公开(公告)号：US08772524B2

公开(公告)日：2014-07-08

申请号：US13122745

申请日：2009-08-11

Applicant: Xiaobing Zhou

Inventor： Xiaobing Zhou

IPC: C23C16/42 ,  H01L21/205

CPC classification number: H01L21/02271 ,  B05D1/62 ,  C23C16/30 ,  C23C16/345 ,  C23C16/36 ,  C23C16/401 ,  C23C16/45553 ,  H01L21/02126 ,  H01L21/02167 ,  H01L21/02219 ,  H01L21/02274 ,  H01L21/3148 ,  H01L21/31633 ,  H01L21/3185

Abstract: A method of producing silicon containing thin films by the thermal polymerization of a reactive gas mixture bisaminosilacyclobutane and source gas selected from a nitrogen providing gas, an oxygen providing gas and mixtures thereof. The films deposited may be silicon nitride, silicon carbonitride, silicon dioxide or carbon doped silicon dioxide. These films are useful as dielectrics, passivation coatings, barrier coatings, spacers, liners and/or stressors in semiconductor devices.

Abstract translation: 通过反应性气体混合物双氨基硅烷环丁烷和选自氮气提供气体，氧气提供气体及其混合物的源气体的热聚合制备含硅薄膜的方法。 沉积的膜可以是氮化硅，碳氮化硅，二氧化硅或碳掺杂的二氧化硅。 这些膜可用作半导体器件中的电介质，钝化涂层，阻挡涂层，间隔物，衬垫和/或应力源。

公开(公告)号：US20140004357A1

公开(公告)日：2014-01-02

申请号：US14003501

申请日：2012-03-09

Applicant: Xiaobing Zhou

Inventor： Xiaobing Zhou

IPC: C09D1/00

CPC classification number: C09D1/00 ,  C08G77/48 ,  C08G77/52 ,  C09D183/14 ,  H01L21/02164 ,  H01L21/02282

Abstract: Inorganic polysilanesiloxane (PSSX) copolymers and method of making and applying the same to the surface of a substrate is provided. These PSSX copolymers are beneficial in forming a dense silicon dioxide layer on a substrate under mild oxidative conditions. The PSSX copolymers comprise SixOy(OH)z units, wherein y and z are defined by the relationship (2y+z)≦(2x+2) and x is either 4 or 5. More specifically, the PSSX copolymers do not contain Si—C covalent bonds.

Abstract translation: 提供了无机聚硅烷（PSSX）共聚物及其制备及其应用于基材表面的方法。 这些PSSX共聚物在温和氧化条件下在底物上形成致密二氧化硅层是有益的。 PSSX共聚物包含六十（OH）z单元，其中y和z由关系式（2y + z）@（2x + 2）定义，x为4或5.更具体地说，PSSX共聚物不含Si- C共价键。

公开(公告)号：US08907037B2

公开(公告)日：2014-12-09

申请号：US13637603

申请日：2011-03-25

Applicant: Igor Chorvath ,  Xiaobing Zhou

Inventor： Igor Chorvath ,  Xiaobing Zhou

IPC: C08G77/24 ,  C08G18/76 ,  C08G18/64 ,  C08L91/06 ,  C08G18/61 ,  C08G18/30 ,  C08L97/02 ,  C08L61/24 ,  C08L61/28 ,  C08L61/06 ,  C08L61/12

CPC classification number: C08G18/7664 ,  C08G18/302 ,  C08G18/61 ,  C08G18/6492 ,  C08K5/07 ,  C08K5/205 ,  C08L61/06 ,  C08L61/12 ,  C08L61/24 ,  C08L61/28 ,  C08L83/04 ,  C08L91/06 ,  C08L97/02 ,  Y10T428/249921 ,  C08L75/04

Abstract: A method of preparing a polymeric methylene diphenyl diisocyanate-polydialkylsiloxane resin by mixing at a temperature between 25° C. and 100° C.: (i) a polymeric methylene diphenyl diisocyanate with (ii) a polydialkylsiloxane selected from hydroxyalkyl dialkyl terminated polydialkylsiloxane having a viscosity of from 5 to 500 000 cSt at 25° C. or (hydroxyalkoxy)alkyl dialkyl terminated polydialkylsiloxane having a viscosity of from 5 to 500 000 cSt at 25° C. in an amount such that from 1 to 99% by weight of the total weight of (i) and (ii) is component (ii), optionally in the presence of a solvent; and subsequently extracting the solvent, if present.

