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1.发明申请ELECTROMECHANICAL TRANSDUCER ELEMENT, LIQUID DISCHARGE HEAD, LIQUID DISCHARGE DEVICE, AND IMAGE FORMING APPARATUS 有权机电传感器元件，液体排出头，液体排出装置和图像形成装置公开(公告)号：US20130176364A1
公开(公告)日：2013-07-11
申请号：US13737128
申请日：2013-01-09
申请人： Osamu Machida , Yoshikazu Akiyama , Ryo Tashiro , Akira Shimofuku , Eiichi Ohta , Kenichi Ogata
发明人： Osamu Machida , Yoshikazu Akiyama , Ryo Tashiro , Akira Shimofuku , Eiichi Ohta , Kenichi Ogata
CPC分类号： B41J2/045 , B41J2/14233 , H01L41/0805 , H01L41/318 , H01L41/331
摘要： Disclosed is an electromechanical transducer element including a first electrode disposed on a substrate; an electromechanical transducer film disposed on a first portion of the first electrode; and a second electrode disposed on a second portion of the electromechanical transducer film, wherein an actuator portion formed by laminating the substrate, the first electrode, the electromechanical transducer film, and the second electrode has a stiffness such that, in a cross section of the actuator portion, the stiffness gradually increases from an end portion of the actuator portion to a center portion of the actuator portion.
摘要翻译： 公开了一种机电换能器元件，包括设置在基板上的第一电极; 设置在所述第一电极的第一部分上的机电换能器膜; 以及设置在所述机电换能器膜的第二部分上的第二电极，其中通过层叠所述基板，所述第一电极，所述机电换能器膜和所述第二电极而形成的致动器部分具有刚度，使得在所述 致动器部分的刚度从致动器部分的端部逐渐增加到致动器部分的中心部分。
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2.发明授权Electromechanical transducer element, liquid discharge head, liquid discharge device, and image forming apparatus 有权机电换能器元件，排液头，液体排出装置和图像形成装置公开(公告)号：US08960866B2
公开(公告)日：2015-02-24
申请号：US13737128
申请日：2013-01-09
申请人： Osamu Machida , Yoshikazu Akiyama , Ryo Tashiro , Akira Shimofuku , Eiichi Ohta , Kenichi Ogata
发明人： Osamu Machida , Yoshikazu Akiyama , Ryo Tashiro , Akira Shimofuku , Eiichi Ohta , Kenichi Ogata
IPC分类号： B41J2/045 , H01L41/08 , H01L41/318 , H01L41/331 , B41J2/14
CPC分类号： B41J2/045 , B41J2/14233 , H01L41/0805 , H01L41/318 , H01L41/331
摘要： Disclosed is an electromechanical transducer element including a first electrode disposed on a substrate; an electromechanical transducer film disposed on a first portion of the first electrode; and a second electrode disposed on a second portion of the electromechanical transducer film, wherein an actuator portion formed by laminating the substrate, the first electrode, the electromechanical transducer film, and the second electrode has a stiffness such that, in a cross section of the actuator portion, the stiffness gradually increases from an end portion of the actuator portion to a center portion of the actuator portion.
摘要翻译： 公开了一种机电换能器元件，包括设置在基板上的第一电极; 设置在所述第一电极的第一部分上的机电换能器膜; 以及设置在所述机电换能器膜的第二部分上的第二电极，其中通过层叠所述基板，所述第一电极，所述机电换能器膜和所述第二电极而形成的致动器部分具有刚度，使得在所述 致动器部分的刚度从致动器部分的端部逐渐增加到致动器部分的中心部分。
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3.发明申请SOL-GEL LIQUID, ELECTROMECHANICAL CONVERSION ELEMENT, LIQUID DISCHARGE HEAD AND INKJET RECORDER 有权溶胶液体，电化学转换元件，液体排出头和喷墨记录器公开(公告)号：US20110205307A1
公开(公告)日：2011-08-25
申请号：US12968630
申请日：2010-12-15
IPC分类号： B41J2/045 , H01L41/18 , H01L41/187
CPC分类号： H01L41/0805 , B41J2/14233 , B41J2202/03 , C23C18/06 , C23C18/1216 , C23C18/1254 , H01L41/1876 , H01L41/318
摘要： A sol-gel liquid for use in forming an individualized electromechanical conversion film of an electromechanical conversion element by inkjet methods, including a lead zirconate titanate (PZT) or the PZT and other metal complex oxides; and an organic solvent having properties surrounded by A, B, C, D, E and F in triangular composition diagram of FIG. 3, and having a viscosity of from 3 to 13 mPa·s, a surface tension of 30±5 mN/m and a dehydration rate of from 70 to 80% relative to pure water.
