 ,  H01L41/08 ,  H01L41/318 ,  H01L41/331 ,  B41J2/14

CPC分类号： B41J2/045 ,  B41J2/14233 ,  H01L41/0805 ,  H01L41/318 ,  H01L41/331

摘要： Disclosed is an electromechanical transducer element including a first electrode disposed on a substrate; an electromechanical transducer film disposed on a first portion of the first electrode; and a second electrode disposed on a second portion of the electromechanical transducer film, wherein an actuator portion formed by laminating the substrate, the first electrode, the electromechanical transducer film, and the second electrode has a stiffness such that, in a cross section of the actuator portion, the stiffness gradually increases from an end portion of the actuator portion to a center portion of the actuator portion.

摘要翻译： 公开了一种机电换能器元件，包括设置在基板上的第一电极; 设置在所述第一电极的第一部分上的机电换能器膜; 以及设置在所述机电换能器膜的第二部分上的第二电极，其中通过层叠所述基板，所述第一电极，所述机电换能器膜和所述第二电极而形成的致动器部分具有刚度，使得在所述 致动器部分的刚度从致动器部分的端部逐渐增加到致动器部分的中心部分。

公开(公告)号：US08646180B2

公开(公告)日：2014-02-11

申请号：US13265192

申请日：2010-05-27

申请人： Yoshikazu Akiyama ,  Takakazu Kihira ,  Keiji Ueda ,  Akira Shimofuku ,  Osamu Machida

发明人： Yoshikazu Akiyama ,  Takakazu Kihira ,  Keiji Ueda ,  Akira Shimofuku ,  Osamu Machida

IPC分类号： B21D53/76 ,  B23P17/00 ,  B41J2/015

CPC分类号： H01L41/0973 ,  H01L41/318

摘要： A method of producing an electromechanical transducer includes a first step of partially modifying a surface of a first electrode; a second step of applying a sol-gel liquid including a metal composite oxide to a predetermined area of the partially-modified surface of the first electrode; a third step of performing drying, thermal decomposition, and crystallization on the applied sol-gel liquid to form an electromechanical transduction film, wherein the drying includes a heat-treatment at 120° C., the decomposition includes thermal decomposition performed at 500° C., and the crystallization includes heat treatment for crystallization at 700° C.; a fourth step of repeating the first, second, and third steps to obtain the electromechanical transduction film with a desired thickness; and a fifth step of forming a second electrode on the electromechanical transduction film.

摘要翻译： 一种制造机电换能器的方法包括：第一步骤，部分地改变第一电极的表面; 将包含金属复合氧化物的溶胶 - 凝胶液施加到第一电极的部分改性表面的预定区域的第二步骤; 在所施加的溶胶 - 凝胶液上进行干燥，热分解和结晶以形成机电转换膜的第三步骤，其中所述干燥包括在120℃下的热处理，所述分解包括在500℃下进行的热分解 ，结晶包括在700℃下结晶的热处理。 重复第一，第二和第三步骤以获得具有所需厚度的机电转换膜的第四步骤; 以及在机电转换膜上形成第二电极的第五步骤。

公开(公告)号：US08425026B2

公开(公告)日：2013-04-23

申请号：US13004203

申请日：2011-01-11

申请人： Osamu Machida ,  Yoshikazu Akiyama ,  Keiji Ueda ,  Akira Shimofuku

发明人： Osamu Machida ,  Yoshikazu Akiyama ,  Keiji Ueda ,  Akira Shimofuku

IPC分类号： B41J2/04 ,  B41J2/17

CPC分类号： B41J2/14233 ,  H01L41/0805 ,  H01L41/0926 ,  H01L41/318

摘要： A method for manufacturing an electromechanical transducer film including a lower electrode and plural layers of a sol-gel solution film formed on the lower electrode by an inkjet method, the method including the steps of a) modifying a surface of the lower electrode, b) forming a first sol-gel solution film on the surface of the lower electrode by ejecting droplets of a sol-gel solution to the surface of the lower electrode, and c) forming a second sol-gel solution film on the first sol-gel solution film by ejecting droplets of the sol-gel solution to a surface of the first sol-gel solution film. Adjacent dots formed on the surface of the lower electrode by the droplets ejected in step b) overlap each other. Adjacent dots formed on the surface of the first sol-gel solution film by the droplets ejected in step c) do not overlap each other.

摘要翻译： 一种制造机电换能器薄膜的方法，所述机电换能器薄膜包括下电极和通过喷墨方法形成在下电极上的多层溶胶 - 凝胶溶液膜，所述方法包括以下步骤：a）修改下电极的表面，b） 通过将溶胶 - 凝胶溶液的液滴喷射到下电极的表面，在下电极的表面上形成第一溶胶 - 凝胶溶液膜，以及c）在第一溶胶 - 凝胶溶液上形成第二溶胶 - 凝胶溶液膜 通过将溶胶 - 凝胶溶液的液滴喷射到第一溶胶 - 凝胶溶液膜的表面上。 在步骤b）中喷射的液滴在下电极的表面上形成的相邻点彼此重叠。 在步骤c）中喷射的液滴在第一溶胶 - 凝胶溶液膜的表面上形成的相邻点彼此不重叠。