公开(公告)号：US08921867B2

公开(公告)日：2014-12-30

申请号：US14130940

申请日：2013-06-05

申请人： Panasonic Corporation

发明人： Yuko Okumoto ,  Akihito Miyamoto

IPC分类号： H01L29/00 ,  H01L51/00 ,  H01L21/00 ,  H01L21/332 ,  H01L51/40 ,  H01L51/05 ,  H01L29/786 ,  H01L27/32

CPC分类号： H01L51/0529 ,  H01L27/3262 ,  H01L27/3274 ,  H01L29/786 ,  H01L51/0004 ,  H01L51/0037 ,  H01L51/004 ,  H01L51/0533 ,  H01L51/0541 ,  H01L51/0545 ,  H01L2251/5315

摘要： A thin-film transistor including: a gate electrode that is located above a substrate; a gate insulating layer that faces the gate electrode; a partition that defines an opening and has higher liquid repellency than liquid repellency of the gate insulating layer, the opening having a surface of the gate insulating layer therewithin; a semiconductor layer that faces the gate electrode with the gate insulating layer interposed therebetween and is formed within the opening by an application method; a source electrode and a drain electrode that are electrically connected to the semiconductor layer; and an intermediate layer that is made of the same material as a material of the partition and is located between the gate insulating layer and the semiconductor layer, wherein the intermediate layer is discretely present above the gate insulating layer.

摘要翻译： 1.一种薄膜晶体管，包括：位于基板上方的栅电极; 面对栅电极的栅极绝缘层; 限定开口并具有比栅极绝缘层的液体排斥性更高的液体排斥性的隔板，该开口具有栅极绝缘层的表面; 面向栅电极的半导体层，其间具有栅极绝缘层，并通过施加方法形成在开口内; 源电极和漏电极，其电连接到所述半导体层; 以及由与所述隔板的材料相同的材料制成并且位于所述栅极绝缘层和所述半导体层之间的中间层，其中所述中间层离散地存在于所述栅极绝缘层的上方。

公开(公告)号：US08907344B2

公开(公告)日：2014-12-09

申请号：US13968559

申请日：2013-08-16

申请人： Panasonic Corporation

发明人： Yuko Okumoto ,  Akihito Miyamoto ,  Takaaki Ukeda

IPC分类号： H01L29/768 ,  H01L27/32 ,  H01L27/12 ,  H01L51/00 ,  H01L51/05 ,  H01L27/28

CPC分类号： H01L27/3258 ,  H01L27/1225 ,  H01L27/1292 ,  H01L27/283 ,  H01L27/3262 ,  H01L51/0005 ,  H01L51/0558

摘要： A thin film transistor element is formed in each of adjacent first and second apertures defined by partition walls. In plan view of a bottom portion of the first aperture, a center of area of a liquid-philic layer portion is offset from a center of area of the bottom portion in a direction opposite a direction of the second aperture, and in plan view of a bottom portion of the second aperture, a center of area of a liquid-philic layer portion is offset from a center of area of the bottom portion in a direction opposite a direction of the first aperture.

摘要翻译： 在由分隔壁限定的相邻的第一和第二孔中的每一个中形成薄膜晶体管元件。 在第一孔的底部的平面图中，液体亲水层部分的区域的中心在与第二孔的方向相反的方向上偏离底部区域的中心，并且在平面图中 第二孔的底部，液体亲属层部分的区域的中心在与第一孔的方向相反的方向上偏离底部区域的中心。