摘要翻译： 一种用于通过喷墨法形成机电转换元件的单独机电转换膜的溶胶凝胶液体，包括锆钛酸铅（PZT）或PZT等金属络合物氧化物; 和在图3的三角形组成图中具有被A，B，C，D，E和F包围的性质的有机溶剂。 3，粘度为3〜13mPa·s，表面张力为30±5mN / m，脱水率为70〜80％。
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4.发明授权Sol-gel liquid, electromechanical conversion element, liquid discharge head and inkjet recorder 有权溶胶凝胶液，机电转换元件，排液头和喷墨记录仪公开(公告)号：US08690297B2
公开(公告)日：2014-04-08
申请号：US12968630
申请日：2010-12-15
IPC分类号： B41J2/045 , H01L41/18 , H01L41/187
CPC分类号： H01L41/0805 , B41J2/14233 , B41J2202/03 , C23C18/06 , C23C18/1216 , C23C18/1254 , H01L41/1876 , H01L41/318
摘要： A sol-gel liquid for use in forming an individualized electromechanical conversion film of an electromechanical conversion element by inkjet methods, including a lead zirconate titanate (PZT) or the PZT and other metal complex oxides; and an organic solvent having properties surrounded by A, B, C, D, E and F in triangular composition diagram of FIG. 3, and having a viscosity of from 3 to 13 mPa·s, a surface tension of 30±5 mN/m and a dehydration rate of from 70 to 80% relative to pure water.
摘要翻译： 一种用于通过喷墨法形成机电转换元件的单独机电转换膜的溶胶凝胶液体，包括锆钛酸铅（PZT）或PZT等金属络合物氧化物; 和在图3的三角形组成图中具有被A，B，C，D，E和F包围的性质的有机溶剂。 3，粘度为3〜13mPa·s，表面张力为30±5mN / m，脱水率为70〜80％。
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5.发明授权Method for producing electromechanical transducer, electromechanical transducer produced by the method, liquid-droplet jetting head, and liquid-droplet jetting apparatus 有权用于制造机电换能器的方法，通过该方法制造的机电换能器，液滴喷射头和液滴喷射装置公开(公告)号：US08646180B2
公开(公告)日：2014-02-11
申请号：US13265192
申请日：2010-05-27
CPC分类号： H01L41/0973 , H01L41/318
摘要： A method of producing an electromechanical transducer includes a first step of partially modifying a surface of a first electrode; a second step of applying a sol-gel liquid including a metal composite oxide to a predetermined area of the partially-modified surface of the first electrode; a third step of performing drying, thermal decomposition, and crystallization on the applied sol-gel liquid to form an electromechanical transduction film, wherein the drying includes a heat-treatment at 120° C., the decomposition includes thermal decomposition performed at 500° C., and the crystallization includes heat treatment for crystallization at 700° C.; a fourth step of repeating the first, second, and third steps to obtain the electromechanical transduction film with a desired thickness; and a fifth step of forming a second electrode on the electromechanical transduction film.
摘要翻译： 一种制造机电换能器的方法包括：第一步骤，部分地改变第一电极的表面; 将包含金属复合氧化物的溶胶 - 凝胶液施加到第一电极的部分改性表面的预定区域的第二步骤; 在所施加的溶胶 - 凝胶液上进行干燥，热分解和结晶以形成机电转换膜的第三步骤，其中所述干燥包括在120℃下的热处理，所述分解包括在500℃下进行的热分解 ，结晶包括在700℃下结晶的热处理。 重复第一，第二和第三步骤以获得具有所需厚度的机电转换膜的第四步骤; 以及在机电转换膜上形成第二电极的第五步骤。
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6.发明授权Electromechanical transducer film and method for manufacturing electromechanical transducer film 有权机电换能器薄膜及制造机电换能器薄膜的方法公开(公告)号：US08425026B2
公开(公告)日：2013-04-23
申请号：US13004203
申请日：2011-01-11
申请人： Osamu Machida , Yoshikazu Akiyama , Keiji Ueda , Akira Shimofuku
发明人： Osamu Machida , Yoshikazu Akiyama , Keiji Ueda , Akira Shimofuku
CPC分类号： B41J2/14233 , H01L41/0805 , H01L41/0926 , H01L41/318
摘要： A method for manufacturing an electromechanical transducer film including a lower electrode and plural layers of a sol-gel solution film formed on the lower electrode by an inkjet method, the method including the steps of a) modifying a surface of the lower electrode, b) forming a first sol-gel solution film on the surface of the lower electrode by ejecting droplets of a sol-gel solution to the surface of the lower electrode, and c) forming a second sol-gel solution film on the first sol-gel solution film by ejecting droplets of the sol-gel solution to a surface of the first sol-gel solution film. Adjacent dots formed on the surface of the lower electrode by the droplets ejected in step b) overlap each other. Adjacent dots formed on the surface of the first sol-gel solution film by the droplets ejected in step c) do not overlap each other.