Abstract translation: 通过在25℃和100℃之间的温度下混合制备聚合亚甲基二苯基二异氰酸酯 - 聚二烷基硅氧烷树脂的方法：（i）聚合亚甲基二苯基二异氰酸酯与（ii）选自羟烷基二烷基封端的聚二烷基硅氧烷的聚二烷基硅氧烷， 在25℃下粘度为5至500000cSt或在25℃下粘度为5至500 000cSt的（羟基烷氧基）烷基二烷基封端的聚二烷基硅氧烷，其量为使得1至99重量％ （i）和（ii）的总重量是组分（ii），任选在溶剂存在下; 并随后萃取溶剂（如果存在）。

公开(公告)号：US08580886B2

公开(公告)日：2013-11-12

申请号：US13310004

申请日：2011-12-02

Applicant: Michael Backer ,  John Gohndrone ,  Don Kleyer ,  Xiaobing Zhou

Inventor： Michael Backer ,  John Gohndrone ,  Don Kleyer ,  Xiaobing Zhou

IPC: C08K5/5419 ,  C07F7/18

CPC classification number: B01J31/0239 ,  B01J2231/4288 ,  B01J2531/985 ,  C07F7/1804

Abstract: A method for preparing a bis(alkoxysilylorgano)dicarboxylate includes reacting a haloorganoalkoxysilane, a dimetal salt of a dicarboxyl functional compound, and a phase transfer catalyst. A quaternary iminium compound of a polyaza, polycycloalkene is useful as the phase transfer catalyst. The product may be a bis(alkoxysilylalkyl)fumarate, which is useful as a coupling agent in rubber compositions for tire applications.

Abstract translation: 制备双（烷氧基甲硅烷基有机）二羧酸酯的方法包括使卤代有机烷氧基硅烷，二羧基官能化合物的二盐和相转移催化剂反应。 多氮化合物的季铵化合物，聚环烯烃可用作相转移催化剂。 产物可以是富马酸双（烷氧基甲硅烷基）烷基酯，其可用作轮胎用橡胶组合物中的偶联剂。

公开(公告)号：US08147789B2

公开(公告)日：2012-04-03

申请号：US12440299

申请日：2007-08-29

Applicant: John Patrick Cannady ,  Xiaobing Zhou

Inventor： John Patrick Cannady ,  Xiaobing Zhou

IPC: C01B33/04

CPC classification number: C01B33/04

Abstract: A composition comprising at least 93% (w/w) neopentasilane; and a method of preparing neopentasilane, the method comprising treating a tetrakis-(trihalosilyl)silane with diisobutylaluminum hydride.

Abstract translation: 包含至少93％（w / w）的新戊硅烷的组合物; 和一种制备新戊硅烷的方法，该方法包括用二异丁基氢化铝处理四（三卤代甲硅烷基）硅烷。

公开(公告)号：US08658284B2

公开(公告)日：2014-02-25

申请号：US13504579

申请日：2010-10-25

Applicant: Wei Chen ,  Eric Scott Moyer ,  Binh Thanh Nguyen ,  Sheng Wang ,  Mark A. Wanous ,  Xiaobing Zhou

Inventor： Wei Chen ,  Eric Scott Moyer ,  Binh Thanh Nguyen ,  Sheng Wang ,  Mark A. Wanous ,  Xiaobing Zhou

IPC: B32B9/00 ,  B05D5/12 ,  C08G77/62

CPC classification number: C08G77/62 ,  C09D183/16 ,  Y10T428/31663

Abstract: A polysilane-polysilazane copolymer contains a polysilane unit of formula (I), and a polysilazane unit of formula (II), where each R1 and each R2 are each independently selected from H, Si, and N atoms, R3 is selected from H, Si, or C atoms, a≧1, b≧1, and a quantity (a+b)≧2. The polysilane-polysilazane copolymer may be formulated in a composition with a solvent. The polysilane-polysilazane copolymer may be used in PMD and STI applications for trench filling, where the trenches have widths of 100 nm or less and aspect ratios of at least (6). The polysilane-polysilazane copolymer can be prepared by amination of a perchloro polysilane having (2) or more silicon atoms per molecule with a primary amine.

