公开(公告)号：US20140051804A1

公开(公告)日：2014-02-20

申请号：US14003497

申请日：2012-03-08

Applicant: Xiaobing Zhou ,  Eric S. Moyer

Inventor： Xiaobing Zhou ,  Eric S. Moyer

IPC: C09D5/00

CPC classification number: C09D5/006 ,  C08G77/48 ,  C09D183/14

Abstract: Polysilanesiloxane copolymers or resins and method of making are provided. The present disclosure further provides a method of applying the polysilanesiloxane copolymers onto a substrate to form a polysilanesiloxane film for use in photolithography (193 nm). The polysilanesiloxane films meet the basic performance criteria expected or desired for use in an antireflection coating (ARC) application,

Abstract translation: 提供聚硅氧烷共聚物或树脂及其制备方法。 本公开进一步提供了一种将聚硅烷硅氧烷共聚物施加到基材上以形成用于光刻（193nm）的聚硅烷硅氧烷膜的方法。 聚硅烷硅氧烷膜符合预防或期望用于抗反射涂层（ARC）应用的基本性能标准，

公开(公告)号：US20130072625A1

公开(公告)日：2013-03-21

申请号：US13310004

申请日：2011-12-02

Applicant: Michael Backer ,  John Gohndrone ,  Don Kleyer ,  Xiaobing Zhou

Inventor： Michael Backer ,  John Gohndrone ,  Don Kleyer ,  Xiaobing Zhou

IPC: C08K5/5419 ,  C07F7/18 ,  C08L47/00

CPC classification number: B01J31/0239 ,  B01J2231/4288 ,  B01J2531/985 ,  C07F7/1804

Abstract: A method for preparing a bis(alkoxysilylorgano)dicarboxylate includes reacting a haloorganoalkoxysilane, a dimetal salt of a dicarboxyl functional compound, and a phase transfer catalyst. A quaternary iminium compound of a polyaza, polycycloalkene is useful as the phase transfer catalyst. The product may be a bis(alkoxysilylalkyl)fumarate, which is useful as a coupling agent in rubber compositions for tire applications.

Abstract translation: 制备双（烷氧基甲硅烷基有机）二羧酸酯的方法包括使卤代有机烷氧基硅烷，二羧基官能化合物的二盐和相转移催化剂反应。 多氮化合物的季铵化合物，聚环烯烃可用作相转移催化剂。 产物可以是富马酸双（烷氧基甲硅烷基）烷基酯，其可用作轮胎用橡胶组合物中的偶联剂。

公开(公告)号：US20110195582A1

公开(公告)日：2011-08-11

申请号：US13122745

申请日：2009-08-11

Applicant: Xiaobing Zhou

Inventor： Xiaobing Zhou

IPC: H01L21/314 ,  H01L21/316 ,  H01L21/318 ,  C07F7/10

CPC classification number: H01L21/02271 ,  B05D1/62 ,  C23C16/30 ,  C23C16/345 ,  C23C16/36 ,  C23C16/401 ,  C23C16/45553 ,  H01L21/02126 ,  H01L21/02167 ,  H01L21/02219 ,  H01L21/02274 ,  H01L21/3148 ,  H01L21/31633 ,  H01L21/3185

Abstract: A method of producing silicon containing thin films by the thermal polymerization of a reactive gas mixture bisaminosilacyclobutane and source gas selected from a nitrogen providing gas, an oxygen providing gas and mixtures thereof. The films deposited may be silicon nitride, silicon carbonitride, silicon dioxide or carbon doped silicon dioxide. These films are useful as dielectrics, passivation coatings, barrier coatings, spacers, liners and/or stressors in semiconductor devices.

Abstract translation: 通过反应性气体混合物双氨基硅烷环丁烷和选自氮气提供气体，氧气提供气体及其混合物的源气体的热聚合制备含硅薄膜的方法。 沉积的膜可以是氮化硅，碳氮化硅，二氧化硅或碳掺杂的二氧化硅。 这些膜可用作半导体器件中的电介质，钝化涂层，阻挡涂层，间隔物，衬垫和/或应力源。

公开(公告)号：US20100176338A1

公开(公告)日：2010-07-15

申请号：US12440299

申请日：2007-08-29

Applicant: John Patrick Cannady ,  Xiaobing Zhou

Inventor： John Patrick Cannady ,  Xiaobing Zhou

IPC: C09K3/00

CPC classification number: C01B33/04

Abstract: A composition comprising at lest 93% (w/w) neopentasilane; and a method of preparing neopentasilane, the method comprising treating a tetrakis-(trihalosilyl)silane with diisobutylaluminum hydride.

Abstract translation: 包含至少93％（w / w）的新戊硅烷的组合物; 和一种制备新戊硅烷的方法，该方法包括用二异丁基氢化铝处理四（三卤代甲硅烷基）硅烷。