摘要翻译： 一种制造机电换能器薄膜的方法，所述机电换能器薄膜包括下电极和通过喷墨方法形成在下电极上的多层溶胶 - 凝胶溶液膜，所述方法包括以下步骤：a）修改下电极的表面，b） 通过将溶胶 - 凝胶溶液的液滴喷射到下电极的表面，在下电极的表面上形成第一溶胶 - 凝胶溶液膜，以及c）在第一溶胶 - 凝胶溶液上形成第二溶胶 - 凝胶溶液膜 通过将溶胶 - 凝胶溶液的液滴喷射到第一溶胶 - 凝胶溶液膜的表面上。 在步骤b）中喷射的液滴在下电极的表面上形成的相邻点彼此重叠。 在步骤c）中喷射的液滴在第一溶胶 - 凝胶溶液膜的表面上形成的相邻点彼此不重叠。
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公开(公告)号：US20140340854A1
公开(公告)日：2014-11-20
申请号：US14278085
申请日：2014-05-15
CPC分类号： B05D1/322 , B05D1/02 , B05D3/007 , H01L21/02623 , H01L27/11568 , H01L27/20 , H01L28/40 , H01L41/0973 , H01L41/113 , H01L41/1132 , H01L41/1876 , H01L41/317 , H01L41/319 , H01L41/332 , H05K1/16 , H05K3/1241
摘要： An electronic device includes a substrate; and a plurality of thin-film elements formed on the substrate. Further, the thin-film element includes a thin-film section having a function selected from a group including piezoelectric effect, inverse piezoelectric effect, charge storage, semiconductivity, and conductivity, and the plurality of thin-film elements includes the thin-film sections having two or more different functions.
摘要翻译： 电子装置包括：基板; 以及形成在所述基板上的多个薄膜元件。 此外，薄膜元件包括具有选自包括压电效应，反压电效应，电荷存储，半导电性和导电性的组的功能的薄膜部分，并且多个薄膜元件包括薄膜部分 具有两个或多个不同的功能。
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8.发明申请公开(公告)号：US20120038712A1
公开(公告)日：2012-02-16
申请号：US13265192
申请日：2010-05-27
CPC分类号： H01L41/0973 , H01L41/318
摘要： A method of producing an electromechanical transducer includes a first step of partially modifying a surface of a first electrode; a second step of applying a sol-gel liquid including a metal composite oxide to a predetermined area of the partially-modified surface of the first electrode; a third step of performing drying, thermal decomposition, and crystallization on the applied sol-gel liquid to form an electromechanical transduction film; a fourth step of repeating the first, second, and third steps to obtain the electromechanical transduction film with a desired thickness; and a fifth step of forming a second electrode on the electromechanical transduction film.
摘要翻译： 一种制造机电换能器的方法包括：第一步骤，部分地改变第一电极的表面; 将包含金属复合氧化物的溶胶 - 凝胶液施加到第一电极的部分改性表面的预定区域的第二步骤; 在所施加的溶胶 - 凝胶液上进行干燥，热分解和结晶以形成机电转换膜的第三步骤; 重复第一，第二和第三步骤以获得具有所需厚度的机电转换膜的第四步骤; 以及在机电转换膜上形成第二电极的第五步骤。
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公开(公告)号：US20120028075A1
公开(公告)日：2012-02-02
申请号：US13179711
申请日：2011-07-11
申请人： Masahiro YAGI , Eiichi Ohta , Yoshikazu Akiyama , Ryoh Tashiro , Osamu Machida
发明人： Masahiro YAGI , Eiichi Ohta , Yoshikazu Akiyama , Ryoh Tashiro , Osamu Machida
CPC分类号： H01L41/317 , C23C18/1216 , C23C18/14 , G01N21/8422 , G01N2021/8427
摘要： A thin film manufacturing method includes placing a substrate in a raw material solution with which a thin film is formed on a first principal plane of the substrate; forming the thin film on the first principal plane of the substrate by applying light to a first principal plane side from a light source; measuring a distance from the first principal plane of the substrate to a liquid surface of the raw material solution by applying light from the light source; and adjusting a position of the substrate in a height direction on the basis of a measurement result obtained at the measuring.
摘要翻译： 薄膜制造方法包括将基板放置在基板的第一主面上形成有薄膜的原料溶液中; 通过将光从光源施加到第一主平面侧，在所述基板的所述第一主平面上形成所述薄膜; 通过施加来自所述光源的光来测量从所述基板的所述第一主平面到所述原料溶液的液面的距离; 并且基于在测量中获得的测量结果来调整基板在高度方向上的位置。
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公开(公告)号：US09834853B2
公开(公告)日：2017-12-05
申请号：US15382952
申请日：2016-12-19
申请人： Yoshikazu Akiyama , Akira Shimofuku , Keiji Ueda
发明人： Yoshikazu Akiyama , Akira Shimofuku , Keiji Ueda
IPC分类号： H01L21/00 , C30B1/02 , C30B29/32 , C23C14/24 , C23C14/34 , B41J2/16 , H01L41/187 , H01L41/39 , H01L41/113 , H01L41/29 , H01L41/318
CPC分类号： C30B1/023 , B41J2/161 , B41J2/162 , B41J2/1645 , B41J2/1646 , C23C14/24 , C23C14/34 , C23C18/1216 , C30B29/32 , H01L41/0973 , H01L41/113 , H01L41/1876 , H01L41/29 , H01L41/318 , H01L41/39
摘要： A PZT precursor solution is used for forming a PZT film by a sol-gel method. The PZT precursor solution includes a solvent; a component that forms a crystal of PZT by crystallization, the component being dissolved in the solvent; and an element that inhibits crystal growth of PZT, the element being dissolved in the solvent.
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