Abstract translation: 聚硅烷 - 聚硅氮烷共聚物含有式（I）的聚硅烷单元和式（II）的聚硅氮烷单元，其中每个R 1和R 2各自独立地选自H，Si和N原子，R 3选自H， Si或C原子，a> = 1，b> = 1，数量（a + b）> = 2。 聚硅烷 - 聚硅氮烷共聚物可以配制成具有溶剂的组合物。 聚硅烷 - 聚硅氮烷共聚物可用于PMD和STI应用于沟槽填充，其中沟槽具有100nm或更小的宽度和至少（6）的纵横比。 聚硅烷 - 聚硅氮烷共聚物可以通过每分子具有（2）个或更多个硅原子的氨氯化聚酰胺与伯胺胺化制备。

公开(公告)号：US20130022807A1

公开(公告)日：2013-01-24

申请号：US13637603

申请日：2011-03-25

Applicant: Igor Chorvath ,  Xiaobing Zhou

Inventor： Igor Chorvath ,  Xiaobing Zhou

IPC: C07F7/18 ,  C08K5/1545 ,  B27N3/00 ,  C08K7/02 ,  C08K5/5465 ,  C08L79/00 ,  C08K7/00

CPC classification number: C08G18/7664 ,  C08G18/302 ,  C08G18/61 ,  C08G18/6492 ,  C08K5/07 ,  C08K5/205 ,  C08L61/06 ,  C08L61/12 ,  C08L61/24 ,  C08L61/28 ,  C08L83/04 ,  C08L91/06 ,  C08L97/02 ,  Y10T428/249921 ,  C08L75/04

Abstract: A method of preparing a polymeric methylene diphenyl diisocyanate-polydialkylsiloxane resin by mixing at a temperature between 25° C. and 100° C.: (i) a polymeric methylene diphenyl diisocyanate with (ii) a polydialkylsiloxane selected from hydroxyalkyl dialkyl terminated polydialkylsiloxane having a viscosity of from 5 to 500 000 cSt at 25° C. or (hydroxyalkoxy)alkyl dialkyl terminated polydialkylsiloxane having a viscosity of from 5 to 500 000 cSt at 25° C. in an amount such that from 1 to 99% by weight of the total weight of (i) and (ii) is component (ii), optionally in the presence of a solvent; and subsequently extracting the solvent, if present.

Abstract translation: 通过在25℃和100℃之间的温度下混合制备聚合亚甲基二苯基二异氰酸酯 - 聚二烷基硅氧烷树脂的方法：（i）聚合亚甲基二苯基二异氰酸酯与（ii）选自羟烷基二烷基封端的聚二烷基硅氧烷的聚二烷基硅氧烷， 在25℃下粘度为5至500000cSt或在25℃下粘度为5至500 000cSt的（羟基烷氧基）烷基二烷基封端的聚二烷基硅氧烷，其量为使得1至99重量％ （i）和（ii）的总重量是组分（ii），任选在溶剂存在下; 并随后萃取溶剂（如果存在）。

公开(公告)号：US20120214006A1

公开(公告)日：2012-08-23

申请号：US13504579

申请日：2010-10-25

Applicant: Wei Chen ,  Eric Scott Moyer ,  Binh Thanh Nguyen ,  Sheng Wang ,  Mark A. Wanous ,  Xiaobing Zhou

Inventor： Wei Chen ,  Eric Scott Moyer ,  Binh Thanh Nguyen ,  Sheng Wang ,  Mark A. Wanous ,  Xiaobing Zhou

IPC: C08G77/62 ,  B05D5/12 ,  B32B9/00 ,  C09D183/16

CPC classification number: C08G77/62 ,  C09D183/16 ,  Y10T428/31663

Abstract: A polysilane−polysilazane copolymer contains a polysilane unit of formula (I), and a polysilazane unit of formula (II), where each R1 and each R2 are each independently selected from H, Si, and N atoms, R3 is selected from H, Si, or C atoms, a≧1, b≧1, and a quantity (a+b)≧2. The polysilane−polysilazane copolymer may be formulated in a composition with a solvent. The polysilane-polysilazane copolymer may be used in PMD and STI applications for trench filling, where the trenches have widths of 100 nm or less and aspect ratios of at least (6). The polysilane−polysilazane copolymer can be prepared by amination of a perchloro polysilane having (2) or more silicon atoms per molecule with a primary amine.

