Abstract:
Transition support rings for joining tubular segments of different inner cross-sectional dimensions to make segmented liners for use in a fluidized bed reactor (FBR) for making polysilicon-coated granulate material are disclosed. Segmented liners comprising the transition support rings and fluidized bed reactors including segmented liners are also disclosed.
Abstract:
Embodiments of an outlet tube assembly for use with a dispensing vessel are disclosed. The dispensing vessel has a side wall defining a chamber; the side wall has an upper portion and has a lower portion that tapers downwardly to an outlet. The outlet tube assembly facilitates accurate measurement of a particulate material level within the dispensing vessel and/or reduces contamination of the particulate material.
Abstract:
Fluidized bed reactor systems for producing high purity silicon-coated particles are disclosed. A vessel has an outer shell, an insulation layer inwardly of the outer shell, a concentric inner shell inwardly of the outer shell, and a concentric liner that is positioned inwardly of the inner shell and that defines a reactor chamber. The inner shell and liner are sealed together at their bottoms by an O-ring seal arrangement to prevent gas in the reactor chamber from entering a space between the inner shell and the liner. A central inlet nozzle produces a vertical gas plume in the reactor chamber.
Abstract:
Segmented silicon carbide liners for use in a fluidized bed reactor for production of polysilicon-coated granulate material are disclosed, as well as methods of making and using the segmented silicon carbide liners. Non-contaminating bonding materials for joining silicon carbide segments also are disclosed. One or more of the silicon carbide segments may be constructed of reaction-bonded silicon carbide.
Abstract:
Segmented silicon carbide liners for use in a fluidized bed reactor for production of polysilicon-coated granulate material are disclosed, as well as methods of making and using the segmented silicon carbide liners. Non-contaminating bonding materials for joining silicon carbide segments also are disclosed. One or more of the silicon carbide segments may be constructed of reaction-bonded silicon carbide.
Abstract:
Embodiments of a reaction chamber liner for use in a heated silicon deposition reactor are disclosed. The liner has an upper portion, a mid portion comprising a material other than a stainless steel alloy, and a lower portion comprising a martensitic stainless steel alloy. The liner's upper portion may have a composition substantially similar to the lower portion.