Abstract translation: 聚硅烷 - 聚硅氮烷共聚物含有式（I）的聚硅烷单元和式（II）的聚硅氮烷单元，其中每个R 1和R 2各自独立地选自H，Si和N原子，R 3选自H， Si或C原子，a≥1，b≥1，数量（a + b）≥2。 聚硅烷 - 聚硅氮烷共聚物可以配制成具有溶剂的组合物。 聚硅烷 - 聚硅氮烷共聚物可用于PMD和STI应用于沟槽填充，其中沟槽具有100nm或更小的宽度和至少（6）的纵横比。 聚硅烷 - 聚硅氮烷共聚物可以通过每分子具有（2）个或更多个硅原子的氨氯化聚酰胺与伯胺胺化制备。

公开(公告)号：US09249164B2

公开(公告)日：2016-02-02

申请号：US13825633

申请日：2011-09-20

Applicant: Peter Cheshire Hupfield ,  Xiaobing Zhou

Inventor： Peter Cheshire Hupfield ,  Xiaobing Zhou

IPC: C07F7/00 ,  C07F7/02 ,  C07F7/18 ,  C07F7/20

CPC classification number: C07F7/025 ,  C07F7/1892 ,  C07F7/20

Abstract: A process for preparing an acryloyloxysilane, the process comprising reacting a metal salt of a carboxylic acid having the formula [CR22═CR1COO−]aMa+ (I), with a haloorganoalkoxysilane having the formula XR3Si(OR4)nR53—n (II) in the presence of mineral spirits and a phase transfer catalyst at a temperature of from 50 to 160° C. to form a mixture comprising an acryloyloxysilane and a metal halide having the formula Ma+X−a (III), wherein R1 is H or C1-C6 hydrocarbyl, each R2 is independently R1 or [COO−]aMa+, Ma+ is an alkali metal cation or alkaline earth metal cation, a is 1 or 2, X is halo, R3 is C1-C6 hydrocarbylene, each R4 is independently C1-C10 Q hydrocarbyl, each R5 is independently R1 and n is an integer from 1 to 3.

Abstract translation: 一种制备丙烯酰氧基硅烷的方法，该方法包括使式[CR 22 = CR 1 COO - ] a M a +（I）的羧酸金属盐与式XR 3 Si（OR 4）n R 53-n（II）的卤代有机烷氧基硅烷在 在50至160℃的温度下存在矿物油精和相转移催化剂以形成包含丙烯酰氧基硅烷和具有式Ma + X-a（III）的金属卤化物的混合物，其中R 1为H或C1- C6烃基，每个R2独立地是R1或[COO-] aMa +，Ma +是碱金属阳离子或碱土金属阳离子，a是1或2，X是卤素，R3是C1-C6亚烃基，每个R4独立地是C1- C10Q烃基，每个R5独立地为R1，n为1至3的整数。

公开(公告)号：US20140051804A1

公开(公告)日：2014-02-20

申请号：US14003497

申请日：2012-03-08

Applicant: Xiaobing Zhou ,  Eric S. Moyer

Inventor： Xiaobing Zhou ,  Eric S. Moyer

IPC: C09D5/00

CPC classification number: C09D5/006 ,  C08G77/48 ,  C09D183/14

Abstract: Polysilanesiloxane copolymers or resins and method of making are provided. The present disclosure further provides a method of applying the polysilanesiloxane copolymers onto a substrate to form a polysilanesiloxane film for use in photolithography (193 nm). The polysilanesiloxane films meet the basic performance criteria expected or desired for use in an antireflection coating (ARC) application,

Abstract translation: 提供聚硅氧烷共聚物或树脂及其制备方法。 本公开进一步提供了一种将聚硅烷硅氧烷共聚物施加到基材上以形成用于光刻（193nm）的聚硅烷硅氧烷膜的方法。 聚硅烷硅氧烷膜符合预防或期望用于抗反射涂层（ARC）应用的基本性能标准，